• 한국전기전자재료학회논문지
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• 제19권11호
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• pp.1014-1019
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• 2006

The influence of the number of solution coatings on the densification of the PZT thick films was studied. PZT powder and PZT precursor solution was prepared by a sol-gel method and PZT thick films were fabricated by the screen-printing method on the alumina substrates. The powder and solution of composition were (A) PZT(80/20)/PZT(20/80), (B) PZT(70/30)/PZT(30/70) and (C) PZT(60/40)/PZT(40/60), (D) PZT(52/48)/PT. The coating and drying procedure was repeated 4 times. And then the PZT precursor solution was spin-coated on the PZT thick films. A concentration of a coating solution was 0.5 moth and the number of coating was repeated from 0 to 6. The porosity of the thick films was decreased with increasing the number of coatings and the PZT thick films with 6-times coated showed the dense microstructure and thickness of about $60{\mu}m$. A grain size was increased with increasing the coating number. All PZT thick films showed the typical XRD patterns of a typical perovskite polycrystalline structure. The relative dielectric constant of PZT thick films was improved 30-100% as the number of coatings.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.174-177
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• 2001

We have seen the effects of buffer layer in organic light-emitting diodes using poly(N-vinylcarbazole)(PVK). Polymer PVK buffer layer was made using spin casting techniques. Two different types of spin casting have been applied; static coating and dynamic coating. Two device structures were fabricated; one is ITO/TPD/Alq$_3$/Al as a reference, and the other is ITO/PVK/TPD/Alq$_3$/Al to see the effects of buffer layer in organic light-emitting diodes. Current-voltage characteristics and luminous efficiency were measured with a variation of spin-casting methods and rpm speeds. We have obtained an improvement of luminous efficiency by a factor of two and half when the PVK buffer layer is used.

• 한국전기전자재료학회논문지
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• 제33권6호
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• pp.460-464
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• 2020

This study reports the fabrication and application of semitransparent Cu nanoparticle layers. Spin coating and subsequent drying of a Cu colloid solution were performed to deposit Cu nanoparticle layers onto Si and glass substrates. As the spin speed of the spin coating increases, the density of the nanoparticles on the substrate decreases, and the agglomeration of nanoparticles is suppressed. This microstructural variation affects the optical properties of the nanoparticle layers. The transmittance and reflectance of the Cu nanoparticle layers increase with increasing spin speed, which results from the trade-off between the exposed substrate area and surface coverage of the Cu nanoparticles. Since the glass substrates coated with Cu nanoparticle layers are semitransparent and colored, it is anticipated that the application of a Cu nanoparticle-dielectric bilayer structure to transparent solar cells will improve the cell efficiency as well as aesthetic appearance.

• 전자공학회논문지
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• 제50권7호
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• pp.102-108
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• 2013

용액 공정 기반으로 유기 전자소자를 제작할 시, 회전 도포 방법을 이용하는데 이 방법의 단점 중의 하나는 후속 회전 도포할 때 용액 속의 용매에 의해 이미 제작된 유기 박막을 물리적 또는 화학적인 손상을 입힐 수 있다는 것이다. 이러한 문제들로 인해 후속적인 박막 제조에 사용될 수 있는 용매의 종류는 매우 제한적일 수 밖에 없다. 본 논문에서는 기존에 알려진 용매들의 적절한 조합으로 인해 다층 박막 제작이 가능함을 보이고, 이를 이용하여 용액 공정 기반 유기 트랜지스터를 제작하여 성능의 향상을 보일 것이다. 트랜지스터의 구조는 하부 게이트 하부 접촉 (bottom gate, bottom contact) 구조로 제작되었고 게이트 절연체는 강유전체 고분자로 제작되었는데 한 번의 회전 도포 방법과 두 번의 회전 도포 방법으로 동일 두께를 형성하여 두 트랜지스터를 제작, 드레인 전압에 따른 소스-드레인 전류를 비교하였다. 그 결과 소스-게이트 누설 전류 감소 효과가 있었고, ON 상태에서의 소스-드레인 전류의 상승효과도 관찰되었다. 전류-전압 그래프로부터 계산된 이동도는 약 2.7배 증가되었다. 그러므로 용액 공정 기반 전계효과 트랜지스터를 제작할 시, 게이트 절연체를 다층 구조로 제작하면 성능 향상에 이점이 많다는 것을 알 수 있었다.

• 마이크로전자및패키징학회지
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• 제6권1호
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• pp.39-49
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• 1999

Monolayer 두께의 불화된 유기박막의 특성을 접촉각 측정을 통해 분석 하였다. 정접촉각을 표면장력의 다른 세 가지의 극성(water, formamide), 비극성(diiodomethane) 용액을 이용하여 Teflon, Spin coating된 FC막, 기상증착된 PFDA와 FC막위에 측정하였다. Aluminum위에 증착된 불화 유기박막이 물에 대해 $130^{\circ}$가 넘는 가장 큰 정접촉각을 나타내었다. 반면에 산화막위에 증착된 유기박막은 $70^{\circ}$미만의 낮은 접촉각을 갖었다. Teflon은 $108^{\circ}$, Spin coating된 막은 $121^{\circ}$로 측정되었다. 이들 측정된 값을 이용 Lewis acid/base 이론에 적용 박막의 표면에너지를 계산한 결과 Teflon의 경우는 18 dynes/cm, Spin coating된 유기박막은 8.4 dynes /cm의 낮은 에너지 값이 계산되었다. 실리콘과 산화막위에 증착된 유기박막은 상대적으로 높은 31~35 dynes /cm의 값을 나타내었으나 aluminum위에 증착된 막에서는 Lewis base 항이 큰 음수 값을 갖는 이례적인 경우가 발생하였다. 이때 음수값을 무시한 경우 계산된 aluminum 상의 증착된 유기박막의 표면에너지 PFDA가 13dynes / cm 이였다. 이는 동접촉각과 AFM 측정결과 다른 표면과는 다르게 aluminum강의 유기박막의 비균질성과 표면의 높은 거칠기에 기인함을 알 수 있었다.

• Macromolecular Research
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• 제16권8호
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• pp.725-733
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• 2008

Polyimide (PI) multilayer thin films were prepared by spin-coating from a poly(amic acid) (PAA) and poly(amic acid) ammonium salt (PAAS). PI was prepared from pyromellitic dianhydride (PMDA) and 4,4'-oxydianiline (ODA) PAA. Different compositions of PAAS were prepared by incorporating triethylamine (TEA) into PMDA-ODA PAA in dimethylacetamide. PI multilayer thin films were spin-coated from PMDA-ODA PAA and PAAS. The PAAS comprising cationic and anionic moieties were spherical with a particle size of $20{\sim}40\;nm$. Some particles showed layers with ammonium salts, despite poor ordering. Too much salt obstructed the interaction between the polymer chains and caused phase separation. A small amount of salt did not affect the interactions of the interlayer structure but did interrupt the stacking between chains. Thermogravimetric analysis (TGA) showed that the average decomposition temperature of the thin films was $611^{\circ}C$. All the films showed almost single-step, thermal decomposition behavior. The nanostructure of the multilayer thin films was confirmed by X -ray reflectivity (XRR). The LF 43 film, which was prepared with a 4:3 molar ratio of PMDA and ODA, was comprised of uniformly spherical PAAS particles that influenced the nanostructure of the interlayer by increasing the interaction forces. This result was supported by the atomic force microscopy (AFM) data. It was concluded that the relationship between the uniformity of the PAAS particle shapes and the interaction between the layers affected the optical and thermal properties of PI layered films.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 춘계학술대회 논문집 반도체재료
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• pp.42-45
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• 2001

The high permittivity are applied to DRAM and FRAM. (Ba,Sr)$TiO_3$ (EST) thin films were prepared by Sol-Gel method. BST solution was made and spin-coated on $Pt/SiO_2/Si$ substrate at 4000 [rpm] for 10 seconds in a time coating. Coated specimens were dried at $90[^{\circ}C]$ for 5 minutes. Coating process was repeated from 3 times to 5 times and then sintered at $750[^{\circ}C]$ for 30 minutes. Each specimen was analyzed structure and electrical characteristics. Thickness of BST ceramics thin films are about 2600-2800[$\AA$] in 3 times. Dielectric constant of thin films was little decreased at 1[KHz]~1[MHz]. Dielectric constant and loss to frequency were 250 and 0.02 in BST3. The property of leakage current was stable When the applied voltage was 0~3[V] Leakage current was $10^{9}\sim10^{11}$[A] at 0~3[V].

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권9호
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• pp.429-433
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• 2006

PZT(80/0) powder was prepared by a sol-gel method and PZT thick films were fabricated by the screen-printing method on the alumina substrates. The coating and drying procedure was repeated 4 times. And then the PZT(20/80) precusor solution was spin-coated on the PZT thick films. A concentration of a coating solution was 0.5mol/L and the number of coating was varied from 0 to 6. The porosity decreased and the grain size increased with increasing the number of coatings. The thickness of the PZT-6(6: number of coatings) films was about $60{\mu}m$. The relative dielectric constant increased and the dielectric loss decreased with increasing the number of PZT(20/80) sol coatings. The relative dielectric constant and dielectric loss of the PZT-6 thick film were 275 and 3.5%, respectively. The remanent polarization, coercive field and breakdown strength of the PZT-6 film were $19.8{\mu}C/cm^2$, 13.7kV/cm and 130kV/cm, respectively.

• 폴리머
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• 제35권2호
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• pp.130-135
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• 2011

전자 기기의 빠른 발전에 따른 무선 기기들의 사용은 급격히 늘어나고 있다. 그래서 이런 제품에 자가 발전이 가능한 재료를 적용시키는 사례가 점차 늘고 있다. 여기에 사용되는 재료로서 poly(vinylidene fluoride) (PVDF)가 있는데 PVDF는 piezoelectricity를 낼 수 있는 특별한 결정구조인 ${\beta}$-phase를 가지고 있다. 이 논문에서는 piezoelectricity에 결정적인 영향인 ${\beta}$-phase 함량을 증가시키기 위해 다층 PVDF 필름을 제조하였다. 이 PVDF 필름은 용매인 DMAc에 10%로 용해시킨 깃으로 spin rate는 850 rpm, spin time은 60초이며 건조온도는 $60^{\circ}C$이다. 비교적으로 다층 필름은 단열 층보다 더 높은 ${\beta}$-phase함량을 나타내었다 이 ${\beta}$-phase함량은 4-layer 필름이 되기까지 점차 증가되었으며 최대 함량은 7.72이다.

• 한국세라믹학회지
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• 제34권2호
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• pp.188-194
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• 1997

TMCS(Trimethylchlorosilane)로 표면개질한 습윤겔을 에탄올에 재분산시켜 코팅용 재분산 실리카 졸을 제조하였고 제조된 졸을 실리콘 기판에 스핀 코팅한 후 상압 하에서 건조(8$0^{\circ}C$) 및 열처리(>25$0^{\circ}C$)하여 열처리온도에 따른 박막의 물성 변화를 관찰하였다. 습윤겔의 재분산시 안정한 재분산 실리카 졸의 제조를 위한 최적 재분산 조건을 습윤겔:에탄올=1g110$m\ell$로 하였고, 이렇게 제조된 재분산 실리카 졸의 농도와 점도는 각각 0.11 M, 2.0-2.2cP였으며 평균 졸 입자크기는 약 30nm정도였다. 1500rpm, 10회 스핀 코팅한 후 8$0^{\circ}C$에서 2시간 건조, 45$0^{\circ}C$에서 2시간 열처리에 의하여 굴절율이 약 1.14, 두께가 400nm정도인 균열이 없는 박막을 얻을 수 있었다.