• Title/Summary/Keyword: Spacing effect

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Effect of slurries on the dishing of Shallow Trench Isolation structure during CMP process

  • Lee, Hoon;Lim, Dae-Soon;Lee, Sang-Ick
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.10b
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    • pp.443-444
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    • 2002
  • The uniformity of field oxide is critical to isolation property of device in STI, so the control of field oxide thickness in STI-CMP becomes enormously important. The loss of field oxide in shallow trench isolation comes mainly from dishing and erosion in STI-CMP. In this paper, the effect of slurries on the dishing was investigated with both blanket and patterned wafers were selected to measure the removal rate, selectivity and dishing amount. Dishing was a strong function of pattern spacing and types of slurries. Dishing was significantly decreased with decreasing pattern spacing for both slurries. Significantly lower dishing with ceria based slurry than with silica based slurry were achieved when narrow pattern spacing were used. Possible dishing mechanism with two different slurries were discussed based on the observed experimental results.

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Effective measurement of high facet reflectivity using the variation longitudinal modes spacing of semiconductor external cavity ring lasers (반도체 외부 공진기 링 레이저의 종 모드 간격 변화를 이용한 고반사율을 갖는 Etalon Coating Reflectivity의 정밀 측정)

  • 엄진섭;안상호
    • Korean Journal of Optics and Photonics
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    • v.10 no.6
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    • pp.524-526
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    • 1999
  • It is observed that the mode spacing of an cxternal cavity semiconducror laser can be altered dramatically by the insertion of an intracavity etalon. 111e mode spacing is decreased as a function of etalon's reflectivity and this effect is quantitatively explained by an analysis of resonant modes. We abo show that this effect provides a precise and convenient alternative for determining the coating reflectivity of a high reflectivity etalon. talon.

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A Study on the Collection Characteristics of a Wide Plate-Spacing Electrostatic Precipitator -II. Effect of Wave Form of Pulse Energization - (광폭 전기집진기의 집진특성에 판한 연구 - II. 펄스 하전 파형의 영향 -)

  • 김용진;하병길;정상현;홍원석;하대홍;유주식
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.13 no.11
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    • pp.1059-1064
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    • 2001
  • This study Investigates the effect of the wave form of pulse energization on the collection characteristics of a wide plate spacing electrostatic precipitator. For the semi-pulse energization, the peak current and voltage of the energization increases with increase of the pulse period, and the corona current increases, as pulse ratio decreases. For the micro-pulse energization, the corona current increases with increase of the pulse voltage. The collection efficiency of semi-pulse and micro-pulse energization is larger than that of DC charge.

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Crack Spacing in RC Tension Members Considering Cover Thickness and Concrete Compressive Strength (피복두께와 콘크리트 강도를 고려한 철근콘크리트 인장부재의 균열간격)

  • Kim, Woo;Lee, Ki-Yeol
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.38 no.2
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    • pp.193-202
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    • 2018
  • This paper proposed a crack spacing calculation formulation which is an important parameter for calculating the crack width, that is the main factor for verification of serviceability limit states and durability performance evaluation of reinforced concrete members. The basic equation of average crack spacing is derived by considering the bond characteristics which is the governing equation for the analysis of cracking behavior in reinforced concrete members. In order to consider the effect of the cover thickness and concrete compressive strength, the crack spacing measured in 124 direct tensile tests performed by several researchers was analyzed and each coefficient was proposed. And, correlation analysis was performed from 80 specimen data where the maximum and average crack spacing were simultaneously measured, and a correlation coefficient that can easily predict the maximum crack spacing from the average crack spacing was proposed. The results of the proposed average crack spacing equation and maximum crack spacing correlation were compared with those current design code specification. The comparisons of proposed equations and the Korean design codes show that the proposed formulation for the average crack spacing and the maximum crack spacing improves the accuracy and reliability of prediction compared to the corresponding provisions of the Korean Concrete Structural Design Code and Korean Highway Bridge Design Code (Limit States Design).

The Shear Lag Phenomenon in Bundled Tube Structure According to the Arrangement of Structural Members (부재배치에 따른 묶음튜브 구조의 전단지연현상)

  • Kim, Young-Chan;Kim, Hyun
    • Journal of the Korean Society of Safety
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    • v.21 no.3 s.75
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    • pp.81-86
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    • 2006
  • The purpose of this study is to examine the effect of column spacing and beam size on the lateral displacement and shear lag phenomenon in bundled tube system. According to the parametric study in which the spacing of columns, the size of columns and girders in bundled tube were selected as a parameter, it is the most efficient to increase the size of the interior columns with the largest reduction of lateral drift if the steel tonnage of a frame can be increased. It was noticed that the shear lag was affected more by the exterior stiffness factor and ratio than by the interior ones when column spacing was changed, and when the size of column was changed, the reverse phenomenon was happened. And The change of column spacing affected shear lag, lateral drift, and tonnage more than that of column size or girder size.

Influence of Concrete Strength and Lateral Ties on Behavior of High-Strength Concrete Columns (고강도 콘크리트 기둥의 거동에 미치는 콘크리트 강도와 띠철근의 영향)

  • Lee, Young-Ho;Chung, Heon-Soo
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.6 no.2
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    • pp.245-253
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    • 2002
  • This study was focused on the effect of concrete strength and lateral ties of concrete columns using high-strength concrete. Thirty-six concrete columns with 20cm square cross-section were tested. Experimental parameters included the concrete strength, the distribution of longitudinal bars and the volumetric ratio, yield strength, spacing of lateral ties. From the experiments, we found that: 1) the increasing rate of the strength and ductility of concrete columns caused by confinement of lateral ties was decreasing, as the concrete strength increased. 2) The high volumetric ratio and the reduction of tie spacing had a tendency to enhance the strength and improve the ductility. 3) The high-strength concrete columns required high volumetric ratio of lateral ties to maintain the proper strength and ductility. It was observed that the current AIK design code to specify the maximum tie spacing of high-strength concrete columns led to the poor strength and ductility for seismic design.

A Study on the Mechanical Properties of Al-8.6% Si-3.6% Cu Alloy Cast in Plaster Mold (석고주조(石膏鑄造)한 Al-8.6% Si-3.6% Cu 합금(合金)의 기계적(機械的) 성질(性質)에 관(關)한 연구(硏究))

  • Yeo, In-Dong;Kim, Dong-Ok;Kang, In-Chan
    • Journal of Korea Foundry Society
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    • v.4 no.4
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    • pp.5-13
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    • 1984
  • This paper is presented for showing the effect of cooling rate on dendrite arm spacing, correlated with the chilling power of molding materials (conventional plaster, foamed plaster, silica sand) and section thickness, and also showing relationship between dendrite arm spacing and mechanical properties for an aluminum - 8.6 percent silicon - 3.6 percent copper alloy. Local solidification time $(t_f)$ and secondary dendrite arm spacing (d) could be varied widely in accordance with the molding materials and casting thickness, and the following relationship is obtained: $d=9.4t_f\;^{0.31}$ A good correlation between dendrite arm spacing and mechanical properties such as ultimate tensile strength, yield strength, hardness was found, that is, mechanical properties decreased in a linear manner with increase in log of secondary dendrite arm spacing. Ultimate tensile strength in conventional plaster mold casting decreased by 15 percent comparing with the sand casting, where as in foamed plaster mold casting, it decreased by 30 percent comparing with the sand casting. From those results, it has been verified that DAS might be the most representative parameter for predicting mechanical properties varing with the different cooling condition.

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The Effects of the Distribution Aspect of Precipitate on the Corrosion Behavior of As-Cast Magnesium Alloys

  • 이충도
    • Transactions of Materials Processing
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    • v.8 no.3
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    • pp.295-295
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    • 1999
  • In the present study, the corrosion behavior of AZ91D as-cast alloy was investigated form the viewpoint of the distribution aspect of precipitate ($Mg_{17}Al_{12}$) and the variation of Al concentration in the Mg-rich matrix. The dendrite arm spacing (DAS) of an as-cast specimen was measured as a function of degree which describes the distribution aspect of the precipitate, and the salt spray test was conducted for various grain-sired specimens fur 20 days. The dendrite arm spacing increased as the grain size increased to about 150㎛, but a constant value is indicated when the grain size exceeds that range. Although the relationship between the corrosion rate and grain size is of a nonlinear type, the linear trend between the corrosion rate and the dendrite arm spacing is maintained for the overall range of dendrite arm spacing. Since the precipitate in the as-cast alloy is discontinuously distributed, this linear relationship means that the variation of Al-solute concentration in the Mg-rich matrix has a more potent effect than the protective action of the precipitate on the corrosion behavior of an as-cast alloy.

Impingement Heat Transfer Within a Row of Submerged Circular Water Jets (1열 원형 서브머지드 충돌수분류군에 의한 열전달의 실험적 연구)

  • Ohm, Ki-Chan
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.22 no.8
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    • pp.538-544
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    • 2010
  • An experimental investigation is presented to study the effect nozzle spacing, jet to plate spacing and Reynolds number on the local heat transfer to normally upward impinging submerged circular water jets on a flat heated surface. Nozzle arrays are a single jet(nozzle dia. = 8 mm), a row of 3 jets(nozzle dia. = 4.6 mm, nozzle spacing = 37.5 mm) and a row of 5 jets(nozzle dia. = 3.6 mm, nozzle spacing = 25 mm), and jet to plate spacing ranging from 16∼80 mm(H/D = 2∼10) is tested. Reynolds number based on single jet exit condition is varied 30000∼70000($V_o$ = 3∼7 m/s). Except for the condition of H/D = 10, the average Nusselt number of multi-jet is higher than that of single jet. For H/D = 2, average Nusselt number is increased by 50.3∼82.5% for a row of 3 jets and by 52.9∼65.2% on a row of 5 jets when compared to the average Nusselt number on the single jet.

Effect of Joint Spacing on the Earth Pressure Against the Support System in a Jointed Rock Mass

  • Son, Moorak;Adedokun, Solomon
    • Journal of the Korean GEO-environmental Society
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    • v.17 no.1
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    • pp.29-37
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    • 2016
  • This study examined the magnitude and distribution of earth pressure on the support system in a jointed rock mass due to the different joint spacing as well as varying the rock type and joint condition (joint shear strength and joint inclination angle). Based on a physical model test and its numerical simulation, a series of numerical parametric analyses were conducted using a discrete element method. The results showed that the magnitude and distribution of earth pressure were strongly affected by the different joint spacing as well as the rock type and joint condition. In addition, the study results were compared with Peck's earth pressure for soil ground, which indicated that the earth pressure in a jointed rock mass could be considerably different from that in soil ground. The study suggests that the joint spacing as well as the rock type and joint condition are important factors affecting the earth pressure in a jointed rock mass and they should be considered when designing a support system in a jointed rock mass.