• 제목/요약/키워드: Sol-gel film

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PZT(10/90)/(90/10)이종층 박막의 강유전특성에 관한 연구 (A study on the Ferroelectric Properties of PZT(10/90)/(90/10) Heterolayered Thin Films)

  • 김경태;박인길;이성갑;이영희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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    • pp.109-112
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    • 1999
  • The PZT(10/90)/(90/17) heterolayered thin films were fabricated by the spin-coaling on the Pt/Ti/SiO$_2$/Si substrate using the PZT(10/90) and PZT(70/10) metal alkoxide solutions. The effect of heterolayered thin films on the ferroelectrics and electrical properties have been investigated. The lower PZT layers provided the nucleation site for the formation of a perovskite phase of the upper PZT films. Dielectric constant increased with increasing the number of coatings, and it was about 569.9 at PZT-6 heterolayered films.

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Effects of Al Concentration on Structural and Optical Properties of Al-doped ZnO Thin Films

  • Kim, Min-Su;Yim, Kwang-Gug;Son, Jeong-Sik;Leem, Jae-Young
    • Bulletin of the Korean Chemical Society
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    • 제33권4호
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    • pp.1235-1241
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    • 2012
  • Aluminium (Al)-doped zinc oxide (AZO) thin films with different Al concentrations were prepared by the solgel spin-coating method. Optical parameters such as the optical band gap, absorption coefficient, refractive index, dispersion parameter, and optical conductivity were studied in order to investigate the effects of the Al concentration on the optical properties of AZO thin films. The dispersion energy, single-oscillator energy, average oscillator wavelength, average oscillator strength, and refractive index at infinite wavelength of the AZO thin films were found to be affected by Al incorporation. The optical conductivity of the AZO thin films also increases with increasing photon energy.

Photochromic Polysiloxanes Substituted with 1,2-Bis(2-methyIbenzo[b]thiophene-3-yl)hexafluorocyclopentene

  • Shin, Hee-Won;Kim, Yong-Rok;Kim, Eun-Kyoung
    • Macromolecular Research
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    • 제13권4호
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    • pp.321-326
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    • 2005
  • Photochromic diarylethene polymers (DPs) in which 1,2-bis(2-methylbenzo[b ]thiophene-3-yl)hexafluorocyclopentene (BTF6) were covalently grafted onto the polymer main chain as pendant photochromic units were newly synthesized and their photochromic properties were investigated using steady-state and picosecond timeresolved spectroscopies. Polysiloxanes substituted with BTF6 molecules were prepared by sol-gel process using a mixture of tetraethoxysilane (TEOS), a silylated BTF6, and an organically modified silane precursor in the presence of HCl. The polysiloxane film (DP1) prepared from $\omega-methoxy$ poly(ethylene glycol) 3-(triethoxysilyl) propylcarbainate (MPGSC) as the silane precursor showed a much lower glass transition temperature than that (DP2) from heptadecafluorodecyltrimethoxysilane (HDFTMS). The ring-closure quantum yields of DP1 and DP2 were determined to be 0.20 and 0.02, respectively. Such a large difference in the quantum yield was attributed to the polymer matrix environment of the free inner volume.

코팅횟수에 따른 PZT세라믹의 구조적 특성 (The Structural properties of PZT ceramic with preparation coating timing)

  • 강정민;조현무;이성갑;배선기
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2004년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.64-66
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    • 2004
  • $Pb(Zr_{0.3},Ti_{0.7})O_3$, $Pb(Zr_{0.3},Ti_{0.3})O_3$ powders were prepared by the sol-gel method and PZT heterolayered thick films were fabricated by the screen-printing method. The structural properties as a faction of the composition ration were studied. As a result of the differential thermal analysis (DTA), exothermic peak was observed at around $864^{\circ}C$ dne to the formation of the polycrystalline perovskite phase. The PZT heterolayered thick film sintered at $1050^{\circ}C$ for 10min showed the average grain size $1{\sim}1.4{\mu}m$. The average thickness of PZT heterolayered thick films, obained by $3{\sim}6times$ of screen-printing, was approximately $60{\sim}110{\mu}m$.

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전자 수송층을 삽입한 용액 공정형 산화물 트랜지스터의 특성 평가 (Characterization of Solution-Processed Oxide Transistor with Embedded Electron Transport Buffer Layer)

  • 김한상;김성진
    • 한국전기전자재료학회논문지
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    • 제30권8호
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    • pp.491-495
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    • 2017
  • We investigated solution-processed indium-zinc oxide (IZO) thin-film transistors (TFTs) by inserting a 2-(4-biphenylyl)-5-(4-tert-butylphenyl)-1,3,4-oxadiazole (PBD) buffer layer. This buffer layer efficiently tuned the energy level between the semiconducting oxide channel and metal electrode by increasing charge extraction, thereby enhancing the overall device performance: the IZO TFT with embedded PBD layer (thickness: 5 nm; width: $2,000{\mu}m$; length: $200{\mu}m$) exhibited a field-effect mobility of $1.31cm^2V^{-1}s^{-1}$, threshold voltage of 0.12 V, subthreshold swing of $0.87V\;decade^{-1}$, and on/off current ratio of $9.28{\times}10^5$.

UV경화형 아크릴 수지와 콜로이드 실리카로 합성된 코팅막의 특성 (Properties of Coating Films Synthesized from Colloidal Silica and UV-curable Acrylate resin)

  • 강영택;강동필;한동희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.551-552
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    • 2007
  • Coating films were prepared from silane-terminated Colloidal silaca(CS) and UV-curable acrylate resin. The silane-terminated CSs were synthesized from CS and methyltrimethoxysilane(MTMS) and then treated with 3-methacryloxypropyltrimethoxysilane(MAPTMS)/3-glycidoxypropyltrimethoxysilane( GPTMS)/vinyltrimethoxysilane(VTMS) by sol-gel process, respectively. The silane-terminated CS and acrylate resin were hybridized using UV-curing system. Thin films of hybrid material were prepared using spin coater on the glass. Their hardness, contact angle and transmittance improved with the addition of silane-terminated CS.

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Preparation of the SBT Film on the LZO/Si Structure for FRAM Application

  • Im, Jong-Hyun;Jeon, Ho-Seung;Kim, Joo-Nam;Park, Byung-Eun;Kim, Chul-Ju
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.140-141
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    • 2007
  • To fabricate the metal-ferroelectric-insulator-semiconductor (MFIS) structure for the ferroelectric random access memory (FRAM) application, we prepared the ferroelectric $Sr_{0.9}Bi_{2.1}Ta_2O_9$ (SBT) and the insulator LaZrOx (LZO) thin films on the silicon substrate using a sol-gel method. In this study, we will investigate the feasibility of the SBT/LZO/Si structure as one of the promising gate configuration for the 1-transistor (1-T) type FRAM, by measurements of the electrical properties and the physical properties.

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급속 열처리에 의한 PZT 강유전 박막의 제작 (Fabrication of PZT ferroelectric thin films by rapid thermal annealing)

  • 백동수;김현권;최형욱;김준한;박창엽;신현용
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1993년도 하계학술대회 논문집 B
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    • pp.1106-1109
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    • 1993
  • Ferroelectric thin films of PZT with differnt Zr/Ti ratio were prepared by sol-gel processing and annealed by rapid-thermal-annealing at $500^{\circ}C-700^{\circ}C$ for 10sec-1min. The structure of the annealed films were examined by X-ray diffraction and SEM. Maximum remnant polarization of 10.24 ${\mu}m/cm^2$ and coercive field of 70 KV/cm were obtained from hysteresis curve or the film.

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$TiO_2-Nb_2O_5$ 박막형 습도센서의 개발에 관한 연구(I) (A Study on the Development of $TiO_2-Nb_2O_5$ Thin Film Type Humidity Sensors(I))

  • 진윤영;유도현;김영봉;강대하;조기선;신태현;이덕출
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1993년도 하계학술대회 논문집 B
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    • pp.1150-1152
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    • 1993
  • $TiO_2-Nb_2O_5$ thin films are fabricated by Sol-Gel method and their electrical properties have been investigated. The crystalline form is amorphous under $400^{\circ}C$ and is anatase over $500^{\circ}C$. The surface conductivity of films is higher that of $500^{\circ}C$ than that of $600^{\circ}C$.

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솔-젤법으로 제작한 PZT 이종층 박막의 구조적 특성 (Microstructural Properties of PZT Heterolayered Thin Films Prepared by Sol-Gel Method)

  • 이성갑;김경태;정장호;박인길;이영희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 추계학술대회 논문집
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    • pp.311-314
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    • 1999
  • Ferroelectric PZT heterolayered thin films were fabricated by spin coating method on the Pt/Ti/SiO$_2$/Si substrate using PZT(10/90) and PZT(90/10) metal alkoxide solutions. All PZT heterolayered films showed a homogeneous grain structure without presence of the rosette structure. It can be assumed that the lower PZT layers a role of nucleation site or seeding layer for the formation of the upper PZT layer. Zr and Ti diffusion into the Pt electrode were mainly distributed at the surface of Pt electrode beneath the PZT/Pt interface. The PZT/Pt interfacial layer showed a microstructure characterized by a grain phase surrounded by a Pb-deficient pyrochlore matrix phase. The relative dielectric constant and the dielectric loss of the PZT-6 film were 567 and 3.6, respectively.

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