• Title/Summary/Keyword: Sol-gel deposition

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High-Performance Optical Gating in Junction Device based on Vanadium Dioxide Thin Film Grown by Sol-Gel Method

  • Lee, Yong-Wook;Kim, Eung-Soo;Shin, Bo-Sung;Lee, Sang-Mae
    • Journal of Electrical Engineering and Technology
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    • v.7 no.5
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    • pp.784-788
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    • 2012
  • In this paper, a high-performance optical gating in a junction device based on a vanadium dioxide dioxide ($VO_2$) thin film grown by a sol-gel method was experimentally demonstrated by directly illuminating the $VO_2$ film of the device with an infrared light at ~1554.6 nm. The threshold voltage of the fabricated device could be tuned by ~76.8 % at an illumination power of ~39.8 mW resulting in a tuning efficiency of ~1.930 %/mW, which was ~4.9 times as large as that obtained in the previous device fabricated using the $VO_2$ thin film deposited by a pulsed laser deposition method. The rising and falling times of the optical gating operation were measured as ~50 ms and ~200 ms, respectively, which were ~20 times as rapid as those obtained in the previous device.

Characterization of Sol-gel Coated Pb(ZrTi)O3 Thin film for Piezoelectric Vibration MEMS Energy Harvester (압전 MEMS 진동에너지 수집소자를 위한 졸겔 공법기반의 Pb(ZrTi)O3 박막의 특성 분석 및 평가)

  • Park, Jong-C.;Park, Jae-Y.
    • Proceedings of the KIEE Conference
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    • 2009.07a
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    • pp.1240_1241
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    • 2009
  • In this paper, sol-gel-spin coated $Pb(ZrTi)O_3$ thin film with $ZrO_2$ buffer-layer and $PbTiO_3$ seed-layer was investigated for vibration MEMS energy harvester to scavenge power from ambient vibration via d33 piezoelectric mode. Piezoelectric thin film deposition techniques on insulating layer is the important key for $d_{33}$ mode of piezoelectric vibration energy harvester. $ZrO_2$ buff-layer was utilized as an insulating layer. $PbTIO_3$ seed-layer was applied as an inter-layer between PZT and $ZrO_2$ layer to improve the crystalline of PZT thin film. The fabricated PZT thin film had a remanent polarization of 5.3uC/$cm^2$ and the coercive field of 60kV/cm. The fabricated energy harvester using PZT thin film with PTO seed-layer generated 1.1uW of electrical power to $2.2M{\Omega}$ of load with $4.4V_{pvp}$ from vibration of 0.39g at 528Hz.

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Revealing Strong Metal Support Interaction during CO Oxidation with Metal Nanoparticle on Reducible Oxide Substrates

  • Park, Dahee;Kim, Sun Mi;Qadir, Kamran;Park, Jeong Young
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.264-264
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    • 2013
  • Strong metal-support interaction effect is an important issue in determining the catalytic ac-tivity for heterogeneous catalysis. In this study, we investigated the support effect and the role of organic capping layers of two-dimensional Pt nanocatalysts on reducible metal oxide supports under the CO oxidation. Several reducible metal oxide supports including CeO2, Nb2O5, and TiO2 thin films were prepared via sol-gel techniques. The structure, chemical state and optical property were characterized using XRD, XPS, TEM, SEM, and UV-VIS spectrometer. We found that the reducible metal oxide supports have a homogeneous thin thickness and crystalline structure after annealing at high temperature showing the different optical band gap energy. Langmuir-Blodgett technique and arc plasma deposition process were employed to ob-tain Pt nanoparticle arrays with capping and without capping layers, respectively on the oxide support to assess the role of the supports and capping layers on the catalytic activity of Pt catalysts under the CO oxidation. The catalytic performance of CO oxidation over Pt supported on metal oxide thin films under oxidizing reaction conditions (40 Torr CO and 100 Torr O2) was tested. The results show that the catalytic activity significantly depends on the metal oxide support and organic capping layers of Pt nanoparticles, revealing the strong metal-support interaction on these nanocatalysts systems.

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Synthesis and Photocatalytic Activity of Ag Spot-coated TiO2-SrO Composite Powders (나노 Ag spot-coated TiO2-SrO 복합분체의 합성과 광촉매 활성 평가)

  • Han, Jae-Kil;Kim, Hyeong-Chul;Hong, Won-Seok;Choi, Sung-Chang
    • Korean Journal of Materials Research
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    • v.18 no.7
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    • pp.389-393
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    • 2008
  • Nano-sized $TiO_2$-60 wt% SrO composite powders were synthesized by a sol-gel method using titanium isopropoxide and $Sr(OH)_2\;{\cdot}\;8H_2O$ as precursors. 3, -5, -7 wt%Ag spot-coated $TiO_2$-60 wt% SrO composite powders were synthesized by a Ag electroless deposition method using $TiO_2$-60 wt% SrO composite powders calcined at $1050^{\circ}C$, which mainly exhibited the $SrTiO_3$phase. However, a small number of rutile $TiO_2$, $Sr_2TiO_4$ and $SrO_2$ phases were also detected. In the Ag spot-coated powders synthesized by electroless deposition, nano-sized particles about 5-25 nm in diameter adhered to the $TiO_2$-60 wt% SrO composite powders. The photocatalytic activity of Ag spot-coated $TiO_2$-SrO and $TiO_2$-SrO composite powders for degradation of phenol showed that all of $TiO_2$-SrO composite powders were highly active under UV light irradiation. 7 wt%Ag spot-coated $TiO_2$-60wt.%SrO composite powders had a relatively higher photocatalytic activity than did $TiO_2$-SrO composite powders under visible light.

High $T_c$, Superconductors for Applications

  • Soh, Deawha;Fan, Zhanguo
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2003.05a
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    • pp.366-369
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    • 2003
  • High T$_{c}$ superconducting lines will be applied as key materials in the areas of power transmission line; magnetic levitation of vehicle; magnetic separation; magnetic energy storage and marine propulsion. A combination method of electrophoresis deposition and zone-melting for preparation of YBaCuO tape is proposed. The submicron particle powder of YBaCuO made by sol-gel method is used in the electrophoresis process. A 40~50${\mu}{\textrm}{m}$ thickness of YBaCuO film on Ag plate could be deposited in about three minutes. After deposition the film is rolled and heat treated in order to increase the density and the adhesion of the film to the Ag plate. Silver(Ag) and lead oxide(PbO) were added in the YBaCuO powder in order to reduce its melting point. The YBaCuO coating with controlled Ag and PbO contents was preliminarily zone-melted at about 945$^{\circ}C$.>.

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Fabrication and Characterization of Ferroelectric $(Bi,Sm)_4Ti_3O_{12}$ Thin Films Prepared by Chemical Solution Deposition

  • Kang, Dong-Kyun
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2006.10a
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    • pp.170-173
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    • 2006
  • Ferroelectric $Bi_{3.35}Sm_{0.65}Ti_3O_{12}(BST)$ thin films were deposited on $Pt(111)/Ti/SiO_2/Si(100)$ substrates by a sol-gel spin-coating process. In this experiments, $Bi(TMHD)_3$, $Sm_5(O^iPr)_{13}$, $Ti(O^iPr)_4$ were used as precursors, which were dissolved in 2-methoxyethanol. Thereafter, the thin films with the thickness, of 240nm were annealed from 600 to $720^{\circ}C$ in oxygen atmosphere for 1 hr, and post-annealed in oxygen atmosphere for 1 hr after deposition of Pt electrode to enhance the electrical properties. The remanent polarization and coercive voltage of the BST thin films annealed at $720^{\circ}C$ were $19.48\;{\mu}C/cm^2$ and 3.40 V, respectively, and a fatigue-free characteristics. As a result, Sm-substituted bismuth titanate films with good ferroelectric properties and excellent fatigue resistance are useful candidates for ferroelectric memory applications.

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Pore Modification of Sol-Gel Driven Alumina Membrane via Soaking and Vapor-Deposition Method

  • 이상연;이승진;양승만;박승빈
    • Proceedings of the Membrane Society of Korea Conference
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    • 1995.04a
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    • pp.58-59
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    • 1995
  • 기체 분리용 무기분리막은 고분자막과 비교하여 열 및 구조적 안정성이 우수하므로, 석탄가스화반응 혼합기체중의 기체분리 등 고온 또는 고압공정에 적합한 분리방법으로서 주목되고 있다. 기체의 분리를 위한 무기재료막은 크게 다공성막과 비다공성막으로 나눌 수 있으며, 이 중 비기공 성막의 경우 높은 선택도를 가지나 투과도가 낮아 경제성이 떨어지는 것으로 평가되고 있다. 한편, 기존의 다공성막의 경우 투과도는 높으나 기체의 분리가 혼합기체중 각 기체의 분자량의 차이에 의존하는 Knudsen 확산에 제한되는 낮은 선택도를 갖는 단점이 있다. 따라서 다공성막의 기공을 특정기체의 선택도가 우수한 촉매물질등으로 개선하여 비기공성막에 비해 우수한 투과도를 갖고, 기공성막에 비해 향상된 선택도를 보이는 복합막의 연구가 활발히 추진되고 이\ulcorner. 본 연구는 솔젤법에 의해 제조된 팔라듐 함침 알루미나 지지막의 기공을 침투$\cdot$증착(Soaking and Vapor-deposition)법에 의해 개선하여 기체의 투과도를 높게 유지하면서 수소의 선택성을 향상시키는 것을 목적으로 하였다.

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High $T_c$ Superconductor Applications and Thick Film Preparation

  • Soh, Dea-Wha;Zhanguo Fan
    • Journal of information and communication convergence engineering
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    • v.1 no.2
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    • pp.63-66
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    • 2003
  • High $T_c$ superconducting lines will be applied as key materials in the areas of power transmission line; magnetic levitation of vehicle; magnetic separation; magnetic energy storage and marine propulsion. A combination method of electrophoresis deposition and zone-melting for preparation of YBaCuO tape is proposed. The submicron particle powder of YBaCuO made by sol-gel method is used in the electrophoresis process. A 40∼50 ${\mu}\textrm{m}$ thickness of YBaCuO film on Ag plate could be deposited in about three minutes. After deposition the film is rolled and heat treated in order to increase the density and the adhesion of the film to the Ag plate. Silver(Ag) and lead oxide(PbO) were added in the YBaCuO powder in order to reduce its melting point. The YBaCuO coating with controlled Ag and PbO contents was preliminarily zone-melted at about $945^{\circ}C$.

Investigation of the Effects of ZnO Thin Film Deposition Methods on Inverted Polymer Solar Cells (다양한 박막 형성법을 사용한 ZnO 전자 추출층이 역구조 고분자 태양전지에 미치는 영향 연구)

  • Lee, Donggu;Noh, Seunguk;Sung, Myungmo;Lee, Changhee
    • Current Photovoltaic Research
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    • v.1 no.1
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    • pp.59-62
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    • 2013
  • We investigated the effects of ZnO thin film deposition methods on the performance of inverted polymer solar cells with a structure of ITO/ZnO/P3HT:PCBM/MoO3/Al. The ZnO thin films were deposited by various methods (spin coating of nanoparticles, sol-gel process, atomic layer deposition) and their morphology was analyzed by atomic force microscopy (AFM). The device with ZnO nanoparticle thin films showed the highest power conversion efficiency of 3 % with low series resistance and high shunt resistance. The superior performance of the device with the ZnO nanoparticle layer is attributed to better electron extraction capability.

Dielectric Characteristics of $Al_2O_3$ Thin Films Deposited by Reactive Sputtering

  • Park, Jae-Hoon;Park, Joo-Dong;Oh, Tae-Sung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.100-100
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    • 2000
  • Aluminium oxide (Al2O3) films have been investigated for many applications such as insulating materials, hard coatings, and diffusion barriers due to their attractive electrical and mechanical properties. In recent years, application of Al2O3 films for dielectric materials in integrated circuits as gates and capacitors has attracted much attention. Various deposition techniques such as sol-gel, metalorganic decomposition (MOD), sputtering, evaporation, metalorganic chemical vapor deposition (MOCVD), and pulsed laser ablation have been used to fabricate Al2O3 thin films. Among these techniques, reactive sputtering has been widely used due to its high deposition rate and easy control of film composition. It has been also reported that the sputtered Al2O3 films exhibit superior chemical stability and mechanical strength compared to the films fabricated by other processes. In this study, Al2O3 thin films were deposited on Pt/Ti/SiO/Si2 and Si substrates by DC reactive sputtering at room temperature with variation of the Ar/O2 ratio in sputtering ambient. Crystalline phase of the reactively sputtered films was characterized using X-ray diffractometry and the surface morphology of the films was observed with Scanning election microscopy. Effects of Th Ar/O2 ratio characteristics of Al2O3 films were investigated with emphasis on the thickness dependence of the dielectric properties. Correlation between the dielectric properties and the microstructure was also studied

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