• 제목/요약/키워드: Sol-Gel Coating

검색결과 620건 처리시간 0.028초

용액법으로 제작된 ZnSnO 박막트랜지스터의 전극 물질에 따른 계면 접촉특성 연구 (Metal-Semiconductor Contact Behavior of Solution-Processed ZnSnO Thin Film Transistors)

  • 정영민;송근규;우규희;전태환;정양호;문주호
    • 한국재료학회지
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    • 제20권8호
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    • pp.401-407
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    • 2010
  • We studied the influence of different types of metal electrodes on the performance of solution-processed zinc tin oxide (ZTO) thin-film transistors. The ZTO thin-film was obtained by spin-coating the sol-gel solution made from zinc acetate and tin acetate dissolved in 2-methoxyethanol. Various metals, Al, Au, Ag and Cu, were used to make contacts with the solution-deposited ZTO layers by selective deposition through a metal shadow mask. Contact resistance between the metal electrode and the semiconductor was obtained by a transmission line method (TLM). The device based on an Al electrode exhibited superior performance as compared to those based on other metals. Kelvin probe force microscopy (KPFM) allowed us to measure the work function of the oxide semiconductor to understand the variation of the device performance as a function of the types metal electrode. The solution-processed ZTO contained nanopores that resulted from the burnout of the organic species during the annealing. This different surface structure associated with the solution-processed ZTO gave a rise to a different work function value as compared to the vacuum-deposited counterpart. More oxygen could be adsorbed on the nanoporous solution-processed ZTO with large accessible surface areas, which increased its work function. This observation explained why the solution-processed ZTO makes an ohmic contact with the Al electrode.

금 나노입자 형성을 이용한 계층구조 SiO2 코팅층의 제조 및 표면 특성 (Synthesis and Surface Properties of Hierarchical SiO2 Coating Layers by Forming Au Nanoparticles)

  • 김지영;김은경;김상섭
    • 한국재료학회지
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    • 제23권1호
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    • pp.53-58
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    • 2013
  • Superhydrophobic $SiO_2$ layers with a micro-nano hierarchical surface structure were prepared. $SiO_2$ layers deposited via an electrospray method combined with a sol-gel chemical route were rough on the microscale. Au particles were decorated on the surface of the microscale-rough $SiO_2$ layers by use of the photo-reduction process with different intensities ($0.11-1.9mW/cm^2$) and illumination times (60-240 sec) of ultraviolet light. With the aid of nanoscale Au nanoparticles, this consequently resulted in a micro-nano hierarchical surface structure. Subsequent fluorination treatment with a solution containing trichloro(1H,2H,2H,2H-perfluorooctyl)silane fluorinated the hierarchical $SiO_2$ layers. The change in surface roughness factor was in good agreement with that observed for the water contact angle, where the surface roughness factor developed as a measure needed to evaluate the degree of surface roughness. The resulting $SiO_2$ layers revealed excellent repellency toward various liquid droplets with different surface tensions ranging from 46 to 72.3 mN/m. Especially, the micro-nano hierarchical surface created at an illumination intensity of $0.11mW/cm^2$ and illumination time of 60 sec showed the largest water contact angle of $170^{\circ}$. Based on the Cassie-Baxter and Young-Dupre equations, the surface fraction and work of adhesion for the micronano hierarchical $SiO_2$ layers were evaluated. The work of adhesion was estimated to be less than $3{\times}10^{-3}N/m$ for all the liquid droplets. This exceptionally small work of adhesion is likely to be responsible for the strong repellency of the liquids to the micro-nano hierarchical $SiO_2$ layers.

Ti-PCS 혼합용액의 전기방사를 통해 제조된 TiO2-SiO2 나노복합 섬유 (TiO2-SiO2 Nanocomposite Fibers Prepared by Electrospinning of Ti-PCS Mixed Solution)

  • 신동근;진은주;이윤주;권우택;김영희;김수룡;류도형
    • Korean Chemical Engineering Research
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    • 제53권3호
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    • pp.276-281
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    • 2015
  • $TiO_2-SiO_2$ 나노복합소재는 자체가 화학적으로 안정할 뿐만 아니라 광학적, 열적 특성이 매우 우수하여 광화학센서, 촉매 등 다양한 분야에 적용되고 있다. 이러한 구조를 구현하는 방법으로 티타늄이 첨가된 폴리카보실란(PCS) 혼합용액을 전기방사한 후 이를 적절한 산화분위기에서 열처리하여 부직포상의 $TiO_2-SiO_2$ 나노복합섬유를 만들 수 있는데, 이는 기존의 졸겔공정에 의해 제조되는 섬유보다 더 쉽고 안정적인 방법이다. 공정 중 방사된 섬유를 산화분위기에서 $1200^{\circ}C$ 이상까지 열처리하게 되면 크리스토발라이트 기지조직 내에서 아나타제 나노결정상이 매우 균일하게 형성되었다. 또한, 열처리 후 섬유의 표면과 단면은 매우 치밀하고 매끈하였으며 10~20nm 크기의 아나타제 결정입자들이 내부에 균일하게 분포하였다.

솔 - 젤법을 이용한 Bismuth Layered Structure를 가진 강유진성 박막의 제조 및 특성평가에 관한 연구 (II. MOD법으로 제조한 강유전성 $Sr_{0.7}/B_{2.3}(Ta_{1-x}Nb_x)_2O_9$ 박막의 유전특성) (The Preparation and Characterization of Bismuth Layered Ferroelectric Thin Films by Sol-Gel Process (II. Dielectric Properties of Ferroelectric $Sr_{0.7}/B_{2.3}(Ta_{1-x}Nb_x)_2O_9$ Thin Films Prepared by MOD Process))

  • 최무용;송석표;정병직;김병호
    • 한국전기전자재료학회논문지
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    • 제12권1호
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    • pp.62-68
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    • 1999
  • Ferroelectric $Sr_{0.7}/B_{2.3}(Ta_{1-x}Nb_x)_2O_9$(x=0, 0.1, 0.2, 0.3) thin films were deposited on $Pt/SiO_2/Si$ substrate by MOD(Metalorganic Decomposition) process. Metal carboxylate and metal alkoxide were used as precursors, and 2-methoxyethanol, xylene as solvents. After spin coating, thin films were pre-annealed at $400^{\circ}C$, followed by RTA(Rapid Thermal Annealing) and final annealing at $800^{\circ}C$ in oxygen atmosphere. These procedures were repeated three times to obtain thin films with the thickness of $2000{\AA}$. To enhance the nucleation and growth of layered-perovskite phase, thin films were rapid-thermally annealed above $720^{\circ}C$ in oxygen atmosphere. As RTA temperature increased, fluorite phase was transformed to layered-perovskite phase. And the change of Nb contents affected dielectric / electrical properties and microstructure. The ferroelectric characteristics of $Sr_{0.7}/B_{2.3}(Ta_{1-x}Nb_x)_2O_9$ thin film were Pr=8.67 $\mu{C}/cm^2$, Ec=62.4kV/cm and $I_{L}=1.4\times10^{-7}A/cm^2$ at the applied voltage of 5V, respectively.

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구형 SiO2@Y2O3: Eu 코어-쉘 복합체 형광체 합성 및 특성 (Synthesis and Characterization of Spherical SiO2@Y2O3 : Eu Core-Shell Composite Phosphors)

  • 송우석;양희선
    • 한국세라믹학회지
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    • 제48권5호
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    • pp.447-453
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    • 2011
  • The monodisperse spherical $SiO_2$ particles were overcoated with $Y_2O_3:Eu^{3+}$ phosphor layers via a Pechini sol-gel process and the resulting $SiO_2@Y_2O_3:Eu^{3+}$ core-shell phosphors were subsequently annealed at $800^{\circ}C$ at an ambient atmosphere. The crystallographic structure, morphology, and luminescent property of core-shell structured $SiO_2@Y_2O_3:Eu^{3+}$ phosphors were characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), and photoluminescence (PL). The spherical, nonagglomerated $SiO_2$ particles prepared by a Stober method exhibited a relatively narrow size distribution in the range of 260-300 nm. The thickness of phosphor shell layer in the core-shell particles can be facilely controlled by varying the coating number of $Y_2O_3:Eu^{3+}$ phosphors. The core-shell structured $SiO_2@Y_2O_3:Eu^{3+}$ phosphors showed a strong red emission, which was dominated by the $^5D_0-^7F_2$ transition (610 nm) of $Eu^{3+}$ ion under the ultraviolet excitation (263 nm). The PL emission properties of $SiO_2@Y_2O_3:Eu^{3+}$ phosphors were also compared with pure $Y_2O_3:Eu^{3+}$ nanophosphors.

Solution-processed Dielectric and Quantum Dot Thin Films for Electronic and Photonic Applications

  • 정현담
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.37-37
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    • 2010
  • Silicate-silsesquioxane or siloxane-silsesquioxane hybrid thin films are strong candidates as matrix materials for ultra low dielectric constant (low-k) thin films. We synthesized the silicate-silsesquioxane hybrid resins from tetraethoxyorthosilicate (TEOS) and methyltrimethoxysilane (MTMS) through hydrolysis and condensation polymerization by changing their molar ratios ([TEOS]:[MTMS] = 7:3, 5:5, and 3:7), spin-coating on Si(100) wafers. In the case of [TEOS]:[MTMS] 7:3, the dielectric permittivity value of the resultant thin film was measured at 4.30, exceeding that of the thermal oxide (3.9). This high value was thought to be due to Si-OH groups inside the film and more extensive studies were performed in terms of electronic, ionic, and orientational polarizations using Debye equation. The relationship between the mechanical properties and the synthetic conditions of the silicate-silsesquioxane precursors was also investigated. The synthetic conditions of the low-k films have to be chosen to meet both the low orientational polarization and high mechanical properties requirements. In addition, we have investigated a new solution-based approach to the synthesis of semiconducting chalcogenide films for use in thin-film transistor (TFT) devices, in an attempt to develop a simple and robust solution process for the synthesis of inorganic semiconductors. Our material design strategy is to use a sol-gel reaction to carry out the deposition of a spin-coated CdS film, which can then be converted to a xerogel material. These devices were found to exhibit n-channel TFT characteristics with an excellent field-effect mobility (a saturation mobility of ${\sim}\;48\;cm^2V^{-1}s^{-1}$) and low voltage operation (< 5 V). These results show that these semiconducting thin film materials can be used in low-cost and high-performance printable electronics.

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스핀코팅법으로 제작한 산화아연/산화구리 이종접합의 정류 및 일산화질소 가스 감지 특성 (Rectifying and Nitrogen Monoxide Gas Sensing Properties of a Spin-Coated ZnO/CuO Heterojunction)

  • 황현정;김효진
    • 한국재료학회지
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    • 제26권2호
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    • pp.84-89
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    • 2016
  • We present the rectifying and nitrogen monoxide (NO) gas sensing properties of an oxide semiconductor heterostructure composed of n-type zinc oxide (ZnO) and p-type copper oxide thin layers. A CuO thin layer was first formed on an indium-tin-oxide-coated glass substrate by sol-gel spin coating method using copper acetate monohydrate and diethanolamine as precursors; then, to form a p-n oxide heterostructure, a ZnO thin layer was spin-coated on the CuO layer using copper zinc dihydrate and diethanolamine. The crystalline structures and microstructures of the heterojunction materials were examined using X-ray diffraction and scanning electron microscopy. The observed current-voltage characteristics of the p-n oxide heterostructure showed a non-linear diode-like rectifying behavior at various temperatures ranging from room temperature to $200^{\circ}C$. When the spin-coated ZnO/CuO heterojunction was exposed to the acceptor gas NO in dry air, a significant increase in the forward diode current of the p-n junction was observed. It was found that the NO gas response of the ZnO/CuO heterostructure exhibited a maximum value at an operating temperature as low as $100^{\circ}C$ and increased gradually with increasing of the NO gas concentration up to 30 ppm. The experimental results indicate that the spin-coated ZnO/CuO heterojunction structure has significant potential applications for gas sensors and other oxide electronics.

H2S tolerance effects of Ce0.8Sm0.2O2-δ modification on Sr0.92Y0.08Ti1-xNixO3-δ anode in solid oxide fuel cells

  • Kim, Kab In;Kim, Hee Su;Kim, Hyung Soon;Yun, Jeong Woo
    • Journal of Industrial and Engineering Chemistry
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    • 제68권
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    • pp.187-195
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    • 2018
  • $Sr_{0.92}Y_{0.08}Ti_{1-x}Ni_xO_{3-{\delta}}$ (SYTN) was investigated in the presence of $H_2S$ containing fuels to assess the feasibility of employing oxide materials as alternative anodes. Aliovalent substitution of $Ni^{2+}$ into $Ti^{4+}$ increased the ionic conductivity of perovskite, leading to improved electrochemical performance of the SYTN anode. The maximum power densities were 32.4 and $45.3mW/cm^2$ in $H_2$ at $900^{\circ}C$ for the SYT anode and the SYTN anode, respectively. However, the maximum power densities in 300 ppm of $H_2S$ decreased by 7% and by 46% in the SYT and the SYTN anodes, respectively. To enhance the sulfur tolerance and to improve the electrochemical properties, the surface of SYTN anode was modified with samarium doped ceria (SDC) using the sol-gel coating method. For the SDC-modified SYTN anode, the cell performance was mostly recovered in the pure $H_2$ condition after 500-ppm $H_2S$ exposure in contrast to the irreversible cell performance degradation exhibited in the unmodified SYTN anode.

수증기 메탄 개질 반응을 이용한 수소 생산용 Ni-Cr-Al 다공체 지지 촉매의 제조, 기계적 안정성 및 수소 환원 효율 (Fabrication of Ni-Cr-Al Metal Foam-Supported Catalysts for the Steam Methane Reforming (SMR), and its Mechanical Stability and Hydrogen Yield Efficiency)

  • 김규식;강태훈;공만식;박만호;윤중열;안지혜;이기안
    • 한국분말재료학회지
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    • 제28권3호
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    • pp.201-207
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    • 2021
  • Ni-Cr-Al metal-foam-supported catalysts for steam methane reforming (SMR) are manufactured by applying a catalytic Ni/Al2O3 sol-gel coating to powder alloyed metallic foam. The structure, microstructure, mechanical stability, and hydrogen yield efficiency of the obtained catalysts are evaluated. The structural and microstructural characteristics show that the catalyst is well coated on the open-pore Ni-Cr-Al foam without cracks or spallation. The measured compressive yield strengths are 2-3 MPa at room temperature and 1.5-2.2 MPa at 750℃ regardless of sample size. The specimens exhibit a weight loss of up to 9-10% at elevated temperature owing to the spallation of the Ni/Al2O3 catalyst. However, the metal-foam-supported catalyst appears to have higher mechanical stability than ceramic pellet catalysts. In SMR simulations tests, a methane conversion ratio of up to 96% is obtained with a high hydrogen yield efficiency of 82%.

다중층 나노구조체를 통한 열차단 특성 제어 (Analysis of suppressed thermal conductivity using multiple nanoparticle layers)

  • 노태호;심이레
    • 한국표면공학회지
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    • 제56권4호
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    • pp.233-242
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    • 2023
  • In recent years, energy-management studies in buildings have proven useful for energy savings. Typically, during heating and cooling, the energy from a given building is lost through its windows. Generally, to block the entry of ultraviolet (UV) and infrared (IR) rays, thin films of deposited metals or metal oxides are used, and the blocking of UV and IR rays by these thin films depends on the materials deposited on them. Therefore, by controlling the thicknesses and densities of the thin films, improving the transmittance of visible light and the blocking of heat rays such as UV and IR may be possible. Such improvements can be realized not only by changing the two-dimensional thin films but also by altering the zero-dimensional (0-D) nanostructures deposited on the films. In this study, 0-D nanoparticles were synthesized using a sol -gel procedure. The synthesized nanoparticles were deposited as deep coatings on polymer and glass substrates. Through spectral analysis in the UV-visible (vis) region, thin-film layers of deposited zinc oxide nanoparticles blocked >95 % of UV rays. For high transmittance in the visible-light region and low transmittance in the IR and UV regions, hybrid multiple layers of silica nanoparticles, zinc oxide particles, and fluorine-doped tin oxide nanoparticles were formed on glass and polymer substrates. Spectrophotometry in the UV-vis-near-IR regions revealed that the substrates prevented heat loss well. The glass and polymer substrates achieved transmittance values of 80 % in the visible-light region, 50 % to 60 % in the IR region, and 90 % in the UV region.