• 한국결정성장학회지
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• 제31권4호
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• pp.190-195
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• 2021

상온에서 PET 기판 위에 Mn-SnO₂/Ag/Mn-SnO₂ 3중 다층막을 RF/DC 마그네트론 스파터링 방식으로 제조하였다. EMP 시뮬레이션 결과에 따라 Mn-SnO₂의 막 두께는 40 nm, Ag 막 두께는 13 nm로 고정하였다. 550 nm 파장대역에서 측정한 3중막의 투과율은 82.9에서 88.1 % 범위였으며 면저항은 5.9에서 6.9 Ω/☐로 변화하였다. 가장 높은 성능지수(ϕ_TC)는 48.1 × 10^-3 Ω^-1로 나타났다. 곡률반경 4, 5 mm 조건에서 inner 밴딩과 out 밴딩의 굽힘시험을 10,000회 실시한 결과 Mn-SnO₂/Ag/Mn-SnO₂ 3중막의 저항변화율은 약 1.5 %로 탁월한 기계적 유연성을 보였다.

• 한국전기전자재료학회논문지
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• 제18권10호
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• pp.917-923
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• 2005

In this paper, effect of catalytic configuration on the sensing properties of $SnO_2$ nanoparticle gas sensitive thick film was investigated. Two types of catalytic configuration, mono and binary, were made on the $SnO_2$ nanoparticle. In case of mono catalytic system, $3 wt\%$ Pd or Pt catalyst was doped onto the $SnO_2$ nanoparticle, respectively. In case of binary catalytic system, Pd and Pt was doped simultaneously with concentration ratio of 1:2 to 2:1 onto the $SnO_2$ nanoparticle. After doping, gas sensitive thick film was printed on alumina substrate and heat-treated at 450 to $600^{\circ}C$. Gas sensing properties was evaluated using 500 to 10,000 ppm $CH_4$ gas. As a result, gas sensitive thick film with binary catalytic system showed unstable phenomena that the gas sensitivity was changed according to aging time. In contrary, the mono catalytic system showed relatively stable phenomena despite of aging time. Especially, gas sensitive thick film doped with $3 wt\%$ Pt catalyst and heat-treated at $500^{\circ}C$ showed good sensing properties such as 0.57 of $R_{3500}/R_{1000}$ and very small variation within $3.5\%$ after aging for 5 hours, and response time was very short less than 20 seconds.

• 전기전자학회논문지
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• 제13권4호
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• pp.37-42
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• 2009

본 연구에서는 졸겔법으로 ZnO, 수열합성법으로 $SnO_2$ 나노분말을 제조하고 이들 나노분말에 Pd, Ru 등의 촉매를 첨가하였다. MEMS 기술로 제작된 히터 및 전극 구조 위에 나노 감지 분말을 도포하여 CO and $NO_2$ 가스 센서를 제작하였다. 0.1 wt% Pd 도핑된 $SnO_2$ 가스센서와 Ru 도핑된 ZnO 가스 센서는 각각 CO 30 ppm, $NO_2$ 1 ppm의 낮은 농도에서도 높은 감지 특성을 보였다.

• 한국전기전자재료학회논문지
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• 제13권8호
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• pp.658-666
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• 2000

Sb and Sb-Fe doped SnO$_2$film resistors were prepared by spray pyrolysis technique. The effects of Sb and Sb-Fe addition on TCR and electrical properties of SnO$_2$film resistors were studied. Also the dependence of electrical properties on the substrate temperature and substrate-nozzle distance was investigated. The Sn-Sb system with 7.9 mol% SbCl$_3$(STO-406) and Sn-Sb-Fe systems with 7.3 mol% SbCl$_3$+7.3 mol% FeCl$_3$(STO-407) and with 3.4 mol% SbCl$_3$+7.7mol% FeCl$_3$(STO-408) were prepared. Both of the systems Sn-Sb and Sn-Sb-Fe represented nonlinearity of TCR with temperature. As the amount of Fe increased TCR was shifted to positive direction. Decreasing Sb or increasing Fe caused resistivity to increase. Also increasing Fe caused the crystallization degree of rutile structure in SnO$_2$film to decrease. The electrical resistivity decreased with increasing substrate temperature The resistivity decreased with increasing substrate-nozzle distance in the ranges from 15 to 25 cm and increased rapidly at the distance over 25cm.

• 한국세라믹학회지
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• 제37권2호
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• pp.194-200
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• 2000

Sb-doped tin oxide films were deposited on Corning glass 1737 substrate by plasma enhanced chemical vapor deposition(PECVD) technique using a gas mixture of SnCl4/SbCl5/O2/Ar. The deposition behaviors of tin oxide films by PECVD were compared with those by thermal CVD, and effects of deposition temperature, r.f. power and Sb doping on the electrical properties of tin oxide films were investigated. PECVD technique largely increased the deposition rate and smoothed the surface of tin oxide films compared with thermal CVD. Electrical resistivity decreased with doping of Sb due to the increase of carrier concentration. However, large doping of Sb diminished carrier concentration and mobility due to the decrease of crystallinity, which resulted in the increase of electrical resistivity. As the deposition temperature and r.f. power increased, Cl content in the film decreased.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2005년도 춘계학술발표대회 및 제8회 신소재 심포지엄 논문개요집
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• pp.143-143
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• 2005

• 한국재료학회지
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• 제21권4호
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• pp.207-211
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• 2011

Ni 8 wt.%-doped tin oxide ($SnO_2$) thick films were fabricated into gas sensors by the method of screen printing onto alumina substrates. The particle size of $SnO_2$ was controlled by changing the ball-mill time between 0~120 h. The structural and morphological properties of these thick films were investigated using X-ray diffraction and scanning electron microscopy. The structural properties of $SnO_2$ powders showed a tetragonal phase with (110) dominant orientation. The particle size of the $SnO_2$:Ni powders after ball-mill of 120 h was about 0.05 ${\mu}m$. The gas sensitivity (S = Rg/Ra) to 5 ppm $CH_4$ gas and $CH_3CH_2CH_3$ gas was measured at room temperature by comparing the resistance in air (Ra) with that of the target gases (Rg). The sensitivity of the $SnO_2$ gas sensors was enhanced by increasing the ball-mill time. There was an association between the sensitivity of both the $CH_4$ gas and the $CH_3CH_2CH_3$ gas and the particle size of the $SnO_2$. $SnO_2$ gas sensors prepared by 72 h ball-mill showed a sensitivity of about 13 to 5 ppm $CH_4$ gas and $CH_3CH_2CH_3$ gas. The response time of the $SnO_2$:Ni gas sensors to the $CH_4$ gas was about 20 seconds.

• 한국세라믹학회지
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• 제40권10호
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• pp.973-980
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• 2003

n-type 반도체인 SnO$_2$ 가스센서에서 첨가제가 산화성 가스에 대한 감지특성에 미치는 영향을 살펴보았다 SnO$_2$ 센서는 환원성 가스에 노출될 경우 전자 주게로 작용하여 저항이 감소하지만, 반대로 산화성 가스에 노출될 경우 전자 받게로 작용하여 저항이 증가하는 특성을 보인다 산화성 가스와 SnO$_2$ 분말 사이의 반응생성물을 가스 크로마토그래피 분석을 통하여 환원성 가스인 알콜의 반응 생성물과 비교하였다. PdC1$_2$혹은 A1$_2$O$_3$가 첨가된 센서는 산화성의 $CH_3$CN와 $CH_3$NO$_2$에 대해 동작온도에 따라 독특한 이중반응특성을 보였다. 이들 센서들의 조합과 패턴인식 기법을 이용하면 전자수용기를 가진 가스들에 대한 선택성을 높일 수 있을 것이다.

• 한국표면공학회지
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• 제56권3호
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• pp.201-207
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• 2023

Eu³⁺-doped SnO² (SnO²:Eu³⁺) phosphor thin films were grown on quartz substrates by radio-frequency magnetron sputtering. The deposition temperature was varied from 100 to 400 ℃. The X-ray diffraction patterns showed that all the thin films had two mixed phases of SnO₂ and Eu₂Sn₂O₇. The 880 nmthick SnO²:Eu³⁺ thin film grown at 100 ℃ exhibited numerous pebble-shaped particles. The excitation spectra of SnO²:Eu³⁺ thin films consisted of a strong and broad peak at 312 nm in the vicinity from 250 to 350 nm owing to the O^2--Eu3+ charge transfer band, irrespective of deposition temperature. Upon 312 nm excitation, the SnO²:Eu³⁺ thin films showed a main emission peak at 592 nm arising from the ⁵D₀→⁷F₁ transition and a weak 615 nm red band originating from the ⁵D₀→⁷F₂ transition of Eu³⁺. As the deposition temperature increased, the emission intensities of two bands increased rapidly, approached a maximum at 100 ℃, and then decreased slowly at 400 ℃. The thin film deposited at 200 ℃ exhibited a band gap energy of 3.81 eV and an average transmittance of 73.7% in the wavelength range of 500-1100 nm. These results indicate that the luminescent intensity of SnO²:Eu³⁺ thin films can be controlled by changing the deposition temperature.

• 센서학회지
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• 제4권2호
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• pp.37-44
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• 1995

공침법을 이용하여 Ca 및 Pt 가 첨가된 $SnO_{2}$ 미세 분말을 제조하였다. 제조한 미세분말에 대해 TEM, XRD 및 BET 분석으로 결정크기 및 비표면적을 분석하였으며, 제조한 원료분말을 이용하여 스크린 인쇄법으로 후막형 가스 감지 소자를 제작하고, 그 특성과 탄화수소계가스에 대한 감지 특성을 조사하였다. 첨가된 Ca 및 Pt에 의해 하소와 소성의 열처리 과정 중에 $SnO_{2}$ 결정 성장이 억제되었으며, 탄화수소계가스에 대한 응답특성의 향상을 가져왔다. 한편, 소자의 전극으로써 Au 와 Pt를 사용하여 비교 분석하였는데, Au를 전극으로 사용할 경우에 Pt에 비해 가스 감응 특성 면에서 큰 저하를 가져왔다. 이는 Pt 전극도 $CH_{4}$의 산화에 기여했기 때문이다. Ca 및 Pt를 각각 0.1, 1 wt% 첨가한 $SnO_{2}$ 후막소자의 경우 2000 ppm의 $CH_{4}$에 대해 약 83%의 감도를 보였다.