Journal of IKEEE (전기전자학회논문지)

Institute of Korean Electrical and Electronics Engineers (한국전기전자학회)
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MEMS based on nanoparticle gas sensor for air quality system

유해가스 차단시스템용 MEMS 가스 센서

  • Lee, Eui-Bok (School of Electronics & Electrical Engineering, Korea University) ;
  • Park, Young-Wook (School of Electronics & Electrical Engineering, Korea University) ;
  • Hwang, In-Sung (Department of Materials Science & Engineering, Korea University) ;
  • Kim, Sun-Jung (Department of Materials Science & Engineering, Korea University) ;
  • Cha, Jun-Gho (Seju Engineering Co. Ltd.) ;
  • Lee, Ho-Jun (Seju Engineering Co. Ltd.) ;
  • Lee, Jong-Heun (Department of Materials Science & Engineering, Korea University) ;
  • Ju, Byeong-Kwon (Department of Materials Science & Engineering, Korea University)
  • 이의복 (고려대학교 전자전기공학과) ;
  • 박영욱 (고려대학교 전자전기공학과) ;
  • 황인성 (고려대학교 신소재공학과) ;
  • 김선중 (고려대학교 신소재공학과) ;
  • 차정호 ((주)세주엔지니어링) ;
  • 이호준 ((주)세주엔지니어링) ;
  • 이종흔 (고려대학교 전자전기공학과) ;
  • 주병권 (고려대학교 전자전기공학과)
  • Received : 2009.12.19
  • Published : 2009.12.30
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Abstract

In this study, nanopower ZnO and $SnO_2$ as sensing materials were prepared by hydrazine and hydrothermal routes, respectively, and were doped with Pd, Ru catalyst. The CO and $NO_2$ sensors were fabricated by coating of sensing materials on the MEMS-based structure with electrodes and heaters. The 0.1 wt% Pd doped $SnO_2$ sensor and Ru doped ZnO sensor showed the high sensor response to CO 30 ppm and $NO_2$ 1 ppm, respectively. The sensor signal was stable. This can be used for the detection of pollutant gases emitted from gasoline engine.

본 연구에서는 졸겔법으로 ZnO, 수열합성법으로 $SnO_2$ 나노분말을 제조하고 이들 나노분말에 Pd, Ru 등의 촉매를 첨가하였다. MEMS 기술로 제작된 히터 및 전극 구조 위에 나노 감지 분말을 도포하여 CO and $NO_2$ 가스 센서를 제작하였다. 0.1 wt% Pd 도핑된 $SnO_2$ 가스센서와 Ru 도핑된 ZnO 가스 센서는 각각 CO 30 ppm, $NO_2$ 1 ppm의 낮은 농도에서도 높은 감지 특성을 보였다.

Keywords

References

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