• Title/Summary/Keyword: Slurry temperature

검색결과 391건 처리시간 0.026초

Study on Polishing Mechanism of Thermal Oxide Film after High-Temperature Conditioning (고온 패드 컨디셔닝 후 열산화막 연마 메커니즘 연구)

  • Choi, Gwon-Woo;Kim, Nam-Hoon;Seo, Yong-Jin;Lee, Woo-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.193-194
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    • 2005
  • By the high-temperature pad conditioning process: The slurry residues in pores and grooves of the polishing pad were clearly removed. These clear pores and enlarged grooves made the slurry attack the oxide surface. The changed slurry properties by high-temperature pad conditioning process made the oxide surface hydro-carbonate to be removed easily.

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Study on Surface Analysis of TEOS Film by Change of Slurry Temperature in CMP Process (CMP 공정중 TEOS 막의 슬러리 온도 변화에 따른 표면 분석 연구)

  • Ko, Pil-Ju;Kim, Nam-Hoon;Seo, Yong-Jin;Lee, Woo-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.645-646
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    • 2005
  • The increasing hydroxyl ($OH^-$) groups diffused into the TEOS and then weakened reactants such as H-C-O-Si bonds on the surface of TEOS film were actively generated with the increase of slurry temperature. These soft reactants on the surface of TEOS film could be removed easily by mechanical parts of CMP.

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Combustion and Microexplosion of Al/Liquid Fuel Slurry Droplets(I)-Ewperimental Study- (Al/액체연료 슬러리 액적의 연소와 (1)-실험적 연구-)

  • Byeon, Do-Yeong;Jo, Ju-Hyeong;An, Guk-Yeong;Baek, Seung-Uk
    • Transactions of the Korean Society of Mechanical Engineers B
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    • 제21권12호
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    • pp.1576-1585
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    • 1997
  • The microexplosive combustion of a slurry droplet was investigated experimentally. The microexplosion has been approximately considered to be caused by pressure build-up in the shell and to be promoted by heterogeneous nucleation of liquid carrier, which is due to the suppression of evaporation and subsequent superheating of liquid carrier. To closely investigate the pressure build-up and the heterogeneous nucleation, the experiments were conducted in an electric combustor, of which temperature was controllable (400 K-900 K). And the effects of two aligned droplets on the interactive combustion and microexplosion were found in a hot post region of a flat flame burner. Transient internal temperature distributions for slurry droplets were measured. And the shell formation and the microexplosion of suspended A1/JP-8 and Al/n-heptane slurry droplets were examined with various surfactant concentrations (0.5-5 wt%) and solid loadings (10-50 wt.%). The microexplosion time of binary array of droplets was found to be less than that of the isolated droplet due to radiative interaction between droplets.

Influence of the Supercooling Degree and Cooling Rate on a Continuous Ice Formation by a Supercooled Aqueous Solution in Flow Using a Plate Heat Exchanger (판형 열교환기를 이용한 과냉각수용액에서 유동과냉도 및 냉각속도가 연속제빙에 미치는 영향)

  • Lee, Dong-Gyu;Peck, Jong-Hyeon;Hong, Hi-Ki;Kang, Chae-Dong
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • 제19권9호
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    • pp.647-653
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    • 2007
  • In dynamic ice storage system(DISS), ice slurry is formed not only from solution freezing by mechanical removing parts but also supercooled solution. However, in order to perform continuous ice formation in the system without mechanical moving parts, supercooled aqueous solution should be formed stable through cooling heat exchanger and be dissolved uniformly in storage tank. In previous study, the time of ice slurry increased as the pressure of the cooling heat exchanger(PHX) increased. In this study, a cooling experiment of an ethylene glycol 7mass% solution was performed with various inlet temperature of the PHX, which has constant brine inlet temperature of $-7^{\circ}C$. The temperature in the storage tank maintained to freezing point of the solution. At results, the time of ice slurry formation increased as the supercooling degree decreased and the cooling rate increased.

Additive Effect in the Preparation of Carbon-slurry Fuel (Carbon-slurry 연료의 제조에 있어서 첨가제의 효과)

  • Cho, Min-Ho;Lee, Dae-Yeop;Han, Jeong-Sik;Lee, Ik-Mo
    • Applied Chemistry for Engineering
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    • 제18권1호
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    • pp.64-70
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    • 2007
  • Preparation and characterization of carbon-slurry fuel with high dispersion have been carried out. Carbon-slurry fuel was obtained by mixing Jet A-1 liquid fuel with appropriate carbon powders and additives. Dispersion of carbon in Jet A-1 was affected by various factors such as mixing temperature, characteristics of carbon powders, and type and amount of additives. Among these factors, the stability of the slurry fuel was most dependent on the type of additive. A variety of additives such as anionic, cationic, and nonionic additives was tested for the dispersion of carbon in Jet A-1. It was found that anionic additives based on sodium salts showed the highest dispersion of carbon-slurry fuels. The degree of dispersion could be monitored by measuring the luminosity.

Physical Properties of Microencapsulated Phase Change Material Slurries (미립잠열슬러리의 물성에 관한 실험적 연구)

  • 이효진;홍재창;이재구
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • 제12권9호
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    • pp.860-869
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    • 2000
  • The thermal conductivity and density of slurries entrained with the particles of Micro-PCM are measured with respect to its temperatures as well as concentrations. For the thermal conductivity of slurries, a device made from P.A. Hilton (Model No. H470) is adopted. There is a well-scaled 0.3 mm gap between shells into which the slurry is injected. The temperatures of the slurry are changed to $5~25^{\circ}C$ , for which it is controled by the supplied voltage and cooling water circulated around the outer shell. The concentrations of Micro-PCM slurries are varied from 5 wt% to 50 wt%. Some general equations such as Maxwell's equation, are evaluated for their applicability with Micro-PCM slurry. As a result, it happens to be some 20% discrepancy between the experiment and the applied equations. The density measurements of Micro-PCM slurry to its temperature and concentration are peformed by hydrometer. For the experiment, tetradecane encapsulated slurry (($t_m≒6^{\circ}C$) and a mixed wax ($t_m≒50^{\circ}C$) are tested. The temperature changes of tetradecane are applied for $0^{\circ}C\;to\;$20^{\circ}C$and a mixed wax for $20^{\circ}C\;to\;$60^{\circ}C$ and its concentrations are changed from 5 wt% to 30 wt%. The results are compared with a general equation and the referenced data. For the conclusion, the experimental result and a general equation are well agreed.

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Synthesis and Performance Evaluation of Linear Polycarboxylate Dispersant of Glacial Acrylic Acid - Maleic Acid- Sodium Methallyl Disulfonate for Ceramics

  • Kommanapalli, Kiran Kumar;Lyot, Pierre;Sunkara, Jhansi Rani;Checule, Pierrick
    • Journal of the Korean Ceramic Society
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    • 제55권2호
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    • pp.126-134
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    • 2018
  • Using aqueous solution free radical polymerization with glacial acrylic acid (GAA), maleic anhydride (MA) and sodium methallyl disulfonate (SMADS), a novel linear polycarboxylate dispersant was synthesized for ceramics. Dispersant linear structural characterization was done by FTIR, $^1H$ NMR, HPLC and GPC, and the ratio of monomers was determined using an orthogonal experiment. This research is focused on the effects of polymerization temperature, monomer mole ratios and dosage of initiator on ceramic slurry viscosity with linear polycarboxylate dispersant for ceramic dosage rate of 0.30% (based on dry slurry), all of which were investigated by single factor test. The best polymerization conditions for linear GAA-MA-SMADS are when n(AA) : n(MA) : n(SMADS) equals 3.0 : 1.0 : 0.5, the molecular weight of the polymer is 4600 daltons, the initiator sodium persulfate accounts for 7% of the total mass of polymerized monomers, the polymerization temperature is $90^{\circ}C$ and the reaction time is 2 h. The ceramic body slurry viscosity drops from $820mPa{\cdot}s$ to $46mPa{\cdot}s$ when the concentration of the polycarboxylate dispersant is 0.30%.

Ice Slurry Formation of a Solution in a Pressurized Plate Heat Exchanger (가압 판형 열교환기에 의한 수용액의 아이스슬러리 생성)

  • Lee Dong-Gyu;Kim Byung-Seon;Peck Jong-Hyeon;Hong Hi-Ki;Kang Chae-Dong
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • 제18권7호
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    • pp.596-602
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    • 2006
  • Ice adhesion and blockage problems have been issued in continuous ice slurry making process. So we composed continuous ice slurry making device using a commercial small plate heat exchanger (PHX), and investigated character of ice formation. An experiment of ice formation was peformed with an aqueous solution of ethylene glycol 7 mass%. In the experiment, the effect of the pressurization on ice slurry formation during the cooling process was investigated. The pressurization test for the aqueous solution was performed by setting valves at the PHX inlet and outlet. At the results, the time of continuous ice formation increased as the pressure of the plate heat exchanger increased for cooling temperature of $-5^{\circ}C$. Also continuous ice formation at the cooling temperature of $-7^{\circ}C$ showed a possibility. It was found that the pressurization may contribute to suppress the dissolution of supercooled aqueous solution in the PHX.

Solubilization Characteristics of Piggery Slurry by Different Storage type and Temperature Conditions (돈분 슬러리의 저장형태 및 온도에 따른 가용화 특성)

  • Park, Woo-Kyun;Jun, Hang-Bae;Park, Noh-Back;Hong, Seung-Gil
    • Korean Journal of Environmental Agriculture
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    • 제29권4호
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    • pp.348-353
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    • 2010
  • The current study investigated the fate of organic matter in piggery slurry under two different store systems(closed store system and open store system) in association with different temperature. Thirty days after storing in both systems at $20^{\circ}C$, it was observed that the content of organic matter remained in piggery slurry with closed store system was twice more than that with open store system implying more efficient degradation of organic matter with open store system. Temperature also influenced on the organic matter degradation in piggery slurry as shown decline in TS and VS contents as the temperature increased. With store at $35^{\circ}C$, 29% of initial organic matter was reduced while there was only 23% reduction of organic matter at $20^{\circ}C$. There was no difference in the type of organic fatty acids(VFAs) produced under the range of temperature(20, $35^{\circ}C$) simulating summer condition. Increases in organic fatty acids contents with hydrolysis and acid producing microbial was observed from 15 days after initiating store of the piggery slurry and the total organic acid amount produced 30 days after store was $2,829\;mg{\cdot}COD/L$ and $9,123\;mg{\cdot}COD/L$ at $20^{\circ}C$ and $35^{\circ}C$, respectively. These corresponded to 5.4% and 17.4% of the initial organic matter contents in piggery slurry, respectively.

The thermal stabilization characteristics of electrolyte membrane in high temperature electrolysis[HTE] (고온 수전해 전해질 막의 열안정화 특성 고찰)

  • Choi, Ho-Sang;Son, Hyo-Seok;Sim, Kyu-Sung;Hwang, Gab-Jin
    • Transactions of the Korean hydrogen and new energy society
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    • 제16권2호
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    • pp.150-158
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    • 2005
  • Added ratio of 8YSZ powder and organic compounds (solvent, plasticizer, dispersant, binder) properly. It manufactured electrolysis membrane by wet process that make slurry and dry process that do not use organic compounds. In the case of wet process, harmony combination and method of organic compound are an importance element in slurry manufacture. This slurry did calcine at temperature of 140$^{\circ}C$ in Furnace and manufactured electrolyte disk by Dry pressing method. Like this, manufacturing disk sintered at temperature of $1300^{\circ}C,\;1400^{\circ},\;1500^{\circ}C$ in Furnace and completed electrolysis membrane. Confirmed change of crystal structure and decision form through analysis of density, SEM, XRD according to change of sintering temperature, and considered relation with ion conductivity.