• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.20-23
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• 2004

As the integrated circuit device shrinks to the smaller dimension, the chemical mechanical polishing(CMP) process was required for the global planarization of inter-metal dielectric(IMD) layer with free-defect. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Chemical-Mechanical polishing(CMP) of conductors is a key process in Damascene patterning of advanced interconnect structure. The effect of alternative commercial slurries pads, and post-CMP cleaning alternatives are discuss, with removal rate, scratch dentisty, surface roughness, dishing, erosion and particulate density used as performance metrics. Electroplated copper deposition is a mature process from a historical point of view, but a very young process from a CMP perspective. While copper electro deposition has been used and studied for decades, its application to Cu damascene wafer processing is only now gaining complete acceptance in the semiconductor industry. The polishing mechanism of Cu-CMP process has been reported as the repeated process of passive layer formation by oxidizer and abrasion action by slurry abrasives. however it is important to understand the effect of oxidizer on copper passivation layer in order to obtain higher removal rate and non-uniformity during Cu-CMP process. In this paper, we investigated the effects of oxidizer on Cu-CMP process regarding the additional volume of oxidizer.

• Korean Journal of Materials Research
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• v.16 no.12
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• pp.747-753
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• 2006

(BaSr)$TiO_3$ (BST) thick films were prepared by tape casting method, using $BaTiO_3$ and $SrTiO_3$ powder slurry and their dielectric properties were investigated. With an additive, $Li_2CO_3$, the sintering temperature was lowered by $200^{\circ}C$. Sintering density was 5.7 g/$cm^3$ and the BST thick films exhibited a maximum dielectric constant, tunability at temperatures near phase transition point. Whilst their characteristics were deteriorated above the phase transition temperature, they were unchanged below the phase transition temperature, which is presumedly due to the acceleration of $90^{\circ}$ domain formation, its contribution to the relaxation of internal stress and the increase in sintering according to the replacement of Li.

• Progress in Superconductivity and Cryogenics
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• v.23 no.3
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• pp.5-9
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• 2021

Comprehensive utilization of sulfur-containing iron tailings (SIT) not only solves environmental problems but also creates certain economic value. The iron element from SIT was enriched by the superconducting high gradient magnetic separation (S-HGMS) technology in this study. In the experiments, the total iron content (TFe) was increased from 26.3% to 60.5% with the total sulfur content (TS) of 5.9% under the optimal parameters, i.e., a magnetic flux density of 0.4 T, a slurry flow rate of 1500 mL/min. The high-quality sulfur-containing material with TFe of more than 60% was obtained, which can be used for preparing high-sulfur free cutting steel. The S-HGMS technology can realize the resource utilization of iron tailings with high added value.

• Journal of the Korean Electrochemical Society
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• v.8 no.4
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• pp.162-167
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• 2005

Using Pechini method, we synthesized the $La_{0.6}Ca_{0.41}CrO_3$ (LCC41) and $La_{0.8}Sr_{0.05}Ca_{0.15}CrO_3$ (LSCC) powders for slurry dip coating, and $La_{0.75}Ca_{0.27}CrO_3$ (LCC27) powder for air plasma spray coating. The sintering property of the powders and their coating properties were investigated. The average particle sizes of the LCC41, LSCC, LCC27 were 0.6, 0.9, $1.5{\mu}m$, respectively. The relative density of LCC41 bulk was to be found about 98%. The LSCC coating on anode support prevented Ca migration of the coated LCC41 on the anode some or less, which was confirmed from EDS result. The air plasma spray-coated LCC27 with the dip-coated LCC41 were more dense and showed better electrical conductivity than those of the air plasma spray-coated LCC27 and the dip-coated LSCC and LSCC41. The LCC41 and LCC27 showed good electrical conductivities, but the LSCC had a poor electrical conductivity probably due to low sinterability

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.24 no.6
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• pp.268-273
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• 2014

$Y_2O_3$ ceramic specimens were fabricated from the granular powder, obtained by spray drying process from the slurry. The slurry was prepared by mixing PVA binder, NaOH for Ph control, PEG and $Y_2O_3$ powder. The $Y_2O_3$ specimen was shaped in size of ${\phi}14mm$ and then sintered at $1650^{\circ}C$. The characteristics, microstructure, densities and plasma resistance of the $Y_2O_3$ specimens were investigated with the function of forming pressure and sintering time. $Y_2O_3$ specimens were exposed under the $CHF_3/O_2/Ar$ plasma, the dry etching treatment of specimens was carried out by the physical reaction etching of $Ar^+$ ion beam and the chemical reaction etching of $F^-$ ion decomposed from $CHF_3$. With increasing sintering time, $Y_2O_3$ specimens showed relatively high density and strong resistance in plasma etching test.

• Journal of the Mineralogical Society of Korea
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• v.30 no.4
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• pp.137-147
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• 2017

Sericite is a clay mineral that has a wide applications in the industry, depending on its purity. To maintain sericite's purity as high as possible it is necessary to remove its gangue minerals or control their contents prior to use for high value-added products and applications. In this study, the wet beneficiation of sericite by applying selective grinding and sedimentation techniques, were investigated. The ore mineral was composed mainly of sericite, quartz and calcite. Analysis showed that the content of sericite increased along with the particle size decrease, but the contents of impurity minerals as quartz and calcite were tended to decrease relatively with particle size decrease. The results of liberation tests using an attrition scrubber showed that the increase in residence time and slurry density have increased the generation of fine particles in -325 mesh size range. It was observed, however, that the contents of impurities such as quartz and calcite in such fine particles also increased during prolonged scrubbing. In the dispersed form without breaking, the yield of the recovered concentrate was 15.4 wt% and the $K_2O$ content was 9.84 wt%, after the dispersed slurry was allowed to settle for 20 minutes. On the other hand, the concentrate yield was increased to 23.4 wt% after 10 minute attrition scrubbing and 40 minute sedimentation, while its $K_2O$ content was decreased to 9.71 wt%. Most of final products were observed as platelet-shaped particles containing Si, Al and K which are main component of sericite.

• Journal of Animal Environmental Science
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• v.14 no.2
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• pp.105-112
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• 2008

This study was carried out to investigate evaporation rate of moisture per surface area and degradation rate of organic matter in full scale escalator reversing composting facility were analyzed to develope a computer program for the computation of an optimum volume of composting facility according to handling methods of swine farm, moisture levels of manure, degradation rate of organics and evaporation rate of moisture during composting. The obtained results can be followed as bellow; The temperature in full scale escalator reversing composting facility during composting reached $70^{\circ}C$ in 4 days and maintained until 11 days. Reduction rate of moisture and density was average 1.20% and 29.7%, respectively. Annual degradation rate of organic matter was 3.53%, showing lowest rate in winter as 3.23%. These seasonal degradation rate could be a factor to be considered for proper management and installation of composting facility. When computed with the amount of feces, urine, slurry and manure plus wastewater produced, the optimum volumes of composting facility for slurry and manure plus wastewater including each 95% moisture was $229m^3$ and $277m^3$, respectively, showing 21% ($48m^3$) difference.

• Korean Journal of Microbiology
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• v.47 no.4
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• pp.356-363
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• 2011

The accidental releases of total petroleum hydrocarbons (TPH) due to oil spills frequently ended up with soil and ground water pollution. TPH may be degraded through physicochemical and biological processes in the environment but with relatively slow rates. In this study an attempt has been made to develop an integrated chemical and biological treatment technology in order to establish an efficient and environment-friendly restoration technology for the TPH contaminated soils. A Fenton-like reaction was employed as a preceding chemical treatment process and a bioaugmentation process utilizing a diesel fuel degrader consortium was subsequently applied as a biological treatment process. An efficient chemical removal of TPH from soils occurred when the surfactant OP-10S (0.05%) and oxidants ($FeSO_4$ 4%, and $H_2O_2$ 5%) were used. Bioaugmentation of the degrader consortium into the soil slurry led to an increase in their population density at least two orders of magnitude, indicating a good survival of the degradative populations in the contaminated soils ($10^8-10^9$ CFU/g slurry). TPH removal efficiencies for the Fenton-treated soils increased by at least 57% when the soils were subjected to bioaugmentation of the degradative consortium. However, relatively lower TPH treatment efficiencies (79-83%) have been observed in the soils treated with Fenton and the degraders as opposed to the control (95%) that was left with no treatment. This appeared to be due to the presence of free radicals and other oxidative products generated during the Fenton treatment which might inhibit their degradation activity. The findings in this study will contribute to development of efficient bioremediation treatment technologies for TPH-contaminated soils and sediments in the environment.

• Journal of the Korean Electrochemical Society
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• v.26 no.1
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• pp.1-10
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• 2023

The cathode, which is one of the four major components of a lithium secondary battery, is an important component responsible for the energy density of the battery. The mixing process of active material, conductive material, and polymer binder is very essential in the commonly used wet manufacturing process of the cathode. However, in the case of mixing conditions of the cathode, since there is no systematic method, in most cases, differences in performance occur depending on the manufacturer. Therefore, LiMn₂O₄ (LMO) cathodes were prepared using a commonly used THINKY mixer and homogenizer to optimize the mixing method in the cathode slurry preparation step, and their characteristics were compared. Each mixing condition was performed at 2000 RPM and 7 min, and to determine only the difference in the mixing method during the manufacture of the cathode other experiment conditions (mixing time, material input order, etc.) were kept constant. Among the manufactured THINKY mixer LMO (TLMO) and homogenizer LMO (HLMO), HLMO has more uniform particle dispersion than TLMO, and thus shows higher adhesive strength. Also, the result of the electrochemical evaluation reveals that HLMO cathode showed improved performance with a more stable life cycle compared to TLMO. The initial discharge capacity retention rate of HLMO at 69 cycles was 88%, which is about 4.4 times higher than that of TLMO, and in the case of rate capability, HLMO exhibited a better capacity retention even at high C-rates of 10, 15, and 20 C and the capacity recovery at 1 C was higher than that of TLMO. It's postulated that the use of a homogenizer improves the characteristics of the slurry containing the active material, the conductive material, and the polymer binder creating an electrically conductive network formed by uniformly dispersing the conductive material suppressing its strong electrostatic properties thus avoiding aggregation. As a result, surface contact between the active material and the conductive material increases, electrons move more smoothly, changes in lattice volume during charging and discharging are more reversible and contact resistance between the active material and the conductive material is suppressed.

• Plant Journal
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• v.15 no.4
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• pp.30-35
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• 2019

To meet both increasing social demand for reduction of fine dust and the strengthened air pollutant emission standards, this paper indicated performance enhancement of FGD with structural constraints in 500 MW coal fired thermal power plant's. Through modifying internal facilities for flue gases to make swirl in the absorption tower, it made turbulence and increased the efficiency of material transfer, the reaction area and time with the limestone slurry. Therefore, it could reduce dust and enhance the performance of collecting the SO₂. As a result, desulfurization efficiency was improved from 91.61% to 98.43% and dust removal efficiency was improved from 77.4% to 87.08%. Emission density is 7.85 ppm of SO₂ and 4.67 mg/㎥ of dust. This is a level that satisfies emission limit of 25 ppm of SO₂ and 5 mg/㎥ of dust which are the air pollutant emission standards of 2023. The performance enhancement method of this study is expected to be effectively applied to other coal-fired power plants with similar constraints.