• 제목/요약/키워드: Slurry Temperature

검색결과 393건 처리시간 0.025초

고온 패드 컨디셔닝 후 열산화막 연마 메커니즘 연구 (Study on Polishing Mechanism of Thermal Oxide Film after High-Temperature Conditioning)

  • 최권우;김남훈;서용진;이우선
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.193-194
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    • 2005
  • By the high-temperature pad conditioning process: The slurry residues in pores and grooves of the polishing pad were clearly removed. These clear pores and enlarged grooves made the slurry attack the oxide surface. The changed slurry properties by high-temperature pad conditioning process made the oxide surface hydro-carbonate to be removed easily.

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CMP 공정중 TEOS 막의 슬러리 온도 변화에 따른 표면 분석 연구 (Study on Surface Analysis of TEOS Film by Change of Slurry Temperature in CMP Process)

  • 고필주;김남훈;서용진;이우선
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.645-646
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    • 2005
  • The increasing hydroxyl ($OH^-$) groups diffused into the TEOS and then weakened reactants such as H-C-O-Si bonds on the surface of TEOS film were actively generated with the increase of slurry temperature. These soft reactants on the surface of TEOS film could be removed easily by mechanical parts of CMP.

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Al/액체연료 슬러리 액적의 연소와 (1)-실험적 연구- (Combustion and Microexplosion of Al/Liquid Fuel Slurry Droplets(I)-Ewperimental Study-)

  • 변도영;조주형;안국영;백승욱
    • 대한기계학회논문집B
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    • 제21권12호
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    • pp.1576-1585
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    • 1997
  • The microexplosive combustion of a slurry droplet was investigated experimentally. The microexplosion has been approximately considered to be caused by pressure build-up in the shell and to be promoted by heterogeneous nucleation of liquid carrier, which is due to the suppression of evaporation and subsequent superheating of liquid carrier. To closely investigate the pressure build-up and the heterogeneous nucleation, the experiments were conducted in an electric combustor, of which temperature was controllable (400 K-900 K). And the effects of two aligned droplets on the interactive combustion and microexplosion were found in a hot post region of a flat flame burner. Transient internal temperature distributions for slurry droplets were measured. And the shell formation and the microexplosion of suspended A1/JP-8 and Al/n-heptane slurry droplets were examined with various surfactant concentrations (0.5-5 wt%) and solid loadings (10-50 wt.%). The microexplosion time of binary array of droplets was found to be less than that of the isolated droplet due to radiative interaction between droplets.

판형 열교환기를 이용한 과냉각수용액에서 유동과냉도 및 냉각속도가 연속제빙에 미치는 영향 (Influence of the Supercooling Degree and Cooling Rate on a Continuous Ice Formation by a Supercooled Aqueous Solution in Flow Using a Plate Heat Exchanger)

  • 이동규;백종현;홍희기;강채동
    • 설비공학논문집
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    • 제19권9호
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    • pp.647-653
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    • 2007
  • In dynamic ice storage system(DISS), ice slurry is formed not only from solution freezing by mechanical removing parts but also supercooled solution. However, in order to perform continuous ice formation in the system without mechanical moving parts, supercooled aqueous solution should be formed stable through cooling heat exchanger and be dissolved uniformly in storage tank. In previous study, the time of ice slurry increased as the pressure of the cooling heat exchanger(PHX) increased. In this study, a cooling experiment of an ethylene glycol 7mass% solution was performed with various inlet temperature of the PHX, which has constant brine inlet temperature of $-7^{\circ}C$. The temperature in the storage tank maintained to freezing point of the solution. At results, the time of ice slurry formation increased as the supercooling degree decreased and the cooling rate increased.

Carbon-slurry 연료의 제조에 있어서 첨가제의 효과 (Additive Effect in the Preparation of Carbon-slurry Fuel)

  • 조민호;이대엽;한정식;이익모
    • 공업화학
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    • 제18권1호
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    • pp.64-70
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    • 2007
  • 분산성이 우수한 carbon-slurry 연료의 제조와 특성 분석을 하였다. Carbon-slurry 연료는 액체연료(Jet A-1)와 탄소 입자 그리고 적당한 첨가제를 혼합하여 얻었다. Carbon-slurry 연료의 분산성은 교반 온도, 탄소 입자의 특성 그리고 첨가제의 양과 종류 등에 따라서 달라진다. 특히 첨가제의 종류가 slurry 연료의 안정성에 가장 중요하였다. 다양한 음이온성, 양이온성, 비이온성 형태의 첨가제를 사용하여 carbon-slurry 연료의 분산성을 분석하였고, 이 결과 나트륨 염의 형태를 가진 음이온성 첨가제를 사용하였을 경우 carbon-slurry 연료의 분산성이 가장 우수하였음을 확인하였다. Carbon-slurry 연료의 분산성은 빛이 투과되는 광도 값을 측정하여 분석하였다.

미립잠열슬러리의 물성에 관한 실험적 연구 (Physical Properties of Microencapsulated Phase Change Material Slurries)

  • 이효진;홍재창;이재구
    • 설비공학논문집
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    • 제12권9호
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    • pp.860-869
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    • 2000
  • The thermal conductivity and density of slurries entrained with the particles of Micro-PCM are measured with respect to its temperatures as well as concentrations. For the thermal conductivity of slurries, a device made from P.A. Hilton (Model No. H470) is adopted. There is a well-scaled 0.3 mm gap between shells into which the slurry is injected. The temperatures of the slurry are changed to $5~25^{\circ}C$ , for which it is controled by the supplied voltage and cooling water circulated around the outer shell. The concentrations of Micro-PCM slurries are varied from 5 wt% to 50 wt%. Some general equations such as Maxwell's equation, are evaluated for their applicability with Micro-PCM slurry. As a result, it happens to be some 20% discrepancy between the experiment and the applied equations. The density measurements of Micro-PCM slurry to its temperature and concentration are peformed by hydrometer. For the experiment, tetradecane encapsulated slurry (($t_m≒6^{\circ}C$) and a mixed wax ($t_m≒50^{\circ}C$) are tested. The temperature changes of tetradecane are applied for $0^{\circ}C\;to\;$20^{\circ}C$and a mixed wax for $20^{\circ}C\;to\;$60^{\circ}C$ and its concentrations are changed from 5 wt% to 30 wt%. The results are compared with a general equation and the referenced data. For the conclusion, the experimental result and a general equation are well agreed.

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Synthesis and Performance Evaluation of Linear Polycarboxylate Dispersant of Glacial Acrylic Acid - Maleic Acid- Sodium Methallyl Disulfonate for Ceramics

  • Kommanapalli, Kiran Kumar;Lyot, Pierre;Sunkara, Jhansi Rani;Checule, Pierrick
    • 한국세라믹학회지
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    • 제55권2호
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    • pp.126-134
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    • 2018
  • Using aqueous solution free radical polymerization with glacial acrylic acid (GAA), maleic anhydride (MA) and sodium methallyl disulfonate (SMADS), a novel linear polycarboxylate dispersant was synthesized for ceramics. Dispersant linear structural characterization was done by FTIR, $^1H$ NMR, HPLC and GPC, and the ratio of monomers was determined using an orthogonal experiment. This research is focused on the effects of polymerization temperature, monomer mole ratios and dosage of initiator on ceramic slurry viscosity with linear polycarboxylate dispersant for ceramic dosage rate of 0.30% (based on dry slurry), all of which were investigated by single factor test. The best polymerization conditions for linear GAA-MA-SMADS are when n(AA) : n(MA) : n(SMADS) equals 3.0 : 1.0 : 0.5, the molecular weight of the polymer is 4600 daltons, the initiator sodium persulfate accounts for 7% of the total mass of polymerized monomers, the polymerization temperature is $90^{\circ}C$ and the reaction time is 2 h. The ceramic body slurry viscosity drops from $820mPa{\cdot}s$ to $46mPa{\cdot}s$ when the concentration of the polycarboxylate dispersant is 0.30%.

가압 판형 열교환기에 의한 수용액의 아이스슬러리 생성 (Ice Slurry Formation of a Solution in a Pressurized Plate Heat Exchanger)

  • 이동규;김병선;백종현;홍희기;강채동
    • 설비공학논문집
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    • 제18권7호
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    • pp.596-602
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    • 2006
  • Ice adhesion and blockage problems have been issued in continuous ice slurry making process. So we composed continuous ice slurry making device using a commercial small plate heat exchanger (PHX), and investigated character of ice formation. An experiment of ice formation was peformed with an aqueous solution of ethylene glycol 7 mass%. In the experiment, the effect of the pressurization on ice slurry formation during the cooling process was investigated. The pressurization test for the aqueous solution was performed by setting valves at the PHX inlet and outlet. At the results, the time of continuous ice formation increased as the pressure of the plate heat exchanger increased for cooling temperature of $-5^{\circ}C$. Also continuous ice formation at the cooling temperature of $-7^{\circ}C$ showed a possibility. It was found that the pressurization may contribute to suppress the dissolution of supercooled aqueous solution in the PHX.

돈분 슬러리의 저장형태 및 온도에 따른 가용화 특성 (Solubilization Characteristics of Piggery Slurry by Different Storage type and Temperature Conditions)

  • 박우균;전항배;박노백;홍승길
    • 한국환경농학회지
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    • 제29권4호
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    • pp.348-353
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    • 2010
  • 본 연구에서는 돈분 슬러리의 저장형태 및 온도에 따른 유기물의 거동을 관찰하였는데, closed system과 open system의 저장형태에 따른 유기물 농도는 $20^{\circ}C$에서 30일 저장 후 약 2배 정도의 차이를 보였다. 또한 온도에 의한 유기물 농도의 거동은 온도가 증가할수록 TS 및 VS 농도가 감소하였고, $20^{\circ}C$ 약 23%, $35^{\circ}C$ 약 29% 정도가 감소되는 것으로 나타났다. 하절기 외부온도 특성을 반영한 온도조건(20, $35^{\circ}C$) 및 저장기간 따른 생성된 유기산 종류는 비슷하였고, 저장기간 15일 이후부터 분변내 포함된 가수분해 및 산생성 미생물의 성장이 증대되어 유기산의 생성이 증가하였다. 반응시간 30일 후 생성된 총유기산 농도는 $20^{\circ}C$에서 $2,829\;mg{\cdot}COD/L$이었으며, $30^{\circ}C$에서는 $9,123\;mg{\cdot}COD/L^{\circ}C$로 초기 유기물농도 대비 각각 5.4, 17.4%의 유기산 전환율을 나타내었다. 따라서 돈분슬러리의 저장기간이 길어질수록 외부온도에 따라 가수분해 및 산생성 반응으로 유기산이 생성되고, 메탄생성균의 기질이용으로 유기물의 손실이 발생하여 온실가스 배출도 증가할 것으로 예상된다.

고온 수전해 전해질 막의 열안정화 특성 고찰 (The thermal stabilization characteristics of electrolyte membrane in high temperature electrolysis[HTE])

  • 최호상;손효석;심규성;황갑진
    • 한국수소및신에너지학회논문집
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    • 제16권2호
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    • pp.150-158
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    • 2005
  • Added ratio of 8YSZ powder and organic compounds (solvent, plasticizer, dispersant, binder) properly. It manufactured electrolysis membrane by wet process that make slurry and dry process that do not use organic compounds. In the case of wet process, harmony combination and method of organic compound are an importance element in slurry manufacture. This slurry did calcine at temperature of 140$^{\circ}C$ in Furnace and manufactured electrolyte disk by Dry pressing method. Like this, manufacturing disk sintered at temperature of $1300^{\circ}C,\;1400^{\circ},\;1500^{\circ}C$ in Furnace and completed electrolysis membrane. Confirmed change of crystal structure and decision form through analysis of density, SEM, XRD according to change of sintering temperature, and considered relation with ion conductivity.