• 제목/요약/키워드: Single crystal growth

검색결과 913건 처리시간 0.029초

열처리에 따른 AlN 단결정의 결정성에 관한 연구 (A study on the crystallinity of AlN single crystals by heat treatment)

  • 강승민
    • 한국결정성장학회지
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    • 제27권3호
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    • pp.105-109
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    • 2017
  • 고주파 유도 가열 장치를 이용하여 승화법으로 성장된 AlN 단결정을 질소 분위기 하에서 $1200^{\circ}C$$1500^{\circ}C$에서 열처리하였다. 열처리 후 단결정 시편들의 표면을 광학현미경으로 관찰하였으며, DCXRD(Double crystal X-ray Diffractometry)를 이용하여 FWHM(Full width of half maximum) 값을 측정하여 결정성의 변화를 평가하였다.

EFG법에 의한 Sapphire Ribbon 단결정 성장 (Sapphire Ribbon Single Crystal Growth by EFG Method)

  • 박신서;류두형;정재우;최종건;오근호;손선기;변영재;전형탁
    • 한국세라믹학회지
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    • 제27권6호
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    • pp.783-789
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    • 1990
  • Shaped crystal growth apparatus were made for sapphire ribbon single crystal growth. Sapphire ribbon single crystal are grown by EFG(Edge-defined Film-fed Growth) methdo for use as watch-glass and SOS(Silicon-On-Sapphire) devices. Sapphire ribbon crystals were grown to be 40min wide, 1.8mm thick, 96mm long. Therelationshiops between growth striation and surface roughness, with various growth rates, were investigated and compared. It was found that sapphire ribbon crystal is suitable for watch-glass by measuring the transmittance in the visible light region.

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HVPE(Hydride Vapor Phase Epitaxy) 법을 적용한 N2 양의 변화에 따른 AlN 단결정의 성장 거동에 관한 연구 (A study on the growth behavior of AlN single crystal according to the change of N2 in HVPE propcess)

  • 인경필;강승민
    • 한국결정성장학회지
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    • 제34권2호
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    • pp.61-65
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    • 2024
  • HVPE(Hydride vapor phase epitaxy) 공법은 기체상의 원료를 사용하여 박막 또는 단결정을 제조하는 공법이다. 화학적 기상증착법의 원리를 적용하여 난용융성 또는 고융점의 물질의 단결정을 성장할 수 있는 공법으로서, 질화갈륨(GaN) 단결정을 얻을 수 있는 공법 중 하나이다. 최근 동 공법을 이용하여 질화알루미늄(AlN) 단결정을 성장하고자 하는 연구가 많이 수행되어져 왔으나, 아직은 좋은 결과를 얻지 못하고 있다. 본 연구에서는 AlN 단결정을 HVPE 공법으로 성장하고자 하였다. 성장 공정에서 질소를 운송가스(Carrior gas)로 사용하였으며, 질소(N2)의 양의 변화에 따른 성장 결과를 고찰하여 보았다. 질소의 양이 증가함에 따른 성장 결정의 변화 양상을 확인할 수 있었다. 성장된 AlN 단결정의 형상을 광학 현미경을 사용하여 관찰하였고, 이중결정 X선 회절 분석(DCXRD, Double crystal X-ray diffractometry)을 이용하여, AlN 결정의 생성을 확인함과 동시에 성장된 단결정의 결정성도 알아보았다.

저항가열 방식에 의한 SiC 단결정 성장 조건에 관한 연구 (A study on the SiC single crystal growth conditions by the resistance heating method)

  • 강승민
    • 한국결정성장학회지
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    • 제26권2호
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    • pp.53-57
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    • 2016
  • 저항가열 방식으로 제작된 설비를 이용하여 SiC 단결정을 성장하였다. 성장 조건에 따라 결정의 성장 양상이 달랐으며, 원료부의 온도와 결정 성장부의 온도에 따라 각각 온도 설정이 필요함을 알았다. 본 논문에서는 SiC 결정의 성장 온도에 따른 성장 결과에 대하여 고찰해 보았으며, 이에 대한 결과를 보고하고자 한다.

GROWTH AND CHARACTERIZATION OF $La_3Ga_5SiO_{14}$ SINGLE CRYSTALS BY THE FLOATING ZONE METHOD

  • Yoon, Won-Ki;Auh, Keun-Ho
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 1999년도 PROCEEDINGS OF 99 INTERNATIONAL CONFERENCE OF THE KACG AND 6TH KOREA·JAPAN EMG SYMPOSIUM (ELECTRONIC MATERIALS GROWTH SYMPOSIUM), HANYANG UNIVERSITY, SEOUL, 06월 09일 JUNE 1999
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    • pp.253-269
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    • 1999
  • The development of telecommunication and information technology requires to develop new piezoelectric materials with small size, low impedance, wide pass band width and high thermal stability of frequency. Langasite (La3Ga5SiO14) single crystal has been researched substitute of quartz and LiNbO3 for the applications of SAW filter, BAW filter and resonator. Its single crystal growth has been carried out by Czochralski Method. So, in order to get single crystal with higher quality, in this study, lnagasite (La3Ga5SiO14) single crystal was grown by using Floating Zone (FZ) method and characterized. For the growth of langasite single crystals, the langasite powder was synthesized at 135$0^{\circ}C$ for 5hrs and the feed rod was sintered at 135$0^{\circ}C$ for 5hrs. The growing rate was 1.5mm/h and the rotation speed was 15 rpm for an upper rotation and 13 rpm for a lower rotation. In order to prevent the evaporation of gallium oxide, Ar and O2 gas mixture was flowed. The growth direction was analyzed by Laue back-scattered analysis. The composition of grown crystal was analyzed suing XRD and WDS. The electrical properties of grown crystal at various frequencies and temperature were discussed.

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천연베릴을 이용한 온도구배 환류법에 의한 합성 Emerald 단결정 육성 (Single Crystal Growth of Synthetic Emerald by Reflux Method of Temperature Gradient used Natural Beryl)

  • 최의석;김무경;이종민;안영필;서청교;안찬준
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 1996년도 The 9th KACG Technical Annual Meeting and the 3rd Korea-Japan EMGS (Electronic Materials Growth Symposium)
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    • pp.519-521
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    • 1996
  • Emerald (3BeO.Al2O3.6SiO2 : Cr3+) single crystals were crystals were grown by reflux method of temperature gradient in the flux solution of Li2O-MoO3-V2O5 system. The composition of flux materials were 3 mole ratio of MoO3-V2O5/Li2O, subtituted 0.2 mole% of K2O, Na2O, Nb2O5 etc to Li2O content, solved 10-15% of beryl to flux quantity and doped 1% of Cr2O3 to emerald amount. Those of mixing were melted at 110$0^{\circ}C$ in Pt containers of the 3 zone furnace of melt-growth-return to circulate continniously, specially it has been grown large emerald single crystal when thermal fluctuation was treated for 2hrs of once time a day at 1050-95$0^{\circ}C$ in growth zone, substitutional solid solution effect of Cr+3 ion for Al+3 to the growth of emerald single crystal was good. Emerald single crystals were c(0001) hexagonal crystal face of preferencial growth direction and m(1010) post side. When it had been durated for 5 months emerald single crystals of the firet size of 0.6mm thickness of seed crystal were grown 32$\times$65mm(c x m) of maximum size and 6.2mm thickness.

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고순도 SiC 미분말을 적용한 4H-SiC 단결정 성장에 관한 연구 (Study on the growth of 4H-SiC single crystal with high purity SiC fine powder)

  • 신동근;김병숙;손해록;김무성
    • 한국결정성장학회지
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    • 제29권6호
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    • pp.383-388
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    • 2019
  • 개선된 열탄소환원법으로 합성된 금속불순물함량 1 ppm 이하의 고순도 SiC 미립 분말을 이용하여 2,100℃ 이상고온의 RF 가열 PVT 장치에서 SiC 단결정을 성장시켰으며, In-situ x-ray 이미지 분석을 통해 성장과정 중 분말의 승화거동 및 단결정 성장거동을 관찰하였다. SiC 분말은 단결정 성장의 공급원으로 온도가 높은 외곽 부분부터 소진되고 graphite 잔여물이 남았다. 성장 중 원료의 흐름은 가운데 부분으로 집중되었으며 SiC 단결정의 성장거동에도 영향을 미쳤는데, 이는 미립분말로 인한 도가니 내부 온도분포 차이가 원인으로 예상되었다. 단결정 성장이 완료된 후, 단결정 잉곳을 1 mm 두께의 단결정 기판으로 절단하고 또한, 잉곳에서 얻어진 단결정 기판은 전반적으로 짙은 황색의 4H -SiC가 관찰되었으며, 외곽에 일부 발생한 다결정은 시드결정을 시드홀더에 부착하는 과정에서 혼입된 기포층과 같은 불순물 혼입이 원인으로 사료된다.

Self diffusion of cation in yttria stabilized zirconia single crystal

  • Cheong, Deock-Soo
    • 한국결정성장학회지
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    • 제19권5호
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    • pp.237-241
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    • 2009
  • Dislocation dipoles were formed in the early stage of deformation of Y-CSZ single crystal at high temperatures. And the dipoles were pinched off to break into dipoles loops by dislocation climb. Dislocation loop annealing was peformed in Y-CSZ single crystal to evaluate the diffusivity of cation which was the rate-controlling ion.

Effect of Hot-zone Aperture on the Growth Behavior of SiC Single Crystal Produced via Top-seeded Solution Growth Method

  • Ha, Minh-Tan;Shin, Yun-Ji;Bae, Si-Young;Park, Sun-Young;Jeong, Seong-Min
    • 한국세라믹학회지
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    • 제56권6호
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    • pp.589-595
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    • 2019
  • The top-seeded solution growth (TSSG) method is an effective approach for the growth of high-quality SiC single crystals. In this method, the temperature gradient in the melt is the key factor determining the crystal growth rate and crystal quality. In this study, the effects of the aperture at the top of the hot-zone on the growth of the SiC single crystal obtained using the TSSG method were evaluated using multiphysics simulations. The temperature distribution and C concentration profile in the Si melt were taken into consideration. The simulation results showed that the adjustment of the aperture at the top of the hot-zone and the temperature gradient in the melt could be finely controlled. The surface morphology, crystal quality, and polytype stability of the grown SiC crystals were investigated using optical microscopy, high-resolution X-ray diffraction, and micro-Raman spectroscopy, respectively. The simulation and experimental results suggested that a small temperature gradient at the crystal-melt interface is suitable for growing high-quality SiC single crystals via the TSSG method.

A Study on the single crystal growth of the optic-grade $LiTaO_3$ as a electro-optic materials

  • Kim, B.k.;J.K. Yoon
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 1996년도 The 9th KACG Technical Annual Meeting and the 3rd Korea-Japan EMGS (Electronic Materials Growth Symposium)
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    • pp.526-526
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    • 1996
  • The single crystal of LiTaO3 is well known eletro-optic material as well as the piezoelectric one applied to SAW filter. LiTaO3 has large electro-optic effects, so applied to optical switch, acosto-optic deflector, and optical memory device using photorefractive effects. The crystal growth of SAW-grade LiTaO3 has been studied many aspects, but there is no detail research about optic-grade crystal growth. The conditions of optic-grade LiTaO3 single crystal are as below. The optical transmittance must be over 75%, and axial and radial concentratiom uniformity below 1%. The variation of Curie temperature depending on Li/Ta ratio must be also below 2$^{\circ}C$ and no internal no internal cracks and defects. Because of the limitation of crystal quality, the growing of optic-grade LiTaO3 single crystal is very difficult compared with the growing of SAW-grade. In this research, upper conditions of optic-grade single crystal was investigated after growing of 1 inch diameter and 1.5 inch length LiTaO3 single crystal having no internal cracks and defects using Czochralski method. Curie temperature was determined with DSC and measuring capacitance and lattice parameter was calculated about the grown crystal and ceramic powder samples of various Li/Ta ratio. The result of Tc variation was below 1.2$^{\circ}C$ all over the grown crystal, so it is confirmed that LiTaO3 was grown under congruent melting composition having optical homogeniety. Also, the optical transmittance was about 78%, which was sufficient for optical device.

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