• 대한기계학회논문집A
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• 제25권1호
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• pp.47-53
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• 2001

Results ar presented of a new process for internal precision finishing of slender fine ceramic pipes using a magnetic field generated by a permanent magnets. For finishing the interior surface of a long pipe, a new type of finishing equipment was developed which can be very easily used in an industrial surrounding. In general, the pipe is so slender that a conventional finishing tool is hardly inserted into the pipe deeply, being impossible to finish. Therefore, a new technology has been considered to finish inside of a slender ceramic pipe by a simple technique. In this experimental, Magnetic Abrasive Machining is applied for the inner surface of silicon nitride fine ceramic pipe using ferromagnetic particles mixed with chromium-oxide powder. It is shown the initial roughness of 2.6㎛ Ry(0.42㎛ Ra) in the inside surface can be precisely finished to the roughness of 0.1㎛ Ry(0.01㎛ Ra). This paper discusses the outline of the processing by the application of magnetic abrasive machining and a few finishing characteristics.

• Current Photovoltaic Research
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• 제3권2호
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• pp.61-64
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• 2015

In solar industry, numerous researchers reported about cold spray method among various electrode formation technic, but there are no known a bonding mechanism of metal powder. In this study, a cross-section of copper electrode formed by cold spray method was observed and heterogeneous phase between silicon substrate and copper electrode was analyzed using morphology observation technic. SEM and TEM analysis were performed to analyze a crystallinity and distribution shape of heterogeneous copper phase. Molecular dynamics simulation was performed to calculate glass transition temperature of copper metal. In the result, amorphous copper phase was observed near interface between silicon substrate and metal electrode. The results of the molecular dynamics simulation show that an amorphous copper phase could be formed at a temperature below the melting point of copper because cold spraying resulted in a lower glass transition temperature.

• 한국재료학회지
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• 제9권4호
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• pp.414-418
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• 1999

Typical metal oxide thin films having optical and electrical properties are widely used as inorganic functional materials. Liquid phase deposition(LPD) method, a new low temperature process, has been developed for the several advantages of no vacuum system, low cost, high throughput, and low processing temperature(<$50^{\circ}C$). Silica powder was added to 40wt% hydrofluoro-silicic acid($H_2$SiF\ulcorner) to obtain an immersing solution of silica-saturated hydrofluorosilicic acid solution. Boric acid solution was continuously added in the range from 0 to 0.05M to prepare supersaturated hydrofluorosilicic acid solution. LPD $SiL_2$film was formed with the variation of added amount of $H_2$O. The SiO$_2$thin film could be prepared from hydrofluorosilicic acid by LPD method. The thickness of LPD $_SiO2$film was influenced by the boric acid concentration and added amount of $H_2$O. Silicon in thin film existed as SiF\ulcorner by Raman spectrum.

• 한국재료학회지
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• 제10권1호
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• pp.83-89
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• 2000

$Si_3N_4$에 2wt% $Al_2O_3$와 6wt% $Y_2O_3$을 첨가한 분말을 가스압 소결 방법으로 시편을 제조하였다. 이때 소결시 시간변화에 따른 공기 중에서 마모 특성을 비교하였다. 소결 시간에 따른 마모 특성의 변화는 기계적 성질, 즉, 파괴인성 등이 영향을 주는 것으로 나타났다. 소결 시간이 길어지면 큰 elongated 입자의 과잉성장에 따라 곡강도 및 파괴인성이 낮아져 이 결과 마모가 증가되었다. 이때 나타난 결과에 의하면 공기 중에서 질화규소의 마모특성에 영향을 주는 인자는 여러 가지 기계적 특성 중에서 파괴인성 및 곡강도가 미치는 영향이 크게 나타났다.

• 한국결정성장학회지
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• 제3권2호
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• pp.117-124
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• 1993

연속성장법은 crystal growth chamber의 상부에 있는 reservoir에서 원료 분말을 연속적으로 공급하면서 도가니 하부에 용융대를 형성시킨 후, 종자결정을 용융대에 dipping하여 회전시키면서 아래로 끌어내려 단결정을 성장시키는 방법이다. 본 연구에서는 연속 성장법을 이용하여 silicon 단결정을 육성시켰으며 연속성장에 영향을 미치는 인자는 critical melt level, 원료공급속도, 성장속도, graphite crucible과 gruphite susceptor의 형태, work coil의 위치에 따른 graphite susceptor의 수직온도구배, 중력과 종자결정의 회전에 의한 원심력이 용융대의 안정화에 미치는 영향과 용융액 표면에서 일어나는 소결현상에 관해 고찰하였다.

• 한국세라믹학회지
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• 제46권5호
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• pp.534-539
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• 2009

Reaction Bonded Silicon Carbide(RBSC) has been used for engineering ceramics due to low-temperature fabrication and near-net shape products with excellent structural properties such as thermal shock resistance, corrosion resistance and mechanical strength. Recently, attempts have been made to develop hot gas filter with gradient pore structure by RBSC to overcome weakness of commercial clay-bonded SiC filter such as low fracture toughness and low reliability. In this study a fabrication process of porous RBSC with multi-layer pore structure with gradient pore size was developed. The support layer of the RBSC with multi-layer pore structure was fabricated by conventional Si infiltration process. The intermediate and filter layers consisted of phenolic resin and fine SiC powder were prepared by dip-coating of the support RBSC in slurry of SiC and phenol resin. The temperature of $1550^{\circ}C$ to make Si left in RBSC support layer infiltrate into dip-coated layer to produce SiC by reacting with pyro-carbon from phenol resin.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 추계학술대회 논문집 전기물성,응용부문
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• pp.60-63
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• 2002

This paper presents bead-based microbiocihps to detect and separate target proteins. Micro beads coated with capture proteins were introduced into a microchamber, and target proteins flowing across the chamber were bound and concentrated. The chip was connected with an external fluid system. Bead surfaces were double-coated with photo-cleavable linkers and capture proteins. The proteins bound on the beads were photo-separated under UV irradiation, and excited to be measured in fluorescence. $38{\sim}50{\mu}m$ sized polystyrene beads were used. SOGs(silicon-on-glass) were used to fabricate the microchip having glasses bonded on both sides. 100 ${\mu}m$ thick silicon channel was formed through silicon deep RIE process. The upper glass cover had holed through to have inlets and outlets fabricated by powder-blastings. In this study, biotin and streptavidin were used as capture proteins and detection proteins, respectively. The protein mixtures of streptavidin, HSA(human serum albumin) and ovalbumin were applied for selective detection test.

• 센서학회지
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• 제28권2호
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• pp.127-132
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• 2019

In this study, the fabrication of through-silicon vias (TSVs) filled with SWNTs/Sn by utilizing surface/bulk micromachining and MEMS technologies is proposed. Tin (Sn) and single-walled nanotube (SWNT) powders are used as TSV interconnector materials in the development of a novel TSV at low temperature. The measured resistance of a TSV filled with SWNT/Sn powder is considerably reduced by increasing the fraction of Sn and is lower than that of a TSV filled with only Sn. This is because of a decrease in the surface scattering of electrons along with an increase in the grain size of sintered SWNTs/Sn. The proposed method is conducted at low temperatures (< $400^{\circ}C$) due to the low melting temperature of Sn; hence, the proposed TSVs filled with SWNTs/Sn can be utilized in CMOS based applications.

• 한국세라믹학회지
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• 제55권3호
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• pp.285-289
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• 2018

We synthesized silicon carbide (${\beta}-SiC$) nanowires with nano-scale diameter (30 - 400 nm) and micro-scale length ($50-200{\mu}m$) on a porous body using low-grade silica and carbon black powder by carbothermal reduction at $1300-1600^{\circ}C$. The SiC nanowires were formed by vapor-liquid-solid deposition with self-evaporated Fe catalysts in low-grade silica. We investigated the characteristics of the SiC nanowires, which were grown on a porous body with Ar flowing in a vacuum furnace. Their structural, optical, and electrical properties were analyzed with X-ray diffraction (XRD), transmission electron microscopy (TEM), and selective area electron diffraction (SAED). We obtained high-quality SiC single crystalline nanowire without stacking faults that may have uses in industrial applications.

• 한국세라믹학회지
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• 제35권4호
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• pp.413-419
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• 1998

${\beta}$-silicon carbides with yttrium aluminum garnet of 2,5,10 mol% were prepared by a liquid--phase sint-ering and the microstructural evolution and phase transformation were investigated during sintering as functions of liquid-phase amount and sintering time. The rate of grain growth decreases with the addition of the amount of yttrium aluminum garnet (YAG) in the SiC starting powder however the apparent density and the aspect ratio of grains in sintered body increase. The phase transformation from ${\beta}$-SiC to ${\alpha}$-SiC were dependent on the liquid-phase amount and sintering time.