• Title/Summary/Keyword: Silicon mold

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Activation Energy Measurement of the $^{60}Co$ $\gamma$-ray Irradiated Epoxy Resin ($^{60}Co$ $\gamma$-ray 조사에 따른 에폭시 수지의 활성화 에너지 측정)

  • Lee, Kyoung-Yong;Kim, Ki-Yup;Hwang, In-Ra;Choi, Yong-Sung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.04c
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    • pp.75-79
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    • 2008
  • In this paper, we measured the activation energy of the Bisphenol A type Epoxy resin (DGEBA)-Jeffamine system according to an irradiation. We put the mixed solutions to the silicon mold after mixing both DGEBA(216g) and Jeffamine(93.9g), curing agent of amine system. The mixed solutions were cured in the atmosphere during 24hours after finishing the first curing during 4hours in the vacuum oven under $80^{\circ}C$. The mixed solutions were cured in the atmosphere during 24hours after finishing the second curing during 12hours in the vacuum oven under $60^{\circ}C$ again. Prepared samples were irradiated to the dose rate of 8kGy/hr with 500kGy, 700kGy, 1000kGy, 1500kGy, 2000kGy, 2500kGy. Experimental results indicated activation energy of the samples reduced as the irradiation dose increased because of the peroxides of the Epoxy created by the oxidation and the radiation.

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Micro Metal Powder Injection Molding in the W-Cu System (W-Cu의 마이크로 금속분말사출성형)

  • 김순욱;양주환;박순섭;김영도;문인형
    • Journal of Powder Materials
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    • v.9 no.4
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    • pp.267-272
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    • 2002
  • The production of micro components is one of the leading technologies in the fields of information and communiation, medical and biotechnology, and micro sensor and micro actuator system. Microfabrication (micromachining) techniques such as X-ray lithography, electroforming, micromolding and excimer laser ablation are used for the production of micro components out of silicon, polymer and a limited number of pure metals or binary alloys. However, since the first development of microfabrication technologies there have been demands for the cost-effective replication in large scale series as well as the extended range of available material. One such promising process is micro powder injection molding (PIM), which inherits the advantages of the conventional PIM technology, such as low production cost, shape complexity, applicability to many materials, applicability to many materials, and good tolerance. This paper reports on a fundamental investigation of the application of W-Cu powder to micro metal injection molding (MIM), especially in view of achieving a good filling and a safe removal of a micro mold conducted in the experiment. It is absolutely legitimate and meaningful, at the present state of the technique, to continue developing the micro MIM towards production processes for micro components.

Fabrication of Nano Master with Anti-reflective Surface Using Aluminum Anodizing Process (양극산화공정을 이용한 반사방지 성형용 나노 마스터 개발)

  • Shin, H.;Park, Y.;Seo, Y.;Kim, B.
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.18 no.6
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    • pp.697-701
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    • 2009
  • A simple method for the fabrication of porous nano-master for the anti-reflection effect on the transparent substrates is presented. In the conventional fabrication methods for antireflective surface, coating method using materials with low refractive index has usually been used. However, it is required to have a high cost and long processing time for mass production. In this paper, we developed a porous nano-master with anti-reflective surface for the molding stamper of the injection mold, hot embossing and UV imprinting by using the aluminum anodizing process. Through two-step anodizing and etching processes, a porous nano-master with anti-reflective surface was fabricated at the large area. Pattern size Pore diameter and inter-pore distance are about 130nm and 200nm, respectively. In order to replicate anti-reflective structure, hot embossing process was performed by varying the processing parameters such as temperature, pressure and embossing time etc. Finally, antireflective surface can be successfully obtained after etching process to remove selectively silicon layer of AAO master.

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A Study on the Direct Synthesis of TaC by Cast-bonding (주조접합법에 의한 TaC 직접합성에 관한 연구)

  • Park, Heung-Il;Lee, Sung-Youl
    • Journal of Korea Foundry Society
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    • v.17 no.4
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    • pp.371-378
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    • 1997
  • The study for direct synthesis of TaC carbide which was a reaction product of tantalum and carbon in the cast iron was performed. Cast iron which has hypo-eutectic composition was cast bonded in the metal mold with tantalum thin sheet of thickness of $100{\mu}m$. The contents of carbon and silicon of cast iron matrix was controlled to have constant carbon equivalent of 3.6. The chracteristics of microstructure and the formation mechanism of TaC carbide in the interfacial reaction layer in the cast iron/tantalum thin sheet heat treated isothermally at $950^{\circ}C$ for various time were examined. TaC carbide reaction layer was grown to the dendritic morphology in the cast iron/tantalum thin sheet interface by the isothermal heat treatment. The composition of TaC carbide was 48.5 at.% $Ti{\sim}48.6$ at.% C-2.8 at.% Fe. The hardness of reaction layer was MHV $1100{\sim}1200$. The thickness of reaction layer linearly increased with increasing the total content of carbon in the cast iron matrix and isothermal heat treating time. The growth constant for TaC reaction layer was proportional to the log[C] of the matrix. The formation mechanism of TaC reaction layer at the interface of cast iron/tantalum thin sheet was proved to be the interfacial reaction.

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Flow Phenomena in Micro-Channel Filling Process (I) - Flow Visualization Experiment - (마이크로 채널 충전 과정의 유동 현상(I) - 유동 가시화 실험 -)

  • Kim, Dong-Sung;Lee, Kwang-Cheol;Kwon, Tai-Hun;Lee, Seung-S.
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.26 no.10
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    • pp.1982-1988
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    • 2002
  • Micro-injection molding and microfluidic devices with the help of MEMS technologies including the LIGA process are expected to play important roles in micro-system industries, in particular the bio-application industry, in the near future. Understanding fluid flows in micro-channels is important since micro-channels are typical geometry in various microfluidic devices and mold inserts for micro-injection molding. In the present study, Part 1, an experimental investigation has been carried out to understand the detailed flow phenomena in micro-channel filling process. Three sets of micro-channels of different thickness (40um,30um and 2011m) were fabricated using SU-8 on silicon wafer substrate. And a flow visualization system was developed to observe the filling flow into the micro-channels. Experimental flow observations are extensively made to find the effects of pressure, inertia force, viscous force and surface tension. A dimensional analysis for experimental results was carried out and several relationships A dimensionless parameters are obtained.

Bio-inspired Structural Colors of Transparent Substrate based on Light Diffraction and Interference on Microscale and Nanoscale Structures (자연모사기반 나노-마이크로패턴의 광 회절 및 간섭에 의한 투명기판의 구조색 구현)

  • Park, Yong Min;Kim, Byeong Hee;Seo, Young Ho
    • Journal of Industrial Technology
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    • v.39 no.1
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    • pp.33-39
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    • 2019
  • This paper addresses effects of nanoscale structures on structural colors of micropatterned transparent substrate by light diffraction. Structural colors is widely investigated because they present colors without any chemical pigments. Typically structural colors is presented by diffraction of light on a micropatterned surface or by multiple interference of light on a surface containing a periodic or quasi-periodic nano-structures. In this paper, each structural colors induced by quasi-periodic nano-structures, periodic micro-structures, and nano/micro dual structures is measured in order to investigate effects of nanoscale and microscale structures on structural colors in the transparent substrate. Using pre-fabricated pattern mold and hot-embossing process, nanoscale and microscale structures are replicated on the transparent PMMA(Poly methyl methacrylate) substrate. Nanoscale and microscale pattern molds are prepared by anodic oxidation process of aluminum sheet and by reactive ion etching process of silicon wafer, respectively. Structural colors are captured by digital camera, and their optical transmittance spectrum are measured by UV/visible spectrometer. From experimental results, we found that nano-structures provide monotonic colors by multiple interference, and micro-structures induce iridescent colors by diffraction of light. Structural colors is permanent and unchangeable, thus it can be used in various application field such as security, color filter and so on.

A study on the manufacture of cylindrical vaporization amplification sheets using centrifugal force (원심력을 이용한 원통형 증기화 증폭 시트 제작 연구)

  • Ko, Min-Sung;Wi, Eun-Chan;Yun, Yi-Seob;Lee, Joo-Hyung;Baek, Seung-Yub
    • Design & Manufacturing
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    • v.16 no.1
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    • pp.43-49
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    • 2022
  • As technologies in various industrial fields develop, high-quality parts are required. In the past, precision parts were produced by the contact machining method, but the contact machining method has clear limitations. In order to solve this problem, research on a non-contact processing method has been conducted, and laser processing and electric discharge processing are representative. However, the non-contact method has a problem in that productivity is insufficient, and there is a problem that it takes a lot of time to continuously process microholes. Researchers have developed an electron beam drilling equipment for continuous processing of fine holes, and a vaporization amplification sheet to increase the processing efficiency of the equipment. In this study, a cylindrical vaporization amplification sheet using room temperature curing type silicon was fabricated, and the metal distribution and thickness uniformity of the produced sheet were analyzed. In order to manufacture a cylindrical vaporization amplification sheet, an equipment capable of using centrifugal force was developed, and a sample in which metal powder was evenly distributed and a constant thickness was produced.

A Study on Cutting Conditions and Finishing Machining of Si Material Using Laser Assisted Module (레이저 보조 모듈을 이용한 Si 소재의 절삭조건 및 보정가공에 관한 연구)

  • Young-Durk Park
    • Design & Manufacturing
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    • v.17 no.2
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    • pp.15-21
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    • 2023
  • In this study, a diamond turning machine and a laser-assisted machining module were utilized for the complex combined cutting of aspheric shapes and fine patterns on the surface of high-hardness brittle material, silicon. The analysis of material's form accuracy and corrective machining was conducted based on key factors such as laser output, rotational speed, feed rate, and cutting depth to achieve form accuracy below 1 ㎛ and surface roughness below 0.1 ㎛. The cutting condition and corrective machining methods were investigated to achieve the desired form accuracy and surface roughness. The rotational speed of the spindle and the linear feed rate of the diamond turning machine were varied in five stages for the cutting condition test. Surface roughness and form accuracy were measured using both a contact surface profilometer and a non-contact surface profilometer. The experimental results revealed a tendency of improved surface roughness with increased rotational speed of the workpiece, and the best surface roughness and form accuracy were observed at a feed rate of 5 mm/min. Furthermore, based on the cutting condition experiments, corrective machining was performed. The experimental results demonstrated an improvement in form accuracy from 0.94 ㎛ to 0.31 ㎛ and a significant reduction in the average value of the surface roughness curve from 0.234 ㎛ to 0.061 ㎛. This research serves as a foundation for future studies focusing on the machinability in relation to laser output parameters.

Effects of Carbon Black on Mechanical Properties and Curing Behavior of Liquid Silicone Rubber (LSR) (Carbon Black 첨가에 따른 액상 실리콘 고무(LSR)의 기계적 특성 및 경화 거동 분석)

  • Beom-Joo Lee;Seon-Ju Kim;Hyeong-Min Yoo
    • Design & Manufacturing
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    • v.17 no.2
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    • pp.27-32
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    • 2023
  • Liquid silicon rubber (LSR) has fine thermal compatibility and is widely used in various fields such as medical care and automobiles because it is easy to implement products with good fluidity. With the recent development of flexible sensors, the focus has been on manufacturing conductive elastomers, such as silicone as elastic materials, and carbon black, CNT, and graphene are mainly used as nanomaterials that impart conductive phases. In this study, mechanical behavior and curing behavior were measured and analyzed to manufacture a CB-LSR complex by adding Carbon Black to LSR and to identify properties. As a result of the compression test, the elastic modulus tended to increase as carbon black was added. When the swelling test and the compression set test were conducted, the swelling rate tended to decrease as the content of carbon black increased, and the compression set tended to increase. In addition, DSC measurements showed that the total amount of reaction heat increased slightly as the carbon black content increased. It is considered that carbon black was involved in the crosslinking of LSR to increase the crosslinking density and have a positive effect on oil resistance reinforcement.

Deposition and Characterization of Antistiction Layer for Nanoimprint Lithography by VSAM (Vapor Self Assembly Monolayer) (기상 자기조립박막 법을 이용한 나노임프린트용 점착방지막 형성 및 특성평가)

  • Cha, Nam-Goo;Kim, Kyu-Chae;Park, Jin-Goo;Jung, Jun-Ho;Lee, Eung-Sug;Yoon, Neung-Goo
    • Korean Journal of Materials Research
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    • v.17 no.1
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    • pp.31-36
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    • 2007
  • Nanoimprint lithography (NIL) is a new lithographic method that offers a sub-10nm feature size, high throughput, and low cost. One of the most serious problems of NIL is the stiction between mold and resist. The antistiction layer coating is very effective to prevent this stiction and ensure the successful NIL results. In this paper, an antistiction layer was deposited by VSAM (vapor self assembly monolayer) method on silicon samples with FOTS (perfluoroctyltrichlorosilane) as a precursor for making an antistiction layer. A specially designed LPCVD (low pressure chemical vapor deposition) was used for this experiment. All experiments were achieved after removing the humidity. First, the evaporation test of FOTS was performed for checking the evaporation temperature at low pressure. FOTS was evaporated at 5 Tow and $110^{\circ}C$. In order to evaluate the temperature effect on antistiction layer, chamber temperature was changed from 50 to $170^{\circ}C$ with 0.1ml of FOTS for 1 minute. Good hydrophobicity of all samples was shown at about $110^{\circ}$ of contact angle and under $20^{\circ}$ of hysteresis. The surface energies of all samples calculated by Lewis acid/base theory was shown to be about 15mN/m. The deposited thicknesses of all samples measured by ellipsometry were almost 1nm that was similar value of the calculated molecular length. The surface roughness of all samples was not changed after deposition but the friction force showed relatively high values and deviations deposited at under $110^{\circ}$. Also the white circles were founded in LFM images under $110^{\circ}$. High friction forces were guessed based on this irregular deposition. The optimized VSAM process for FOTS was achieved at $170^{\circ}C$, 5 Torr for 1 hour. The hot embossing process with 4 inch Si mold was successfully achieved after VSAM deposition.