• Title/Summary/Keyword: Silica-on-silicon

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Effective Silicon Oxide Formation on Silica-on-Silicon Platforms for Optical Hybrid Integration

  • Kim, Tae-Hong;Sung, Hee-Kyung;Choi, Ji-Won;Yoon, Ki-Hyun
    • ETRI Journal
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    • v.25 no.2
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    • pp.73-80
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    • 2003
  • This paper describes an effective method for forming silicon oxide on silica-on-silicon platforms, which results in excellent characteristics for hybrid integration. Among the many processes involved in fabricating silica-on-silicon platforms with planar lightwave circuits (PLCs), the process for forming silicon oxide on an etched silicon substrate is very important for obtaining transparent silica film because it determines the compatibility at the interface between the silicon and the silica film. To investigate the effects of the formation process of the silicon oxide on the characteristics of the silica PLC platform, we compared two silicon oxide formation processes: thermal oxidation and plasma-enhanced chemical vapor deposition (PECVD). Thermal oxidation in fabricating silica platforms generates defects and a cristobalite crystal phase, which results in deterioration of the optical waveguide characteristics. On the other hand, a silica platform with the silicon oxide layer deposited by PECVD has a transparent planar optical waveguide because the crystal growth of the silica has been suppressed. We confirm that the PECVD method is an effective process for silicon oxide formation for a silica platform with excellent characteristics.

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Separation of Silicon and Silica by Liquid-Liquid Extraction

  • Fujita, Toyohisa;Oo, Kyaw-Zin;Shibayama, Atsushi;Miyazaki, Toshio;Kuzuno, Eiichi;Yen, Wan-Tai
    • Proceedings of the IEEK Conference
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    • 2001.10a
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    • pp.719-724
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    • 2001
  • The objective of this investigation was to separate silicon and silica for recycling by the liquid-liquid separation technique. In the preparation of silicon (Si) single crystal, a small amount of silicon is fixed on the surface of silica (quartz, $SiO_2$) crucible. The used crucible is crushed for recycling both silicon and silica in a high purity from the mixed powder. Zeta-potential of silicon and silica are almost the same at pH higher than 3. Their separation by simple flotation is ruled out. However, their hydrophobic characteristics are different in several different organic solvent from the measurement of contact angle. Therefore, the liquid-liquid extraction is employed to separate silicon and silica. The result indicates that the organic solvent mixed with dodecyl ammonium acetate could extracted the silicon powder at high purity (97-100%) with high recovery from the silica powder in the water phase.

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Study on White Precipitate in Most of Waters after Thawing (물이 해동한 다음 발생하는 휜 침전물의 정성분석 및 이온의 변화)

  • 윤수철;박해룡;윤형식;김창수
    • Journal of Food Hygiene and Safety
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    • v.17 no.1
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    • pp.15-19
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    • 2002
  • The objectives of this study were to investigate the change of silicon, cations and anions dissolved in water before and after thawing, and analyzed what the white-colored precipitate (WP) farmed after thawing was composed of. The silicon concentration that has been changed might have been compared with the weight of WP under water-free state. The major component of WP has been approved to be a silicon, while calsium was only a little contained. As the weight of WP has been nearly equal to the reduced silicon concentration, the weight of its could be changeable calculated by silica (SiO$_2$) molecular weight. Therefore, WP could have been presumed to be a silica. The more silicon concentration was increased, the more weight of silicon was increased. Except for the sample "C", the amounts of cations and anions could be found to be unchangeable nearly. As a result of that, WP has been apparent to be silica itself while most of ions (excluded with Si) of any others were not changed.

Effect of Foliar and Root Application of Silicon Against Rice Blast Fungus in MR219 Rice Variety

  • Abed-Ashtiani, Farnaz;Kadir, Jugah-Bin;Selamat, Ahmad-Bin;Hanif, Ahmad Husni Bin-Mohd;Nasehi, Abbas
    • The Plant Pathology Journal
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    • v.28 no.2
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    • pp.164-171
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    • 2012
  • Rice blast disease caused by Magnaporthe grisea (Hebert) Barr [teleomorph] is one of the most devastating diseases in rice plantation areas. Silicon is considered as a useful element for a large variety of plants. Rice variety MR219 was grown in the glasshouse to investigate the function of silicon in conferring resistance against blast. Silica gel was applied to soil while sodium silicate was used as foliar spray at the rates of 0, 60, 120, 180 g/5 kg soil and 0, 1, 2, 3 ml/l respectively. The treatments were arranged in a completely randomized design. Disease severity and silicon content of leaves were compared between the non-amended controls and rice plants receiving the different rates and sources of silicon. Silicon at all rates of application significantly (${\alpha}$ = 0.05) reduced the severity of disease with highest reduction (75%) recorded in treatments receiving 120 g of silica gel. SEM/EDX observations demonstrated a significant difference in weight concentration of silicon in silica cells on the leaf epidermis between silicon treated (25.79%) and non treated plants (7.87%) indicating that Si-fertilization resulted in higher deposition of Si in silica cells in comparison with non-treated plants. Application of silicon also led to a significant increase in Si contents of leaves. Contrast procedures indicated higher efficiency of silica gel in comparison to sodium silicate in almost all parameters assessed. The results suggest that mitigated levels of disease were associated with silicification and fortification of leaf epidermal cells through silicon fertilization.

Effects on Density and Dominant rate of Periphyton by Variation of Dissolved Silicon Concentration (용존규소농도의 변화가 하천 부착조류의 밀도와 우점율에 미치는 영향에 관한 연구)

  • Jeon, Kyoung-ho
    • Journal of Korean Society of Water and Wastewater
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    • v.23 no.6
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    • pp.703-709
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    • 2009
  • In this study, an artificial-waterway experiment was conducted, using an attachment plate, on which algae from Nanakita river was placed, to examine the influence exerted by the variation of the dissolved-silicon concentration on the river periphyton. As a result, the variation of the dissolved-silicon concentration was found to exert an influence on the density of the adhesion diatom, and the mole ratio limits of the silica were about $Si/P{\fallingdotseq}182$ and $Si/N{\fallingdotseq}16.4$ or less. Moreover, the mole ratio that is necessary for proliferation was found to be larger than the value of the oceanic algae. Senedesmus sp. and Ankistrodesmus sp., which used silica in adhesion chlorophyta, received the influence of the silicon concentration strongly, and the twowere found to be superior in the environment, making silica a restriction factor.

Synthesis of Silica Coated Silicon Substrate by Recycling Silicon Sludge Generated in Semiconductor Packaging Process and Their Application to Epoxy Molding Compound (반도체 패키징 공정에서 발생하는 실리콘 슬러지의 재활용을 통한 Si@SiO2 제조 및 에폭시 몰딩 컴파운드로의 응용)

  • Yeon-Ryong Chu;Dahee Kang;Ha-Yeong Kim;Jisu Lim;Gyu-Sik Park;Suk Jekal;Chang-Min Yoon
    • Journal of the Korea Organic Resources Recycling Association
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    • v.32 no.3
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    • pp.57-66
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    • 2024
  • In this study, silicon sludge from a semiconductor packaging process is recycled to fabricate silica coated silicon-sludge and applied as a filler for an epoxy molding compound(EMC). Silicon-sludge powder(S-sludge) is treated with acid to remove metallic impurities and then coated using the sol-gel method to synthesize silica coated silicon-sludge powder(SS-sludge). The as-synthesized SS-sludge is subsequently mixed with epoxy resin, a curing agent, and carbon black to create an EMC(SS-sludge EMC). The heat dissipation properties of the EMC were examined using an IR camera. IR camera analysis confirmed that the SS-sludge EMC exhibited the highest surface temperature of 58.5℃ compared to SiO2-based EMC. This enhancement in heat dissipation using SS-sludge EMC is attributed to the excellent thermal conductivity(150W/mK) of the silicon substrate and the presence of the silica layer on the SS-sludge surface which effectively enhances the thermal property of the EMC. Therefore, this study successfully demonstrates the recycling of silicon sludge from a semiconductor packaging process by synthesizing silica coated silicon-sludge and suggests a novel application of this material in semiconductor packaging.

Effect of Specific Surface Area on the Reaction of Silicon Monoxide with Porous Carbon Fiber Composites

  • Park, Min-Jin;Lee, Jae-Chun
    • The Korean Journal of Ceramics
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    • v.4 no.3
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    • pp.245-248
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    • 1998
  • Porous carbon fiber composites (CFCs) having variable specific surface area ranging 35~1150 $\m^2$/g were reacted to produce silicon carbide fiber composites with SiO vapor generated from a mixture of Si and $SiO_2$ at 1673 K for 2 h under vacuum. Part of SiO vapor generated during conversion process condensed on to the converted fiber surface as amorphous silica. Chemical analysis of the converted CFCs resulting from reaction showed that the products contained 27~90% silicon carbide, 7~18% amorphous silica and 3~63% unreacted carbon, and the composition depended on the specific carbide, 7~18% amorphous silica and 3~63% unreacted carbon, and the composition depended on the specific surface area of CFCs. CFC of higher specific surface area yielded higher degree of conversion of carbon to silicon and conversion products of lower mechanical strength due to occurrence of cracks in the converted caron fiber. As the conversion of carbon to silicon carbide proceeded, pore size of converted CFCs increased as a result of growth of silicon carbide crystallites, which is also linked to the crack formation in the converted fiber.

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Planar Waveguide Devices for Communication and Sensing Applications

  • Okamoto, Katsunari
    • Journal of the Optical Society of Korea
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    • v.14 no.4
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    • pp.290-297
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    • 2010
  • The paper reviews progress and future prospects of two kinds of planar waveguide devices; they are (a) silica and silicon photonics multi/demultiplexers for communications and signal processing applications, and (b) a novel waveguide spectrometer based on Fourier transform spectroscopy for sensing applications.

Effect of Recycling Time on Stability of Colloidal Silica Slurry and Removal Rate in Silicon Wafer Polishing (연마 Recycling 시간에 따른 콜로이드 실리카 슬러리의 안정성 및 연마속도)

  • Choi, Eun-Suck;Bae, So-Ik
    • Journal of the Korean Ceramic Society
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    • v.44 no.2 s.297
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    • pp.98-102
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    • 2007
  • The stability of slurry and removal rate during recycling of colloidal silica slurry was evaluated in silicon wafer polishing. The particle size distribution, pH, and zeta potential were measured to investigate the stability of colloidal silica. Large particles appeared as recycling time increased while average size of slurry did not change. Large particles were identified by EDS(energy dispersive spectrometer) as foreign substances from pad or abraded silicon flakes during polishing. As the recycling time increased, pH of slurry decreased and removal rate of silicon reduced but zeta potential decreased inversely. Hence, it could be mentioned that decrease of removal rate is related to consumption of $OH^-$ ions during recycling. Attention should be given to the control of pH of slurry during polishing.