• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.50-53
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• 2003

CMP (chemical mechanical polishing) process remained to solve several problems in deep sub-micron integrated circuit manufacturing process. especially consumables (polishing pad, backing film, slurry, pad conditioner), one of the most important components in the CMP system is the slurry. Among the composition of slurries (buffer solution, bulk solution, abrasive particle, oxidizer, inhibitor, suspension, antifoaming agent, dispersion agent), the abrasive particles are important in determining polish rate and planarization ability of a CMP process. However, the cost of abrasives is still very high. So, in order to reduce the high COO (cost of ownership) and COC (cost of consumables) in this paper, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we have studied the possibility of recycle of reused silica abrasive through the analysis of particle size and hardness. Also, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slurry. As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.145-148
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• 2003

Recently, the recycle of CMP (chemical mechanical polishing) slurries have been positively considered in order to reduce the high COO (cost of ownership) and COC (cost of consumables) in CMP process. Among the composition of slurries (buffer solution, bulk solution, abrasive particle, oxidizer, inhibitor, suspension, antifoaming agent, dispersion agent), the abrasive particles are one of the most important components. Especially, the abrasive particles of slurry are needed in order to achieve a good removal rate. However, the cost of abrasives, is still very high. In this paper, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we have studied the possibility of recycle of reused silica abrasive through the analysis of particle size and hardness. Also, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slury, As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.10 no.1
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• pp.48-54
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• 2000

Influence of seed addition on the mullite synthesis was investigated from mixture powders of kaolin and aluminium trihydroxide which contain various $Al_2O_3$/SiO_2$ ratio (silica rich, stoichiometric, alumina rich). The flexural strength increases with the increase of the mullite-seed content in case of silica rich and stoichiometric mullite, but flexural strength decreases with the increase of the mullite-seed content in case of alumina rich mullite. Microstructural investigation revealed that aspect ratio of mullite grains increased with higher alumina content, along with lower sintered density. Mullite contents of specimens are increased with seed content regardless of $Al_2O_3$/SiO_2$ ratio of the mixture composition.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.2
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• pp.138-143
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• 2004

CMP (Chemical Mechanical Polishing) technology for global planarization of multilevel interconnection structure has been widely studied for the next generation devices. Among the consumables for CMP process, especially, slurry and their chemical compositions play a very important role in the removal rates and within-wafer non-uniformity (WIWNU) for global planarization ability of CMP process. However, CMP slurries contain abrasive particles exceeding 1 ${\mu}{\textrm}{m}$ size, which can cause micro-scratch on the wafer surface after CMP process. Such a large size particle in these slurries may be caused by particle agglomeration in slurry supply-line. In this work, to investigate the effects of agglomeration on the performance of oxide CMP slurry, we have studied an aging effect of silica slurry as a function of particle size distribution and aging time during one month. We Prepared and compared the self-developed silica slurry by adding of alumina powders. Also, we have investigated the oxide CMP characteristics. As an experimental result, we could be obtained the relatively stable slurry characteristics comparable to aging effect of original silica slurry. Consequently, we can expect the saving of high-cost slurry.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2013.11a
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• pp.68-71
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• 2013

Reactive Powder Concrete (RPC) is an ultra high strength and high ductility cement-based composite material and has shown some promise as a new generation concrete in construction field. It is characterized by a silica fume-cement mixture with very low water-binder (w/b) ratio and very dense microstructure, which is formed using various powders such as cement, silica fume and very fine quartz sand (0.15~0.4mm) instead of ordinary coarse aggregate. However, the unit weight of cement in RPC is as high as 900~1,000 kg/㎥ due to the use of very fine sand instead of coarse aggregate, and a large volume of relatively expensive silica fume as a high reactivity pozzolan is also used, which is not produced in Korea and thus must be imported. Since the density of RPC has a heavy weight at 2.5~3.0 g/㎤. In this study, the modified RPC was made by the combination of ternary pozzolanic materials such as blast furnace slag and fly ash, silica fume in order to economically and practically feasible for Korea's situation. The fire resistance and structural behavior of the modified RPC exposed to high temperature were investigated.

• Journal of the Society of Cosmetic Scientists of Korea
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• v.45 no.4
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• pp.409-414
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• 2019

Silica and polymethylsilsesquioxane (PMSQ) are silicone powders widely used as cosmetics. We synthesized silica-PMSQ composites via sol-gel method using tetraethoxysilane (TEOS) and methyltrimethoxysilane (MTMS) as precursors of silica and PMSQ, respectively. Shape of the composites was controlled by varying the ratios of TEOS and MTMS, which were used as silane monomers. Silica-PMSQ composites showed three different shapes, which were sphere-shape, raspberry- shape, and donut- shape. All of them had soft touch, easy water dispersion, and soft focus effect in common. However, each shape showed some differences in sense of use, adhesion, and strength of the soft focus effect. Raspberry-shape composite had the strongest soft focus effect, donut-shape one had the strongest adhesion, and sphere-shape one had the best in softness. Thus, it is concluded that by varying the ratios of TEOS and MTMS silica-PMSQ composites could be easily synthesized into different shapes, providing various functions. This method can be applied to manufacture functional cosmetics.

• Journal of the Korean Ceramic Society
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• v.32 no.7
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• pp.853-857
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• 1995

ZrSiO4 powders were prepared from partially hydrolyzed solution of Si(OC2H5)4 and ZrOCl2.8H2O solution by the sol-gel method and formation rate of ZrSiO4 on the reaction parameter was investigated. In order to prepare homogeneous ZrSiO4 precursor gels, the H2O/Si(OC2H5)4 molar ratio of about 2, the pH of the ZrOCl2.8H2O solution fo about 4 and stirring time of the mixed solutions of about 2 hrs were appropriate. Formation of temperature of ZrSiO4 reduced about 15$0^{\circ}C$ by milling and formation of ZrSiO4 at 1300~135$0^{\circ}C$ showed an accelerative increase through the hedvall effect by silica.

• Proceedings of the Korea Concrete Institute Conference
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• 1997.04a
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• pp.136-145
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• 1997

The purpose of this study is to develope of alternative adimixture for manufacture of PHC pile(compressive strength above 800kg/$\textrm{cm}^2$). For the investigation, properties of alternative admixture admixed with II-anhydrite and pozollanic fine powders(e.q., Fly-ash, Silica-Fume), the fluidity and viscosity in the cement pastes, the fluidity and compressive strength in mortars at steam curing condition, were respectively examined. Also, properties of compressive strength of concretes with exiting admixture(specimen name SM) and alterantive admixture(specimen name AP) for PHC pile, at steam and standard curing condition, were compared each other. As a result of this experimental study, it was found that specimens admixed with II-anhydrite and pozollanic fine powders had an increase on the fluidity of cement paste and mortar, and compressive strength of mortar and concrete was as good as concrete with SM.

• Journal of the Korean Ceramic Society
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• v.53 no.5
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• pp.541-547
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• 2016

In developing high temperature molds with advantages of the sand and precision (investment) castings, mechanical properties of the mold were improved through homogeneous coating of starting powders with an inorganic binder and improvement of fabrication process. Beads with mullite composition were employed for properties of the mold under high temperature, which was compared with artificial sands. Precursors of silica and sodium oxide were used as starting materials for an inorganic binder to achieve homogeneous coating on the starting powders. Strength was enhanced by the glass phase converted from the inorganic binder through heat treatment process. Also, two kinds of process, wet and dry processes, were incorporated to prepare mold specimens. Consequently, fabrication process of the mold with superior strength and high temperature applicability, compared with the previous molds for sand casting, could be suggested through control of the starting material and enhancement of the vitrification efficiency.

• Applied Biological Chemistry
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• v.33 no.4
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• pp.315-318
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• 1990

After technical pesticides and dispersants were dissolved in a volatile organic solvent, the wettable powders(WP's) were formulated by adsorbing the pesticide-dispersant solution to finely powdered porous synthetic silica without milling process. The median sizes of 11 WP'S were smaller than $8{\mu}m$, 9 of which had more than 80% suspensibility after 2 hours. It was possible In formulate 50% WP for liquid of fly technical pesticides. The pesticidal efficacies of WP's tested were comparable In commercial formulations regardless of suspensibilities of WP's.