• Journal of the Korea Organic Resources Recycling Association
• /
• v.30 no.3
• /
• pp.5-12
• /
• 2022

This study suggests the effective recycling method of sludge waste from various industrial fields to synthesize uniform colloidal silica nanoparticles. In detail, polymers are removed from the sludge waste to attain sludge-extracted silica (s-SiO₂) micron-sized particles, and ammonia assisted sonication is applied to s-SiO₂, which has effectively extracted the silanol precursor. The nano-sized silica (n-SiO₂) particles are successfully synthesized by a typical sol-gel method using silanol precursor. Also, the yield amounts of n-SiO₂ are determined by the function of s-SiO₂ etching time. Finally, n-SiO₂-based slurry is synthesized for the practical CMP application. As a result, rough-surfaced semiconductor chip is successfully polished by the n-SiO₂-based slurry to exhibit the mirror-like clean surface. In this regard, sludge wastes are successfully prepared as valuable semicondutor grade materials.

• Journal of the Korean Ceramic Society
• /
• v.38 no.12
• /
• pp.1150-1154
• /
• 2001

Silicon oxynitride (SiON) thick films using the core layer of silica optical waveguide have been deposited on Si wafer by PECVD at low temperature (32$0^{\circ}C$) were obtained by decomposition of appropriate mixture of (SiH$_4$+$N_2$O+$N_2$) gaseous mixtures under RF power and SiH$_4$/($N_2$O+$N_2$) ratio deposition condition. Prism coupler measurements show that the refractive indices of SiON layers range from 1.4663 to 1.5496. A high SiH$_4$/($N_2$O+$N_2$) of 0.33 and deposition power of 150 W leads to deposition rates of up to 8.67 ${\mu}{\textrm}{m}$/h. With decreasing SiH$_4$/($N_2$O+$N_2$) ratio, the SiON layer become smooth from 41$\AA$ to 6$\AA$.

• Journal of the Korean Ceramic Society
• /
• v.24 no.5
• /
• pp.500-506
• /
• 1987

In order to synthesize monodispersed spherical silica fine particles, we investigated the reaction of hydrolysis of 0.05∼4.0 mole Si(OC2H5)4-0.01∼7.60mole NH3 -0.24∼38.40 mole H2O-2.62∼16.88mole C2H5OH systems. The range of the composition of solution which spherical silica particles were formed was enlarged according to an increase in concentration of Si(OC2H5)4. Larger particles were obtained at higher molar ratios of Si(OC2H5)4/C2H5OH, NH3/H2O and H2O/Si(OC2H5)4 and at a lower reaction temperature.

• Korean Journal of Soil Science and Fertilizer
• /
• v.3 no.1
• /
• pp.17-21
• /
• 1970

To determine the effects of the silicate and the phosphate on the rice seedlings, 200 grams dry soil of the paddy field taken in the petri dish of 15cm diameter were treated with three levels of silicate(wollastonite) and phosphate. And the same amounts of nitrogen and potash were added constantly to each treated petridish. 100 grains of rice of which variety is Nongrim 25 were sown on each treated petridish simultaneously. After five times continuous culture, the rice plants and the soil were analyzed chemically and the results obtained are summarized as follows: 1. Dry matter weight of the rice seedlings was significantly increased to the increased phosphate absorption, on the other hand that was decreased when the silica absorption was increased. 2. The higher the available phosphate content in the soil after the experiments, the lower the silica content as well as absorption by the plant, and the $SiO_2/P_2O_5$ ratio in the plant was significantly decreased. 3. By the wollastonite application, the available silica, the exchangeable calcium in the soil after the experiment, and the silica content as well as silica absorption and $SiO_2/P_2O_5$ ratio in the rice plant was significantly increased. 4. Higher correlation coefficient was obtained between the exchangeable calcium amount and the silica content or silica/phosphate ratio in the rice plant than the available silica content in soil itself. 5. It is possible to control the silica/phosphate ratio in plant by the control of the silica/phosphate ratio in soil. 6. The relation between the silica/phosphate ratio in plant (y) and the available silica/phosphate ratio in soil (x) was $y=0.665+1.420x-0.0825x^2$ and the goodness of fit(r) was 82%.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.314.2-314.2
• /
• 2014

To improve the optical and electrical properties of commercialized GaN-based light-emitting diodes (LEDs), many methods are suggested. In recent years, great efforts have been made to improve the internal quantum efficiency and light extraction efficiency (LEE) and promising approaches are suggested using a patterned sapphire substrate (PSS), V-pit embedded LED structures, and silica nanostructures. In this study, we report on the enhancement of photoluminescence (PL) intensity in GaN-based LED structures by using the combination of SiO2 (silica) nanospheres and polystyrene/SiO2 core-shell nanospheres. The SiO2 nanospheres-coated LED structure shows the slightly increased PL intensity. Moreover the polystyrene/SiO2 core-shell nanospheres-coated structure shows the more increase of PL intensity comparing to that of only SiO2 spheres-coated structure and the conventional structure without coating of nanospheres. The Finite-difference time-domain (FDTD) simulation results show corresponding result with experimentally observed results. The mechanism of enhancement of PL intensity using the coating of polystyrene/SiO2 core-shell nanospheres on LED surface can be explained by the improvement in extraction efficiency by both increasing the probability of light escape by reducing Fresnel reflection and by multiple scattering within the core-shell nanospheres.

• Journal of the Korea Organic Resources Recycling Association
• /
• v.32 no.1
• /
• pp.21-29
• /
• 2024

In this study, EMC(Epoxy molding compound) waste from the semiconductor molding process is recycled and synthesized into silica nanoparticles, which are then applied as abrasive materials contains CMP(Chemical mechanical polishing) slurry. Specifically, silanol precursor is extracted from EMC waste according to the ultra-sonication method, which provides heat and energy, using ammonia solution as an etchant. By employing as-extracted silanol via a facile sol-gel process, uniform silica nanoparticles(e-SiO₂, experimentally synthesized SiO₂) with a size of ca. 100nm are successfully synthesized. Through physical and chemical analysis, it was confirmed that e-SiO₂ has similar properties compared to commercially available SiO₂(c-SiO₂, commercially SiO₂). For practical CMP applications, CMP slurry is prepared using e-SiO₂ as an abrasive and tested by polishing a semiconductor chip. As a result, the scratches that are roughly on the surface of the chip are successfully removed and turned into a smooth surface. Hence, the results present a recycling method of EMC waste into silica nanoparticles and the application to high-quality CMP slurry for the polishing process in semiconductor packaging.

• Proceedings of the Korean Society of Propulsion Engineers Conference
• /
• 2011.04a
• /
• pp.337-340
• /
• 2011

This study investigates the rheological characteristics of $SiO_2$-Kerosene gel propellants with Aerosil(R) R972, Silica 230, Silica 530. Power-law rheological model is used to confirm whether or not gelification is achieved. It was found that the produced gel have shear-thinning effect, and that the viscosity of the gel propellants increases with increasing $SiO_2$ concentration. Among gellants used in this study, gel propellant with Aerosil(R) R972 fits most to the power law model as the shear rate increases. However, gels produced with Silica 230 and Silica 530 gellant deviate from the power law model when the shear rate regime is below 100 [1/s].

• Korean Chemical Engineering Research
• /
• v.48 no.5
• /
• pp.583-588
• /
• 2010

Esterification of free fatty acid with methanol to biodiesel was investigated in a batch reactor using various solid acid catalysts, such as polymer cation-exchanged resins with sulfuric acid functional group(Amberlyst-15, Dowex 50Wx8), acidic ionic liquids (ILs)-modified silica gels respectively with $-SO_3H$ and $-SO_2Cl$ functional group ($SiO_2-[ASBI][HSO_4]$, $SiO_2-[ASCBI][HSO_4]$) and grafted silica gels respectively with $-SO_3H$ and $-SO_2Cl$ functional group ($SiO_2-R-SO_3H$, $SiO_2-R-SO_2Cl$). The effects of reaction time, temperature, reactant concentration(molar ratio of methanol to oleic acid), and catalyst amount were studied. Allylimidazolium-based ILs on modified silica gels were superior to other tested solid acid catalysts. Especially, the performance of $SiO_2-[ASBI][HSO_4]$ (immobilized by grafting of 3-allyl-1-(4-sulfobutyl)imidazolium hydrogen sulfate on silica gel) was better than that of a widely known Amberlyst-15 catalyst at the same reaction conditions. A high conversion yield of 96% was achieved in the esterification reaction of the simulated cooking oil at 353 K for 2 h. The high catalytic activity of $SiO_2-[ASBI][HSO_4]$ was attributed to the presence of strong Brønsted acid sites from the immobilized functional groups. The catalyst was recovered and the biodiesel product was separated by simple processes such as decantation and filtration.

• Journal of the Mineralogical Society of Korea
• /
• v.25 no.4
• /
• pp.271-282
• /
• 2012

We explore the effect of removal of organic ligand on the atomic configurations around oxygen in hydroxyl groups in amorphous silica gel (synthesized through hydrolysis of $SiCl_4$ in diethyl-ether) using high resolution $^{17}O$ solid state NMR spectroscopy. $^1H$ and $^{29}Si$ MAS NMR spectra for amorphous silica gel showed diverse hydrogen environments including water, hydroxyl groups (e.g., hydrogen bonded silanol, isolated silanol), and organic ligands (e.g., alkyl chain) that may interact with surface hydroxyls in the amorphous silica gel, for instance, forming silica-organic ligand complex (e.g., Si-$O{\cdots}R$). These physically and chemically adsorbed organic ligands were partly removed by ultrasonic cleaning under ethanol and distilled water for 1 hour. Whereas $^{17}O$ MAS NMR spectra with short pulse length ($0.175{\mu}s$) at 9.4 T and 14.1 T for as-synthesized amorphous silica gel showed the unresolved peak for Si-O-Si and Si-OH structures, the $^{17}O$ MAS NMR spectra with long pulse length ($2{\mu}s$) showed the additional peak at ~0 ppm. The peak at ~0 ppm may be due to Si-OH structure with very fast relaxation rate as coupled to liquid water molecules or organic ligands on the surface of amorphous silica gel. The observation of the peak at ~0 ppm in $^{17}O$ MAS NMR spectra for amorphous silica gel became more significant as the organic ligands were removed. These results indicate that the organic ligands on the surface of amorphous silica gel interact with oxygen atoms in Si-OH and provide the information about atomic structure of silanol and siloxane in amorphous silica gel. The current results could enhance the understanding of dehydration mechanism of diverse silicates, which is known as atomic scale origins of intermediate depth (approximately, 70~300 km) earthquakes in subduction zone.

• Journal of the Korean Chemical Society
• /
• v.54 no.5
• /
• pp.579-581
• /
• 2010

Solid silica supported ferric chloride ($SiO_2-FeCl_3$) catalyzed one-step synthesis of various benzimidazoles from o-phenylenediamine and aldehydes using $H_2O_2$ as the oxidant. The salient features of this method are simple and convenient procedure, easy purification and shorter reaction times.