• Title/Summary/Keyword: SiInZnO

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Thermal Annealing Effects of Amorphous Ga-In-Zn-O Metal Point Contact Field Effect Transistor for Display Application

  • Lee, Se-Won;Jeong, Hong-Bae;Lee, Yeong-Hui;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.252-252
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    • 2011
  • 최근 주목받고 있는 amorphous gallium-indium-zinc-oxide (a-GIZO) thin film transistors (TFTs)는 수소가 첨가된 비정질 실리콘 TFT에 비해 높은 이동도와 뛰어난 전기적, 광학적 특성에 의해 큰 주목을 받고 있다. 또한 넓은 밴드갭을 가지므로 가시광 영역에서 투명한 특성을 보이고, 플라스틱 기판 위에서 구부러지는 성질에 의해 플랫 패널 디스플레이나 능동 유기 발광소자 (AM-OLED), 투명 디스플레이에 응용되고 있다. 뿐만 아니라, 일반적인 Poly-Si TFT는 자체적으로 가지는 결정성에 의해 대면적화 시 균일성이 좋지 못하지만 GIZO는 비정질상 이기 때문에 백플레인의 대면적화에 유리하다는 장점이 있다. 이러한 TFT를 제작하기 전, 전기적 특성에 대한 정보를 얻거나 예측하는 것이 중요한데, 이에 따라 고안된 구조가 바로 metal point contact FET (pseudo FET)이다. pseudo FET은 소스/드레인 전극을 따로 증착할 필요 없이 채널을 증착한 후, 프로브 탐침을 채널의 표면에 적당한 압력으로 접촉시켜 전하를 공급하는 소스와 드레인처럼 동작시킬 수 있다. 따라서 소스/드레인을 증착하거나 lithography와 같은 추가적인 공정을 요구하지 않아 소자의 특성을 보다 간단하고 수월하게 분석할 수 있다는 장점이 있다. 본 연구에서는 p-type 기판위에 100nm의 oxidation SiO2를 게이트 절연막으로 사용하는 a-GIZO pseudo FET를 제작하였다. 소자 제작 후, 열처리 온도에 따른 전기적 특성을 분석하였고, 열처리 조건은 30분간 N2 분위기에서 실시하였다. 열처리 후 전기적 특성 분성 결과, 450oC에서 가장 낮은 subthreshold swing 값과 게이트 전압의 더블 스윕 후 문턱 전압의 변화가 거의 없음을 확인하였다.

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Effect of microwave power on aging dynamics of solution-processed InGaZnO thin-film transistors

  • Kim, Gyeong-Jun;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.256-256
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    • 2016
  • 기존의 디스플레이 기슬은 마스크를 통해 특정 부분에만 유기재료를 증착시키는 방법을 사용하였으나, 기판의 크기가 커짐에 따라 공정조건에 제약이 발생하였다. 이를 해결하기 위해 최근 용액 공정에 대한 연구가 활발히 진행되고 있다. 용액 공정은 기존 진공 증착 방식과 비교하였을 때 상온, 대기압에서 증착이 가능하며 경제적이고, 대면적 균일 증착에 유리하다는 장점이 있다. 반면, 용액 공정으로 제작한 소자는 시간이 지남에 따라 점차 전기적 특성이 변하는 aging effect를 보인다. Aging effect는 용액에 포함된 C기와 OH기 기반의 불순물의 영향으로 시간의 경과에 따라서 문턱전압, subthreshold swing 및 mobility 등의 전기적 특성이 변하는 현상으로 고품질의 박막을 형성하기 위해서는 고온의 열처리가 필요하다. 지금까지 고품질 박막 형성을 위한 열처리는 퍼니스 (furnace) 장비에서 주로 이루어졌는데, 시간이 오래 걸리고, 상대적으로 고온 공정이기 때문에 유리, 종이, 플라스틱과 같은 다양한 기판에 적용하기 어렵다는 단점이 있다. 따라서, 본 연구에서는 $100^{\circ}C$ 이하의 저온에서도 열처리가 가능한 microwave irradiation (MWI) 방법을 이용하여 solution-processed InGaZnO TFT를 제작하였고, 기존의 열처리 방식인 furnace로 열처리한 TFT 소자와 aging effect를 비교하였다. 먼저, solution-processed IGZO TFT를 제작하기 위해 p type Si 기판을 열산화시켜서 100 nm의 SiO2 게이트 산화막을 성장시켰고, 스핀코팅 방법으로 a-IGZO 채널층을 형성하였다. 증착후 열처리를 위하여 1000 W의 마이크로웨이브 출력으로 15분간 MWI를 실시하여 a-IGZO TFT를 제작하였고, 비교를 위하여 furnace N2 gas 분위기에서 $600^{\circ}C$로 30분간 열처리한 TFT를 준비하였다. 제작된 직후의 TFT 특성을 평가한 결과, MWI 열처리한 소자가 퍼니스 열처리한 소자보다 높은 이동도, 낮은 subthreshold swing (SS)과 히스테리시스 전압을 가지는 것을 확인하였다. 한편, aging effect를 평가하기 위하여 제작 후에 30일 동안의 특성변화를 측정한 결과, MWI 열처리 소자는 30일 동안 문턱치 전압(VTH)의 변화량 ${\Delta}VTH=3.18[V]$ 변화되었지만, furnace 열처리 소자는 ${\Delta}VTH=8.56[V]$로 큰 변화가 있었다. 다음으로 SS의 변화량은 MWI 열처리 소자가 ${\Delta}SS=106.85[mV/dec]$인 반면에 퍼니스 열처리 소자는 ${\Delta}SS=299.2[mV/dec]$이었다. 그리고 전하 트래핑에 의해서 발생하는 게이트 히스테리시스 전압의 변화량은 MWI 열처리 소자에서 ${\Delta}V=0.5[V]$이었지만, 퍼니스 열처리 소자에서 ${\Delta}V=5.8[V]$의 큰 수치를 보였다. 결과적으로 MWI 열처리 방식이 퍼니스 열처리 방식보다 소자의 성능이 우수할 뿐만 아니라 aging effect가 개선된 것을 확인할 수 있었고 차세대 디스플레이 공정에 있어서 전기적, 화학적 특성을 개선하는데 기여할 것으로 기대된다.

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Geochemical Properties of Deep Sea Sediment in the Benthic Environmental Impact Experiment Site (BIS) of Korea (심해 저층환경충격 시험지역의 퇴적물 지화학적 특성)

  • Kong, Gee Soo;Hyeong, Kiseong;Choi, Hun-Soo;Chi, Sang-Bum
    • Ocean and Polar Research
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    • v.36 no.4
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    • pp.407-421
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    • 2014
  • The benthic environmental impact experiment addresses environmental impacts at a specific site related to deep-sea mineral resource development. We have acquired several tens of multi- or box core samples at 31 sites within the Benthic environmental Impact Site (BIS) since 2010, aiming to examine the basic properties of surficial deep-sea sediment as a potential source for deep-water plumes. In this study, we present the geochemical properties such as major elements, rare earth elements (REEs), and heavy metal contents at the BIS. Such proxies vary distinctly according to the Facies association. The lithology of all core sediments in the BIS corresponds to both Association Ib and Association IIIb. The vertical profiles of some major elements ($SiO_2$, $Fe_2O_3$, CaO, $P_2O_5$, MgO, MnO) show noticeable differences between Association Ib and IIIb, while others ($Al_2O_3$, $TiO_2$, $Na_2O$, and $K_2O$) do not vary between Association Ib and IIIb. REEs are also distinctly different for Associations Ib and IIIb; in Association Ib, REY and HREE/LREE are uniform through the sediment section, while they increase downward in Association IIIb like the major elements; below a depth of 8 cm, REY is over 500 ppm. The metal enrichment factor (EF) evaluates the anthropogenic influences of some metals (Cu, Ni, Pb, Zn, and Cd) in marine sediments. In both Associations, the EF for Cu is over 1.5, the EF for Ni and Pb ranges from 0.5 to 1.5, and the EF for Zn and Cd are less than 0.5, indicating Cu is enriched but Zn and Cd are relatively depleted in the BIS. The vertical variations of geochemical properties between Association Ib and IIIb are shown to be clearly different, which seems to be related to the global climate changes such as the shift of Intertropical convergence zone (ITCZ).

.Improved Photoluminescence of $BaMgAl_{10}O_{17}:Mn$ Under VUV Excitation

  • Lee, Hyun-Woo;Jung, Kyeong-Youl;Yang, Young-Suk;Kang, Yun-Chan
    • 한국정보디스플레이학회:학술대회논문집
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    • 2004.08a
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    • pp.1083-1086
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    • 2004
  • We applied the spray pyrolysis technique to prepare Mn-doped $BaMgAl_{10}O_{17}$ (BAM) particles with high photoluminescence, which could be used in the plasma display device as a green phosphor. Several preparation conditions were investigated in order to tail the vacuum ultraviolet (VUV) characteristics. Some portions of barium were replaced with strontium to improve the luminescent intensity of BAM:Mn particles under VUV excitation. The content of Mn and Sr was optimized to obtain high luminescent efficiency under VUV excitation. Finally, the optimized BAM:Mn green particles showed higher photoluminescence intensity than that of commercial $Zn_2SiO_4$ and comparable with commercial barium-aluminate phosphor.

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Geochemistry, Secondary Contamination and Heavy Metal Behavior of Soils and Sediments in the Tohyun Mine Creek, Korea (토현광산 수계에 분포하는 토양과 퇴적물의 지구화학적 특성, 이차적 오염 및 중금속의 거동)

  • 이찬희;이현구;윤경무
    • Economic and Environmental Geology
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    • v.34 no.1
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    • pp.39-53
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    • 2001
  • Environmental pollution of the Tohyun mine creek area was investigated on the basis of geology, mineralogy and geochemistry. In soils and sediments of the mine area, ${Al_2}{O_3}/{Na_2O}$ and ${K_2}O/{Na_2}O$ ratios are partly negative correlation against ${SiO_2}/{Al_2}{O_3}$, respectively. Geochemical characteristics of some trace and rare earth elements such as V/Ni, Ni/Co, La/Ce, Th/Yb, Th/U, La/Th, ${La_N}/{Yb_N}$, La/Sc and Sc/Th are revealed a narrow range and homogeneous compositions may be explained by simple source lithology. These results suggest that sediments source of the host shale around the mine area could be originated by basic to intermediate igneous rocks. Mineral compositions of soil and sediment near the mine area were partly variable mineralogy, which are composed of quartz, mica, feldspar, chlorite, clay minerals and some pyrite. Soils and sediments with highly concentrated heavy minerals, gravity separated mineralogy, are composed of some pyrite, arsenopyrite, chalcopyrite, sphalerite, galena, goethite and various kinds of hydroxide minerals on the polished sections. As normalized by bed rock composition, average enrichment indices of major elements in sediments, precipitates, farmland soils and paddy soils are 1.0, 1.7, 0.9 and 0.8, respectively. Maximum concentration of environmental toxic elements in the mine creek are detected with Ag = 186 ppm, As = 17,100 ppm, Bi = ]27 ppm, Cd = 77 ppm, Cu = 12,299 ppm, Pb = 8,897 ppm, Sb = 1,350 ppm, W = 599 ppm and Zn = 12,250 ppm, which are increasing with total FeO increasing, and extremely high concentrations of surface sediments and precipitates near the waste rock dump. These toxic elements (As, Bi, Cd, Cu, Pb, Sb, W and Zn) of the samples, normalizing by host rock concentration, revealed that average enrichment index is 106.0 for sediments, 279.6 for precipitates, 3.5 for farmland soils and 1.6 for paddy soils. However, on the basis of EPA values, enrichment indices of all the samples are 40.7, 121.4, 1.3 and 0.6, respectively.

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Complex Formation of Transition and Post-Transition Metal Ions with 1,15-Diaza-3,4 : 12,13-dibenzo-5,8,11-trioxacyclooctadecane (전이 및 중금속이온과 1,15-diaza-3,4 : 12,13-dibenzo-5,8,11-trioxa-cyclooctadecane과의 착물형성)

  • Kim, Si-Joong;Lee, Myung-Jae;Koo, Chang-Hyung;Woo, Kyoun-Ja
    • Journal of the Korean Chemical Society
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    • v.35 no.6
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    • pp.645-652
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    • 1991
  • The stability constants$(K_f)$ of the complexes of some transition and post-transition metal ions (Co(Ⅱ), Ni(Ⅱ), Cu(Ⅱ), Zn(Ⅱ), Cd(Ⅱ), Pb(Ⅱ), Hg(Ⅱ)) with $N_2O_3$-donor macrocyclic ligand, 1,15-diaza-3,4 : 12,13-dibenzo-5,8,11-trioxacyclooctadecane ($NtnOdienH_4$), have been determined by potentiometry in aqueous solution at $25^{\circ}C$. Log $K_f$ values of the complexes were : Co(Ⅱ): 3.83, Ni(Ⅱ) : 4.56, Cu(Ⅱ) : 7.74, Zn(Ⅱ) : 4.98, Cd(Ⅱ) : 3.91, Pb(Ⅱ) : 6.65, and Hg(Ⅱ) : 14.87. The order of stabilities of transition metal complexes was the same as the natural order of stability proposed by Williams-Irving. In post-transition metal complexes, the order of stabilities was Cd(Ⅱ) < Pb(Ⅱ) < Hg(Ⅱ), and the covalent character in metal ion-donor atoms bonds appeared a dominant factor in the stability. In methanol solution, each metal ion forms 1 : 1 complex, while Ni(Ⅱ) ion forms both 1 : 1 and 1 : 2 complexes. It was confirmed by $^1H-$ and $^{13}C-$NMR spectral study that the nitrogen atoms in the ligand were major contributors for the complexation of post-transition metal ions with the ligand. It was shown, by elementry analysis, electrical conductivity and magnetic susceptibility measurements, and spectral analysis, that solid Cu(Ⅱ)-and Zn(Ⅱ)-complexes have a distorted octahedral and a tetrahedral structure, respectively.

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Occurrence and Chemical Composition of White Mica and Chlorite from Laminated Quartz Vein of Unsan Au Deposit (운산 금 광상의 엽리상 석영맥에서 산출되는 백색운모와 녹니석의 산상 및 화학조성)

  • Yoo, Bong Chul
    • Korean Journal of Mineralogy and Petrology
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    • v.34 no.1
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    • pp.1-14
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    • 2021
  • The Unsang gold deposit has been one of the three largest deposits (Daeyudong, Kwangyang) in Korea. The geology of this deposit consists of series of host rocks including Precambrian metasedimentary rock and Jurassic Porphyritic granite. The deposit consists of Au-bearing quartz veins which filled fractures along fault zones in Precambrian metasedimentary rock and Jurassic Porphyritic granite, which suggests that it is an orogenic-type deposit. Quartz veins are classified as 1) galena-quartz vein type, 2) pyrrhotite-quartz vein type, 3) pyrite-quartz vein type, 4) pegmatic quartz vein type, 5) muscovite-quartz vein type and 6) simple quartz vein type based on mineral assembles. The studied quartz vein is pyrite-quartz vein type which occurs as sericitization, chloritization and silicification. The white mica from stylolitic seams of laminated quartz vein occurs as fine or medium aggregate associated with white quartz, pyrite, chlorite, rutile, monazite, apatite, K-feldspar, zircon and calcite. The structural formular of white mica from laminated quartz vein is (K0.98-0.86Na0.02-0.00Ca0.01-0.00Ba0.01-0.00 Sr0.00)1.00-0.88(Al1.70-1.57Mg0.22-0.09Fe0.23-0.10Mn0.00Ti0.04-0.02Cr0.01-0.00V0.00Ni0.00)2.06-1.95 (Si3.38-3.17Al0.83-0.62)4.00O10(OH2.00-1.91F0.09-0.00)2.00. It indicated that white mica of laminated quartz vein has less K, Na and Ca, and more Si than theoretical dioctahedral micas. Compositional variations in white mica from laminated quartz vein are caused by phengitic or Tschermark substitution [(Al3+)VI+(Al3+)IV <-> (Fe2+ or Mg2+)VI+(Si4+)IV] and direct (Fe3+)VI <-> (Al3+)VI substitution. The structural formular of chlorite from laminated quartz vein is((Mg1.11-0.80Fe3.69-3.14Mn0.01-0.00Zn0.01-0.00K0.07-0.01Na0.01-0.00Ca0.04-0.01Al1.66-1.09)5.75-5.69 (Si3.49-2.96Al1.04-0.51)4.00O10 (OH)8. It indicated that chlorite of laminated quartz vein has more Si than theoretical chlorite. Compositional variations in chlorite from laminated quartz vein are caused by phengitic or Tschermark substitution (Al3+,VI+Al3+,IV <-> (Fe2+ or Mg2+)VI+(Si4+)IV) and octahedral Fe2+ <-> Mg2+ (Mn2+) substitution. Therefore, laminated quartz vein and alteration minerals of the Unsan Au deposit was formed during ductile shear stage of orogeny.

Compaction and Sintering Characteristics of High Energy Ball Milled Mn-Zn Ferrite Powders

  • Lee, Hyunseung;Rhee, Hoseong;Lee, Sangsoo;Chang, Si Young
    • Korean Journal of Materials Research
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    • v.31 no.12
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    • pp.677-681
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    • 2021
  • The Mn-Zn ferrite powders were prepared by high energy ball milling, then compacted and sintered at various temperatures to assess their sintering behavior and magnetic properties. The initial ferrite powders were spherical in shape with the size of approximately 70 ㎛. After 3 h of ball milling at 300 rpm, aggregated powders ~230 nm in size and composed of ~15 nm nanoparticles were formed. The milled powders had a density of ~70 % when compacted at 490 MPa for 3 min. In the samples subsequently sintered at 1,273 K ~ 1,673 K for 3 h, the MnZnFe2O4 phase was detected. The density of the sintered samples had a tendency to increase with increasing sintering temperature up to 1,473 K, which produced the highest density of 98 %. On the other hand, the sample sintered at 1,373 K had the highest micro-hardness of approximately 610 Hv, which is due to much finer grains.

Mineralogy and Geochemistry of Iron Hydroxides in the Stream of Abandoned Gold Mine in Kwangyang, Korea (광양 폐금광 수계에 형성된 철수산화물에 대한 광물학적 및 지구화학적 특성)

  • Park, Cheon-Young;Jeoung, Yeon-Joong;Kim, Seoung-Ku
    • Journal of the Korean earth science society
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    • v.22 no.3
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    • pp.208-222
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    • 2001
  • Geochemical investigations on suspended amorphous iron oxide material from the Kwangyang gold mine and its surrounding area, Cheonnam, Korea have been carried out. The sediments samples were collected from 11 location along Kwangyang mine area and were air dried and sieved to -80 mesh. These samples consist mainly of iron, silicon and alumina. The Fe$_2$O$_3$ contents ranges from 17.9 wt.% to 72.3 wt.%. The content of Fe$_2$O$_3$ increase with decreasing Si, Al, Mg, Na, K, Mn, and Ti, whereas the contents of Te, Au, Ga, Bi, Cd, Hg, Sb, and Se increase in the amorphous stream sediments. Amorphous stream sediments have been severely enriched for As (up to 54.9 ppm), Bi (up to 3.77 ppm), Cd (up to 3.65 ppm), Hg (up to 64 ppm), Sb (up to 10.1 ppm), Cu (up to 37.1 ppm), Mo (up to 8.86 ppm), Pb (up to 9.45 ppm) and Zn (up to 29.7 ppm). At the upstream site, the Au content (up to 4.4 ppm) in the amorphous stream sediments are relatively high but those contents decrease with distance of mine location. The content of Ag (up to 0.24 ppm) were low in upstream site but those contents increase significantly in the downstream sites. The X-ray diffraction patterns of the samples have virtually no sharp and discrete peaks, indicating that some samples are amorphous or poorly-ordered. The quartz, goethite, kaolinite and illite were associated in amorphous stream sediments. The infrared spectra for amorphous stream sediments show major absorption bands due to OH stretching, adsorbed molecular water, sulfate and Fe-O stretching, respectively.

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White Mica and Chemical Composition of Samdeok Mo Deposit, Republic of Korea (삼덕 Mo 광상에서 산출되는 백색운모 및 화학조성)

  • Yoo, Bong Chul
    • Journal of the Mineralogical Society of Korea
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    • v.32 no.3
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    • pp.223-234
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    • 2019
  • The geology of the Samdeok Mo deposit consists of Paleozoic Hwajeonri formation, Kowoonri formation, Suchangri formation, Iwonri formation, Hwanggangri formation, Cretaceous, leucocratic porphyritic granite and granitic porphyry. This deposit consists of three quartz veins that filled NS oriented fractured zones in Suchangri formation. Quartz veins vary from 0.05 m to 0.3 m in thickness and extend to about 400 m in strike length. Quartz veins occur as massive, breccia, and cavity textures. Wallrock alteration has silicification, sericitization, argillitization and chloritization. The mineralogy of the quartz veins consists of quartz, fluorite, white mica, biotite, apatite, monazite, rutile, ilmenite, molybdenite, chalcopyrite, Fe-Mg-Mn oxide and Fe oxide. White mica from Samdeok Mo deposit occurs as fine or coarse grains in quartz vein and hostrock and has four mineral assemblages (I type: quartz, molybdenite, Fe oxide and Fe-Mg-Mn oxide, II type: quartz, Fe oxide and Fe-Mg-Mn oxide, III type: quartz and biotite, and IV type: quartz). The structural formular of white mica from quartz vein is $(K_{0.89-0.60}Na_{0.05-0.00}Ca_{0.01-0.00}Sr_{0.02-0.00})_{0.94-0.62}(Al_{1.54-1.12}Mg_{0.36-0.18}Fe_{0.26-0.09}Mn_{0.04-0.00}Ti_{0.02-0.00}Cr_{0.02-0.00}Zn_{0.01-0.00})_{1.91-1.72}(Si_{3.40-3.11}Al_{0.92-0.60})_{4.00}O_{10}(OH_{1.68-1.42}F_{0.58-0.32})_{2.00}$, but white mica of I type has higher FeO content, and lower $SiO_2$ and MgO contents than white micas of other types. Also, compositional variations in white mica from the Samdeok Mo deposit are caused by phengitic or Tschermark substitution ($(Al^{3+})^{VI}+(Al^{3+})^{IV}{\leftrightarrow}(Fe^{2+}{\text{ or }}Mg^{2+})^{VI}+(Si^{4+})^{IV}$) and direct $(Fe^{3+})^{VI}{\leftrightarrow}(Al^{3+})^{VI}$ substitution.