• Title/Summary/Keyword: SiC coating

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Hydrogen and Ethanol Gas Sensing Properties of Mesoporous P-Type CuO

  • Choi, Yun-Hyuk;Han, Hyun-Soo;Shin, Sun;Shin, Seong-Sik;Hong, Kug-Sun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.222-222
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    • 2012
  • Metal oxide gas sensors based on semiconductor type have attracted a great deal of attention due to their low cost, flexible production and simple usability. However, most works have been focused on n-type oxides, while the characteristics of p-type oxide gas sensors have been barely studied. An investigation on p-type oxides is very important in that the use of them makes possible the novel sensors such as p-n diode and tandem devices. Monoclinic cupric oxide (CuO) is p-type semiconductor with narrow band gap (~1.2 eV). This is composed of abundant, nontoxic elements on earth, and thus low-cost, environment-friendly devices can be realized. However, gas sensing properties of neat CuO were rarely explored and the mechanism still remains unclear. In this work, the neat CuO layers with highly ordered mesoporous structures were prepared by a template-free, one-pot solution-based method using novel ink solutions, formulated with copper formate tetrahydrate, hexylamine and ethyl cellulose. The shear viscosity of the formulated solutions was 5.79 Pa s at a shear rate of 1 s-1. The solutions were coated on SiO2/Si substrates by spin-coating (ink) and calcined for 1 h at the temperature of $200{\sim}600^{\circ}C$ in air. The surface and cross-sectional morphologies of the formed CuO layers were observed by a focused ion beam scanning electron microscopy (FIB-SEM) and porosity was determined by image analysis using simple computer-programming. XRD analysis showed phase evolutions of the layers, depending on the calcination temperature, and thermal decompositions of the neat precursor and the formulated ink were investigated by TGA and DSC. As a result, the formation of the porous structures was attributed to the vaporization of ethyl cellulose contained in the solutions. Mesoporous CuO, formed with the ink solution, consisted of grains and pores with nano-meter size. All of them were strongly dependent on calcination temperature. Sensing properties toward H2 and C2H5OH gases were examined as a function of operating temperature. High and fast responses toward H2 and C2H5OH gases were discussed in terms of crystallinity, nonstoichiometry and morphological factors such as porosity, grain size and surface-to-volume ratio. To our knowledge, the responses toward H2 and C2H5OH gases of these CuO gas sensors are comparable to previously reported values.

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Preparation of Silica Films by Surface Tension Control (표면장력 제어를 이용한 실리카 박막의 제조)

  • Lee, Jae-Jun;Kim, Yeong-Ung;Jo, Un-Jo;Kim, In-Tae;Je, Hae-Jun;Park, Jae-Gwan
    • Korean Journal of Materials Research
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    • v.9 no.8
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    • pp.804-809
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    • 1999
  • Silica films were prepared on Si single crystal substrates by a sol-gel process without DMF using TEOS as a starting material. Films were fabricated by spin coating technique. For films having a composition of TEOS : HCI(1:0.05mol), gelation time, the thickness of films, the formation of cracks and the microstructure of the films were investigated as a function of the molar ratio of $CH_3OH and H_2O$. With 8mol $CH_3OH$, the longest gelation time was measured to be 640hr. The thickness of the coated films was decreased with increasing content of $CH_3OH$. The films were sintered at $500^{\circ}C$ for 1hr with a heating rate of $0.6^{\circ}C$/min. The coated films showed worm-like grains and partially cracked microstructures at an amount of $CH_3OH$ 2mol and 4mol. The addition of more than 8 mole of $CH_2OH$ resulted in crack-free silica films. This suggests that crack-free films can be fabricated by controlling the surface tension energy of the sol solutions without DMF.

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Incident Angle Dependence of Quantum Efficiency in c-Si Solar Cell or a-Si Thin Film Solar Cell in BIPV System (광 입사각이 BIPV에 적용되는 단결정 또는 비정질 실리콘 태양전지의 양자효율에 미치는 영향)

  • Kang, Jeong-Wook;Son, Chan-Hee;Cho, Guang-Sup;Yoo, Jin-Hyuk;Kim, Joung-Sik;Park, Chang-Kyun;Cha, Sung-Duk;Kwon, Gi-Chung
    • Journal of the Korean Vacuum Society
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    • v.21 no.1
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    • pp.62-68
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    • 2012
  • The conversion efficiency of solar cells depending on incident angle of light is important for building-integrated photovoltaics (BIPV) applications. The quantum efficiency is the ratio of the number of charge carriers collected by the solar cell to the number of photons of a given energy shining on the solar cell. The analysis of angle dependence of quantum efficiencies give more information upon the variation of power output of a solar cell by the incident angle of light. The variations in power output of solar cells with increasing angle of incidence is different for the type of cell structures. In this study we present the results of the quantum efficiency measurement of single-crystalline silicon solar cells and a-Si:H thin-film solar cells with the angle of incidence of light. As a result, as the angle of incidence increases in single-crystalline silicon solar cells, quantum efficiency at all wavelength (300~1,100 nm) of light were reduced. But in case of a-Si:H thin-film solar cells, quantum efficiency was increased or maintained at the angle of incidence from 0 degree to about 40 degrees and dramatically decrease at more than 40 degrees in the range of visible light. This results of quantum efficiency with increasing incident angle were caused by haze and interference effects in thin-film structure. Thus, the structural optimization considering incident angle dependence of solar cells is expected to benefit BIPV.

A new Method of Stiction Reduction for MEMS Structures Using DDMS (DDMS를 이용한 MEMS 구조물의 새로운 점착방지 방법)

  • Kim, Bong-Hwan;Oh, Chang-Hoon;Chun, Kuk-Jin;Oh, Yong-Soo
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.6
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    • pp.9-16
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    • 2000
  • In order to achieve stiction-free polysilicon surfaces, we have suggested a new class of chemical coating precursors and confirmed their excellent characteristics. The strategy is to adopt dialkyldichlorosilanes (DDS, $R2SiCl_2$) instead of monoalkyltrichlorosilanes (MTS, $RSiCl_3$) such as octadecyltrichlorosilane (OTS) or 1H,1H2H,2H-perfluorodecyltrichlorosilane (FDTS). Dichlorodimethylsilane (DDMS, $(CH_3)2SiCl_2$) in this study is commercially available DDS with two short chains. DDMS in aprotic media spontaneously deposits on the hydrophilic polysilicon surface, which is completely changed to hydrophobic one. When polysilicon surface is exposed to DDMS solution at room temperature, anti-stiction property and hydrophobicity are clearly comparable to FDTS. DDMS is even superior to MTS in reliability and easy handling, which provides high yield. Since interactions among precursor molecules are reduced, conglomeration both in homogeneous solution and on surface can be effectively avoided. Even the cantilevers of 3 mm in length can be protected successfully from the stiction and the final quality of the modified surfaces is much less dependent on temperature. And no difference was found between the processes in ambient environment and in dry box. In addition, DDMS has advantages of remarkably reduced process time and low cost.

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Characteristics of Nano-Size Au Fine Particles Doped TiO2 Thin Films by Sol-Gel Method (졸-겔법에 의한 나노크기 Au 미립자 분산 TiO2 박막의 특성)

  • Park, Min-Jung;Koo, Se-Na;Lee, Kyoung-Seok;Mun, Chong-Soo
    • Journal of the Korean Ceramic Society
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    • v.43 no.2 s.285
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    • pp.114-120
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    • 2006
  • Nano-size Au particle doped $TiO_2$ films were prepared with $Ti(OC_3H_7^i)_4$, polyvinylpyrrolidone(PVP), $HAuCl_4$ and $C_3H_7OH$ etc. by sol-gel method. $TiO_2$ gel films were obtained by the dip-coating method on the $SiO_2$ glass substrates, and then heat-treated at $700^{\circ}C$ for 10 min. The thickness of $TiO_2$ films were $0.7\~1.8\;{\mu}m$. It was found that the thickness of films prepared from PVP containing solution was about $2\~8$ times higher values than that of thin films without PVP. The size of Au particles doped in the films were about $350\~750\;nm$. Nano-size Au particle dispersed $TiO_2$ films showed high absorption peak at visible region 450nm, which made them good candidates for non-linear optical materials and photo-catalytic materials. The contact angle of $TiO_2$ film for water was $12.5^{\circ}$, and therefore it is clear that $TiO_2$ films have very high hydrophilic properties and the self-cleaning effects.

Effects of ICP Power on the Properties of TiCrN Films (유도결합플라즈마의 전력이 TiCrN 코팅층에 미치는 영향)

  • Cha, B.C.;Kim, J.H.;Lee, B.S.;Kim, S.K.;Kim, D.W.;Kim, D.;You, Y.Z.
    • Journal of the Korean Society for Heat Treatment
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    • v.22 no.5
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    • pp.307-311
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    • 2009
  • In this study, TiCrN films were deposited on STS 316 Land Si (100) wafer by inductively coupled plasma (ICP) assisted D.C. magnetron sputtering. The effect R.F. power for ICP discharge on the mechanical properties of TiCrN films was investigated. XRD, XPS and FE-SEM were used for the structure analysis. Also the Micro-Knoop hardness tester and profilometer were used for measuring hardness of coatings and film stress respectively. As increasing the R.F. power for ICP discharge, thickness of coating was decreased from 1633 nm to 1288 nm but hardness was increased about $Hk_{5g}$ 4200 at 400 W. All of the XRD patterns showed (111), (200) and (220) peaks of TiCrN films. Surface morphology was studied using the profilometer. FE-SEM was used to know morphology and cross-section of the films. Structure of the films was changed dense as increased ICP power.

Characteristic Analysis of Poly(4-Vinyl Phenol) Based Organic Memory Device Using CdSe/ZnS Core/Shell Qunatum Dots

  • Kim, Jin-U;Kim, Yeong-Chan;Eom, Se-Won;No, Yong-Han
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.289.1-289.1
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    • 2014
  • In this study, we made a organic thin film device in MIS(Metal-Insulator-Semiconductor) structure by using PVP (Poly vinyl phenol) as a insulating layer, and CdSe/ZnS nano particles which have a core/shell structure inside. We dissolved PVP and PMF in PGMEA, organic solvent, then formed a thin film through a spin coating. After that, it was cross-linked by annealing for 1 hour in a vacuum oven at $185^{\circ}C$. We operated FTIR measurement to check this, and discovered the amount of absorption reduced in the wave-length region near 3400 cm-1, so could observe decrease of -OH. Boonton7200 was used to measure a C-V relationship to confirm a properties of the nano particles, and as a result, the width of the memory window increased when device including nano particles. Additionally, we used HP4145B in order to make sure the electrical characteristics of the organic thin film device and analyzed a conduction mechanism of the device by measuring I-V relationship. When the voltage was low, FNT occurred chiefly, but as the voltage increased, Schottky Emission occurred mainly. We synthesized CdSe/ZnS and to confirm this, took a picture of Si substrate including nano particles with SEM. Spherical quantum dots were properly made. Due to this study, we realized there is high possibility of application of next generation memory device using organic thin film device and nano particles, and we expect more researches about this issue would be done.

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Spinning Multi Walled Carbon Nanotubes and Flexible Transparent Sheet Film

  • Jang, Hun-Sik;Lee, Seok-Cheol;Kim, Ho-Jong;Jeong, In-Hyeon;Park, Jong-Seo;Nam, Seung-Hun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.200-200
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    • 2012
  • We investigated a flexible transparent film using the spinning multi-walled carbon nanotubes (MWCNTs). Spin-capable MWCNTs on iron catalyzed on a SiO2 wafer was grown by chemical vapor deposition, which was performed at $780^{\circ}C$ using C2H2 and H2 gas. The average diameter and length of MWCNTs grown on the substrate were ~15 nm and $250{\sim}300{\mu}m$, respectively. The MWCNT sheets were produced by continuously pulling out from well-aligned MWCNTs on a substrate. The MWCNT sheet films were produced simply by direct coating on the flexible film or grass. The thickness of sheet film was remarkably decreased by alcohol spraying on the surface of sheet. The alcohol splay increased transmittance and decreased electrical resistance of MWCNT sheet films. Single and double sheets were produced with sheet resistance of ~699 and ${\sim}349{\Omega}/sq$, respectively, transmittance of 81~85 % and 67~72%, respectively. The MWCNT sheet films were heated through the application of direct current power. The flexible transparent heaters showed a rapid thermal response and uniform distribution of temperature. In addition, MWCNT yarns were prepared by spinning a bundle of MWCNTs from vertically super-aligned MWCNTs on a substrate, and field emission from the tip and side of the yarns was induced in a scanning electron microscope. We found that the field emission behavior from the tip of the yarn was better than the field emission from the side. The field emission turn-on voltages from the tip and side of MWCNT yarns were 1.6 and $1.7V/{\mu}m$, respectively, after the yarn was subjected to an aging process. Both the configuration of the tip end and the body of the yarn were changed remarkably during the field emission. We also performed the field emission of the sheet films. The sheet films showed the turn on voltage of ${\sim}1.45V/{\mu}m$ during the field emission.

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Stabilization Characteristics of Upgraded Coal Using Palm Oil Residues (팜 잔사유를 이용한 고품위화 석탄의 안정화 특성분석)

  • Park, In Su;Chun, Dong Hyuk;Jo, Wan Taek;You, Ji Ho;Lee, Si Hyun;Rhee, Young Woo
    • Clean Technology
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    • v.19 no.4
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    • pp.469-475
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    • 2013
  • In this research, the stabilization characteristics of upgraded coal using palm oil residues were investigated. The Eco coal, which is the Indonesian low-rank coal, was used as a raw material. The low-rank coal was mixed with palm fatty acid distillate (PFAD), and then dried in a nitrogen atmosphere at $107^{\circ}C$. The trend of spontaneous combustion of upgraded coal was studied by measuring of crossing-point temperature (CPT), low temperature oxidation and moisture readsorption. The results of the CPT measuring and low temperature oxidation showed that the propensity of spontaneous combustion of the upgraded coal was improved compared to the dried coal. The moisture readsorption characteristics of the upgraded coal was also improved. The upgraded coal was stabilized through the surface coating with PFAD, and stability of upgraded coal was proportional to the content of PFAD.

Strength Property of Ternary System Non-Cement Matrix according to the Curing Method (3성분계 무시멘트 경화체의 양생방법에 따른 강도특성)

  • Lee, Jin-Woo;Lee, Sang-Soo
    • The Journal of the Korea Contents Association
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    • v.14 no.4
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    • pp.389-396
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    • 2014
  • This study was conducted as the basic research for the replacement of Blast Furnace Slag, Red Mud, Silica Fume, etc., with cement as a solution to the problems arising from the global warming caused by the generation of $CO_2$, and conducted the experimental review to examine the feasibility of matrix having properties identical to those of cement by using the Blast Furnace slag, Red mud, Silica fume, and alkali-activator. For this, by using the the inorganic binder, such as Blast Furnace Slag, Red Mud, Silica Fume, etc., and NaOH, $Na_2SiO_3$ and others as the cement substitute material, the strength characteristic according to the mixture time variation was performed in the tentative experiment. Based on the preceding experiment, this study performed the experiment to analyze the strength properties of hardener through the curing by air-dry temperature, curing by temperature in water, coating curing, and Korean paper curing. For the water curing at $80^{\circ}C$, the compressive strength and flexural strength were found to be the most excellent at the age of the 28th day, and furthermore, it was found that the non-cement hardener could be made, which is considered to affect the production of eco-friendly concrete.