• Title/Summary/Keyword: SiC coating

Search Result 563, Processing Time 0.03 seconds

Crystallographic orientation modulation of ferroelectric $Bi_{3.15}La_{0.85}Ti_3O_{12}$ thin films prepared by sol-gel method (Sol-gel법에 의해 제조된 강유전체 $Bi_{3.15}La_{0.85}Ti_3O_{12}$ 박막의 결정 배향성 조절)

  • Lee, Nam-Yeal;Yoon, Sung-Min;Lee, Won-Jae;Shin, Woong-Chul;Ryu, Sang-Ouk;You, In-Kyu;Cho, Seong-Mok;Kim, Kwi-Dong;Yu, Byoung-Gon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2003.07b
    • /
    • pp.851-856
    • /
    • 2003
  • We have investigated the material and electrical properties of $Bi_{4-x}La_xTi_3O_{12}$ (BLT) ferroelectric thin film for ferroelectric nonvolatile memory applications of capacitor type and single transistor type. The 120nm thick BLT films were deposited on $Pt/Ti/SiO_2/Si$ and $SiO_2/Nitride/SiO_2$ (ONO) substrates by the sol-gel spin coating method and were annealed at $700^{\circ}C$. It was observed that the crystallographic orientation of BLT thin films were strongly affected by the excess Bi content and the intermediate rapid thermal annealing (RTA) treatment conditions regardeless of two type substrates. However, the surface microstructure and roughness of BLT films showed dependence of two different type substrates with orientation of (111) plane and amorphous phase. As increase excess Bi content, the crystallographic orientation of the BLT films varied drastically in BLT films and exhibited well-crystallized phase. Also, the conversion of crystallographic orientation at intermediate RTA temperature of above $450^{\circ}C$ started to be observed in BLT thin films with above excess 6.5% Bi content and the rms roughness of films is decreased. We found that the electrical properties of BLT films such as the P-V hysteresis loop and leakage current were effectively modulated by the crystallographic orientations change of thin films.

  • PDF

The Effect of Boron Content and Deposition Temperature on the Microstructure and Mechanical Property of Ti-B-C Coating Prepared by Plasma-enhanced Chemical Vapor Deposition (PECVD법에 의해 증착된 Ti-B-C코팅막 내의 보론함량과 증착온도에 따른 미세구조 및 기계적 물성의 변화)

  • Ok, Jung-Tae;Song, Pung-Keun;Kim, Kwang-Ho
    • Journal of the Korean institute of surface engineering
    • /
    • v.38 no.3
    • /
    • pp.106-111
    • /
    • 2005
  • Ternary Ti-B-C coatings were synthesized on WC-Co and Si wafers substrates by a PECVD technique using a gaseous mixture of $TiCl_4,\;BCl_3,\;CH_4,\;Ar,\;and\; H_2$. The effects of deposition variables such as substrate temperature, gas ratio, $R_x=[BCl_3/(CH_4+BCl_3)]$ on the microstructure and mechanical properties of Ti-B-C coatings were investigated. From our instrumental analyses, the synthesized Ti-B-C coatings was confirmed to be composites consisting of nanocrystallites TiC, quasi-amorphous TiB2, and amorphous carbon at low boron content, on the contrary, nanocrystallites $TiB_2$, quasi-amorphous TiC, and amorphous carbon at relatively high boron content. The microhardness of the Ti-B-C coatings increased from $\~23 GPa$ of TiC to $\~38 GPa$ of $Ti_{0.33}B_{0.55}C_{0.11}$ coatings with increasing the boron content. The $Ti_{0.33}B_{0.55}C_{0.11}$ coatings showed lower average friction coefficient of 0.45, in addition, it showed relatively better wear behavior compared to other binary coatings of $TiB_2$ and TiC. The microstruture and microhardness value of Ti-B-C coatings were largely depend on the deposition temperature.

Influence of Coating Agent and Particle Size on the Soft Magnetic Properties of Fe Based Nano Crystalline Alloy Powder Core (철기(Fe Based) 나노결정질 합금 분말코어의 코팅제 및 입도가 연자기적 특성에 미치는 영향)

  • Jang, S.J.;Choi, Y.J.;Kim, S.W.;Jeon, B.S.;Lee, T.H.;Song, C.B.;Namkung, J.
    • Journal of the Korean Magnetics Society
    • /
    • v.25 no.3
    • /
    • pp.67-73
    • /
    • 2015
  • This is a basic research for improving soft magnetic property of Fe based nano crystalline alloy powder core. The main study is done around characteristics of permeability, core loss, and DC bias depending on amount of insulation coating agent and particle size. First, $Fe_{73.5}Si_{13.5}B_9Nb_3Cu_1$ amorphous alloy ribbon was fabricated by using the planar flow casting (PFC) device. Then, heat treatment and ball milling were done to obtain alloy powder. The amount of polyether imide (PEI) added to it was varied by 0.5, 1.0, 2.0, 2.5 wt% to have compression molding into $16ton/cm^2$. After going through crystalline heat treatment, the made toroidal nano crystalline powder core ($OD12.7mm^*ID7.62mm^*H4.75mm$) had smaller permeability as amount of insulation coating agent decreases. However, it was found out that core loss and DC bias characteristics have been improved. The reason for this results were expected to be because green density of power core decreases as amorphous alloy powder particles become smaller as amount of alloy powder insulation coating agent increases, it was determined that 1 wt% of insulation coating agent is appropriate. Also, for powder core made based on alloy powder size with amount of insulation coating agent fixed at 1 wt%, effective permeability and core loss were outstanding as particle size became bigger. However, characteristics of DC bias became worse as applied DC field increases. This is expected to be due to insulation effect, residual pores, or molding density of powder core resulting from thickness of coating on surface of alloy powder.

Influence of Coating Materials and Emulsifiers on Nanoparticles in Manufacturing Process (코팅물질과 유화제가 나노입자 제조 및 안정성에 미치는 영향)

  • Kim, Byeong-Cheol;Chun, Ji-Yeon;Park, Young-Mi;Hong, Geun-Pyo;Lee, Si-Kyong;Choi, Mi-Jung
    • Food Science of Animal Resources
    • /
    • v.32 no.2
    • /
    • pp.220-227
    • /
    • 2012
  • The objective of this study was to investigate the influence of emulsion processing with various homogenization treatments on the physical properties of nanoparticles. For the manufacturing of nanoparticles, by taking the emulsion-diffusion method, various coating materials, such as gum arabic, hydroxyethyl starch, polycarprolactone, paraffin wax, ${\kappa}$-carrageenan and emulsifiers like Tween$^{(R)}$60, Tween$^{(R)}$80, monoglyceride and Pluronic$^{(R)}$F68, were added into the emulsion system. Furthermore, the various speeds (7,000 rpm to 10,000 rpm), and times (15 s to 60 s) of homogenization were treated during the emulsion- diffusion process. NEO II homomixer was the most effective homogenizer for making nanoparticles as 51 nm ($D_{10}$) and 26 nm ($D_{50}$). To manufacture smaller nanoparticles, by using NEO II homomixer, 10,000 rpm of agitation speed, polycaprolactone as coating material, and Pluronic$^{(R)}$F68 as an emulsifier were the optimum operating conditions and components. For the stability of nanoparticles for 7 days, $20^{\circ}C$ of storage temperature was appropriate to maintain the particle size. From these results, the type of homogenizer, homogenization speed, homogenization time and storage temperature could affect the particle size. Moreover, type of coating materials and emulsifier also influenced the size and stability of the nanoparticles.

In Situ Shrinkage and Stress Development for $\textrm{PbTiO}_3$, Films Prepared by Sol-gel Process (Sol-gel법으로 제조된 $\textrm{PbTiO}_3$ 박막의 온도에 따른 수축 및 응력거동)

  • Park, Sang-Myeon
    • Korean Journal of Materials Research
    • /
    • v.9 no.7
    • /
    • pp.735-739
    • /
    • 1999
  • In this study we investigated stress development and shrinkage of thickness for a single $PbTiO_3$(PT) layer prepared by sol-gel processing. Changes of microhardness for multideposited PT layers with temperatures are also monitored to understand the densification of thin films. Single PT layer shrank rapidly from room temperature to$ 220^{\circ}C$ yielding 83% of total shrinkage observed up to $500^{\circ}C$. A tensile stress of ~75MPa developed in an as-spun layer, and increased steadily beyond $130^{\circ}C$ until it reaches the maximum value of 147MPa at $250^{\circ}C$. The significant decrease of tensile stress in the film beyond $370^{\circ}C$ indicates that thermal expansion mismatch between the film and the substrate dominates the stress behavior in this temperature range. Microhardness of the multideposited coatings also increased rapidly above $300^{\circ}C$ regardless of the pyrolysis temperatures used. Large amount of perovskite phase formed in multideposited coatings after $550^{\circ}C$ may be due partly to enhanced homogeneous nucleation in the thicker coating.

  • PDF

A Study on the Improvement of Tool's Life by Applying DLC Sacrificial Layer on Nitride Hard Coated Drill Tools (드릴공구의 이종질화막상 DLC 희생층 적용을 통한 공구 수명 개선 연구)

  • Kang, Yong-Jin;Kim, Do Hyun;Jang, Young-Jun;Kim, Jongkuk
    • Journal of the Korean institute of surface engineering
    • /
    • v.53 no.6
    • /
    • pp.271-279
    • /
    • 2020
  • Non-ferrous metals, widely used in the mechanical industry, are difficult to machine, particularly by drilling and tapping. Since non-ferrous metals have a strong tendency to adhere to the cutting tool, the tool life is greatly deteriorated. Diamond-like carbon (DLC) is one of the promising candidates to improve the performance and life of cutting tool due to their low frictional property. In this study, a sacrificial DLC layer is applied on the hard nitride coated drill tool to improve the durability. The DLC coatings are fabricated by controlling the acceleration voltage of the linear ion source in the range of 0.6~1.8 kV. As a result, the optimized hardness(20 GPa) and wear resistance(1.4 x 10-8 ㎣/N·m) were obtained at the 1.4 kV. Then, the optimized DLC coating is applied as an sacrificial layer on the hard nitride coating to evaluate the performance and life of cutting tool. The Vickers hardness of the composite coatings were similar to those of the nitride coatings (AlCrN, AlTiSiN), but the friction coefficients were significantly reduced to 0.13 compared to 0.63 of nitride coatings. The drilling test were performed on S55C plate using a drilling machine at rotation speed of 2,500 rpm and penetration rate of 0.25 m/rev. The result showed that the wear width of the composite coated drills were 200 % lower than those of the AlCrN, AlTiSiN coated drills. In addition, the cutting forces of the composite coated drills were 13 and 15 % lower than that of AlCrN, AlTiSiN coated drills, respectively, as it reduced the aluminum clogging. Finally, the application of the DLC sacrificial layer prevents initial chipping through its low friction property and improves drilling quality with efficient chip removal.

Preparation of Silica Films by Sol-Gel Process (졸-겔 법을 이용한 실리카 박막의 제조)

  • 이재준;김영웅;조운조;김인태;제해준;박재관
    • Journal of the Korean Ceramic Society
    • /
    • v.36 no.9
    • /
    • pp.893-900
    • /
    • 1999
  • Silica films were prepared on Si single crystal substrates by sol-gel process using TEOS as starting materials. Films were fabricated by a spin coating technique. Sol solutions were prepared by varying the compositions of CH3OH, H2O and DMF with fixed molar ratio of TEOS=1, HCl=0.05(mol). Wetting behavior viscosity of solutions gelation time thickness of films and cracking behavior were investigated with the various solution compositions. Wetting behaviors of solutions depended on the solution compositions mixing method and mixing rate. The optimum composition of sol was TEOS : DMF ; CH3OH: H2O :HCl=1:2:4:4:0.05(mol) and the mixing rate of solution was optimized at 1 ml/min. Viscosity of solutions were controlled by choosing a reaction time(elapsed time after mixing) at a room temperature so that we could get up to 800nm thick film The surface roughness was getting poor when thickness of films was thicker than 500nm. Thickness of coated films were increased with decreasing amount of CH3OH. The best surface roughness was obtained at the content of CH3OH 4 mol. The shortest gelation time was obtained with the content of CH3OH 8 mol. Crack-free filkms were fabricated when sintered at 500$^{\circ}C$ for 1 hr with heating rate of 0.6$^{\circ}C$/min.

  • PDF

Syngas and Hydrogen Production from $CeO_2/ZrO_2$ coated Foam Devices under Simulated Solar Radiation (다공성 폼에 코팅된 $CeO_2/ZrO_2$ 를 이용한 고온 태양열 합성가스 및 수소 생산 연구)

  • Jang, Jong-Tak;Yoon, Ki-June;Han, Gui-Young
    • 한국태양에너지학회:학술대회논문집
    • /
    • 2012.03a
    • /
    • pp.260-266
    • /
    • 2012
  • Syngas and hydrogen from the $CeO_2/ZrO_2$ coated foam devices were investigated under simulated solar radiation. The $CeO_2/ZrO_2$ coated SiC, Ni and Cu foam device were prepared using drop-coating method. Syngas production step was performed at $900^{\circ}C$, and hydrogen production process was performed for ten repeated cycles to compare the CeO2 conversion in syngas production step, $H_2$ yield in hydrogen production step and cycle reproducibility. The produced syngas had the $H_2$/CO ratio of 2, which was suitable for methanol synthesis or Fischer-Tropsch synthesis process. In addition, syngas and hydrogen production process is one of the promising chemical pathway for storage and transportation of solar heat by converting solar energy to chemical energy. After ten cycles of redox reaction, the $CeO_2/ZrO_2$ was analyzed using XRD pattern and SEM image in order to characterize the physical and chemical change of metal oxide at the high temperature.

  • PDF

Alternative Breaching Methods of the TRISO Fuels

  • Lee Jong-Hyeon;Shim Joon-Bo;Ahn Byung-Gil;Kwon Sang-Woon;Kim Eung-Ho;Yoo Jae-Hyung;Park Seong-Won
    • Proceedings of the Korean Radioactive Waste Society Conference
    • /
    • 2005.11b
    • /
    • pp.92-106
    • /
    • 2005
  • The head-end processes of spent TRISO fuel have been reviewed to understand the current status and the limitations of the reported processes. The main concerns in the TRISO treatment are to effectively breach and separate the carbon and SiC layers composing the TRISO particles. The crush-bum scheme which was considered in the early stages of the development has been replaced by the crush-leach or $CO_2$ burning and the succeeding CO decomposition process because of a sequestration problem of $CO_2$ containing $^{14}C$. However there are still many obstacles to overcome in the reported processes. Hence, innovative thermomechanical and pyrochemical concepts to breach the coating layers of the TRISO particle with a minimized amount of second waste are proposed in this paper and their principles are described in detail.

  • PDF

마그네트론 스퍼터링을 이용한 TiN 다층 박막의 제조 및 특성

  • Song, Min-A;Yang, Ji-Hun;Park, Hye-Seon;Jeong, Jae-Hun;Jeong, Jae-In
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2012.02a
    • /
    • pp.294-294
    • /
    • 2012
  • 본 연구에서는 마그네트론 스퍼터를 이용한 경사 코팅법으로 질화 티타늄을 합성하였으며, 온도, 시편 인가전압, 외부 자기장 등 여러 코팅 조건에 따른 박막의 특성변화를 평가하였다. 스퍼터 소스에 장착된 타겟은 6"의 Ti 타겟을 사용하였으며, 시편과 타겟간의 거리는 약 10 cm, 시편은 Si-wafer와 SUS를 사용하였다. 시편을 진공용기에 장착하고 진공배기를 실시한 후 Ar 가스를 진공용기 내로 공급하여 시편에 전압을 인가한 후 플라즈마를 발생시켜 청정을 실시하였다. 플라즈마 청정이 끝나면 질소유량 (5~60 sccm), 온도 ($0{\sim}300^{\circ}C$), 시편 인가전압 (0~100 V), 외부 자기장 (0~3 A) 등 여러 공정변수를 변화시키며 코팅하였다. 질화 티타늄의 두께는 약 $1.5{\mu}m$로 동일하게 코팅하였다. 그 결과 온도와 시편 인가전압은 각각 $200^{\circ}C$와 100 V 일 때 가장 높은 경도를 보였으며, 외부 자기장의 변화는 경도에 큰 영향을 미치지 않았다. 코팅 변수의 변화에 따른 질화 티타늄 박막의 색차, 경도, 조도, 반사도, 마모도 등의 물성 변화를 분석하였으며, 본 연구에서 얻어진 결과를 이용하여 공정변수 제어를 통한 원하는 특성을 가진 TiN 박막을 쉽게 형성할 수 있을 것으로 예상된다.

  • PDF