• 제목/요약/키워드: Si-Si coupling

검색결과 229건 처리시간 0.027초

MoN 하지층을 이용한 스핀밸브의 자기저항 특성 (Magnetoresistance Properties of Spin Valves Using MoN Underlayer)

  • 김지원;조순철;김상윤;고훈;이창우
    • 한국자기학회지
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    • 제16권5호
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    • pp.240-244
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    • 2006
  • 본 연구에서는 하지층으로 사용한 Mo(MoN)의 두께 변화에 따른 스핀밸브 구조의 자기적 특성과 열처리 결과를 비교 검토하였다. 사용된 스핀밸브는 Si기판/$SiO_2/Mo(MoN)(t{\AA})/NiFe(21\;{\AA})/CoFe(28\;{\AA})/Cu(22\;{\AA})/CoFe(18\;{\AA})/IrMn(65\;{\AA})/Ta(25\;{\AA})$ 구조이다. 또한 본 연구에서는 MoN 하지층을 Si기판에 증착하여 열처리후 특성을 분석하였다. MoN 박막의 질소량이 증가(5 sccm까지)할수록 비저항은 증가하였다. $600^{\circ}C$에서 열처리 후 측정한 XRD 결과를 보면 Si/Mo(MoN) 박막에서 규소화합물을 발견할 수 없었다. MoN을 하지층으로 사용할 경우 $300^{\circ}C$에서 열처리 후 측정한 XPS 결과를 보면 질소 유입량이 5 sccm인 경우가 질소 유입량이 1 sccm인 경우보다 안정적임을 알았다. Mo(MoN) 하지층을 사용한 경우 하지층 두께 변화($45{\AA}$)에 따라 자기저항비와 교환결합력의 변화는 소폭이었다. Mo 하지층의 열처리 온도별 자기저항비는 열처리 전 상온에서 7.0%이었고, $220^{\circ}C$ 열처리 때 7.5%로 증가하였다. 이후 열처리 온도를 $300^{\circ}C$까지 증가 시키면 자기저항비는 7.5%에서 3.5%로 감소하였고, 질소유입량이 변화(5 sccm까지)하여도 유사한 경향을 보였다.

Effect of Annealing Temperature on the Permeability and Magneto-Impedance Behaviors of Fe68.5Mn5Si13.5B9Nb3Cu1 Amorphous Alloy

  • Le Anh-Than;Ha, Nguyen Duy;Kim, Chong-Oh;Rhee, Jang-Roh;Chau Nguyen;Hoa Nguyen Quang;Tho Nguyen Due;Lee, Hee-Bok
    • Journal of Magnetics
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    • 제11권1호
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    • pp.55-59
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    • 2006
  • The effect of annealing temperature on the permeability and giant magneto-impedance (GMI) behaviors of $Fe_{68.5}Mn_{5}Si_{13.5}B_9Nb_3Cu_1$ amorphous alloy has been systematically investigated. The nanocrystalline $Fe_{68.5}Mn_{5}Si_{13.5}B_9Nb_3Cu_1$ alloys consisting of ultra-fine $(Fe,Mn)_3Si$ grains embedded in an amorphous matrix were obtained by annealing their precursor alloy at the temperature range from $500^{\circ}C\;to\;600^{\circ}C$ for 1 hour in vacuum. The permeability and GMI profiles were measured as a function of external magnetic field. It was found that the increase of both the permeability and the GMI effect with increasing annealing temperature up to $535^{\circ}C$ was observed and ascribed to the ultrasoft magnetic properties in the sample, whereas an opposite tendency was found when annealed at $600^{\circ}C$ which is due to the microstructural changes caused by high-temperature annealing. The study of temperature dependence on the permeability and GMI effect showed some insights into the nature of the magnetic exchange coupling between nanocrystallized grains through the amorphous boundaries in nanocrystalline magnetic materials.

Preparation of Low-Temperature Fired PZT Thick Films on Si by Screen Printing

  • Cheon, Chae-Il;Lee, Bong-Yeon;Kim, Jeong-Seog;Bang, Kyu-Seok;Kim, Jun-Chul;Lee, Hyeung-Gyu
    • Transactions on Electrical and Electronic Materials
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    • 제4권2호
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    • pp.20-23
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    • 2003
  • Piezoelectric powder with the composition of PbTiO$_3$-PbZrO$_3$-Pb(Mn$\_$1/3/Nb$\_$2/3/)O$_3$ and small particle size of 0.3 $\mu\textrm{m}$ was investigated for low-temperature firing of PZT thick films. PbTiO$_3$-PbZrO$_3$-Pb(Mn$\_$1/3/Nb$\_$2/3)O$_3$ ceramics showed dense microstructure and superior piezoelectric properties, electromechanical coupling factor (k$\_$p/) of 0.501 and piezoelectric constant (d$\_$33/) of 224. The PZT paste was made of the powder and organic vehicles, and screen-printed on Pt(450nm)/YSZ(110nm)/SiO$_2$(300nm)/Si substrates and fired at 800∼900$^{\circ}C$. Any interface reaction between the PZT thick film and the bottom electrode was not observed in the PZT thick films. The PZT thick film fired at 800$^{\circ}C$ showed moderate electrical properties, the remanent polarization(p$\_$r/) of 16.0 ${\mu}$C/$\textrm{cm}^2$, the coercive field(E$\_$c/) of 36.7 ㎸/cm, and dielectric constant ($\varepsilon$$\_$r/) of 531. Low-temperature sinterable piezoelectric composition and high activity of fine particles reduced the sintering temperature of the thick film. This PZT thick film could be utilized for piezoelectric microactuators or microsensors that require Si micromachining technology.

NiFeCo/Cu/Co 삼층막의 자기저항 메모리 특성에 관한 연구 (A Study on the Magnetoresistive RAM (MRAM) Characteristics of NiFeCo/Cu/Co Trilayers)

  • 김형준;이병일;주승기
    • 한국자기학회지
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    • 제7권3호
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    • pp.152-158
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    • 1997
  • Ni$_{66}$Fe$_{16}$ $Co_{18}$ /Cu/Co 삼층막을 4 .deg. tilt-cut Si(111) 기판과 Cu(50 .angs. ) 바닥층 위에 형성하고, 사진식각 및 에칭 작업을 통해 자기저항 메모리 소자를 제작하여 자기저항 메모리 특성을 연구하였다. 외부 자장의 인가 없이 증착한 NiFeCo/Cu/Co 삼층막은 4 .deg. tilt-cut Si(111) 기판과 Cu(50 .angs. ) 바닥층의 영향으로 면내 일축자기이방성을 형성하였으며, 낮은 자장 내에서 높은 자기저항비와 자기저항민감도 등 자기저항 메모리 소자에 응용이 가능한 우수한 자기저항 특성을 나타내었다. NiFeCo/Cu/Co 삼층막의 Cu 사잇층 두께 변화에 따라 삼층막을 이루는 두 자성층 간에 강자성 및 반강자성 결합력이 관찰되었으며, 결합력은 사잇층 두께에 민감하게 변화하여 NiFeCo/Cu/Co 삼층막의 메모리 특성에 영향을 끼쳤다. 사잇층 두께의 변화에 대해 최적화된 [NiFeCo(60 .angs. )/Cu(25 .angs. )/Co(30 .angs. )]/Cu(50 .angs. )/Si(111, 4 .deg. tilt-cut) 스핀밸브 삼층막을 이용하여 거시적 자기저항 메모리 소자를 제작하고, 시험 소자의 메모리 동작에 대해 관찰하였다. Sense 전류는 10 mA로 고정하고, 약 5 * $10^{5}$ A/$cm^{2}$의 word 전류를 가해 약 10 mV의 출력 전압을 시험 소자에서 얻었으며, NiFeCo/Cu/Co 스핀밸브 삼층막의 자기저항 메모리 소자에의 응용 가능성을 확인할 수 있었다.다.

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Observation of Strong Coupling between Cavity Photon and Exciton in GaN Micro-rod

  • Gong, Su-Hyun;Ko, Suk-Min;Cho, Yong-Hoon
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.297.2-297.2
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    • 2014
  • Strong exciton-photon coupling in microcavities have generated an intense research effort since quasiparticles called exciton polaritons are produced and shows interesting phenomena. Most of studies have been done with GaAs based microcavities at cryogenic temperature. Recently, GaN material which has large exciton binding energy and oscillator strength has much attention because strong coupling between photon and exciton could be realized at room temperature. However, fabrication of high quality microcavity using GaN is challengeable due to the large mismatch between the lattice and the thermal expansion coefficient in GaN based distributed Bragg mirror. Here, we observed strong coupling regime of exciton-photon in GaN micro-rods which were grown by metalorganic vapour phase epitaxy (MOCVD) on Si substrate. Owing to the hexagonal cross-section of micro-rod, whispering gallery modes of photon are naturally formed and could be coupled with exciton in GaN. Using angle-resolved micro-photoluminescence measurement, exciton polariton dispersion curves were directly observed from GaN micro-rod. We expect room temperature exciton polariton condensation could be realized in high quality GaN micro-rod.

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Low-loss Electrically Controllable Vertical Directional Couplers

  • Tran, Thang Q.;Kim, Sangin
    • Current Optics and Photonics
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    • 제1권1호
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    • pp.65-72
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    • 2017
  • We propose a nearly lossless, compact, electrically modulated vertical directional coupler, which is based on the controllable evanescent coupling in a previously proposed graphene-assisted total internal reflection (GA-FTIR) scheme. In the proposed device, two single-mode waveguides are separate by graphene-$SiO_2$-graphene layers. By changing the chemical potential of the graphene layers with a gate voltage, the coupling strength between the waveguides, and hence the coupling length of the directional coupler, is controlled. Therefore, for a properly chosen, fixed device length, when an input wave is launched into one of the waveguides, the ratio of their output powers can be controlled electrically. The operation of the proposed device is analyzed, with the dispersion relations calculated using a model of a one-dimensional slab waveguide. The supermodes in the coupled waveguide are calculated using the finite-element method to estimate the coupling length, realistic devices are designed, and their performance was confirmed using the finite-difference time-domain method. The designed $3{\mu}m$ by $1{\mu}m$ device achieves an insertion loss of less than 0.11 dB, and a 24-dB extinction ratio between bar and cross states. The proposed low-loss device could enable integrated modulation of a strong optical signal, without thermal buildup.

Construction of Ortho-Phenylene-Bridged Cp/Amido Titanium Complexes and Their Ethylene/Apha-Olefin Copolymerizations

  • Cho, Dae-Joon;Wu, Chun-Ji;Lee, Bun-Yeoul
    • 한국고분자학회:학술대회논문집
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    • 한국고분자학회 2006년도 IUPAC International Symposium on Advanced Polymers for Emerging Technologies
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    • pp.223-223
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    • 2006
  • A Suzuki-coupling route is developed for preparation of ortho-phenylene-bridged Cp/amido complexes, one of which shows higher activity, higher 1-hexene incorporation, and higher molecular weight than the silylene-bridged standard CGC $[Me_{2}Si({\eta}^{5}-Me_{4}Cp)(N^{t}Bu)]TiCl_{2}$.

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유전체 경계면에 경사지게 입사하는 beam cone의 해석과 그 응용 (Beam cone analysis and its applications for the beams obliquely input to dielectric boundaries)

  • 이병호;민성욱
    • 전자공학회논문지A
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    • 제33A권5호
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    • pp.142-148
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    • 1996
  • It is shown that a simple vector analysis method can provide beam cone shapes for laser bemas non-paraxially input to dielectric boundaries with inclination. Acceptance coen shapes for angled-endface fibers are calculated by the method. Beam cone shapes inside InP substrates are also calculated by the method for the coupling of an optical fiber and an InP-based photodiode using a Si v-groove. The effectiveness and errors of the recently suggested matrix method for inclined boundaries are also studied.

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