• 산업기술연구
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• 제32권A호
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• pp.119-123
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• 2012

Diamond-like carbon(DLC) thin films with interlayer were deposited on silicon substrate using a reactive sputtering method. The thermal stability of the films was investigated by annealing the films for 1hr in air in the range of 100 to $500^{\circ}C$. The $I_D/I_G$ ratio increased with increasing temperature as related to the $sp^3-to-sp^2$transition. Accordingly, G-position shifting started from $150^{\circ}C$ in the DLC films and from $270^{\circ}C$ in the a-Si/DLC films. Moreover, in the case of the a-Si/DLC films the film still observed even after annealing at $500^{\circ}C$. The thermal stability of the reactive sputtered DLC films appeared to be improved by the a-Si interlayer.

• 한국광학회지
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• 제8권4호
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• pp.277-282
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• 1997

광학소자나 전자소자의 코팅에 많이 이용되고 있는 Diamond-like Carbon(DLC) 박막의 복소굴절율을 광학적 방법을 사용하여 구하였다. PECVD(Plasma enhanced CVD)법에 의해 Si(100)기판과 비정질실리카 기판위에 각각 성장시킨 DLC 박막을 분광타원해석기와 분광광도계를 이용하여 타원해석 스펙트럼과 광투과율 스펙트럼을 측정하고, Sellmeier 분산관계식과 양자역학적 진동자 모델을 이용하여 분석하였다. 비정질실리카 위에 증착된 DLC 박막의 광투과영역에서 분광타원해석분석으로 굴절률 및 박막의 유효두께를 구하고 광흡수영역에서 투과스펙트럼을 역방계산하여 소광계수를 구한 뒤, 이 소광계수 스펙트럼에 최적 근사하는 양자역학적 분산식의 계수들을 회귀분석법으로 결정하여 복소굴절율을 구하였다. 그리고 모델링방법을 타워해석 스펙트럼에 적용하여 Si기판과 비정질이산화규소 기판위에 증착된 DLC 박막의 조밀도, 표면거칠기 등 박막상수를 박막의 성장조건에 따라 분석하였다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2015년도 춘계학술대회 논문집
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• pp.28-28
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• 2015

현재 인쇄전자 소자 생산을 위해 사용되고 있는 대부분의 그라비아 롤러는 미세 패턴의 보호와 인쇄 중 마찰에 대한 내구성을 향상시키기 위해 경질 크롬 도금 막이 사용되고 있다. 그러나 경질 크롬 도금 막의 경우 구현할 수 있는 경도(~1000 HV)와 이형성, 내마찰(마찰계수: ~ 0.6) 특성 등에 한계가 있다. 이러한 경질 크롬 도금이 적용된 그라비아 롤은 그 수명과 내구성, 구현할 수 있는 인쇄 품질 및 신뢰성 그리고 인쇄처리 속도 등에 있어 여러 문제가 있다. DLC(Diamond Like amorphous Carbon)는 낮은 마찰계수 값인 0.2 이하와 뛰어난 내마모성, 상대재료에 대한 이형성 등을 겸비한 표면강화 기술로 경질 크롬 도금막 대비 우수한 표면 경도(>1,800 HV) 특성을 갖으며, 합성된 DLC 코팅 막의 경우 정밀 인쇄 제판이 요구하는 표면거칠기를 구현할 가능성이 높다는 장점이 있다. 특히 실리콘이 첨가 된 Si-DLC의 경우 표면의 마찰계수를 0.1 이하까지 낮출 수 있는데 닥터블레이드 및 잉크, 인쇄 기재와의 마찰 훼손을 최소화시켜 그라비아 인쇄 롤의 수명을 향상시킬 수 있다. 또한 PECVD 공정을 이용하여 합성한 Si-DLC는 표면거칠기를 10nm 이하의 경면으로 구현할 수 있으며, 높은 접촉각에 의한 우수한 이형성을 통해 미세 패턴 내부에 전자잉크/페이스트가 잔류되는 현상을 억제할 수 있다. 이는 기존 경질 크롬 도금이 적용된 그라비아 롤에서 발생하는 패턴 내 잉크 잔류-고형화와 그에 의한 사용수명 단축현상을 현저히 개선시킬 수 있다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.225-225
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• 2012

DLC (Diamind-Like Carbon) 코팅은 1970년대 이온주입기술을 통하여 개발된 것이 처음으로 알려져 있으며, 다이아몬드 구조인 SP3 구조와 그라파이트 구조인 SP2 구조가 혼재되어 있으면서 제조 방법에 따라 수소와 Si 및 다양한 금속을 내재시킬 수 있는 코팅 물질이다. DLC는 높은 경도, 내마모성, 윤활성, 표면조도 등 뛰어난 기계적 특성과 전기절연성, 화학적 안정성 그리고 높은 광학적 투과성을 가져 산업적 활용 잠재력이 높은 재료로 평가되고 있으며, 이외에도 낮은 공정 온도에서 증착할 수 있고, 고경도와 낮은 마찰계수를 가지고 있는 장점이 있다. 그러나, DLC가 열적으로 불안정하기 때문에 사용되는 환경이 $500^{\circ}C$ 이상이 되면 DLC는 자체의 성질을 잃고 거의 흑연에 가까운 물질이 되어버리는 문제가 있고, 또한 높은 압축응력과 기재와의 낮은 밀착력이 단점으로 나타나고 있다. 이에 본 연구는 그런 단점을 보완하고자 PECVD (Plasmas Enhanced Chemical Vapor Deposition) 방법으로 DLC박막에 여러 가지 첨가원소(F,Si,0)를 사용하여 증착시킨 후 400, 500, $600^{\circ}C$에서 1시간동안 열처리를 진행하였으며, 그에 따른 내열 특성을 평가하였다. 또한 염수분무 테스트를 통한 박막의 내식 특성을 평가하였다. DLC박막의 구조는 Raman Spectra을 통해, Sp3 (like diamond) peak와 Sp2 (like graphite) peak 의 혼재 여부를 분석하였고, FE-SEM을 이용하여 막의 표면 및 단면을 관찰하였다. 스크래치 테스트를 통해 DLC박막의 밀착력을 측정하였으며, 볼 온 디스크 타입의 Tribo-meter을 이용하여 마찰계수 변화를 관찰하였다. 또한 나노인덴터를 이용하여 미소경도를 측정하였다. 그 결과 일반 DLC 막에 비해 첨가원소가 함유된 DLC 박막에서 내식성 및 내열특성이 향상되었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.397-397
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• 2007

Diamondlike carbon (DLC) coatings were deposited on alumina ceramic seals using a plasma immersion ion deposition technique (PIID). Then they were subjected to tribological tests using a pin-on-disc tribometer under a high load (1.3 GPa) and under elevated temperatures up to 400C. Coefficients of friction (COFs) were recorded and compared with that of the untreated alumina while the wear tracks were analyzed using SEM with EDS to characterize the DLC films. To enhance the DLC adhesion to the substrate, various interlayers including Si and Cr were deposited using the PIID process or an ion beam assisted deposition (IBAD) method. It was observed that the DLC coating, if adhering well to the substrate, reduced the COFs significantly, from 0.4-0.8 for the uncoated alumina to about 0.05-0.1, within the tested temperature range. The adhesion was determined by the interlayer type and possibly by the application method. Cr interlayer did not perform as well as the Si interlayer. This could also be due to the fact that the Cr interlayer and the subsequent DLC coating had to be done in two different processing systems, while both the Si interlayer and the subsequent DLC film were deposited in one system without breaking the chamber. The coating failure mode was found to be delamination between the Cr and the alumina substrate. In contrast, the Si interlayer with proper DLC deposition procedures resulted in very good adhesion and hence excellent tribological performance. Further study may lead to future DLC applications of ceramic seals.

• 한국재료학회지
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• 제21권3호
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• pp.149-155
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• 2011

We investigated tribological characteristics of diamond-like carbon (DLC) in a condition with carbon nanotube (CNT) content of 1wt% in aqueous solution. Si-DLC films were deposited by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) process on Al6061 aluminum alloy. In this study, the deposition of DLC films was carried out in vacuum with a chamber pressure of 10-5 to 10-3 Torr achieved by mechanical pump followed by turbo molecular pump. The surface adsorbed oxygen on the Aluminum substrates was removed by passing Ar gas for 10 minutes. The RF power was maintained at 500W throughout the experiment. A buffer layer of HMDSO was deposited on the substrate to improve the adhesion of DLC coating. At this point CH4 gas was introduced in the chamber using gas flow controller and DLC coating was deposited on the buffer layer along with HMDSO for 50 min. The thickness of 1 ${\mu}m$ was obtained for DLC films on aluminum substrates The tribological properties of as synthesized DLC films were analyzed by wear test in the presence of dry air, water and lubricant such as CNT ink.

• 한국정밀공학회지
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• 제27권12호
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• pp.28-32
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• 2010

Technical demands for aspheric glass lens formed in market increases its application from simple camera lens module to fiber optics connection module in optical engineering. WC is often used as a metal core of the aspheric glass lens, but the long life time is issued because it fabricated in high temperature and high pressure environment. High hard thin film coating of lens core increases the core life time critically. Diamond Like Carbon(DLC) thin film coating shows very high hardness and low surface roughness, i.e. low friction between a glass lens and a metal core, and thus draw interests from an optical manufacturing industry. In addition, DLC thin film coating can removed by etching process and deposit the film again, which makes the core renewable. In this study, DLC films were deposited on the SiC ceramic core. The process variable in FVA(Filtered Vacuum Arc) method was the substrate bias-voltage. Deposited thin film was evaluated by raman spectroscopy, AFM and nano indenter and measured its crystal structure, surface roughness, and hardness. After applying optimum thin film condition, the life time and crystal structure transition of DLC thin film was monitored.

• 대한기계학회논문집A
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• 제26권9호
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• pp.1842-1848
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• 2002

Although DLC coatings have good tribological properties, these are dependant on the deposition method, the property of contact surface, and test condition. Humidity, which has little influence on tribological behavior in macro scale, is an important factor of tribological behavior in small devices like MEMS. The objective of this study is to investigate the tribological behavior of DLC coatings with particular attention to their wettability at various humidities. DLC coatings were deposited on Si substrates and tested using a reciprocating friction tester against Si$_3$N$_4$balls at various humidities. The results showed that the tribological behavior of DLC coatings was dependant on relative humidity and wettablility of DLC coatings. Friction coefficient at high relative humidity was higher thar that at low relative humidity. The tungsten-containing DLC coatings had a good wear resistance at low relative humidity whereas DLC coatings derived from argon(Ar)+cesium(Cs) gases showed a good wear resistance at high relative humidity.

• 한국세라믹학회지
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• 제35권8호
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• pp.813-818
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• 1998

A simple method to measure the elastic modulus E and Poisson's ratio v of diamod-like carbon (DLC) films deposited on Si wafer was suggested. Using the anisotropic etching technique of Si we could make the edge of DLC overhang free from constraint of Si substrate. DLC film is chemically so inert that we could not on-serve any surface damage after the etching process. The edge of DLC overhang free from constraint of Si substrate exhibited periodic sinusoidal shape. By measuring the amplitude and the wavelength of the sinu-soidal edge we could determine the stain of the film required to adhere to the substrate. Since the residual stress of film can be determine independently by measurement of the curvature of film-substrate com-posite we could calculated the biaxial elastic modulus E/(1-v) using stress-strain relation of thin films. By comparing the biaxial elastic modulus with the plane-strain modulus E/(1-{{{{ { v}^{2 } }}) measured by nano-in-dentation we could further determine the elastic modulus and Poisson's ratio independently. This method was employed to measure the mechanical properties of DLC films deposited by {{{{ { {C }_{6 }H }_{6 } }} rf glow discharge. The was elastic modulus E increased from 94 to 169 GPa as the {{{{ { V}_{ b} / SQRT { P} }} increased from 127 to 221 V/{{{{ {mTorr }^{1/2 } }} Poisson's ratio was estimated to be abou 0.16∼0.22 in this {{{{ { V}_{ b} / SQRT { P} }} range. For the {{{{ { V}_{ b} / SQRT { P} }} less than 127V/{{{{ {mTorr }^{1/2 } }} where the plastic deformation can occur by the substrate etching process however the present method could not be applied.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2007년도 춘계학술발표회 초록집
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• pp.71-72
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• 2007

In this study, we investigated the fabrication of MLR (multi-layer resist) with a very thin diamond-like carbon (DLC) layer. ArF PR/$SiO_2$/DLC MLR structure was investigated and etching characteristics of the DLC layer was patterned using $SiO_2$ hard-mask by varying the process parameters such as different high-frequency/low-frequency combination ($f_{LF}/f_{HF}$), HF/LF power ratio ($P_{HF}/P_{LF}$), $O_2$ flow and $N_2$ flow rate in $O_2/N_2$/Ar plasmas. The results indicated an increased etch rate of DLC for the higher $f_{LF}/f_{HF}$ combination and for the increased low-frequency power ($P_{LF}$). And the etch rate of DLC was decreased with increasing the $N_2$ flow rate in $O_2/N_2$/Ar plasmas. In order to confirm the application of DLC MLR for the etching process of silicon oxide, the stack of ArF PR/BARC/$SiO_2$/DLC/TEOS/Si was investigated.