• 한국표면공학회지
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• 제50권5호
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• pp.315-321
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• 2017

Antireflective pyramid arrays can be readily obtained via anisotropic etching in alkaline solution (KOH, NaOH), which is widely used in crystalline-Si (c-Si) solar cells. The periodic inverted pyramid arrays show even lower light reflectivity because of their superior light-trapping characteristics. Since this inverted pyramidal structures are mostly achieved using very complex techniques such as photolithograpy and laser processes requiring extra costs, here, we demonstrate the Cu-nanoparticle assisted chemical etching processes to make the inverted pyramidal arrays without the need of photolithography. We have mainly controlled the concentration of $Cu(NO_3)_2$, HF, $H_2O_2$ and temperature as well as time factors that affecting the reaction. Optimal inverted pyramid structure was obtained through reaction parameters control. The reflectance of inverted pyramid arrays showed < 10% over 400 to 1100 nm wavelength range while showing 15~20% in random pyramid arrays.

• Bulletin of the Korean Chemical Society
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• 제21권12호
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• pp.1193-1198
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• 2000

The preparation of nanocrystalline hematite, ${\alpha}-Fe_2O_3$, paricles and their surface coating with silica layers are described. The hematite particles with the size of 30~60 nm are firstly prepared by thermal decomposition of trinuclear acetate-hydroxo iron (III) nitrate complex, $[Fe_3$(OCOCH_3)_7$OH${\cdot}$2H_2O]NO_3$, at $400^{\circ}C$. Subsequently the hematite surfaces are coated with siliva layers by a controlled hydrolysis and condensation reaction of TEOS with varying the TEOS concentration and pH. Monodispersed and spherical $SiO_2-coatedFe_2O_3$ particles with the average particle diameter of ~90 nm and extremely narrow size distribution can be obtained at the pH of 11 and the TEOS concentration of 0.68M, which are found to be the optimum conditions in the present study in achieving the homogeneous deposition of silica layers on hematite surfaces. Diffuse reflectance UV-Vis spectra reveal that the characteristic optical reflectance of ${\alpha}-Fe_2O_3$ particles is preserved almost constant even after coating the surfaces, suggesting that the $SiO_2$ layers can be regarded as protecting layers without degrading the optical properties of hematite particles.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.217-217
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• 2011

Recently, demand for thermally stable metal nanoparticles suitable for chemical reactions at high temperatures has increased to the point to require a solution to nanoparticle coalescence. Thermal stability of metal nanoparticles can be achieved by adopting core-shell models and encapsulating supported metal nanoparticles with mesoporous oxides [1,2]. However, to understand the role of metal-support interactions on catalytic activity and for surface analysis of complex structures, we developed a novel catalyst design by coating an ultra-thin layer of titania on Pt supported silica ($SiO_2/Pt@TiO_2$). This structure provides higher metal dispersion (~52% Pt/silica), high thermal stability (~600$^{\circ}C$) and maximization of the interaction between Pt and titania. The high thermal stability of $SiO_2/Pt@TiO_2$ enabled the investigation of CO oxidation studies at high temperatures, including ignition behavior, which is otherwise not possible on bare Pt nanoparticles due to sintering [3]. It was found that this hybrid catalyst exhibited a lower activation energy for CO oxidation because of the metal-support interaction. The concept of an ultra-thin active metal oxide coating on supported nanoparticles opens-up new avenues for synthesis of various hybrid nanocatalysts with combinations of different metals and oxides to investigate important model reactions at high-temperatures and in industrial reactions.

• 한국가스학회지
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• 제26권2호
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• pp.1-8
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• 2022

본 연구에서는 탄산염암 저류층에서 활용 가능한 GPTMS((3-Glycidoxypropyl)trimethoxysilane)-SiO₂ 나노유체를 제조하고 주입 효과를 분석하였다. 표면개질에 따른 나노입자의 구조적 변화를 확인하기 위해 푸리에변환적외선분광(Fourier transform infrared spectroscopy, FTIR) 분석을 수행했으며, 0.5 mmol/g 이상의 GPTMS 농도에서 실리카 입자의 표면개질을 의미하는 2,950 cm^-1의 C-H 신축 진동(C-H stretching vibration)을 확인하였다. 또한, 친유성 상태로 에이징된 석회석과 백운석을 대상으로 나노입자의 농도와 주입률에 따른 GPTMS-SiO₂ 나노유체의 코어유동 실험을 수행하였다. 나노유체 주입에 따라 최대 18.9%의 오일이 추가로 회수되었으며, 암석의 접촉각과 투과도 변화를 확인할 수 있었다. 이는 나노입자가 탄산염암 표면에 흡착됨에 따라 습윤도를 개선함과 동시에 공극에 영향을 준다는 것을 의미한다. 따라서, 제조된 나노유체는 탄산염암 저류층을 대상으로 한 석유회수증진의 주입유체로 사용될 수 있으며 습윤도, 투과도 변화와 같은 유체 유동물성 개선에 활용될 것으로 기대된다.

• 유기물자원화
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• 제32권1호
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• pp.21-29
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• 2024

본 연구에서는 반도체 패키징의 몰딩 공정에서 발생하는 EMC 폐기물을 재활용하여 실리카 나노입자를 성공적으로 제조하였으며, 이를 CMP 공정용 슬러리의 연마재 물질로 응용하였다. 상세히는, EMC 폐기물을 암모니아 용액과 소니케이터를 활용하여 열과 에너지를 가하는 에칭 과정을 통해 실리카 나노입자를 제조하기 위한 실라놀 전구체를 추출하였다. 이후 실라놀 전구체를 활용하여 졸-겔법을 통해 약 100nm를 나타내는 균일한 구형의 실리카 나노입자(e-SiO₂, experimentally synthesized SiO₂)를 합성하였다. 제조한 e-SiO₂는 물리화학적 분석을 통해 상용화된 실리카 입자(c-SiO₂, commercially SiO₂)와 동일한 형상과 구조를 지니고 있음을 확인할 수 있었다. 최종적으로, e-SiO₂를 연마재로 사용하여 CMP 공정용 슬러리를 제조하여 실제적인 반도체 칩의 연마 성능을 확인하였다. 그 결과, 반도체 칩의 표면에 존재하던 스크래치가 성공적으로 제거되어 매끈한 표면으로 바뀌게 된 것을 확인하였다. 본 연구 결과는 물질의 재활용법에 대한 설계를 통해 EMC 폐기물의 부가가치를 향상시키기 위하여 반도체 공정에서 대표적으로 활용되는 고부가가치 소재인 실리카 입자로 성공적으로 제조하고 이를 응용하는 방법에 대해 제시하였다.

• Advances in nano research
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• 제10권3호
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• pp.295-312
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• 2021

A new ionic liquid functionalized magnetic silica nanoparticle was synthesized and characterized and tested as an adsorbent. The adsorbent was used for magnetic solid phase extraction on ICP-MS method. Simultaneous determination of precious metal Au has been addressed. The method is simple and fast and has been applied to standard water and surface water analysis. A new method for separation/analysis of trace precious metal Au by Magnetron Solid Phase Extraction (MSPE) combined with ICP-MS. The element to be tested is rapidly adsorbed on CoFe2O4@SiO2@[BMIM]PF6 composite nano-adsorbent and eluted with thiourea. The method has a preconcentration factor of 9.5-fold. This method has been successfully applied to the determination of gold in actual water samples. Hydrophobic Ionic Liquids (ILs) 1-butyl-3-methylimidazole hexafluorophosphate ([BMIM]PF6) coated CoFe2O4@SiO2 nanoparticles with core-shell structure to prepare magnetic solid phase extraction agent (CoFe2O4@SiO2@ILs) and establish a new method of MSPE coupled with inductively coupled plasma mass spectrometry for separation/analysis of trace gold. The results showed that trace gold was adsorbed rapidly by CoFe2O4@SiO2@[BMIM]PF6 and eluanted by thiourea. Under the optimal conditions, preconcentration factor of the proposed method was 9.5-fold. The linear range, detection limit, correlation coefficient (R) and relative standard deviation (RSD) were found to be 0.01~1000.00 ng·mL-1, 0.001 ng·mL-1, 0.9990 and 3.4% (n = 11, c = 4.5 ng·mL-1). The CoFe2O4@SiO2 nanoparticles could be used repeatedly for 8 times. This proposed method has been successfully applied to the determination of trace gold in water samples.

• 센서학회지
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• 제22권3호
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• pp.197-201
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• 2013

This paper describes the fabrication and characterization of graphene based carbon dioxide ($CO_2$) gas sensors. Graphene was synthesized by thermal decomposition of SiC. The resistivity $CO_2$ gas sensors were fabricated by pure graphene and graphene decorated Au nanoparticles (NPs). The Au NPs with size of 10 nm were decorated on graphene. Au electrode deposited on the graphene showed Ohmic contact and the sensors resistance changed following to various $CO_2$ concentrations. Resulting in resistance sensor using pure graphene can detect minimum of 100 ppm $CO_2$ concentration at $50^{\circ}C$, whereas Au/graphene can detect minimum 2 ppm $CO_2$ concentration at same at $50^{\circ}C$. Moreover, Au NPs catalyst improved the sensitivity of the graphene based $CO_2$ sensors. The responses of pure graphene and Au/graphene are 0.04% and 0.24%, respectively, at $50^{\circ}C$ with 500 ppm $CO_2$ concentration. The optimum working temperature of $CO_2$ sensors is at $75^{\circ}C$.

• 센서학회지
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• 제19권2호
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• pp.87-91
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• 2010

Hydrogen gas sensors were fabricated using $PdO_x$ loaded with SWNTs. The nanoparticle powders of $SWNT_s-PdO_x$ composite were deposited on Si wafer substrates by a vacuum filtering deposition method. The fabricated sensors were tested against hydrogen gas. The composition ratio that exhibited the highest response to hydrogen gases was SWNTs : $PdO_x$ = 98 : 2 in wt% ratio at operating temperature of about $150^{\circ}C$. The response and recovery times were shorter than 1.0 min. in presence of 1000 ppm hydrogen.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.66-66
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• 2011

Anodic titanium dioxide (TiO2) nanotubes are very attractive materials for gas sensors due to its large surface to volume ratios. The most widely known method for fabrication of TiO2 nanotubes is anodic oxidation of metallic Ti foil. Since the remaining Ti substrate is a metallic conductor, TiO2 nanotube arrays on Ti are not appropriate for gas sensor applications. Detachment of the TiO2 nanotube arrays from the Ti Substrate or the formation of electrodes onto the TiO2 nanotube arrays have been used to demonstrate gas sensors based on TiO2 nanotubes. But the sensitivity was much lower than those of TiO2 gas sensors based on conventional TiO2 nanoparticle films. In this study, Ti thin films were deposited onto a SiO2/Si substrate by electron beam evaporation. Samples were anodized in ethylene glycol solution and ammonium fluoride (NH4F) with 0.1wt%, 0.2wt%, 0.3wt% and potentials ranging from 30 to 60V respectively. After anodization, the samples were annealed at $600^{\circ}C$ in air for 1 hours, leading to porous TiO2 films with TiO2 nanotubes. With changing temperature and CO concentration, gas sensor performance of the TiO2 nanotube gas sensors were measured, demonstrating the potential advantages of the porous TiO2 films for gas sensor applications. The details on the fabrication and gas sensing performance of TiO2 nanotube sensors will be presented.

• 한국축산식품학회지
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• 제32권2호
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• pp.220-227
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• 2012

본 실험은 emulsion-diffusion 방법을 이용한 코팅물질과 유화제를 혼합하여 균질하여 유화액을 만든 후 증류수를 첨가하여 확산시킴으로써 나노입자를 제조하는 방법을 사용하였다. 유화공정에 따른 변화를 살펴보기 위하여 균질기 종류와 균질 속도, 균질 시간을 달리하여 그에 따른 입자크기의 변화를 살펴보고, 나노유화액이 가장 잘 제조되는 조건에서 여러 종류의 코팅물질과 유화제를 이용하여 나노입자의 크기 변화를 살펴보았다. 또한 저장 온도와 저장 기간에 따른 나노입자 크기를 관찰 하고 그에 따른 활성에너지를 산출하였다. 유화 공정에 따른 나노입자 크기의 변화를 살펴보면 NEO II의 경우가 가장 작고 고른 나노입자을 형성하였다. 또한 균질 속도가 증가할 수록 입자가 작아지는 것을 알 수 있었다. 하지만 균질 시간이 증가될수록 입자크기가 증가되는 경향을 보였다. PF68은 유화 능력이 가장 좋은 유화제로 관찰되었고 코팅물질은 PCL이 가장 우수한 능력을 나타내어 나노입자를 제조하는데 있어서 가장 적당하다고 사료되었다. 저장 기간에 따른 입자크기를 살펴보면 저장 기간이 증가할수록 크기가 증가하며, 저장 온도가 낮을수록 변화의 폭이 더 큰 것을 알 수 있었다. 본 연구를 통해 균질기 종류, 균질시간, 균질 속도, 코팅물질 그리고 유화제등은 유화액을 제조할 때 중요한 공정 조건이며 다양한 나노캡슐화 공정으로 원하는 크기의 나노입자를 제조할 수 있다고 사료된다.