• 제목/요약/키워드: Si-C bond

검색결과 200건 처리시간 0.034초

기판 bias 전압이 a-C:H 박막의 특성에 미치는 영향 (Effect of substrate bias voltage on a-C:H film)

  • 유영조;김효근;장홍규;오재석;김근식
    • 한국진공학회지
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    • 제6권4호
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    • pp.348-353
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    • 1997
  • DC saddle-field plasma enhanced chemical vapor deposition(PECVD) 장치를 이용 하여 상온에서 p-type Si(100) 기판위에 hydrogenated amorphous carbon(a-C:H) 박막을 증 착하고 기판의 bias 전압 변화에 따른 박막의 미세구조 변화와 광학적 특성을 연구하였다. 본 실험시 CH4 가스의 유량은 5sccm, 진공조의 $CH_4$ 가스압력은 90mtorr로 일정하게 유지 하였으며 기판의 bias 전압($V_s$)은 0V에서 400V까지 변화시켰다. Rutherford backscattering spectroscopy(RBS)와 elastic recoil detection(ERD) 측정결과 증착된 a-C:H박막의 증착율은 $V_s$=0V에서 $V_s$=400V로 증가함에 따라 45$\AA$/min에서 5$\AA$/min으로 크게 감소하였지만 박막 내의 수소 함유량은 15%에서 52%까지 크게 증가하였다. a-C:H박막내의 수소 함유량이 증 가함에 따라 a-C:H박막은 sp3CH3구조의 polymer like carbon(PLC) 구조로 변환되는 것을 FT-IR로 확인하였으며 Raman 측정 결과 $V_s$=100V와 $V_s$=200V에서 증착한 a-C:H 박막에서 만 C-C결합에 의한 disorder 및 graphite peak를 볼 수 있었다. Photoluminescence(PL) 측 정 결과 $V_s$=200V까지는 기판의 bias 전압이 증가함에 따라 PL세기는 증가하였으나 그 이 상의 인가전압에서는 PL세기가 점점 감소하였다. 특히 $V_s$=200V에서 제작한 a-C:H박막의 PL특성은 상온에서도 눈으로 보일 만큼 우수한 발광 특성을 보였으며, 기판 bias전압이 증 가함에 따라 PL peak 위치가 청색으로 편이하는 경향을 보였다. 이러한 발광 세기의 변화 는 $V_s$=0V부터 $V_s$=200V까지는 기판의 bias전압이 증가함에 따라 상대적으로 박막의 표면에 충돌하는 이온에너지의 감소로 인해 a-C:H박막내에 비발광 중심으로 작용하는 dangling bond가 감소하여 발광의 세기가 증가하였으며 $V_s$=300V이상에서는 박막내의 수소 함유량이 증가함에 따라 dangling bond수는 감소하나 발광 중심으로 작용하는 탄소간의 $\pi$결합을 포 함하는 cluster가 줄어들어 PL세기가 감소한 것으로 생각된다.

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중성리간드(L)가 (hfac)Cu(I)L 전구체의 특성 및 구리 MOCVD 공정에 미치는 영향 (Effect of Neutral Ligand(L) on the Precursor Characteristics of (hfac)Cu(I)L and on Cu MOCVD Process)

  • 최경근;김경원;이시우
    • 한국재료학회지
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    • 제11권3호
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    • pp.185-190
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    • 2001
  • (hfac)Cu(I)L구리 1가 전구체의 경우 L의 종류에 따라 여러 화합물이 존재하며 L이 전구체의 특성 및 증착에 미치는 영향을 규명하였다. 이때 중성리간드는 ATMS(allytrimethylsilane), VTMS(vinyltri-methylsilane), VCH(vinylcyclohexane), MP (4-methyl-1-pentene), ACP(allylcyclopentane), DMB (3,3-dimethyl-1-butene) 등의 alkene류이었다 hfacCu(I)L 전구체는 TG-DSC 분석에서 관찰된 Cu(I)-L 분해 온도가 낮으면 $100^{\circ}C$ 이하의 저온 증착이 가능하였고 저온에서 낮은 박막 비저항 값을 얻을 수 있었다. 또한 이 분해온도가 높은 전구체 일수록 열적으로 안정함을 일정 시간 가열평가를 통해 알 수 있었다. 약 $125~175^{\circ}C$ 증착온도에서는 중성리간드의 종류에 무관하게 증착된 구리 박막의 비저항값이 거의 비슷하였고 약 $226^{\circ}C$ 이상의 증착온도에서는 박막의 비저항이 중성리간드의 분자량의 크기에 비례하여 증가하였다. 전구체의 증기압은 중성리간드의 끓는점과 가장 밀접한 관계가 있으며 중성리간드의 끓는점이 낮으면 낮을수록 증기압은 높았다.

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Adsorption Characteristics of Multi-Metal Ions by Red Mud, Zeolite, Limestone, and Oyster Shell

  • Shin, Woo-Seok;Kang, Ku;Kim, Young-Kee
    • Environmental Engineering Research
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    • 제19권1호
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    • pp.15-22
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    • 2014
  • In this study, the performances of various adsorbents-red mud, zeolite, limestone, and oyster shell-were investigated for the adsorption of multi-metal ions ($Cr^{3+}$, $Ni^{2+}$, $Cu^{2+}$, $Zn^{2+}$, $As^{3+}$, $Cd^{2+}$, and $Pb^{2+}$) from aqueous solutions. The result of scanning electron microscopy analyses indicated that the some metal ions were adsorbed onto the surface of the media. Moreover, Fourier transform infrared spectroscopy analysis showed that the Si(Al)-O bond (red mud and zeolite) and C-O bond (limestone and oyster shell) might be involved in heavy metal adsorption. The changes in the pH of the aqueous solutions upon applying adsorbents were investigated and the adsorption kinetics of the metal ions on different adsorbents were simulated by pseudo-first-order and pseudo-second-order models. The sorption process was relatively fast and equilibrium was reached after about 60 min of contact (except for $As^{3+}$). From the maximum capacity of the adsorption kinetic model, the removal of $Pb^{2+}$ and $Cu^{2+}$ were higher than for the other metal ions. Meanwhile, the reaction rate constants ($k_{1,2}$) indicated the slowest sorption in $As^{3+}$. The adsorption mechanisms of heavy metal ions were not only surface adsorption and ion exchange, but also surface precipitation. Based on the metal ions' adsorption efficiencies, red mud was found to be the most efficient of all the tested adsorbents. In addition, impurities in seawater did not lead to a significant decrease in the adsorption performance. It is concluded that red mud is a more economic high-performance alternative than the other tested adsorption materials for applying a removal of multi-metal in seawater.

발전소용 이중보온용 강관의 홈부식(Grooving Corrosion)에 의한 파손 분석 (The Failure Analysis of Double Pipe for Insulation Used Power Plant by Grooving Corrosion)

  • 함종오;박기덕;박성진;선일식
    • 한국신뢰성학회지:신뢰성응용연구
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    • 제15권3호
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    • pp.197-206
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    • 2015
  • Failure analysis of pre-insulated pipe (SPPS 380, 400A) transporting high temperature water ($95{\sim}110^{\circ}C$) for a plant was carried out. The damaged area (${\Phi}5mm$) of pre-insulated pipe was found only on welds. The chemical composition of damaged pipe meets specification of carbon steel pipes for pressure service (KS D 3562). As results of microstructure analysis, crack propagated from outer to inside after pitting corrosion occurred on the outside surface. The non-metallic inclusion existed on the end of crack. And the non-metallic inclusion continuously and linearly formed along with the bond line of welds. Based on SEM-EDS analysis, the nonmetallic inclusions have higher Manganese (Mn) and Oxygen (O) content but sulfur (S) was not detected. As results of water quality analysis, hydrogen ion concentration and minerals like Fe, Mg, Si were in low level. But the content of dissolved oxygen (11.2 ppm) was slightly higher than that of standard. It seems that the cause of damaged pipe is grooving corrosion due to MnO inclusion formed on bond line and corrosion took place nearby welds.

에어로졸 자기조립에 의한 실리카 나노분말의 표면개질 (Surface Modification Silica Nanoparticles by Aerosol Self Assembly)

  • 길대섭;장희동;장한권;조국;김선경;오경준;최진훈
    • 한국재료학회지
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    • 제20권2호
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    • pp.78-81
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    • 2010
  • Surface modification of silica nanoparticles was investigated using an aerosol self assembly. Stearic acid was used as surface treating agent. A two-fluid jet nozzle was employed to generate an aerosol of the colloidal suspension, which contained 20 nm of silica nanoparticles, surface modifier, and ethyl alcohol. Powder properties such as morphology, specific surface area and pore size distribution were analyzed by SEM, BET and BJH methods, respectively. Surface properties of the silica power were analyzed by FT-IR. The OH bond of the $SiO_2$ surface was converted to a C-H bond. It was revealed that the hydrophilic surface changed to a hydrophobic one due to the aerosol self assembly. Morphology of the surface treated powder was nanostructured with lots of pores having an average diameter of around $2\;{\mu}m$. Depending on the stearic acid concentration (0.25 to 1.0 wt%), the pore size distribution of the particles and the degree of hydrophobicity ranged from 1.5 nm to 180 nm and 29.6% to 50.2%, respectively.

광분해 반응에 의한 Phenylsilylene의 생성과 그 반응성에 관한 연구 (Photochemical Generation of Phenylsilylene and Its Chemistry)

  • 이도남;신한섭;김장환;이명의
    • 대한화학회지
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    • 제37권8호
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    • pp.757-764
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    • 1993
  • Phenylsilylene(PhHSi:)의 광분해 전구체인, 1,1,1,3,3,3-hexamethyl-2-phenyltrisilane(2)과 2,3-dicarbomethoxy-1,4,5,6,7-pentaphenyl-7-silanorbornadiene(5)을 10%와 73%의 수율로 각각 합성하였다. 전구체 2를 254 nm의 빛을 조사시켜 광분해 실험시킨 결과 triethylsilane 존재하에서는 phenylsilylene이 Si-H 결합에 삽입된 생성물인 1,1,1-triethyl-2-phenyldisilane (6)이 44%의 수율로 얻어졌고, diphenylacetylene 존재하에서는 phenylsilylene이 삼중결합에 첨가된 후 diphenylacetylene과 [2+2] 첨가반응이 일어나 얻어진 생성물, 1-phenyl-1-silacyclopenta-2,4-diene(4)과 phenyl-silylene이 삼중결합에 첨가된 다음 곧 이합체화되어진 화합물인 1,2-diphenyl-1,2-disilacyclohexa-2,5-diene(10)이 각각 68% 와 26%의 수율로 얻어졌다. Neat 광반응에서는 생성된 phenylsilylene이 분자간 C-H 삽입반응을 하여 생성된 화합물, 1,5-dihydrosilanthren(11)과 전구체 2가 Si-H 결합에 삽입된 화합물, 1,2-diphenyltrisilane(12)이 5%와 7%의 수율로 각각 얻어졌다. 같은 조건에서 화합물 5를 triethylsilane과 methanol 존재하에서 광분해시킨 결과 phenylsilylene은 생성되지 않고 분자내 1,5-sigmatropic 자리옮김에 의한 silylenolether가 생성됨을 확인하였다.

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졸-겔법으로 제조된 복합 알루미나 미분체의 첨가제에 의한 구조적 특성 비교 (A Comparison of Structural Characterization of Composite Alumina Powder Prepared by Sol-Gel Method According to the Promoters)

  • 이정운;윤호성;채의석;박한진;황운연;박형상;박달령;유승준
    • Korean Chemical Engineering Research
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    • 제43권4호
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    • pp.503-510
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    • 2005
  • 본 연구는 졸-겔법을 이용하여 복합 알루미나를 제조하였고, 다양한 첨가제의 첨가에 의한 복합 알루미나의 열적 안정성을 고찰하였다. $1,200^{\circ}C$에서 소성시킨 복합 알루미나의 열적 안정성은 사용된 첨가제에 따라서 $Si{\fallingdotseq}La$ > Ti > $Ba{\fallingdotseq}Ce$ > Y > $Zr{\fallingdotseq}Mg$ 순으로 나타났다. 특히 실리카 첨가시 ${\alpha}$-알루미나로의 상전이 온도를 $150^{\circ}C$이상 높여 $1,200^{\circ}C$에서 소성 후에도 ${\gamma}$-형에서 ${\delta}$-형의 알루미나 상을 유지함을 알 수 있었고, 비표면적이 $3m^2/g$${\alpha}$-알루미나에 비해 $71m^2/g$(비표면적) 범위까지 증가됨을 보였다. 이러한 알루미나 입자의 특성변화는 실리카 첨가 알루미나의 경우 고온으로 소성시 Si-O-Al의 결합의 증가로 인하여 알루미나의 상전이를 지연시키는 결과로 나타나고, 란타늄 첨가 알루미나의 경우 $LaAlO_3$ 구조의 존재로 인해 알루미나의 입자간 소결을 지연시킴을 알 수 있었다. 또한 란타늄 첨가시 $1,000^{\circ}C$ 이하에서 소성시킨 경우 란타늄이 알루미나 표면에 $La_2O_3$ 구조로 존재하나 $1,000^{\circ}C$ 이상에서는 $LaAlO_3$의 perovskite 구조로 존재하고, $1,300^{\circ}C$ 이상에서는 $LaAl_{11}O_{18}$의 magneto-plumbite 구조로 존재함을 XRD와 XPS 분석 결과에 의해 확인할 수 있었다.

Synthesis of Isopropyldichlorosilane by Direct Process

  • Lim, Weon-Cheol;Cho, Joo-Hyun;Han, Joon-Soo;Yoo, Bok-Ryul
    • Bulletin of the Korean Chemical Society
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    • 제28권10호
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    • pp.1661-1664
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    • 2007
  • Direct reaction of elemental silicon with a gaseous mixture of isopropyl chloride (1) and hydrogen chloride in the presence of copper catalyst using a stirred bed reactor equipped with a spiral band agitator gave isopropyldichlorosilane having a Si-H bond (2a) as a major product and isopropyltrichlorosilane (2b) along with chlorosilanes, trichlorosilane and tetrachlorosilane. A process for production of 2a was maximized using the 1:0.5 mole ratio of 1 to HCl and smaller size of elemental silicon at a reaction temperature of 220 °C. When a reaction was carried out by feeding a gaseous mixture of 1 [12.9 g/h (0.164 mol/h)] and HCl [2.98 g/h (0.082 mol/h)] to a contact mixture of elemental silicon (360 g) and copper (40 g) under the optimum condition for 45 h, 2a among volatile products kept up about 82 mol % until 35 h and then slowly decreased down 68 mol % in 45 h reaction. Finally 2a was obtained in 38% isolated yield (based on 1 used) with an 85% consumption of elemental silicon in a 45 h reaction. In addition to 2a, 2b was obtained as minor product along with chlorosilanes, trichlorosilane, and tetrachlorosilane. The decomposition of 1 was suppressed and the production of 2a improved by adding HCl to 1.

실내역학 실험을 통한 쐐기형 제거식 쏘일네일링 공법의 적용성 평가 (An Estimation of Wedge Type Removable Soil Nailing System Using by Laboratory Tests)

  • 박시삼;한연진;허성준;윤명준;김홍택;박주석
    • 한국지반공학회:학술대회논문집
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    • 한국지반공학회 2009년도 세계 도시지반공학 심포지엄
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    • pp.1330-1333
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    • 2009
  • The soil nailing method had used in variable construction field because of construction convenience and reinforcement effect. Especially, the removal soil nailing method is useful support system in vertical excavation. In this study, to develop the wedge type removable soil nailing method for improvement of the removal soil nailing method. Because of the reinforcement materials is most important in soil nailing method, to evaluate the mechanical characteristics during laboratory strength test in this study. To conduct bond strength test of deformed bar combined with a wedged screw inside plastic fixed socket for evaluate the strength characteristics of wedge type removable soil nailing method and evaluate the strength characteristics of fixed socket based on laboratory tests.

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Al-Si 용융도금된 11%Cr 페라이트 스테인리스강, STS409L GTA 용접부의 미세조직과 경도 (Microstructures and Hardness of Al-Si Coated 11%Cr Ferritic Stainless Steel, 409L GTA Welds)

  • 박태준;공종판;나혜성;강정윤;엄상호;김정길;우인수;이종섭
    • Journal of Welding and Joining
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    • 제28권3호
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    • pp.92-98
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    • 2010
  • Ferritic stainless steels, which have relatively small thermal expansion coefficient and excellent corrosion resistance, are increasingly being used in vehicle manufacturing, in order to increase the lifetime of exhaust manifold parts. But, there are limits on use because of the problem related to cosmetic resistance, corrosions of condensation and high temperature salt etc. So, Aluminum-coated stainless steel instead of ferritic stainless steel are utilized in these parts due to the improved properties. In this investigation, Al-8wt% Si alloy coated 409L ferritic stainless steel was used as the base metal during Gas Tungsten Arc(GTA) welding. The effects of coated layer on the microstructure and hardness were investigated. Full penetration was obtained, when the welding current was higher than 90A and the welding speed was lower than 0.52m/min. Grain size was the largest in fusion zone and decreased from near HAZ to base metal. As welding speed increased, grain size of fusion zone decreased, and there was no big change in HAZ. Hardness had a peak value in the fusion zone and decreased from the bond line to the base metal. The highest hardness in the fusion zone resulted from the fine re-precipitation of the coarse TiN and Ti(C, N) existed in the base metal during melting and solidification process and the presence of fine $Al_2O_3$ and $SiO_2$ formed by the migration of the elements, Al and Si, from the melted coating layer into the fusion zone.