• 제목/요약/키워드: Si activation

검색결과 649건 처리시간 0.03초

다결정 실리콘 박막 위에 P이온 샤워 도핑 후 열처리 방법에 따르는 도펀트 활성화 및 결함 회복에 관한 효과 (The Effect of Annealing Methods on Dopant Activation and Damage Recovery of Phosphorous ion Shower Doped Poly-Si)

  • 김동민;노재상;이기용
    • 전기화학회지
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    • 제8권1호
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    • pp.24-31
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    • 2005
  • Ion-Shower-Doping장비 및 $PH_/3M_2$혼합 가스를 사용하여 Phosphorous를 ELA방법으로 제조된 Poly-Si에 가속 전압 및 조사량을 변수로 이온 주입하였다. As-implanted된 시편의 결정도는 UV-transmittance spectroscopy를 사용하여 측정하였다. 이 때 UV-transmittance를 이용하여 측정한 값은 Raman spectroscopy를 이용해서 측정한 값과 서로 관련되어 있음을 알았다. 면 저항은 가속전압이 1kV에서 15kV까지 증가함에 따라 감소한다 그러나 가혹한 도핑조건하에서는 가속전압의 증가 시 면 저항이 증가한다. 이는 활성화 열처리 후 치유되지 않은 결함에 의해 전자가 포획되며 이에 따라 전하 운반자의 농도가 감소하는 때문이다. 활성화 열처리는 로열처리, RTA 열처리, ELA 열처리 등의 방법으로 수행하였고 열처리 방법에 따르는 도펀트의 활성화 및 결함의 회복의 거동을 연구하였다

${\mu}c$-Si window layer를 이용한 박막 태양전지의 고효율화에 관한 simulation

  • 박승만;공대영;이준신
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.403-403
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    • 2011
  • TCO/p/i/n 구조의 비정질 실리콘 박막 태양전지의 제작에 있어서 a-Si 혹은 넓은 밴드갭 물질인 SiOx, SiC 등은 window layer로 주로 사용 되어왔다. 그러나 ${\mu}c$-Si는 우수한 광학적, 전기적 특성에 불구하고 낮은 activation energy에 의한 p/i interface 에서의 band-off set에 의한 정공재결합에 의해 사용되어 지지 못했다. 이러한 재결합은 p/i interface상에 buffer layer를 삽입함으로써 개선되어 질 수 있다. 본 논문에서는 비정질 실리콘 보다 넓은 광학적 밴드갭을 가지는 a-SiOx 박막을 완충층으로 사용하여 p/i 계면에서의 재결합 감소에 대한 시뮬레이션을 수행하였다. a-SiOX 박막 내에 포함 된 산소의 양에 따라 밴드갭을 조절하여 1.8eV~2.0eV 사이의 완충층을 삽입하여 박막태양전지의 개방전압, 단락전류, 효율 등에 끼치는 영향을 ASA 시뮬레이션을 통하여 알아보았다.

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Phosphomolybdic Acid Supported on Silica Gel as an Efficient and Reusable Catalyst for Cyanosilylation of Aldehydes

  • Kadam, Santosh T.;Kim, Sung-Soo
    • Bulletin of the Korean Chemical Society
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    • 제29권7호
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    • pp.1320-1322
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    • 2008
  • Phosphomolybdic acid supported on silica gel (PMA-$SiO_2$) is an efficient catalyst for the activation of TMSCN for the facile cyanosilylation of various aldehydes. Cyano transfer from TMSCN to aldehyde proceeds smoothly at rt in presence of 0.8 mol % of PMA-$SiO_2$ leading to a range of cyanosilylether in excellent yield (mostly over 93%) within short reaction time (30 min). The catalyst can be recovered and reused several times without loss of activity.

Effect of Oxygen and Diborane Gas Ratio on P-type Amorphous Silicon Oxide films and Its Application to Amorphous Silicon Solar Cells

  • Park, Jin-Joo;Kim, Young-Kuk;Lee, Sun-Wha;Lee, Youn-Jung;Yi, Jun-Sin;Hussain, Shahzada Qamar;Balaji, Nagarajan
    • Transactions on Electrical and Electronic Materials
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    • 제13권4호
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    • pp.192-195
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    • 2012
  • We reported diborane ($B_2H_6$) doped wide bandgap hydrogenated amorphous silicon oxide (p-type a-SiOx:H) films prepared by using silane ($SiH_4$) hydrogen ($H_2$) and nitrous oxide ($N_2O$) in a radio frequency (RF) plasma enhanced chemical vapor deposition (PECVD) system. We improved the $E_{opt}$ and conductivity of p-type a-SiOx:H films with various $N_2O$ and $B_2H_6$ ratios and applied those films in regards to the a-Si thin film solar cells. For the single layer p-type a-SiOx:H films, we achieved an optical band gap energy ($E_{opt}$) of 1.91 and 1.99 eV, electrical conductivity of approximately $10^{-7}$ S/cm and activation energy ($E_a$) of 0.57 to 0.52 eV with various $N_2O$ and $B_2H_6$ ratios. We applied those films for the a-Si thin film solar cell and the current-voltage characteristics are as given as: $V_{oc}$ = 853 and 842 mV, $J_{sc}$ = 13.87 and 15.13 $mA/cm^2$. FF = 0.645 and 0.656 and ${\eta}$ = 7.54 and 8.36% with $B_2H_6$ ratios of 0.5 and 1% respectively.

$Si_3N_4$의 산화반응 기구 (Oxidation Mechanism of $Si_3N_4$)

  • 이홍림;최태운;김종우
    • 한국세라믹학회지
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    • 제17권4호
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    • pp.197-202
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    • 1980
  • The oxidation mechanism of the not sintered pellets and sintered bodies of $Si_3N_4$ was investigated. in air over the temperature range of 800~130$0^{\circ}C$. The $\beta$-cristobalite was instantaneously formed and covered the particles of powder packed in the not sintered and weakly sintered porous $Si_3N_4$ bodies by molecular diffusion of oxygen through the porous Si3N4 bodies and an immediate oxidation. The diffusion of oxygen ion through the formed $\beta$-cristobalite surface layer is assumed to control the further oxidation of the $Si_3N_4$ particles of the porous $Si_3N_4$ bodies. The diffusion coefficients and activation energies of oxygen ion through the $\beta$-cristobalite layer were obtained by the use of a derived equation.

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고상 결정화에 의해 제작된 다결정 실리콘 박막의 특성 연구 (A Study on the characteristics of polycrystalline silicon thin films prepared by solid phase cyrstallization)

  • 김용상
    • E2M - 전기 전자와 첨단 소재
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    • 제10권8호
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    • pp.794-799
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    • 1997
  • Poly-Si films have been prepared by solid phase crystallization of LPCVD(low-pressure CVD) amorphous silicon. The crystallinity of poly-Si films has been derived from UV reflectance spectrum and lies in the range between 70% and 80% . From XRD measurement the peak at 28.2$^{\circ}$from (111) plane is dominantly detected in the SPC poly-Si films, The average grain size of poly-Si film is determined by the image of SEM and varies from 4000 $\AA$ to 8000$\AA$. The electrical conductivity of as-deposited amorphous silicon film is about 2.5$\times$10$^{-7}$ ($\Omega$.cm)$^{-1}$ , and 3~4$\times$10$^{-6}$ ($\Omega$.cm)$^{-1}$ of room temperature conductivity is the SPC poly-Si films. The conductivity activation energies are 0.5~0.6 eV or the 500$\AA$-thick poly-Si films.

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수소기처리에 의한 수소화된 비정질규소의 안정성에 관한 연구 (The Stability of Hydrogenated Amorphous Silicon by Hydrogen Radical Annealing)

  • 이재희;이원식
    • 한국진공학회지
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    • 제5권1호
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    • pp.73-76
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    • 1996
  • We have prepared hydrogenated amophous silicon (a-si : H) films with superlattice structure by hydrogen radical anneling(HRA) technique. We have studied the preparation of a-Si :H films by HRA and the optical & electronic characteristics. Optical band gap and the hydrogen contents in the a Si : H film is decreased as HRA time increased. We first report a -Si : H film prepared by periodicdeposition of a-Si : H layer and HRA have the superlattice structure using TEM . After 1 hour light soaking on the a-Si :H film prepared by HRA, there are no difference in the temperatre dependence of dark conductivity and the conductivity activation energy. An excellent stability for light in a-Si :H films by HRA can be explained using the long-range structural relaxation of the amorphous network and the propertiesof light -induced defects(LID) proposed by Fritzsche.

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Reevaluation of Photon Activation Yields of 11C, 13N, and 15O for the Estimation of Activity in Gas and Water Induced by the Operation of Electron Accelerators for Medical Use

  • Masumoto, Kazuyoshi;Matsumura, Hiroshi;Kosako, Kazuaki;Bessho, Kotaro;Toyoda, Akihiro
    • Journal of Radiation Protection and Research
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    • 제41권3호
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    • pp.286-290
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    • 2016
  • Background: Activation of air and water in the electron linear accelerator for medical use has not been considered severely. By the new Japanese regulation for protection of radiation hazard, it became indispensable to evaluate of activation of air and water in the accelerator room. The measurement of induced activity in air and water components in the electron energy region of 10 to 20 MeV is very difficult, because this energy region is close to the threshold energy region of photonuclear reactions. Then, we measured the photonuclear reaction yields of $^{13}N$, $^{15}O$, and $^{11}C$ by using the electron linear accelerator. Obtained data were compared with the data calculated by the Monte Carlo method. Materials and Methods: An activation experiment was performed at the Research Center for Electron Photon Science, Tohoku University. Highly purified $SiO_2$, $Si_3N_4$, and carbon disks were irradiated for 10 minutes by bremsstrahlung converted by a tungsten plate. Induced activity from C, N, and O was obtained. Monte Carlo calculation was performed using MCNP5 and AERY (DCHAIN-SP) to simulate the experimental condition. Cross section data were adopted the KAERI dataset. Results and Discussion: In our experiment in hospital, calculated values were not agreed with experimental values. It might be three possible reasons as the cause of this deference, such as irradiation energy, calculation procedure and cross section data. Obtained data of this work, calculated and experimental values were good agreement with each other within one order. In this work, we used KAERI dataset of photonuclear reaction instead of JENDL. Therefore, it was found that the photonuclear cross section data of light elements are most important for yield calculation in these reactions. Conclusion: Further improvement for calculation using a new dataset JENDL/PD-2015 and considering electron energy spreading will be needed.

무전해 Ni 도금에 의한 선택적 CONTACT HOLE 충전 (Selective Contact Hole Filling by electroless Ni Plating)

  • 우찬희;권용환;김영기;박종완;이원해
    • 한국표면공학회지
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    • 제25권4호
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    • pp.189-206
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    • 1992
  • The effect of activation and electroless nickel plating conditions on contact properties was investi-gated for selective electroless nickel plating of Si wafers in order to obtain an optimum condition of con-tact hole filling. According to RCA prosess, p-type silicon (100) surface was cleaned out and activated. The effects of temperature, DMAB concentration, time, and strirring were investigated for activation of p-type Si(100) surface. The optimal activation condition was 0.2M HF, 1mM PdCl2, 2mM EDTA,$ 70^{\circ}C$, and 90sec under ultrasonic vibration. In electroless nickel plating, the effect of temperature, DMAB concentra-tion, pH, and plating time were studied. The optimal plating condition found was 0.10M NiSO4.H2O, 0.11M Citrate, pH 6.8, $60^{\circ}C$, 30minutes. The contact resistance of films was comparatively low. It took 30minutes to obtain 1$\mu\textrm{m}$ thick film with 8mM DMAB concentration. The film surface roughness was improved with decreasing temperature and decreasing pH of the plating solution. The best quality of the film was obtained at the condition of temperature $60^{\circ}C$ and pH 6.0. The micro-vickers hardness of film was about 800Hv. Plating rate of nickel on the hole pattern was slower than that of nickel on the line pattern.

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Deep-learning-based gestational sac detection in ultrasound images using modified YOLOv7-E6E model

  • Tae-kyeong Kim;Jin Soo Kim;Hyun-chong Cho
    • Journal of Animal Science and Technology
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    • 제65권3호
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    • pp.627-637
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    • 2023
  • As the population and income levels rise, meat consumption steadily increases annually. However, the number of farms and farmers producing meat decrease during the same period, reducing meat sufficiency. Information and Communications Technology (ICT) has begun to be applied to reduce labor and production costs of livestock farms and improve productivity. This technology can be used for rapid pregnancy diagnosis of sows; the location and size of the gestation sacs of sows are directly related to the productivity of the farm. In this study, a system proposes to determine the number of gestation sacs of sows from ultrasound images. The system used the YOLOv7-E6E model, changing the activation function from sigmoid-weighted linear unit (SiLU) to a multi-activation function (SiLU + Mish). Also, the upsampling method was modified from nearest to bicubic to improve performance. The model trained with the original model using the original data achieved mean average precision of 86.3%. When the proposed multi-activation function, upsampling, and AutoAugment were applied, the performance improved by 0.3%, 0.9%, and 0.9%, respectively. When all three proposed methods were simultaneously applied, a significant performance improvement of 3.5% to 89.8% was achieved.