• Title/Summary/Keyword: Shift pattern

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Thickness Measurement of a Transparent Thin Film Using Phase Change in White-Light Phase-Shift Interferometry

  • Kim, Jaeho;Kim, Kwangrak;Pahk, Heui Jae
    • Current Optics and Photonics
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    • v.1 no.5
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    • pp.505-513
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    • 2017
  • Measuring the thickness of thin films is strongly required in the display industry. In recent years, as the size of a pattern has become smaller, the substrate has become larger. Consequently, measuring the thickness of the thin film over a wide area with low spatial sampling size has become a key technique of manufacturing-yield management. Interferometry is a well-known metrology technique that offers low spatial sampling size and the ability to measure a wide area; however, there are some limitations in measuring the thickness of the thin film. This paper proposes a method to calculate the thickness of the thin film in the following two steps: first, pre-estimation of the thickness with the phase at the peak position of the interferogram at the bottom surface of the thin film, using white-light phase-shift interferometry; second, accurate correction of the measurement by fitting the interferogram with the theoretical pattern through the estimated thickness. Feasibility and accuracy of the method has been verified by comparing measured values of photoresist pattern samples, manufactured with the halftone display process, to those measured by AFM. As a result, an area of $880{\times}640$ pixels could be measured in 3 seconds, with a measurement error of less than 12%.

Temperature Variabilities at Upper Layer in the Korean Marine Waters Related to Climate Regime Shifts in the North Pacific (한국주변해역 상층부의 수온 변동과 북태평양 기후체제와의 관계)

  • Rahman, SM M.;Lee, Chung Il
    • Journal of the Korean Society of Marine Environment & Safety
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    • v.22 no.1
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    • pp.145-151
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    • 2016
  • Temperature variability at the upper layer related to climate regime shifts in the Korean waters was illustrated using water temperature, climate index. Three major climate regime shifts (CRS) in 1976, 1988 and 1998 in north Pacific region had an significant influence on the major marine ecosystems structure pattern. Three marginal seas around Korean peninsula; East Sea, East China Sea and Yellow Sea also got important impact from this kind of decadal shift. We used 10m sea water temperatures in four regions of Korean waters since 1950 to detect major fluctuation patterns both seasonally and also decadal shift. 1988 CRS was occurred in all of the study areas in most seasons however, 1998 CRS was only detected in the Yellow Sea and in the southern part of the East Sea. 1976 CRS was detected in all of the study area mainly in winter. After 1998 CRS, the water temperature in the southern part of the East Sea, East China Sea and Yellow Sea were going into decreased pattern; however, in the northern part of the East Sea, it was further shifted to increasing pattern which was started from 1988 CRS period.

Design of Pedestrian Detection and Tracking System Using HOG-PCA and Object Tracking Algorithm (HOG-PCA와 객체 추적 알고리즘을 이용한 보행자 검출 및 추적 시스템 설계)

  • Jeon, Pil-Han;Park, Chan-Jun;Kim, Jin-Yul;Oh, Sung-Kwun
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.66 no.4
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    • pp.682-691
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    • 2017
  • In this paper, we propose the fusion design methodology of both pedestrian detection and object tracking system realized with the aid of HOG-PCA based RBFNN pattern classifier. The proposed system includes detection and tracking parts. In the detection part, HOG features are extracted from input images for pedestrian detection. Dimension reduction is also dealt with in order to improve detection performance as well as processing speed by using PCA which is known as a typical dimension reduction method. The reduced features can be used as the input of the FCM-based RBFNNs pattern classifier to carry out the pedestrian detection. FCM-based RBFNNs pattern classifier consists of condition, conclusion, and inference parts. FCM clustering algorithm is used as the activation function of hidden layer. In the conclusion part of network, polynomial functions such as constant, linear, quadratic and modified quadratic are regarded as connection weights and their coefficients of polynomial function are estimated by LSE-based learning. In the tracking part, object tracking algorithms such as mean shift(MS) and cam shift(CS) leads to trace one of the pedestrian candidates nominated in the detection part. Finally, INRIA person database is used in order to evaluate the performance of the pedestrian detection of the proposed system while MIT pedestrian video as well as indoor and outdoor videos obtained from IC&CI laboratory in Suwon University are exploited to evaluate the performance of tracking.

Defect Inspection of Phase Shift Photo-Mask with Digital Hologram Microscope (디지털 홀로그램 현미경을 이용한 위상차 포토마스크 결함 측정)

  • Cho, Hyung-Jun;Lim, Jin-Woong;Kim, Doo-Cheol;Yu, Young-Hun;Shin, Sang-Hoon
    • Korean Journal of Optics and Photonics
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    • v.18 no.5
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    • pp.303-308
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    • 2007
  • We report here on the application of a digital holographic microscope as a metrology tool for the inspection and the micro-topography reconstruction of different micro-structures of phase shift photo-mask (PSM). The lithography by phase shift photo-mask uses the interference and the pattern of the PSM is not imaged by general optical microscope. The technique allows us to obtain digitally a high-fidelity surface topography description of the phase shift photo-mask with only one hologram image acquisition, allowing us to have relatively simple and compact set-ups able to give quantitative information of PSM.

A Study on Job Involvement according to Working Pattern and Daytime Sleepiness among Hospital Nurses (병원간호사의 근무형태와 주간수면과다증에 따른 직무몰입)

  • Hwang, Eun-Hee;Kang, Ji-Sook
    • Journal of East-West Nursing Research
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    • v.17 no.2
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    • pp.81-86
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    • 2011
  • Purpose: The purpose of this study was to examine job involvement according to working pattern and daytime sleepiness in hospital nurses. Methods: At 2 hospitals in affiliation of university, after obtaining participant's consent form, data were collected from October to November, 2007. Twohundred fifty nurses participated in the study. Questionnaire consisted of Epworth Sleepiness Scale (ESS), Job Involvement. Collected data was analyzed with SPSS 14.0 program, which was used for frequency, percentage, mean, standard deviation, t-test and Pearson correlation coefficients. Results: Major findings of this study were as follows 1) The nurses for 3 shift work was 172 (68.8%), the nurses for 2 shift work was 3 (1.2%) and the nurses for day fixation was 75 (30.0%). 2) Mean of ESS was 5.94 (3.28), daytime sleepiness was 13.2% and Job involvement had a mean of $21.27.{\pm}4.61.3$) There were significant differences between shift work and day fixed work on ESS (t=4.33, p<.001), job involvement (t=6.54, p<.001). Higher ESS were significantly related to lower job involvement (r=-.185, p=.003). Conclusion: The finding of this study gives useful informations about sleep and work involvement of hospital nurses. It is need to develop systemic management for shift work nurses by hospital, nurse organization, and government.

The Effects of Trunk Pattern Training in Proprioceptive Neuromuscular Facilitation on Muscle Activity of Lower extremity and Static Balance in Stroke Patients (고유수용성 신경근 촉진법의 체간 패턴 훈련이 뇌졸중 환자의 하지근 활성도와 정적 균형에 미치는 영향)

  • Ji, Sang-Goo;Cha, Hyun-Gyu;Lee, Dong-Geol
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.14 no.11
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    • pp.5730-5736
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    • 2013
  • The study was conducted to determine the effect of trunk pattern training in proprioceptive neuromuscular facilitation(PNF) and weight-shift training on the muscle activity and static balance in patients with hemiplegia due to stroke. Twenty patients with hemiplegia due to stroke were assigned to the trunk pattern training in PNF group(n=10) or weight-shift training group(n=10). Both groups were executed conventional treatment for 5 times per week for 6 weeks 30 minutes per session. Each group performed additional training for 20 minutes. Post training, compared to the weight-shift training group, trunk pattern training in PNF group showed significantly increased on muscle activity of rectus femoris, gastrocnemius and static balance(p<.05). These results support the perceived benefits of trunk pattern training in PNF to augment on the static balance and muscle activity of stroke patients. Therefore, trunk pattern training in PNF is feasible and suitable for stroke patients.

Iris recognition robust to noises

  • Kim, Jaemin;Jungwoo Won;Seongwon Cho
    • Proceedings of the Korean Institute of Intelligent Systems Conference
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    • 2003.09a
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    • pp.42-45
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    • 2003
  • This paper describes a new iris recognition method using shift-invariant subbands. First an iris image is preprocessed to compensate the variation of the iris image. Then, the preprocessed iris image is decomposed into multiple subbands using a shift invariant wavelet transform. The best subband among them, which have rich information for various iris pattern and robust to noises, is selected for iris recognition. The quantized pixels of the best subband yield the feature representation. Experimentally, we show that the proposed method produced superb performance in iris recognition.

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A burst-error-correcting decoding scheme of multiple trellis-coded $\pi$/4 shift QPSK for mobile communication channels (이동 통신 채널에서 다중 트렐리스 부호화된 $\pi$/4 shift QPSK의 연집 에러 정정 복호 방식)

  • 이정규;송왕철;홍대식;강창언
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.32A no.4
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    • pp.24-31
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    • 1995
  • In this paper, the dual-mode burst-error-correcting decoding algorithm is adapted to the multiple trellis-coded .pi./4 shift QPSK in order to achieve the improvement of bit error rate (BER) performance over fading channels. The dual-mode adaptive decoder which combines maximum likelihood decoding with a burst detection scheme usually operates as a Viterbi decoder and switches to time diversity error recovery whenever an uncorrectable error pattern is identified. Rayleigh fading channels and Rician fading channels having the Rician parameter K=5dB are used in computer simulation, and the simulation results are compared with those of interleaving techniques. It is shown that under the constraint of the fixed overall memory quantity, the dual-mode adaptive decoding scheme gains an advantage in the BER performance with respect to interleaving strategies.

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Performance Improvement of Clutch Actuating Hydraulic Control System at Semi-Automatic Transmission for Construction Vehicles (건설차량용 반자동 변속기 유압제어계의 성능 개선)

  • 이일영;윤소남;양경욱;이덕규
    • Transactions of the Korean Society of Automotive Engineers
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    • v.4 no.3
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    • pp.10-21
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    • 1996
  • In this study, as a strategy to improve shift characteristics, the authors developed a new style pressure modulator which can reduce shock torque during power shift by modulating the pattern of pressure increase in the cylinder for actuating the clutch. The remarkable merits of this new pressure modulator lie in its structural simplicity and durability, because the modulator is only composed of a poppet type valve and a few orifices. The usefulness of the new pressure modulator is confirmed by experiments and numerical analyses on a clutch control hydraulic system simplified for easy test. Also, the excellency of the transmission with the new pressure modulator is verified by experiments on a test bench for simulating the running power train of an excavator.

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Surface contouring using Electronic Speckle Pattern Interferometry (전자 스페클 패턴 간섭계를 이용한 형상 측정)

  • 김계성;유원재;강영준
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1995.10a
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    • pp.397-401
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    • 1995
  • ESPI(Electronic Speckle Pattern Interfermetry) is an optical technique to measure surface deforamtion of engineering components and materials in industrial ares. This optical method is capable of providing full-field results with high spatial resolution, high speed and is the non-contact technique. One of important application aspects using electronic speckle pattern interferometry is to generate contours of a diffuse object in order to provide data for 3-D shape analysis and topography measurement. The contouring method by modified dual-beam speckle pattern interferometry is proposed. We introduce a shift of the illumination beams through optical fiber in order to obtain the contour fringe patterns. The speckle pattern correlation technique is suitable for providing measurement range from millimeters to several centimeters. The complete geometric analysis of the contoretical and experimental results are obtained.

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