• 제목/요약/키워드: Shape Defect

검색결과 419건 처리시간 0.026초

실리콘 Diaphragm의 일괄 제조공정을 위한 Microscopy Study (Microscopy Study for the Batch Fabrication of Silicon Diaphragms)

  • 하병주;주병권;차균현;오명환;김철주
    • 전자공학회논문지A
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    • 제29A권1호
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    • pp.33-40
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    • 1992
  • 4인치(100) 실리콘 기판상에 센서용 다이아프램을 제조할 때 생기는 식각 현상들을 관찰하고 분석하였다. 115$^{\circ}C$의 "F etch' 용액을 사용하여 300$\mu$ 이상의 깊은 식각을 행하였을 때 식각 표면에 발생하느 식각 결함은 hillock, 반응 생성물, 그리고 횐색 잔유물로 구분될 수 있었따. 특히 hillock의 경우 식각 표면에 부착된 반응 생성물의 밀도나 크기에 관계하여 |111|면들로 이루어질는 피라밋 구조나 사다리꼴 육면체등의 형태를 취함이 확인되었다. 또한 용해된 실리콘의 국부적인 과잉 포활 발생하는 흰색 잔유물의 IR 흡수 스펙트럼을 조사한 결과, Si-N-O 성분에 미량의 h와 C가 포함된 것임을 알 수 있었다. 아울러 식각면을 식각용액에 대해 아래쪽, 위쪽, 그리고 측면을 향하도록 놓았을때 식각 결함의 존재 확률과 분포 그리고 식각율의 분포를 비교한 결과 식각율의 균일성면에서는 하측방향의 자세가, 식각결함의 제거에 있어서는 측면방향의 자세가, 식각결함의 제거에 있어서는 측면방향의 자세가 유리하게 나타났으며 이를 반응조내의 흐름 패턴을 이용하여 해석하였다.

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THE FORMATION MECHANISM OF GROWN-IN DEFECTS IN CZ SILICON CRYSTALS BASED ON THERMAL GRADIENTS MEASURED BY THERMOCOUPLES NEAR GROWTH INTERFACES

  • Abe, Takao
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 1999년도 PROCEEDINGS OF 99 INTERNATIONAL CONFERENCE OF THE KACG AND 6TH KOREA·JAPAN EMG SYMPOSIUM (ELECTRONIC MATERIALS GROWTH SYMPOSIUM), HANYANG UNIVERSITY, SEOUL, 06월 09일 JUNE 1999
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    • pp.187-207
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    • 1999
  • The thermal distributions near the growth interface of 150mm CZ crystals were measured by three thermocouples installed at the center, middle (half radius) and edge (10m from surface) of the crystals. The results show that larger growth rates produced smaller thermal gradients. This contradicts the widely used heat flux balance equation. Using this fact, it si confirmed in CZ crystals that the type of point defects created is determined by the value of the thermal gradient (G) near the interface during growth, as already reported for FZ crystals. Although depending on the growth systems the effective lengths of the thermal gradient for defect generation are varied, were defined the effective length as 10mm from the interface in this experiment. If the G is roughly smaller than 20C/cm, vacancy rich CZ crystals are produced. If G is larger than 25C/cm, the species of point defects changes dramatically from vacancies to interstitial. The experimental results which FZ and CZ crystals are detached from the melt show that growth interfaces are filled with vacancy. We propose that large G produces shrunk lattice spacing and in order to relax such lattice excess interstitial are necessary. Such interstitial recombine with vacancies which were generated at the growth interface, next occupy interstitial sites and residuals aggregate themselves to make stacking faults and dislocation loops during cooling. The shape of the growth interface is also determined by the distributions of G across the interface. That is, the small G and the large G in the center induce concave and convex interfaces to the melt, respectively.

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Skull melting법에 의해 성장된 rutile 단결정 분석 (Analysis of rutile single crystals grown by skull melting method)

  • 석정원;최종건
    • 한국결정성장학회지
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    • 제16권5호
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    • pp.181-188
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    • 2006
  • 스컬용융법에 의해 성장시킨 rutile단결정을 성장 축과 수평 또는 수직으로 절단한 후 ${\phi}5.5mmx1.0mm$ 크기의 웨이퍼로 양면연마 하였다. 연마한 흑색 웨이퍼들은 $1200^{\circ}C$에서 $3{\sim}15$시간, $1300^{\circ}C$에서 $10{\sim}50$시간 annealing을 행함에 의해 옅은 황색으로 변화되었다. Annealing 후 구조적 및 광학적 특성은 비중, SEM-EBSP, XRD, FT-IR, laser Raman, PL 그리고 XPS 등으로 분석하였고, 이들 결과들은 공기중의 무게 증가, 수중의 무게 및 비중의 감소,침상의 2차상, 산소이온 확산 및 $Ti^{3+}$ 이온이 감소되는 것으로 분석되었다. 이는 스컬용융법에 의해 성장된 rutile 단결정에 $O_v,\;Ti^{3+},\;O_v-Ti^{3+}$ interstitial 그리고 $F^+-H^+$와 같은 결함의 존재를 의미한다.

다엽 콜리메이터의 임상적용을 위한 엽측간 투과선량 및 엽종단간 투과선량 연구 (A Study on Inter-leaf Transmission and Cross-leaf Transmission for Clinical Applications of the Multileaf Collimator)

  • 이규찬;최진호
    • 한국의학물리학회지:의학물리
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    • 제15권1호
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    • pp.17-22
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    • 2004
  • Multileaf collimator (MLC) is now rapidly replacing the lead ahoy block to shape the radiation treatment field. In addition to its defect of rectangular field shaping and increased penumbra width, it has another possible problem, and that is of radiation transmission between leaves, which needs to be maintained at as low a level as is permissible. The authors measured and analyzed the inter-leaf and cross-leaf transmissions of MLC by Varian Associates Inc, before its clinical application. The inter-leaf and cross-leaf transmissions were calculated by comparing the measured point doses in the polystyrene phantom in the open field and in a total closure of MLC. The beam profile of the inter-leaf and cross-leaf transmissions were depicted by using a water phantom. A photon beam of 6 MV was used in the measurement. The inter-leaf transmission was 1.63∼1.67%, indicating that the shielding effect of MLC is excellent. However, the cross-leaf transmission in the central area was 18.4∼18.7% and this is well over the clinically acceptable limitation of 5%. The beam profile of cross-leaf transmission displayed 80∼90% transmission near the field edge, so that the cross-leaf transmission was 14∼17% in this area. The multileaf collimator has an excellent shi디ding effect and the inter-leaf transmission is negligible so that it can be used in clinic as a good replacement of the conventional lead alloy block. However, care must be taken to avoid the cross-leaf transmission in the radiation field.

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비정질 실리콘 박막에서 결정상 실리콘의 입자성장에 관한 고분해능 투과전자현미경에 의한 연구 (A High-Resolution Transmission Electron Microscopy Study of the Grain Growth of the Crystalline Silicon in Amorphous Silicon Thin Films)

  • 김진혁;이정용;남기수
    • 전자공학회논문지A
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    • 제31A권7호
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    • pp.85-94
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    • 1994
  • A high-resolution transmission electron microscopy study of the solid phase crystallization of the amorphous silicon thin films, deposited on SiOS12T at 52$0^{\circ}C$ by low pressure chemical vapor deposition and annealed at 55$0^{\circ}C$ in a dry N$_{2}$ ambient was carried out so that the arrangement of atoms in the crystalline silicon and at the amorphous/crystalline interface of the growing grains could be understood on an atomic level. Results show that circular crystalline silicon nuclei have formed and then the grains grow to an elliptical or dendritic shape. In the interior of all the grains many twins whose{111} coherent boundaries are parallel to the long axes of the grains are observed. From this result, it is concluded that the twins enhance the preferential grain growth in the <112> direction along {111} twin planes. In addition to the twins. many defect such as intrinsic stacking faults, extrinsic stacking faults, and Shockley partial dislocations, which can be formed by the errors in the stacking sequence or by the dissociation of the perfect dislocation are found in the silicon grain. But neither frank partial dislocations which can be formed by the condensation of excess silicon atoms or vacancies and can form stacking fault nor perfect dislocations which can be formed by the plastic deformation are observed. So it is concluded that most defects in the silicon grain are formed by the errors in the stacking sequence during the crystallization process of the amorphous silicon thin films.

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흉벽의 오래된 화상 흉터에서 발행한 악성 섬유성 조직구종 (Malignant Fibrous Histiocytoma Arising in Old Burn Scar on the Anterior Chest)

  • 최의철;권인오;박은수;김용배
    • Archives of Plastic Surgery
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    • 제35권6호
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    • pp.743-747
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    • 2008
  • Purpose: Malignant changes of Marjolin's ulcer arising from chronic burn scar are rare. The majority of them are squamous cell carcinoma and basal cell carcinoma. Malignant fibrous histiocytoma is a deep seated pleomorphic sarcoma, which occurs principally as a mass of the extremities, abdominal cavity, or retroperitoneum in adults. Methods: We report a 58-year-old male patient who was admitted due to $3.5{\times}5cm$ chronic ulceration of anterior chest wall on the center of old burn scar. His scar had been occurred by boiling oil and treated with conservative treatment 45 years ago. Preoperative punch biopsy showed suspicious malignant changes and contrast enhanced chest CT showed well-defined, irregular shape enhancing lesion on anterior chest wall without intrathoracic metastasis. Results: The tumor was widely excised and defect was covered with skin graft without infection, necrosis and any other complication. The pathologic findings are compatible with malignant fibrous histiocytoma(storiform - pleomorphic type). The patient underwent 3 cycles of chemotheraphy. Although distant metastasis to the lung developed 6 months later and the patient died 9 month later, there was no local reoccurrence. Conclusion: Aggressive and early excision is needed because malignant fibrous histiocytoma has characteristics of high malignancy with a propensity for early and distant spread. Furthermore, the patient's education about disease entity and postoperative regular follow-up for local recurrence or metastasis is very important. To prevent malignancy from secondly healing burn scar, early skin graft is recommended for patients with deep second degree burn.

모터링 엔진의 시동 사이클 및 시동 정지 사이클에서 저어널베어링의 마모 연구 - II. 해석 결과 (Study on Wear of Journal Bearings during Start-up and Coast-down Cycles of a Motoring Engine - II. Analysis Results)

  • 전상명
    • Tribology and Lubricants
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    • 제31권3호
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    • pp.125-140
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    • 2015
  • In this paper, we present the results of the wear analysis of journal bearings on a stripped-down single-cylinder engine during start-up and coast-down by motoring. We calculate journal bearing wear by using a modified specific wear rate considering the fractional film defect coefficient and load-sharing ratio for the asperity portion of a mixed elastohydrodynamic lubrication (EHL) regime coupled with previously presented graphical data of experimental lifetime linear wear in radial journal bearings. Based on the calculated wear depth, we obtain a new oil film thickness for every crank angle. By examination of the oil film thickness, we determine whether the oil film thickness at the wear scar region is in a mixed lubrication regime by comparing dimensionless oil film thickness, h/σ, to 3.0 at every crank angle. We present the lift-off speed and the crank angles involved with the wear calculation for bearings #1 and #2. The dimensionless oil film thickness, h/σ, illustrates whether the lubrication region between the two surfaces is still within the bounds of the mixed lubrication regime after scarring of the surface by wear. In addition, we present in tables the asperity contact pressure, the real minimum film thickness at the wear scar region, the modified specific wear rate, and the wear angle, α, for bearings #1 & #2. To show the real shape of the oil film at wear scar region, we depict the actual oil film thickness in graphs. We also tabulated the ranges of bearing angles related with wear scar. We present the wear volume for bearings #1 and #2 after one turn-on and turn-off of the engine ignition switch for five kinds of equivalent surface roughness. We show that the accumulated wear volume after a single turn-on and turn-off of an ignition switch normally increases with increasing surface roughness, with a few exceptions.

귓볼 하부 전위피판을 이용한 결손형 선천성 귓볼갈림증의 재건 (A One Stage Reconstruction of Defective Type Cleft Earlobe: Infra-auricular Transposition Flap)

  • 정동우;강대훈;김태곤;이준호;김용하
    • 대한두개안면성형외과학회지
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    • 제13권2호
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    • pp.135-138
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    • 2012
  • Purpose: Reconstruction of the cleft earlobe is challenging. Several procedures are available to reconstruct congenital earlobe deformities. However, for large defective type, surgical procedures and designs are complex and tend to leave a visible scar. We present a simple method of reconstruction for defective type congenital cleft earlobe using a one stage technique with infraauricular transposition flap. This allows for easy and accurate size estimation and good aesthetic outcomes. Methods: A 4-year-old male patient has congenital cleft earlobe and antihelical deformity. Otoplasty for antihelical deformity correction and one stage infra-auricular transposition flap for earlobe reconstruction were performed. The flap was designed from the inferoanterior margin of the earlobe. The size of the flap was determined based on the normal side, and the width and length of the flap was 1 cm and 3 cm in size, respectively. An incision was made at the midline of the defective lobule. Further, the elevated flap was inserted. The elevated flap and the incision margins of the lobule were sutured together. Then, the donor site was closed primarily. Results: The volume and shape of the reconstructed earlobe were natural. There was no flap necrosis. The donor site had no morbidities and scar was not easily notable. Conclusion: Infra-auricular transposition flap can be designed easily and offer sufficient volume of earlobe. Furthermore, the scar is inconspicuous. In conclusion, infra-auricular transposition flap can be a good option for reconstructing a large defect type cleft earlobe.

Optimum design and vibration control of a space structure with the hybrid semi-active control devices

  • Zhan, Meng;Wang, Sheliang;Yang, Tao;Liu, Yang;Yu, Binshan
    • Smart Structures and Systems
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    • 제19권4호
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    • pp.341-350
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    • 2017
  • Based on the super elastic properties of the shape memory alloy (SMA) and the inverse piezoelectric effect of piezoelectric (PZT) ceramics, a kind of hybrid semi-active control device was designed and made, its mechanical properties test was done under different frequency and different voltage. The local search ability of genetic algorithm is poor, which would fall into the defect of prematurity easily. A kind of adaptive immune memory cloning algorithm(AIMCA) was proposed based on the simulation of clone selection and immune memory process. It can adjust the mutation probability and clone scale adaptively through the way of introducing memory cell and antibody incentive degrees. And performance indicator based on the modal controllable degree was taken as antigen-antibody affinity function, the optimization analysis of damper layout in a space truss structure was done. The structural seismic response was analyzed by applying the neural network prediction model and T-S fuzzy logic. Results show that SMA and PZT friction composite damper has a good energy dissipation capacity and stable performance, the bigger voltage, the better energy dissipation ability. Compared with genetic algorithm, the adaptive immune memory clone algorithm overcomes the problem of prematurity effectively. Besides, it has stronger global searching ability, better population diversity and faster convergence speed, makes the damper has a better arrangement position in structural dampers optimization leading to the better damping effect.

격자 세분화 방법을 고려한 복사열전달 형상계수 계산 기법 연구 (STUDY ON VIEW FACTOR CALCULATION FOR RADIATIVE HEAT TRANSFER BY USING THE MESH SUBDIVISION METHOD)

  • 김동건;한국일;최준혁;이장준;김태국
    • 한국전산유체공학회지
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    • 제19권1호
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    • pp.1-6
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    • 2014
  • Since experiments on the actual operational status are said to be very impractical because of their economic and repeatability problems, it is difficult to understand the thermal profiles of aerospace or military equipments. Thus, the CFD codes with considering the radiation heat transfer are used to compensate the defect. In case, analyzing the radiation exchanges between the object surfaces are very important. Because the temperature and the IR signal distributions of the object surface are significantly affected by the radiative heat transfer. To achieve accurate thermal radiation exchange between surfaces, it is important to calculate the radiation view factor precisely. Finer subdivision of meshes can be used to increase the accuracy of radiation view factor, but if the mesh is subdivided infinitely, the time required for calculation increases significantly and thus decreasing the efficiency. If the subdivision is not sufficient, assurance of accuracy is not guaranteed. In this paper, optimal mesh subdivision method using the solid angle has been successfully tested and found to be useful in increasing the efficiency of calculating the shape factors.