• Journal of the Semiconductor & Display Technology
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• v.21 no.1
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• pp.17-21
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• 2022

In the case of the manufacturing industry that produces high-tech components such as semiconductors and large flat panel displays, the manufacturing space is made into a cleanroom to increase product yield and reliability, and various environmental factors have been managed to maintain the environment. Among them, airborne particle is a representative management item enough to be the standard for actual cleanroom grade, and a sequential particle monitoring system is usually used as one parts of the FMS (Fab or Facility monitoring system). However, this method has a problem in that the measurement efficiency decreases as the length of the sampling tube increases. In this study, in order to solve this problem, a multiple regression model was created. This model can correct the measurement error due to the decrease in efficiency by sampling tube length.

• Journal of the Semiconductor & Display Technology
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• v.22 no.1
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• pp.1-5
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• 2023

Most of the production process is performed in a cleanroom in the case of facilities that produce semiconductor chips or display panels. Therefore, environmental management of cleanrooms is very important for product yield and quality control. Among them, airborne particles are a representative management item enough to be the standard for the actual cleanroom rating, and it is a part of the Fab or Facility monitoring system, and the sequential particle monitoring system is mainly used. However, this method has a problem in that measurement efficiency decreases as the length of the sampling tube increases. In addition, a statistically significant test of deterioration in efficiency has rarely been performed. Therefore, in this study, the statistically significant test between the number of particles measured by InSitu and the number of particles measured for each sampling tube ends(Remote). Through this, the efficiency degradation problem of the sequential particle monitoring system was confirmed by a statistical method.

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2003.05b
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• pp.47-48
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• 2003

This new family of portable real time SEQUENTIAL MOBILITY PARTICLE COUNTER and SIZER (SMPS+C) is designed for mobility and easy field use. An integrated battery assures hours of operation, a data logger system storage of all optioned results and a user friendly powerful software easy operation. This technology not only simplifies the SMPS operation, but it permits new on site application monitoring up to a remote wireless telephone operation. (omitted)

• Nuclear Engineering and Technology
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• v.53 no.1
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• pp.148-163
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• 2021

Timely fault identification is important for safe and reliable operation of the electric valve system. Many research works have utilized different data-driven approach for fault diagnosis in complex systems. However, they do not consider specific characteristics of critical control components such as electric valves. This work presents an integrated shallow-deep fault diagnostic model, developed based on signals extracted from DN50 electric valve. First, the local optimal issue of particle swarm optimization algorithm is solved by optimizing the weight search capability, the particle speed, and position update strategy. Then, to develop a shallow diagnostic model, the modified particle swarm algorithm is combined with support vector machine to form a hybrid improved particle swarm-support vector machine (IPs-SVM). To decouple the influence of the background noise, the wavelet packet transform method is used to reconstruct the vibration signal. Thereafter, the IPs-SVM is used to classify phase imbalance and damaged valve faults, and the performance was evaluated against other models developed using the conventional SVM and particle swarm optimized SVM. Secondly, three different deep belief network (DBN) models are developed, using different acoustic signal structures: raw signal, wavelet transformed signal and time-series (sequential) signal. The models are developed to estimate internal leakage sizes in the electric valve. The predictive performance of the DBN and the evaluation results of the proposed IPs-SVM are also presented in this paper.