• Title/Summary/Keyword: Separated Probe

Search Result 55, Processing Time 0.028 seconds

Fabrication of Tungsten Probe using Electro-Chemical Etching (전기화학적 에칭을 이용한 텅스텐 미세 탐침 가공)

  • In, Chi-Hyun;Kim, Gyu-Man;Chu, Chong-Nam
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.18 no.2
    • /
    • pp.111-118
    • /
    • 2001
  • Tungsten probe is the most important part of a probe card, which is widely used for the performance test of wafer chips. Electro chemical etching becomes an exclusive choice for mass production of the tungsten probes. In the mass production, not only the shape of the probe but also the shape distribution of machined probes is important. A new method is proposed for the mass production of the tungsten probes. Tungsten wires are separated by a distance, and dipped into electrolyte. The dipping rate is controlled to shape the probes. Several experimental tests are performed to study the machining characteristics. From the test results, machining parameters including electrical conditions and anode position showed significant influences on the shape, repeatability, precision and quality of sharp tips.

  • PDF

Real-time measurement of void fraction and its propagation speed of slug flow with two Conductance meters (두 개의 컨덕턴스미터를 이용한 슬러그류의 기공률 및 기공률 전달속력 실시간 측정)

  • Kim, Jong-Rok;Ahn, Yeh-Chan;Kang, Deok-Hong;Kim, Moo-Hwan
    • Proceedings of the KSME Conference
    • /
    • 2004.11a
    • /
    • pp.1569-1573
    • /
    • 2004
  • Two ring-type conductance meters were manufactured to measure void fraction and its propagation speed in slug flow. The signal of conductance meter with two rings depends on liquid temperature. Therefore a conductance meter with separated probe designed by Coney (1973), which is independent of liquid temperature, was used and experimentally proved. The manufactured conductance meters showed a good repeatability and agreement with the analytical solution by Coney (1973). From time lag between two conductance meter, we could calculate the propagation speed of void fraction.

  • PDF

Plasma characterization of a mesh separated dual plasma source by L-probe and QMS

  • Kim, Dong-Hun;Choe, Ji-Seong;Kim, Seong-Bong;Park, Sang-Jong;Ju, Jeong-Hun
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2015.08a
    • /
    • pp.156.2-156.2
    • /
    • 2015
  • 반도체 소자의 크기가 나노사이즈로 줄어들기 때문에, 건식식각의 중요성이 강조되고 있다. dual plasma source를 사용함으로써 plasma 밀도, 이온충돌에너지, 이온플럭스를 조절 가능하다. Low frequency로 이온에너지를 조절하고, high frequency로 이온플럭스를 일반적으로 조절한다. 본 연구는 inductively coupled plasma (ICP)와 capacitively coupled plasma (CCP)를 사용하는 dual plasma source이다. ICP는 AE RPS로 2.4 MHz를 사용하고, CCP는 AE RFX-600으로 13.56 MHz이다. single L-probe는 Hiden ESPion이고, quadrupole mass spectrometer (QMS)는 INFICON CPM-300이다. chuck에 CCP가 인가되고, ICP는 SUS mesh를 거쳐서 영향을 미친다. Gas는 Ar, Ar+CF4 두 조건에서 비료를 하였다. Single L-probe를 이용하여 플라즈마를 측정한 결과 CCP만 인가하였을 때, Te 2.05 eV, Ne 4.07E+10 #/cm3, Ni 5.82E+10 #/cm3의 결과를 얻을 수 있었다. ICP를 방전하고 mesh를 통해서 chuck으로 입사하는 이온을 측정한 결과 mesh에 의해 이온이 중성화되어 거의 입사하지 않음을 확인할 수 있었다. 최종적으로 이온의 영향이 상쇄되고, 라디칼의 영향이 증가하여 높은 etch rate와 선택비를 가지며, 등방성 식각의 영향이 커질 것으로 사료된다.

  • PDF

Common-path OCT Image Using Partial Reflecting Probe (부분 반사 프로브를 사용한 공통경로 OCT 이미지 획득)

  • Park, Jae-Seok;Jeong, Myung-Yung;Kim, Chang-Seok;Han, Jae-Ho;Kang, Jin-U.
    • Korean Journal of Optics and Photonics
    • /
    • v.19 no.2
    • /
    • pp.103-107
    • /
    • 2008
  • Unlike conventional optical coherence tomography systems based on Michelson interferometer, we suggest a common-path OCT system, which does not include a separated configuration between reference signal and sample signal. We optimize the refractive index of partial reflecting probe to induce a balanced intensity of the reference signal. At the end of the probe, convex lens was optimally fabricated to get images of biological samples in the position of focus. Using the experimental system, we could get 2-D images of various biological samples.

An Experiment on the Effects of Free Stream Turbulence Intensity on the Backward-Facing Step Flow (자유흐름 난류강도가 후향계단유동에 미치는 영향에 대한 실험)

  • 김사량;유정열
    • Transactions of the Korean Society of Mechanical Engineers
    • /
    • v.19 no.9
    • /
    • pp.2297-2307
    • /
    • 1995
  • An experimental study on the structure of a separated shear layer downstream of the backward-facing step has been performed by examining mean flow and turbulent quantities in terms of free stream turbulence. When free stream turbulence exists, the entrainment rate of the separated shear layer and the flow rate in the recirculation region are enhanced, resulting in shorter reattachment length. The production and diffusion terms in the turbulent kinetic energy balance are shown to increase more than the dissipation term does. Rapid decrease of the pressure-strain term in the shear stress balance implies the enhancement of the three-dimensional motion by free stream turbulence.

Electrophoretic Karyotyping by PFGE in the Genus Fusarium (Fusarium속에서 PFGE를 이용한 Electrophoretic Karyotyping)

  • Min, Byung-Re;Jung, Jin-Sook;Choi, Yong-Keel
    • The Korean Journal of Mycology
    • /
    • v.26 no.2 s.85
    • /
    • pp.135-143
    • /
    • 1998
  • Contour-clamped homogeneous electric field gel electrophoresis was used to establish electrophoretic karyotype for 10 species of Fusarium sections Sporotrichiella, Liseola, Gibbosum, Discolor and Martiella. Intact chromosomal DNA was isolated from fungal protoplast and separated under various conditions according to their size in order to improve DNA separation. The numbers of chromosome-sized DNA molecules for individual species ranged from 5-13, with individual chromosomes ranging from 0.78 Mb to 7.20 Mb in size. The total genome DNA size of each species was estimated at about 18.32 Mb to 48.20 Mb. Comparison of karyotype profiles following Southern hybridization analysis with a randomly selected genomic probe of F. oxysporum formae speciales litii was carried out.

  • PDF

Probe-based Charge Injection Study of DNA Charge Transfer for Applications to Molecular Electro-optic Switching (전극 기반의 전하 주입을 통한 DNA 전하수송 특성 측정)

  • Ryu, Ho-Jeong;Kim, Hee-Young;Kim, Dong-Hyun
    • Journal of the Institute of Electronics Engineers of Korea SC
    • /
    • v.48 no.3
    • /
    • pp.53-59
    • /
    • 2011
  • Charge transfer through DNA oligonucleotides has been investigated for potential applications of DNA into molecular electrooptic switching devices. Electrons were injected using gold electrode probes where DNA oligomers were adsorbed that are separated in medium. The results show that increased adsorption of DNA reduces the ionization current due to the combined effect of charge transfer through DNA and surface-limited charge transport. The probe-based charge injection was extended to examine the capability of extinguishing fluorescence of Cy3 dye molecules attached to DNA. It is expected that the results may be employed to implementing a novel electrooptic switching device based on DNA molecules.

Quantification of Skin Moisture in Hairless Mouse by using a Portable NIR System and a FT NIR Spectrometer (Photo Diode Array형의 휴대용 근적외 분광기와 FT 근적외 분광기를 이용한 Hairless Mouse 피부 수분 정량)

  • Suh, Eun-Jung;Woo, Young-Ah;Kim, Hyo-Jin
    • YAKHAK HOEJI
    • /
    • v.49 no.2
    • /
    • pp.115-121
    • /
    • 2005
  • In this study, the performance of a portable NIR system and a FT NIR spectrometer were compared to determine water content of hairless mouse skin. The stratum corneum parts wer e separated from the epidermal tissues by trypsin solution. NIR diffuse reflectance spectra of hairless mouse skin were acquired using a fiber optic probe. In the near infrared, water molecules show two clear absorption bands at 1450 nm from first overtone of O-H stretching and 1940 nm from the combination involving O-H stretching and O-H deformation. It was found that the variations of O-H absorption band according to water content. Partial least squares regression (PLSR) was applied to develop a calibration model. The PLS model showed a good correlation between NIR predicted value and the absolute water content of separated hairless mouse skin, in vitro. For both the portable and the FT NIR spectrometer, These studies showed the possibility of a rapid and nondestructive skin moisture measurement using NIR spectroscopy. The portable NIR spectrometer with a photodiode arrays-microsensor could be more rapidly applied for the determination of water content with comparable accuracy with the performance of a FT spectrometer .

Agree and Move. (일치와 이동)

  • 박승혁
    • Korean Journal of English Language and Linguistics
    • /
    • v.1 no.4
    • /
    • pp.561-585
    • /
    • 2001
  • It has been claimed recently that the two computational operations Move and Agree of Chomsky (2000, 2001a) should be separated into distinct and independent operations. According to this view, Move is an “operation that applies only to meet an EPP-feature of a functional category.” It is also claimed under that analysis that “a candidate for Move is simply a syntactic object with phonetic content.” The purpose of this short paper is to show that the operation Move should still be viewed as composite; hence it must have the operation Agree as one of its prerequisites. We argue that the EPP feature of T may not be analyzed as an independent feature that triggers overt displacement in syntax. Under Chomsky's (2000, 2001a) theory, displacement in syntax must require the probe-goal (P, G) association before the actual movement takes place. It is shown in this paper that in order for an element $\beta$ to raise to the [Spec, T] position, the $\varphi$-features of T must establish a (P, G) relation with those of $\beta$ prior to movement. In short, Move requires Agree, the EPP feature being dependent on the minimal $\varphi$-feature [person] of nominals.

  • PDF