The low temperature synthesis of Al doped ZnO films on glass & polymer using magnetron co-sputtering : working pressure and oxygen content effect (마그네트론 co-sputtering 법을 이용한 ZnO:Al 박막의 저온 합성)
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- Proceedings of the Materials Research Society of Korea Conference
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- 2005.05a
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- pp.142-142
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- 2005