• Journal of Sensor Science and Technology
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• v.24 no.4
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• pp.264-269
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• 2015

An infrared (IR) bolometer measures the change of resistance by absorbing incident IR radiation and generates a signal as a function of the radiation intensity. Since a bolometer requires temperature stabilization and light filtering except for the infrared rays, it is essential for the device to be packaged meeting conditions that above mentioned. Minimization of heat loss is needed in order to stabilize temperature of bolometer. Heat loss by conduction or convection requires a medium, so the heat loss will be minimized if the medium is a vacuum. Therefore, vacuum packaging for bolometer is necessary. Another important element in bolometer packaging is germanium (Ge) window, which transmits IR radiation to heat the bolometer. To ensure a complete transmittance of IR light, anti-reflection (AR) coatings are deposited on both sides of the window. Although the transmittance of Ge window is high for IR rays, it is difficult to use frequently in low-price IR bolometer because of its high price. In this paper, we fabricated IR window by utilizing silicon (Si) substrate instead of Ge in order to reduce the cost of bolometer packaging. To enhance the IR transmittance through Si substrate, it is textured using Reactive Ion Etching (RIE). The texturing process of Si substrate is performed along with the change of experimental conditions such as gas ratio, pressure, etching time and RF power.

• Journal of Sensor Science and Technology
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• v.20 no.3
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• pp.156-161
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• 2011

We fabricated a schottky barrier metal oxide semiconductor field effect transistor(SB-MOSFET) by applying indium-tin-oxide(ITO) to the source/drain on a highly resistive GaN layer grown on a silicon substrate. The MOSFET, with 10 ${\mu}M$ gate length and 100 ${\mu}M$ gate width, exhibits a threshold gate voltage of 2.7 V, and has a sub-threshold slope of 240 mV/dec taken from the $I_{DS}-V_{GS}$ characteristics at a low drain voltage of 0.05 V. The maximum drain current is 18 mA/mm and the maximum transconductance is 6 mS/mm at $V_{DS}$=3 V. We observed that the spectral photo-response characterization exhibits that the cutoff wavelength was 365 nm, and the UV/visible rejection ratio was about 130 at $V_{DS}$ = 5 V. The MOSFET-type UV detector using ITO, has a high UV photo-responsivity and so is highly applicable to the UV image sensors.

• Journal of Sensor Science and Technology
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• v.17 no.1
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• pp.1-8
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• 2008

Recently, capsule endoscope was developed to observe small intestine in human body. However, the capsule does not have any locomotive ability, which reduces the benefit of the capsule endoscope. Many researches have done to give locomotion to the capsule, still it consumes too much power to generate the motion by small battery. One of the moving method is electrical stimulus that consumes less power than many methods. The electrical stimulus method causes contraction in the small intestine, and it moves the capsule. Some of papers showed it is possible to guide the capsule by electrical stimulus, however the relationship between electrical stimulus at the mucous and contraction force in the small intestine is not reported, yet. In this paper, the mucous in the small intestine was stimulated, and measured the contraction force in the small intestine is shown. The result shows, the relationship between electrical stimulus parameters (voltage, duration) and contraction force. Also, equation between electrical stimulus parameters and contraction force is roughly induced.

• Journal of Sensor Science and Technology
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• v.27 no.4
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• pp.237-241
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• 2018

The real-time enrichment and detection of pathogens are serious issues and rapidly evolving field of research because of the ability of these pathogens to cause infectious diseases. In general, bacterial detection is accomplished by conventional colony counting or by polymerase chain reaction (PCR) after DNA extraction. As colony counting requires considerable time to cultivate, PCR is an attractive method for rapid detection. A small number of pathogens can cause diseases. Hence, a pretreatment process, such as enrichment is essential for detecting bacteria in an actual environment. Thus, in this study, we developed a microfluidic chip capable of performing rapid enrichment of bacteria and the extraction of their genes. A lectin, i.e., Concanavalin A (ConA), which shows binding affinity to the surface of most bacteria, was coated on the surface of magnetic particles to nonspecifically capture bacteria. It was subsequently concentrated through magnetic forces in a microfluidic channel. To lyse the captured bacteria, magnetic particles were irradiated by a wavelength of 532nm. The photo-thermal effect on the particles was sufficient for extracting DNA, which was consequently utilized for the identification of bacteria. Our device will help monitor the existence of bacteria in various environmental situations such as water, air, and soil.

• Journal of Sensor Science and Technology
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• v.29 no.1
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• pp.33-39
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• 2020

Typically, photoacoustic images are obtained in water or gelatin because the impedance of these mediums is similar to that of the human body. However, these acoustic mediums can have an additional mass effect that changes the resonance frequency of the transducer. The acoustic radiation impedance in air is negligible because it is very small compared to that of the transducer. However, the high acoustic impedance of mediums such as the human body and water is quite large compared to that of air, making it difficult to ignore. Specifically, in a case where the equivalent mass is very small, such as with a micro-machined ultrasound transducer, the additional mass effects of the acoustic medium should be considered for an accurate resonance frequency design. In this study, a piezoelectric micro-machined ultrasonic transducer (pMUT) was designed to have a resonance frequency of 10 MHz in the acoustic medium of water, which has similar impedance as the human body. At that time, the resonance frequency of the pMUT in air was calculated at 15.2 MHz. When measuring the center displacement of the manufactured pMUT using a laser vibrometer, the resonance frequencies were measured as 14.3-15.1 MHz, which is consistent with the finite element method (FEM) simulation results. Finally, photoacoustic images of human hair samples were successfully obtained using the fabricated pMUT.

• Journal of Sensor Science and Technology
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• v.29 no.4
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• pp.255-260
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• 2020

In this study, we developed a method of improving the surface-enhanced Raman spectroscopy (SERS) response characteristics by depositing a nanoporous Ag metal thin film through cluster source sputtering after forming a pyramidal texture structure on the Si substrate surface. A reactive ion etching (RIE) system with a metal mesh inside the system was used to form a pyramidal texture structure on the Si surface without following a complicated photolithography process, unlike in case of the conventional RIE system. The size of the texture structure increased with the RIE process time. However, after a process time of 60 min, the size of the structure did not increase but tended to saturate. When the RF power increased from 200 to 250 W, the size of the pyramidal texture structure increased from 0.45 to 0.8 ㎛. The SERS response characteristics were measured by depositing approximately 1.5 ㎛ of nanoporous Ag metal thin film through cluster sputtering on the formed texture structure by varying the RIE process conditions. The Raman signal strength of the nanoporous Ag metal thin film deposited on the Si substrate with the texture structure was higher than that deposited on the general silicon substrate by up to 19%. The Raman response characteristics were influenced by the pyramid size and the number of pyramids per unit area but appeared to be influenced more by the number of pyramids per unit area. Therefore, further studies are required in this regard.

• Journal of Sensor Science and Technology
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• v.29 no.4
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• pp.266-269
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• 2020

In this study, we investigated the effect of a sulfur passivation (S-passivation) process step on the electrical properties of surface-channel In_0.7Ga_0.3As quantum-well (QW) metal-oxide-semiconductor field-effect transistors (MOSFETs) with S/D regrowth contacts. We fabricated long-channel In_0.7Ga_0.3As QW MOSFETs with and without (NH₄)₂S treatment and then deposited 1/4 nm of Al₂O₃/HfO₂ through atomic layer deposition. The devices with S-passivation exhibited lower values of subthreshold swing (74 mV/decade) and drain-induced barrier lowering (19 mV/V) than the devices without S-passivation. A conductance method was applied, and a low value of interface trap density D_it (2.83×10¹² cm^-2eV^-1) was obtained for the devices with S-passivation. Based on these results, interface traps between InGaAs and high-κ are other defect sources that need to be considered in future studies to improve III-V microsensor sensing platforms.

• Journal of Sensor Science and Technology
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• v.29 no.4
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• pp.215-219
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• 2020

MnCo₂S₄/CoS₂ electrode with highly accessible electroactive sites is prepared using the hydrothermal method. The electrode exhibits an areal capacitance of 0.75 Fcm^-2 at 6 mAcm^-2 in 1 M KOH. The capacitance is further increased to 2.06 Fcm^-2 by adding K₃Fe(CN)₆ and K₄Fe(CN)₆ (a redox couple) to KOH. This increment is associated with the redox-active properties of cobalt and manganese transition metals, as well as the ion pair of [Fe(CN)₆]^-3/[Fe(CN)₆]^-4. The capacitance retention of the MnCo₂S₄/CoS₂ electrode is 87.5% for successive 4000 charge-discharge cycles at 10 mAcm^-2 in a composite electrolyte system of KOH and ferri/ferrocyanide. The capacitance enhancement is supported by the lowest equivalent series resistance (0.62 Ωcm^-2) of MnCo₂S₄/CoS₂ in the presence of redox additive couple compared with the bare KOH electrolyte.

• Proceedings of the KSPS conference
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• 1996.10a
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• pp.390-398
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• 1996

Acoustic analysis study was performed on 20 normal subjects by speaking nonsense syllables composed of Korean bilabial stops(/p, $p^{*}$/, ph/) and their Preceding and/or following vowel /a/(that is, [pa, $p^{*}a$, pha, apa, $ap^{*}a$, apha]) with an ultraminiature pressure sensor in their mouths. Speech materials were phonated twice, once with a moderate voice, another time with a loud voice. The acoustic signal and intraoral pressure were recorded simultaneously on computer. By these procedures, we were to measure the intraoral pressure, closure duration and VOT of Korean bilabial stops, and to compare the values one another according to the intensity of phonation and the position of the target consonants. Intraoral pressure was measured by the peak intraoral pressure value of its wave; closure duration by the time interval between the onset of intraoral pressure build-up and the burst meaning the release of closure; Voice onset time(VOT) by the time interval between the burst and the onset of glottal vibration. Heavily aspirated bilabial stop consonant /ph/ showed the highest intraoral pressure value, unaspirated /p$^{*}$/, the second, slightly aspirated /p/, the lowest. The syllable initial bilabial stops showed higher intraoral pressure than word initial stops, and the value of loudly phonated consonants were higher than moderate consonants. The longest closure duration period was that of /$p^{*}$/ and the shortest, /p/, and the duration was longer in word initial position and in the moderate voice. In VOT, the order of the longest to shortest was /ph/, /p/, /$p^{*}$/, and the value was shorter when the consonant was in intervocalic position and when it was phonated with a loud voice.

• Journal of the Korean Society for Nondestructive Testing
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• v.25 no.2
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• pp.103-109
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• 2005

Fiber reinforced plastic material should be inspected in fabrication process in order to enhance quality by prevent defects such as delamination and void. Generally, ultrasonic technique is widely used to evaluate FRP. In conventional ultrasonic techniques, transducer should be contacted on FRP. However, conventional contacting method could not be applied in fabrication process and novel non-contact evaluating technique was required. Laser-based ultrasonic technique was tried to evaluate CFRP plate. Laser-based ultrasonic waves propagated on CFRP were received with various transducers such as accelerometer and AE sensor in order to evaluate the properties of waves due to the variation of frequency. Velocities of laser-based ultrasonic waves were evaluated for various fiber orientation. In addition, laser interferometry was used to receive ultrasonic wave in CFRP and frequency was analysed.