• Journal of the Korean Society for Precision Engineering
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• v.27 no.1
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• pp.125-133
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• 2010

A versatile micro-robotic platform for micro/nano scale assembly has been demanded in a variety of application areas such as micro-biology and nanotechnology. In the near future, a flexible and compact platform could be effectively used in a scanning electron microscope chamber. We are developing a platform that consists of miniature mobile robots and a compact positioning stage with multi degree-of-freedom. This paper presents the design and the implementation of a low-cost and compact multi degree of freedom position sensor that is capable of measuring absolute translational and rotational displacement. The proposed sensor is implemented by using a CMOS type image sensor and a target with specific hole patterns. Experimental design based on statistics was applied to finding optimal design of the target. Efficient algorithms for image processing and absolute position decoding are discussed. Simple calibration to eliminate the influence of inaccuracy of the fabricated target on the measuring performance also presented. The developed sensor was characterized by using a laser interferometer. It can be concluded that the sensor system has submicron resolution and accuracy of ${\pm}4{\mu}m$ over full travel range. The proposed vision-based sensor is cost-effective and used as a compact feedback device for implementation of a micro robotic platform.

• Journal of Sensor Science and Technology
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• v.27 no.5
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• pp.311-316
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• 2018

An antenna-coupled bolometer-type terahertz sensor was designed, fabricated, evaluated, and utilized to obtain terahertz transmission images. The sensor consists of a thin film bowtie antenna that resonates accordingly in response to an incident terahertz beam, a heater that converts the applied current in the antenna into heat, and a microbolometer that converts the rise in temperature into a change in resistance. The device is fabricated by a bulk micromachining process on a 4-inch silicon wafer. The fabricated sensor chip has a size of $2{\times}2mm$ and an active area of $0.1{\times}0.1mm^2$. The temperature coefficient of resistance (TCR) of the bolometer film (VOx) is 2.0%, which is acceptable for bolometer applications. The output sensor signal is proportional to the power of the incident terahertz beam. Transmission images were obtained with a 2-axis scanning imaging system that contained the sensor. The small active area of the sensor will enable the development of highly sensitive focal plane array sensors in terahertz imaging cameras in the future.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.11
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• pp.1007-1013
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• 2014

In this study to improve the productivity, advantage Tandem circumferential weld process of seam tracking system was applied for the laser vision sensor. Weld geometry scanning laser vision sensor and PLC control unit are used to scan correct positioning of welding torch when the program is implemented so that it can correctly track the welding line. The welding experiment was conducted to evaluate the performance of laser vision seam tracking sensor in tandem welding process. The seam tracking several experiments was to determine the reliability of the system, welding experiments relatively good quality welding bead was confirmed. Furthermore, the PLC program for seam tracking was used to confirm the validity of the application of tandem welding process according to the benefits of increased productivity, which is expected to contribute to national competitiveness.

• Journal of Sensor Science and Technology
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• v.15 no.2
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• pp.90-96
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• 2006

We have fabricated the Pd-blck/NiCr gate MISFET-type $H_2$ sensor to detect the hydrogen in atmosphere. A differential pair-type structure was used to minimize the intrinsic voltage drift of the MISFET. The Pd-black film was deposited in the argon environment by thermal evaporation. In order to eliminate the blister formation in the surface of the hydrogen sensing gate metal, Pd-black/NiCr double metal layer was deposited on the gate insulator. The scanning electron microscopy and the auger electron spectroscopy was used to analyze their surface morphology and basic structure. The Pd-black/NiCr gate MISFET has been shown high sensitivity and stability more than Pd-planar/NiCr gate MISFET.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.21 no.7
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• pp.54-60
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• 2007

We constructed a fiber-optic temperature sensor system using a sensor array with 15 fiber Bragg gratings for distributed temperature monitoring in electrical power systems. A polynomial fitting algorithm was used to compensate the nonlinear action of the MEMS tuneable wavelength filter used for Bragg wavelength demodulation Fixed passband wavelengths from a Fabry-Perot ITU filter were used as reference wavelengths for the fitting algorithm which obtained constant accuracy regardless of the wavelength scanning range and frequency. About 0.18[%] of linearity error compared to reference thermocouple thermometer has been obtained in the preliminary experimental results.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.23 no.2
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• pp.199-205
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• 2014

This research focuses on the development of an interrogator that operates and measures fiber Bragg grating(FBG) multiplexing sensor probes for accurate-measurement of the blade deflection in a wind power generator. We designed and fabricated an optical source and spectrum module for the interrogator. Additionally, we verified the wavelength repeatability within 0.001 nm and the wavelength stability within 1 pm of the optical source, and we experimentally determined that the wavelength scanning range was about 44.4 nm. The FBG sensor with 2 nm resolution can be extended to a performance-efficient system that measures more than 20 sensors. The implemented interrogator has 0.141 nm wavelength variations corresponding to an ambient temperature range of $0^{\circ}C$ to $70^{\circ}C$. The measurement error can be easily reduced by employing a temperature compensation algorithm. In this study, we quantitatively confirmed the accuracy and operating stability of the interrogator.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.128-128
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• 1999

산소이온 전도체로 잘 알려진 Yttira-Stabilizd Ziroconia(TSZ)는 연료전지, oxygen pumps, chemical gas sensor 등 다양한 electrochemical divices에 이용되는 고체 전해질의 하나이다. 특히 YSZ는 oxygen 및 oxygen과 평형상태에 있는 gas들을 검출하는 sensor의 electrolyte로서 가장 많이 쓰이고 있다. 현재 상용화되어 있는 YSZ Sensor는 전통적인 bulk 형태의 ceramic으로 제작된 것으로 충분한 ionic conductivity를 얻기 위해서는 $600^{\circ}C$이상의 operating temperature를 필요로 하나 YSZ를 박막으로 제조시 낮은 operating temperature를 뿐만 아니라 sensor의 소형화, 낮은 ohmic loss 및 다양한 응용이 가능한 장점을 가질 수 있다. 본 실험에서는 산소 이온 전도체로서 8mol%-YSZ 고체전해질을 RF-magnetron bias sputtering 법을 이용하여 증착하였다. 제조된 YSZ 박막을 이용한 산소감응 센서셀 구조는 SiO2/Ni-NiO/Pt/YSZ/Pt-기판이다. 센서셀의 정상상태에서의 기전력(electromotive force ; EMF)을 산소분압(Po:1.013$\times$103Ta ~1.013$\times$105Pa)과 측정온도(30$0^{\circ}C$~$700^{\circ}C$)를 변화시키며 측정하였다. 이론적인 기전력과 측정값 사이의 편차는 Po:1.565$\times$104Pa 이하의 산소분압에서는 컸지만 이 이상의 분압에서는 이론치에 근접한 값을 가졌다. 증착한 YSZ와 Ni-NiO 박막의 구조는 X-ray diffractometer(XRD)를 이용하여 결정구조를 알아 보았고, TSZ 박막의 표면 morphology 관찰은 Scanning electron microscopy(SEM) 이용하였다. 박막의 조성분석은 X-ray energy dispersive analysis(EDX)을 사용하였다.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.399-399
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• 2000

In this paper, path generation using the sensor platform is proposed. The sensor platform is composed two electric motors which make panning and tilting motions. An algorithm fur a real path form and an obstacle length is realized using a scanning algorithm to rotating the sensors on the sensor platform. An ARV (Autonomous Robot Vehicle) is able to recognize the given path by adapting this algorithm. In order for the ARV to navigate the path flexibly, a kinematic model needed to be constructed. The kinematic model of the ARV was reformed around its body center through a relative velocity relationship to controllability, which derives from the nonholonomic characteristics. The optimal controller that is based on tile kinematic model is operated purposefully to track a reference vehicle's path. The path generation algorithm is composed of two parks. On e part is the generating path pattern, and the other is used to avoid an obstacle. The optimal controller is used for tracking the reference path which is generated by recognizing the path pattern. Results of simulation show that this algorithm for an ARV is sufficient for path generation by small number of sensors and for low cost controller.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.7
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• pp.594-598
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• 2011

We have investigated the sensing properties of ethanol gas sensor with pure ZnO and Ga-doped ZnO nanowires on Au coated (0001) sapphire substrates grown by hot walled pulsed laser deposition. Randomly aligned ZnO nanowires arrays were grown on a Au-electrode patterned under ambient conditions. ZnO nanowires have various sizes and shapes with a different substrate position inside a furnace. The average of length and diameter of the ZnO nanowires were $8\;{\mu}m$ and 100 nm respectively, and confirmed by field emission scanning electron microscopy. Sensitivity chanege characterization of the gas sensor was found that measured sensitivities of the ethanol gas sensors were 83.3% and 68.3% at $300^{\circ}C$ respectively.

• Journal of Electrochemical Science and Technology
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• v.7 no.4
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• pp.277-285
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• 2016

There is a growing demand for simple, cost-effective, and accurate analytical tools to determine the concentrations of biological and environmental compounds. In this study, a stable electroactive thin film of cobalt hexacyanoferrate (Cohcf) was prepared as an in situ chemical precipitant using electrostatic adsorption of $Co^{2+}$ on a silicate sol-gel matrix (SSG)-modified indium tin oxide electrode pre-adsorbed with $[Fe(CN)_6]^{3-}$ ions. The modified electrode was characterized by scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, and electrochemical techniques. Electrocatalytic oxidation of hydrazine on the modified electrode was studied. An electrochemical sensor for hydrazine was constructed on the SSG-Cohcf-modified electrode. The oxidation peak currents showed a linear relationship with the hydrazine concentration. This study provides insight into the in situ growth and stability behavior of Cohcf nanostructures and has implications for the design and development of advanced electrode materials for fuel cells and sensor applications.