• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.05a
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• pp.192-196
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• 2002

This paper describes on the fabrication and characteristics of a metal thin-film pressure sensor based on Cr strain-gauges for harsh environment applications. The Cr thin-film strain-gauges are sputter-deposited onto a micromachined Si diaphragms with buried cavity for overpressure protectors. The proposed device takes advantages of the good mechanical properties of single-crystalline Si as diaphragms fabricated by SDB and electrochemical etch-stop technology, and in order to extend the operating temperature range, it incorporates relatively the high resistance, stability and gauge factor of Cr thin-films. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.097~1.21 $mV/V{\cdot}kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS.

• Proceedings of the KIEE Conference
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• 1996.11a
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• pp.261-263
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• 1996

The study on the development of one-channel gas sensor using the quartz crystal analyzer were attempted. The adsorption and desorption behavior of organic gases were investigated using the resonant frequency and resistance method of quartz crystal. The sensitive materials were deposited on the quartz crystal analyzer(QCA) by using Langmuir-Blodgett method. To investigate the response characteristics of organic vapours and response mechanism, resonant frequency-resonant resistance (F-R) diagram was used. In our experimental results, the response mechanism between sensitive LB film and organic vapours was obtained using F-R diagram. And the position of each organic vapour were different as to the kind and injection amount. Thus F-R diagram can be applied to one-channel gas sensor using the QCA and useful to analyze the response mechanism between organic vspours and sensitive LB films.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.4
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• pp.302-308
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• 2001

The polymers with various composition of 4-vinylpyridine (4-VP) with n-butyl acrylate (n-BA) and 2-hydroxypropyl methacrylate (HPMA) were synthesized as a humidity sensitive material and quaternized with 1.5-dibromopentane. Resistance versus relative humidity decreased with increase in the content of n-BA in the copolymer. The introduction of HPMA increased the resistance of the humidity sensor as well as enhanced the adherence to the alumina substrate. In the case of 4-VP/n-BA/HPMA=80/10.10, the hysteresis and temperature coefficient were $\pm$2%RH and -0.42∼0.46%RH/$\^{C}$. The average resistance at 30%RH, 60%RH and 90%RH are 3.1㏁, 155 ㏀ and 7.9 ㏀, respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.11a
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• pp.299-302
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• 2000

RTD temperature sensor is a thermoresistor which uses the liner dependence of the resistance of the sensing material on the temperature, and has good stability and sensibility, so it can be used in highly precise temperature measurement. In this study RTD sensor was fabricated using Pt thin film. The Pt thin film was deposited on alumina using DC-Sputter, and annealed with various temperature. Through the experiments of XRD, AFM, 4-point probe, the surface structure of the thin film with annealing conditions and their effects on the electrical resistance were investigated. RTD with serpentine pattern was fabricated using Lift-off and resistance-temperature characteristics were studied.

• Journal of the Korean Society of Mechanical Technology
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• v.13 no.4
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• pp.169-173
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• 2011

This study is about the development of remote controlled bollard using the BLDC motor and ball screw with mechatronics theory. A bollard is composed of the sensor part and the control part. The sensor part is consisted of sensors that detect the locations of a bollard. The role of the control part is adjusting motor speed and power through variable resistance. In order to confirm required performance, the speed of decent and ascent of the bollard, the time and the RPM of BLDC motor were tested according to the variable resistance and the applied load with 10 to $72kg_f$.

• ETRI Journal
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• v.35 no.4
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• pp.617-624
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• 2013

Low power consuming and highly responsive semiconductor-type microelectromechanical systems (MEMS) gas sensors are fabricated for real-time environmental monitoring applications. This subsystem is developed using a gas sensor module, a Bluetooth module, and a personal digital assistant (PDA) phone. The gas sensor module consists of a $NO_2$ or CO gas sensor and signal processing chips. The MEMS gas sensor is composed of a microheater, a sensing electrode, and sensing material. Metal oxide nanopowder is drop-coated onto a substrate using a microheater and integrated into the gas sensor module. The change in resistance of the metal oxide nanopowder from exposure to oxidizing or deoxidizing gases is utilized as the principle mechanism of this gas sensor operation. The variation detected in the gas sensor module is transferred to the PDA phone by way of the Bluetooth module.

• Journal of Sensor Science and Technology
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• v.21 no.2
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• pp.121-126
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• 2012

Piezoresistive type contact force sensor array is fabricated by (111) Silicon bulk micromachining for continuous blood pressure monitoring. Length and width of the unit sensor structure is $200{\mu}m$ and $190{\mu}m$, respectively. The gap between sensing elements is only $10{\mu}m$. To achieve wafer level packaging, the sensor structure is capped by PDMS soft cap using wafer molding and bonding process with $10{\mu}m$ alignment precision. The resistance change over contact force was measured to verify the feasibility of the proposed sensor scheme. The maximum measurement range and resolution is 900 mm Hg and 0.57 mm Hg, respectively.

• Journal of Sensor Science and Technology
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• v.27 no.5
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• pp.311-316
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• 2018

An antenna-coupled bolometer-type terahertz sensor was designed, fabricated, evaluated, and utilized to obtain terahertz transmission images. The sensor consists of a thin film bowtie antenna that resonates accordingly in response to an incident terahertz beam, a heater that converts the applied current in the antenna into heat, and a microbolometer that converts the rise in temperature into a change in resistance. The device is fabricated by a bulk micromachining process on a 4-inch silicon wafer. The fabricated sensor chip has a size of $2{\times}2mm$ and an active area of $0.1{\times}0.1mm^2$. The temperature coefficient of resistance (TCR) of the bolometer film (VOx) is 2.0%, which is acceptable for bolometer applications. The output sensor signal is proportional to the power of the incident terahertz beam. Transmission images were obtained with a 2-axis scanning imaging system that contained the sensor. The small active area of the sensor will enable the development of highly sensitive focal plane array sensors in terahertz imaging cameras in the future.

• 제어로봇시스템학회:학술대회논문집
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• 1993.10b
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• pp.550-553
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• 1993

Methods of Alternating Noise Canceling were previously developed for the optical instrumentation;one using a dual photo sensor and another using a single photo sensor that could cancel normal mode noise on a transmission line, even if the noise was of equal status noise. But the methods could not remove noise on sensor line. This paper discusses a new method of using a photo sensor with a resistance sensordummy, effectively canceling equal status normal mode noise not only on a sensor line but also on a transmission line of an optical instrumentation. The accuracy of this method has been verified by experiments using sinusoidal wave as an equal status noise on a sensor line and/or rectangular wave as an equal status wide band noise on a transmission line respectively.

• Journal of Biosystems Engineering
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• v.13 no.3
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• pp.52-58
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• 1988

This study was conducted to develop a grain moisture content measurement sensor for automatic control of rough rice drying by natural air. For the above objective, the electrod type sensor was designed and tested. The sensor was able to produce electrical resistance which changes with moisture content of grain. An A/D converter and a micro-computer wed for processing measurement data of sensor. The developed sensor satisfied most design requirements and the results of statistical analysis show that there it no difference between the measurement method of sensor developed and of the dry-oven. Using the developed sensor and measurement system, we are able to measure moisture content of rough rice automatically in drying by natural air.