• Transactions on Electrical and Electronic Materials
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• v.13 no.6
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• pp.305-309
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• 2012

In this study, ZnO nanorods and $SnO_2$-CuO heterogeneous oxide were grown on membrane-type gas sensor platforms and the sensing characteristics for carbon monoxide (CO) were studied. Diaphragm-type gas sensor platforms with built-in Pt micro-heaters were made using a conventional bulk micromachining method. ZnO nanorods were grown from ZnO seed layers using the hydrothermal method, and the average diameter and length of the nanorods were adjusted by changing the concentration of the precursor. Thereafter, $SnO_2$-CuO heterogeneous oxide thin films were grown from evaporated Sn and Cu thin films. The average diameters of the ZnO nanorods obtained by changing the concentration of the precursor were between 30 and 200 nm and the ZnO nanorods showed a sensitivity value of 21% at a working temperature of $350^{\circ}C$ and a carbon monoxide concentration of 100 ppm. The $SnO_2$-CuO heterogeneous oxide thin films showed a sensitivity value of 18% at a working temperature of $200^{\circ}C$ and a carbon monoxide concentration of 100 ppm.

• Korean Journal of Optics and Photonics
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• v.6 no.4
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• pp.365-372
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• 1995

A signal processing technique for interferometric fiber-optic sensors is proposed. It does not require a any special optic components such as phase modulator, $3times3$ couplers,to obtain the full sensitivity of the interferometer. Instead, it requires a reference interferometer for phase referencing and a reference mirror for intensity referencing, but intensity referencing can be done without using the r reference mirror. The new technique utilizes the frequency chirping of the laser diode to process t the sensor signal with both wide dynamic range and high sensitivity of the interferometer. It was a applied to an internal-mirrored FP interferometric temperature sensor to obtain the system noise of $4\times10^{-3\circ}C$ from I cm FP Interferometor sensor device.

• Journal of Electrochemical Science and Technology
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• v.4 no.1
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• pp.41-45
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• 2013

Platinum is a well known element which shows a significant electrocatalytic activity in many important applications. In glucose sensor, because of the poisoning effect of reaction intermediates and the low surface area, the electrocatalytic activity towards the glucose oxidation is low which cause the low sensitivity. So, we fabricate a nanoporous PtZn alloy electrode by deposition-dissolution method. It provides a high active surface and a large enzyme encapsulating space per unit area when it used for an enzymatic glucose sensor. Glucose oxidase was immobilized on the electrode surface by capping with PEDOT composite and PPDA. The composite and PPDA also can exclude the interference ion such as ascorbic acid and uric acid to improve the selectivity. The surface area was determined by cyclic voltametry method and the surface structure and the element were analyzed by Scanning Electron Microscope (SEM) and Energy Dispersive X-ray spectroscopy (EDX), respectively. The sensitivity is $13.5{\mu}A/mM\;cm^2$. It is a remarkable value with such simply prepared senor has high selectivity.

• Journal of Sensor Science and Technology
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• v.2 no.1
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• pp.29-34
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• 1993

a-Si : H photodiodes for image sensor have been fabricated and characterized. Photosensitivity of a ITO/a-Si : H/Al photodiode without blocking layer was 0.7 under the applied voltage of 5 V and peak spectral sensitivity in visible region was found at 620 nm. Dark current of ITO/a-SiN : H/a-Si : H/p-a-Si : H/Al photodiode was suppressed by hole blocking layer and electron blocking layer at the value of lower than 1.5 pA to the applied voltage of 10 V. Also maximum photosensitivity was about 1 under the applied voltage of 3 V and peak spectral sensitivity was found at 540 nm.

• Journal of Sensor Science and Technology
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• v.19 no.5
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• pp.385-390
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• 2010

CO sensing thick film gas sensors using $Co_3O_4$ powders prepared by hydrothermal reaction method, were fabricated, and their structural, electrical and CO gas sensing properties were investigated. The specific surface area of the $Co_3O_4$ powders obtained from BET analysis was about 79.0 $m^2/g$. XRD and SEM results show that the thick films heat-treated at $500^{\circ}C$ for 30 min after screen printing had the preferred orientation of (311) direction and the crystalline size was calculated to 221 $\AA$. The maximum activation energy obtained from the temperature-resistance characteristics was 3.11 eV in the temperature range of $290^{\circ}C$ to $310^{\circ}C$. The sensitivity to 1,000 ppm CO was about 150 %. The specific surface area, crystalline size, and maximum activation energy were increased significantly and the sensitivity for CO gas was improved largely.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.942-945
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• 2000

Recently, electret applications have placed the focus on polymer thin film because electrical properties of a blend are studied. In this paper, we hale measured the infra sonic frequency by using Electret Sensor. Electret is formed by appling the voltage range of -4[kV] to -8[kV] to PTFE film and the sensor is manufactured by moment method to detect the infra-sonic signal. Electret Infrasonic Transducer, which is designed and manufactured by using of the moment method according to the potential and electric field simulation , shows its promising result, since the average rising rate of sensitivity is 7.68 [dB/oct] under 1[Hz], and the average values are within ${\pm}$ 1 [dB/oct]. As a result, it is believed that the characteristics of acquired transducer can be applied to the medical treatment, the industry, and the animal life researches, and also the study on noise elimination is required.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.2
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• pp.120-124
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• 2003

This paper describes a MEMS-based micro-fluxgate magnetic sensing element using Ni$\_$0.8/Fe$\_$0.2/ film formed by electroplating. The micro-fluxgate magnetic sensor composed of a thin film magnetic core and micro-structure solenoids for the pick-up and the excitation coils, is developed by using MEMS technologies in order to take advantage of low-cost, small size and lower power consumption in the fabrication. A copper with 20${\mu}$m width and 3${\mu}$m thickness is electroplated on Cr (300${\AA}$) / Au (1500${\AA}$) films for the pick-up (42turn) and the excitation (24turn) coils. In order to improve the sensitivity of the sensing element, we designed the magnetic core into a rectangular-ring shape to reduce the magnetic flux leakage. An electroplated permalloy film with the thickness of 3${\mu}$m is obtained under 2000 gauss to induce magnetic anisotropy. The magnetic core has the high DC effective permeability of ~1,100 and coercive field of ~0.1 Oe. The fabricated sensing element using rectangular-ring shaped magnetic film has the sensitivity of about 150 V/T at the excitation frequency of 2 MHz and the excitation voltage of 4.4 V$\_$p p/. The power consumption is estimated to be 50mW.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.412-413
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• 2005

This paper describes resonant frequency of the structural behavior of micro-cantilever beam simulated by FEM (Finite Element Method). The resonant characteristics and the sensitivity of cantilever-shaped SOI resonant were measured for the application of chemical sensor. The resonant frequency of the fabricated micro-cantilever system was found to be 5.59kHz when the size of cantilever is $500{\mu}m$ long, $100{\mu}m$ wide and $1{\mu}m$ thick. Generation of resonant frequency measured by Modal Analysis is resulted in length of cantilever. The length was found to be a dominant factor for the selection of required resonant frequency range. On the other side, the width had influenced very little on either the magnitude of resonant frequency or the sensitivity.

• Smart Structures and Systems
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• v.18 no.3
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• pp.471-484
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• 2016

Optical fiber sensors have been proven that they have the potential to detect high-frequency ultrasonic signals, in structural health monitoring field which generally refers to acoustic emission signals from active structural damages and guided waves excited by ultrasonic actuators and propagating in waveguide. In this work, the sensing properties of optical fiber sensors based on Mach-Zehnder interferometer were investigated in the metal plate. Analytical formulas were conducted first to explore the parameters affecting its sensing performances. Due to the simple and definable frequency component, the Lamb wave excited by the piezoelectric wafer was employed to study the sensitivity of the proposed optical fiber sensors with respect to the frequency, rather than the acoustic emission signals. In the experiments, according to above investigations, spiral shape optical fiber sensors with different size were selected to increase their sensitivity. Lamb waves were excited by a circular piezoelectric wafer, while another piezoelectric wafer was used to compare their voltage responses. Furthermore, by changing the excitation frequency, the tuning frequency characteristic of the proposed optical fiber sensor was also investigated experimentally.

• Current Optics and Photonics
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• v.4 no.4
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• pp.293-301
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• 2020

In this paper we propose and theoretically analyze a monolithic multiparametric sensor consisting of a superstructure of surface-relief waveguide Bragg gratings (WBGs), a micro-machined diaphragm, and a cantilever beam. Diaphragms of two different configurations, namely circular and square, are designed and analyzed separately for pressure measurement. The square diaphragm is then selected for further study, since it shows relatively higher sensitivity compared to the circular one, as it incurs more induced stress when any pressure is applied. The cantilever beam with a proof mass is designed to enhance the sensitivity for acceleration measurement. A unique mathematical method using coupled-mode theory and the transfer-matrix method is developed to design and analyze the shift in the Bragg wavelength of the superstructure configuration of the gratings, due to simultaneously applied pressure and acceleration. The effect of temperature on the wavelength shift is compensated by introducing another Bragg grating in the superstructure configuration. The measured sensitivities for pressure and acceleration are found to be 0.21 pm/Pa and 6.49 nm/g respectively.