• Title/Summary/Keyword: Sensor Sensitivity

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Fringe Sensitivity of Projection Moire Topography Due to Position of Light Source and Object Distance According to Grating Periods (영사식 무아레 토포그래피에서 격자 주기에 따른 물체거리와 광원의 위치에 대한 무늬 민감도 변화)

  • Oh, Hyun Seock;Ju, Yun Jae;Jo, Jae Heung
    • Korean Journal of Optics and Photonics
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    • v.27 no.2
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    • pp.67-72
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    • 2016
  • In projection moire topography, the investigation of fringe sensitivity, which means the change rate of fringe order according to object height, is important and necessary to reduce the measurement error of the shape of an object. Using the fringe sensitivity, the determination of the absolute orders of moire fringes can be performed very easily and rapidly. The important parameters in the determination of absolute orders of fringes are the positions of light source and object, and the grating period in projection moire topography. Among these parameters, the fringe sensitivity due to the transverse motion of the light source and the longitudinal motion of the object according to grating periods are analyzed and compared. As a result, whereas the fringe sensitivity in the transverse-motion method increases linearly and gradually as the distance between light source and imaging sensor increases, the fringe sensitivity due to the longitudinal-motion method decreases dramatically as the distance between imaging lens and object increases. In these methods, the fringe sensitivity and its change increase as the grating period increases.

The Extraction Method for the G-Sensitivity Scale-Factor Error of a MEMS Vibratory Gyroscope Using the Inertial Sensor Model (관성센서 오차 모델을 이용한 진동형 MEMS 자이로스코프 G-민감도 환산계수 오차 추출 기법)

  • Park, ByungSu;Han, KyungJun;Lee, SangWoo;Yu, MyeongJong
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.47 no.6
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    • pp.438-445
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    • 2019
  • In this paper, we present a new approach to extract the g-sensitivity scale-factor error for a MEMS gyroscope. MEMS gyroscopes, based on the use of both angular momentum and the Coriolis effect, have a g-sensitivity error due to mass unbalance. Generally, the g-sensitivity error is not considered in general use of gyroscopes, but it deserves our attention if we are to develop for tactical class performance and reliability. The g-sensitivity error during vehicle flight increases navigation error; so it must be analyzed and compensated for the use of MEMS IMU for high dynamics vehicle systems. Therefore, we analyzed how to extract the g-sensitivity scale-factor error from the inertial sensor error model. Furthermore we propose a new method to extract the g-sensitivity error using flight motion simulator. We verified our proposed method with experimental results.

Performance analysis of feedback controller for vibratory gyroscope at various vacuum levels

  • Sung, Woon-Tahk;Lee, Jang-Gyu;Kang, Tae-Sam
    • 제어로봇시스템학회:학술대회논문집
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    • 2003.10a
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    • pp.1537-1541
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    • 2003
  • In this paper, presented is a feedback control performance of vibratory gyroscope at various vacuum levels. Micro gyroscope, whose operation is based on the vibrating motion at the vacuum conditions, is highly influenced by the vacuum level of the operating circumstances. In general, we apply the feedback control scheme to the gyroscope in order to improve the performances of the sensor. And control performances of the gyroscope are related to those vacuum levels. So we need investigate the performances of the closed loop control at various vacuum conditions comparing with those of the open loop. The experimental results show that the sensitivity of the closed loop is less than that of the open loop especially in low vacuum conditions. Therefore, there should be trade-off between sensitivity and other sensor performances such as linearity, bandwidth when we apply feedback control to the gyroscope.

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The Characteristics of Thick-film ZnO Sensor for CO Gas Detection (CO 검지용 후막형 ZnO 센서의 특성)

  • Kim, Bong-Hee;Kim, Sang-Wook;Park, Geun-Young;Yi, Seung-Hwan;Sung, Yung-Kwon
    • Proceedings of the KIEE Conference
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    • 1991.11a
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    • pp.245-248
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    • 1991
  • Recently, oxide semiconductor gas sensors consisted of n-type semiconductor materials such as $SnO_2$, ZnO and $Fe_2O_3$ have been widely used to detect reducing gases. In this paper, we made the thick-film ZnO gas sensors with $PdCl_2$ as a catalyst and investigated the sensitivity to CO gas. In the thick-film Zno sensor, the highest sensitivity was shown in the sensor with 1wt.% of $PdCl_2$ which was sintered for 1 hour at $700^{\circ}C$ and operated at $300^{\circ}C$.

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Fabrication of polycrystalline 3C-SiC micro pressure sensors for hightemperature applications (초고온용 다결정 3C-SiC 마이크로 압력센서의 제작)

  • Chung, Gwiy-Sang
    • Journal of Sensor Science and Technology
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    • v.19 no.1
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    • pp.31-35
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    • 2010
  • High temperature micro pressure sensors were fabricated by using polycrystalline 3C-SiC piezoresistors grown on oxidized SOI substrates by APCVD. These have been made by bulk micromachining under $1{\times}1mm^2$ diaphragm and Si membrane thickness of $20{\mu}m$. The pressure sensitivity of implemented pressure sensors was 0.1 mV/$V{\cdot}bar$. The nonlinearity and the hysteresis of sensors were ${\pm}0.44%{\cdot}FS$ and $0.61%{\cdot}FS$. In the temperature range of $25^{\circ}C{\sim}400^{\circ}C$ with 5 bar FS, TCS (temperature coefficient of sensitivity), TCR (temperature coefficient of resistance), and TCGF (temperature coefficient of gauge factor) of the sensor were -1867 ppm/$^{\circ}C$, -792 ppm/$^{\circ}C$, and -1042 ppm/$^{\circ}C$, respectively.

Piezoelectric and Acoustic Properties of Ultrasonic Sensor Using 2-2 Piezocomposites

  • Lee, Sang-Wook;Nam, Hyo-Duk;Ryu, Jeong-Tak;Kim, Yeon-Bo
    • Proceedings of the Korea Society of Information Technology Applications Conference
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    • 2005.11a
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    • pp.215-218
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    • 2005
  • We have investigated on the development of 2-2 piezocomposites that have better piezoelectric activity and lower acoustic impedance than those of conventional piezoceramics. In this study, we have investigated the piezoelectric and acoustic properties of 2-2 piezocomposites sensor which were fabricated using dice-and-fill technique for the different volume fraction of PZT. The resonance characteristics measured by an impedance analyzer were similar to the analysis of finite element method. The resonance characteristics and the electromechanical coupling factor were the best when the volume fraction PZT was 0.6. It also showed the highest result from the standpoint of sensitivity, bandwidth and ring-down property and so on at the same condition. The specific characteristics shows that the 2-2 piezocomposites turned out to be superior to the ultrasonic sensor composed by single phase PZT.

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The effect of additive on $SnO_2$ gas sensor for improving stability ($SnO_2$계 가스 센서의 안정성 향상을 위한 산화물의 첨가 효과)

  • Park, Kwang-Mook;Min, Bong-Ki;Choi, Soon-Don;Nam, Hyo-Duk
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.865-868
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    • 2002
  • $SnO_2$ powders were prepare by precipitating $Sn(OH)_4$ from an aqueous solution of $SnCl_4{\cdot}5H_2O$, pH 9.5. The effects of stability and sensitivity of $SnO_2$ thick film sensors added with various amounts, $SiO_2$, $Al_2O_3$, $ZrO_2$, $TiO_2$ have been investigated. It is shown that the 3wt% $Al_2O_3$ or $SiO_2$ can improve the stability of $SnO_2$ gas sensor at an operating temperature of $350^{\circ}C$.

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Deep RIE(reactive ion etching)를 이용한 가스 유량센서 제작

  • Lee, Yeong-Tae;An, Gang-Ho;Gwon, Yong-Taek;Takao, Hidekuni;Ishida, Makoto
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2006.10a
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    • pp.198-201
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    • 2006
  • In this paper, we fabricated drag force type and pressure difference type gas flow sensor with dry etching technology which used Deep RIE(reactive ion etching) and etching stop technology which used SOI(silicon-on-insulator). we fabricated four kinds of sensor, which are cantilever, paddle type, diaphragm, and diaphragm with orifice type. Both cantilever and paddle type flow sensors have similar sensitivity as 0.03mV/V kPa. Sensitivity of the fabricated diaphragm and diaphragm with orifice type sensor were relatively high as about 3.5mV/V kPa, 1.5mV/V kPa respectively.

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Characteristics of metal thin-film pressure sensors by on silicon thin-film mer (실리콘 박막 멤브레인상에 제작된 금속박막형 압력센서의 특성)

  • Choi, Sung-Kyu;Nam, Hyo-Duk;Chung, Gwiy-Sang
    • Proceedings of the KIEE Conference
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    • 2001.07c
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    • pp.1372-1374
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    • 2001
  • This paper describes fabrication and characteristics of metal thin-film pressure sensor for working at high temperature. The proposed pressure sensor consists of a chrom thin-film, patterned on a Wheatstone bridge configuration, sputter-deposited onto thermally oxidized Si membranes with an aluminium interconnection layer. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.097 $\sim$ 1.21 mV/V kgf/$cm^2$ in the temperature range of 25 $\sim$ $200^{\circ}C$ and the maximum non-linearity is 0.43 %FS.

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