• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.387-393
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• 2004

General purpose of cylindrical capacitive displacement sensor(CCS) is measuring run-out motion and deflection of rotor. If CCS has narrow sensing range, its sensitivity coefficients must be calibrated precisely. And x, y component of CCS output can be coupled. In this research, CCS calibration procedure is automated with automatic calibration program and PC-controlled stage. And, coupled-terms of CCS signals were removed and the errors between measured position and mapped CCS signal were reduced obviously by sensitivity matrix that linearly.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1358-1363
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• 2004

The objective of this work is to propose calibration facility in which a thin film type heat flux sensor can be calibrated under convective flow condition by using a small wind tunnel with the constant temperature plate condition. A small wind tunnel has been built to produce a boundary layer shear flow above a constant temperature copper plate. 12-independent copper blocks, thin film heaters, insulators and temperature controllers were used to keep the temperature of flat plate constant at a specified temperature. Three commercial thin film-type heat flux sensors were tested. Convective calibrations of these gages were performed over the available heat flux range of $1.4{\sim}2.5kW/m^2$. The uncertainty in the heat flux measurements in the convective-type heat flux calibration facility was ${\pm}2.07%$. Non-dimensional sensitivity is proposed to compare the sensitivity calibrated by manufacturer and that of experiment conducted in this study.

• Journal of the Korean Ceramic Society
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• v.27 no.5
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• pp.638-644
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• 1990

The C3H8 gas sensitivities of SnO2, Pd-SnO2, Pt-SnO2 gas sensor are looked over with the impregnation method of PdCl2, H2PtCl6 solution on SnO2. The Cl- ion due to incomplete decomposition of PdCl2 at 80$0^{\circ}C$ for 30 min decrease the C3H8 gas sensitivity of SnO2, and the sensitivity is increased by the impreganation of H2PtCl6 solution on SnO2 because of its lower decomposition temperature compared with PdCl2. The C3H8 gas sensitivities of Pd-SnO2, Pt-SnO2 impregnated slightly after 1st sintering are larger than that of pure SnO2 sensor because very small amount of Cl- ion exist in sample due to smaller amount of impregnaiton.

• Vacuum Magazine
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• v.4 no.3
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• pp.6-11
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• 2017

The tactile sensor of the future robot is becoming a necessity as a sensory organ which can communicate with the person most directly. Recently, the Nature-inspired technology has provided a new direction for the development of these tactile sensors. Here, we review three different nature-inspired tactile sensory system; high sensitivity pressure sensor inspired by beetle wings, highly sensitive strain sensor inspired by the spider's sensory organs, Tactile sensor inspired by human fingertip. These nature-inspired tactile sensors are expected to provide a breakthrough that not only can sensitively measure the pressure, but also delicately recognize the softness and texture of the material just like human.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.186-189
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• 2004

Sensor used by semiconductor process produced an MAP sensor and applied to several industry. Among those sensors divided as transducer which convert physical quantity into electrical value, piezoresistive type sensor has been studied for the properties and sensitivity of piezoresistor. In this paper, the variation of seismic mass which have been functioned as actuator moving the cantilever beam analyzed the effect on distribution of resistance change ratio and supposed the optimal shape and position of piezoresistor. The resulting are following; According to the increment of seismic mass size, the value of resistance change ratio decreased caused by improve the stiffness. Y directional piezoresistor is formed in spot of 100 m apart from cantilever edge and length of that is 800$\mu$m. To increase the sensitivity, piezoresistor is made as n-type and x-direction.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1995.11a
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• pp.202-204
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• 1995

An acoustic sensor using PVDF film is proposed in this paper. And its properties, such as sensitivity level, identification of sound source frequencies. and directivity, were experimented. Sensitivity level measured at the distance of 1[m] was limited in the range of ${\pm}$10dB. Adjacent three frequencies were also tested to identify the frequency of sound sources. In the range of audible frequencies, it could distinguish the frequencies of a complex sound. In addition, it was found that the sensor outputs were maximum in the coincided direction with a source, when directivity was experimented with three sound sources and FFT. The proposed PVDF film sensor has good characteristics of directivity and identifying ability as an acoustic sensor.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07a
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• pp.181-184
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• 2002

This paper describes fabrication and characteristics of ceramic pressure sensor for working at high temperature. The proposed pressure sensor consists of a Ta-N thin-film, patterned on a Wheatstone bridge configuration, sputter deposited onto thermally oxidized Si membranes with an aluminium interconnection layer. The fabricated pressure sensor presents a low temperature coefficient of resistance, high sensitivity, low non-linearity and excellent temperature stability The sensitivity is 1.097∼1.21 mV/V$.$kgf/$\textrm{cm}^2$ in the temperature range of 25∼200$^{\circ}C$ and the maximum non-linearity is 0.43 %FS.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.274-274
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• 2008

This paper describes on the fabrication and characteristics of a 3C-SiC (Silicon Carbide) micro pressure sensor for harsh environment applications. The implemented micro pressure sensor used 3C-SiC thin-films heteroepitaxially grown on SOI (Si-on-insulator) structures. This sensor takes advantages of the good mechanical properties of Si as diaphragms fabricated by D-RIE technology and temperature properties of 3C-SiC piezoresistors. The fabricated pressure sensors were tasted at temperature up to $250^{\circ}C$ and indicated a sensitivity of 0.46 mV/V*bar at room temperature and 0.28 mV/V*bar at $250^{\circ}C$. The fabricated 3C-SiC/SOI pressure sensor presents a high-sensitivity and excellent temperature stability.

• Proceedings of the KIEE Conference
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• 1993.11a
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• pp.188-191
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• 1993

Silicon flow sensor which can detect the magnitude and direction of two dimensional air flow was designed and fabricated by CMOS process and bulk micromachining technique. The flow sensor consists of three-layered dielectric diaphragm a heater at the center of the diaphragm and four thermopiles surrounding the heater at each side of diaphragm as sensing elements. This diaphragm structure contributes to improve the sensitivity due to excellent thermal isolation property of dielectric materials and its tiny thickness. The flow sensor has good axial symmetry to sense 2-D air flow with the optimized sensing position in the given structure. Measured sensitivity of our sensor is $18.7mV/(m/s)^{1/2}$.

• Bulletin of the Korean Chemical Society
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• v.31 no.9
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• pp.2537-2541
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• 2010

We chose a fluorescent pentapeptide sensor (-CPGHE) containing a dansyl fluorophore as a model peptide and investigated whether the selectivity and sensitivity of the peptides for heavy and transition metal ions could be tuned by changing amino acid sequence. In this process, we developed a selective peptide sensor, Cp1-d (-HHPGE, $K_d\;=\;670\;nM$) for detection of $Zn^{2+}$ in 100% aqueous solution and a selective and sensitive peptide sensor, Cp1-e (-CCHPGE, $K_d\;=\;24\;nM$) for detection of $Cd^{2+}$ in 100% aqueous solution. Overall results indicate that the selectivity and sensitivity of the metallopeptide sensors to specific heavy and transition metal ions can be tuned by changing amino acid sequence.