• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.2114-2116
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• 2004

센서의 소형화 되는 추세에 전극 면적은 sensitivity의 중요한 요인이다. 본 연구에서는 콜레스테롤을 측정하기 위해 각각 planar 전극과 porous 전극에 효소 고정화 방법으로 covalent binding인 silanization 공정을 이용하여 전극 면적에 따른 전기화학적 감도를 비교하였다. Handles-Sevcik equation을 이용하여 전극 면적을 구한 결과 planar 전극의 경우 0.1608 $cm^2$, porous 전극의 경우 0.5054 $cm^2$로 porous 전극 면적이 planar전극에 비해 약 3.1배 증가하였다. 또, planar 센서의 sensitivity는 0.08567 ${\mu}A/mM{\cdot}cm^2$이고 porous 센서의 sensitivity는 planar sensor에 비해 약 3.1배 증가한 0.2656 ${\mu}A/mM{\cdot}cm^2$였다. 따라서 porous sensor의 sensitivity의 증가는 전극 면적의 증가에 따른 것이라고 할 수 있다.

• 마이크로전자및패키징학회지
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• 제8권4호
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• pp.17-23
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• 2001

3차원 홀 센서는 두 개의 수평 자계($\chi$, y성분) 검출부와 한 개의 수직 자계(z 성분) 검출부를 갖는다. 종래의 3차원 홀 센서는 일반적으로 $B_{z}$에 대한 감도가 $B_\chi, B_y$에 대한 감도의 약 1/10정도에 그친다. 본 연구에서는 새로운 구조를 갖는 3차원 홀 센서를 제안하였다. 이방성 식각을 이용하여 트랜치를 형성함으로써 감도를 약 6배 증가시켰다. 또한 자속을 집속시키기 위하여 웨이퍼 후면에 강자성체 박막을 증가시킴으로써 $B_{z}$에 대한 감도를 $B_\chi, B_y$에 대한 감도의 약 80% 정도로 증가시켰다. 전류 3 mA를 인가했을 때, Ni/Fe 박막을 증착하여 제작된 센서의 감도는 $B_\chi, B_y$, B$_{z}$ 에 대하여 각각 120.1 mV/T, 111.7 mV/T, 그리고 95.3 mV/T로 측정되었다. 센서의 선형성을 오차가 $\pm$3%로 우수하였다.

• 센서학회지
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• 제29권6호
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• pp.420-426
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• 2020

A metal oxide semiconductor gas sensor is operated by measuring the changes in resistance that occur on the surface of nanostructures for gas detection. ZnO, which is an n-type metal oxide semiconductor, is widely used as a gas sensor material owing to its high sensitivity. Various ZnO nanostructures in gas sensors have been studied with the aim of improving surface reactions. In the present study, the sol-gel and vapor phase growth techniques were used to fabricate nanostructures to improve the sensitivity, response, and recovery rate for gas sensing. The sol-gel method was used to synthesize SnO₂ nanoparticles, which were used as the seed layer. The nanoparticles size was controlled by regulating the process parameters of the solution, such as the pH of the solution, the type and amount of solvent. As a result, the SnO₂ seed layer suppressed the aggregation of the nanostructures, thereby interrupting gas diffusion. The ZnO nanostructures with a sol-gel processed SnO₂ seed layer had larger specific surface area and high sensitivity. The gas response and recovery rate were 1-7 min faster than the gas sensor without the sol-gel process. The gas response increased 4-24 times compared to that of the gas sensor without the sol-gel method.

• 센서학회지
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• 제24권4호
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• pp.258-263
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• 2015

In order to prevent drink-driving by detecting concentration of alcohol from driver's exhale breath, twenty chemical sensors fabricated. The one of purposes for sensor array which consists of those sensors is to discriminate between target gas(alcohol) and interference gases($CH_3CH_2OH$, CO, NOx, Toluene, and Xylene). Wilks's lambda was presented to achieve above purpose and optimal sensors were selected using the method. In this paper, step-wise sensor elimination based on Euclidean distance was investigated for selecting optimal sensors and compared with a result of Wilks's lambda method. The selectivity and sensitivity of sensor array were used for comparing performance of sensor array as a result of two methods. The data acquired from selected sensor were analyzed by pattern analysis methods, principal component analysis and Sammon's mapping to analyze cluster tendency in the low space (2D). The sensor array by stepwise sensor elimination method had a better sensitivity and selectivity compared to a result of Wilks's lambda method.

• 전기학회논문지P
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• 제66권2호
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• pp.82-87
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• 2017

This paper presents performance improvement of CO gas sensor signal conditioner for early fire warning system. The warning system is based on the CO sensor and its advanced signal conditioning modules network that employ electochemical gas sensor. The electochemical has advantage of having a linear output and operating with a low consumption and fast response. This electrochemical gas sensor contains a gas membrane and three electrodes(working, counter, reference electrode) in contact with an electrolyte. To use a three-electrode sensor, a voltage has to be applied between the working and the reference electrode according to the specification of the sensor. In this paper, we designed these requirements that should be considered in temperature compensation algorithm and electrode measurement of CO sensor modules by using advanced signal conditioning method included 3-electrode. Simulation and experimental results show that signal conditioner of CO sensor module using 3-electrode have a advantage linearity, sensitivity and stability, fast response etc..

• 한국전기전자재료학회논문지
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• 제31권3호
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• pp.188-192
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• 2018

In this study, we fabricated an $NO_X$ gas sensor using a composite film of multi-walled carbon nanotubes (MWCNT)/zinc oxide (ZnO). Carbon nanotubes (CNTs) show good electronic conductivity and chemical-stability, and zinc oxide (ZnO) is a wide band gap semiconductor with a large exciton binding energy. Gas sensors require characteristics such as high speed, sensitivity, and selectivity. The fabricated gas sensor was used to detect $NO_X$ gas at different $NO_X$ concentrations. The sensitivity of the gas sensor increased with increasing gas concentrations. Additionally, while changing the temperature inside the chamber containing the MWCNT/ZnO gas sensor, we obtained the sensitivity and normalized responses for detecting $NO_X$ gas in comparison to ZnO and MWCNT film gas sensors. From the experimental results, we confirmed that the gas sensor sensing mechanism was enhanced in the composite-film gas-sensor and that the electronic interaction between MWCNT and ZnO contributed to the improved sensor performance.

• 센서학회지
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• 제32권5호
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• pp.290-294
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• 2023

Among various types of harmful gases, hydrogen sulfide is a strong toxic gas that is mainly generated during spillage and wastewater treatment at industrial sites. Hydrogen sulfide can irritate the conjunctiva even at low concentrations of less than 10 ppm, cause coughing, paralysis of smell and respiratory failure at a concentration of 100 ppm, and coma and permanent brain loss at concentrations above 1000 ppm. Therefore, rapid detection of hydrogen sulfide among harmful gases is extremely important for our safety, health, and comfortable living environment. Most hydrogen sulfide gas sensors that have been reported are electrical resistive metal oxide-based semiconductor gas sensors that are easy to manufacture and mass-produce and have the advantage of high sensitivity; however, they have low gas selectivity. In contrast, the electrochemical sensor measures the concentration of hydrogen sulfide using an electrochemical reaction between hydrogen sulfide, an electrode, and an electrolyte. Electrochemical sensors have various advantages, including sensitivity, selectivity, fast response time, and the ability to measure room temperature. However, most electrochemical hydrogen sulfide gas sensors depend on imports. Although domestic technologies and products exist, more research is required on their long-term stability and reliability. Therefore, this study includes the processes from electrode material synthesis to sensor fabrication and characteristic evaluation, and introduces the sensor structure design and material selection to improve the sensitivity and selectivity of the sensor. A sensor case was fabricated using a 3D printer, and an Ag reference electrode, and a Pt counter electrode were deposited and applied to a Polytetrafluoroethylene (PTFE) filter using PVD. The working electrode was also deposited on a PTFE filter using vacuum filtration, and an electrochemical hydrogen sulfide gas sensor capable of measuring concentrations as low as 0.6 ppm was developed.

• 한국세라믹학회지
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• 제36권3호
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• pp.237-243
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• 1999

스크린 프린팅법을 이용하여 NOX 감지용 WO3 후막형 가스센서를 제조하였다. 본 실험에서는 감지막의 소성 온도에따른 감도변화 및 Ru을 첨가함으로써 감도의 증진을 중점적으로 조사하였다. 또한 NO2 50 ppm하에서 CO, H2, CH4 그리고 i-C4H10등의 가스에 대하여 cross sensitivity를 조사하였다. WO3 가스센서는 소성온도 50$0^{\circ}C$, 작동온도 30$0^{\circ}C$에서 최대감도를 얻었다. 순수한 WO3에 Ru(0.004 wt%)을 첨가시 NO2 및 NO 가스에 대한 감도가 크게 증진되었다. 그러나 순수한 WO3 센서는 Ru(0.004 wt%)이 첨가된 WO3 센서보다 더 우수한 cross sensitivity를 보였다.

• 센서학회지
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• 제6권3호
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• pp.180-187
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• 1997

We demonstrate the improvement of sensitivity and analysis of operating characteristics of the piezoelectric pressure sensor using ZnO piezoelectric thin film and FET(field effect transistor) for sensing applied pressure and transforming the pressure into electrical signals, respectively. The sensitivity of the PSFET(pressure sensitive field effect transistor) was improved by using highly-oriented ZnO film perpendicular to the substrate surface and the operating characteristics was investigated by monitoring output voltage with time in various static pressure levels.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.387-393
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• 2004

General purpose of cylindrical capacitive displacement sensor(CCS) is measuring run-out motion and deflection of rotor. If CCS has narrow sensing range, its sensitivity coefficients must be calibrated precisely. And x, y component of CCS output can be coupled. In this research, CCS calibration procedure is automated with automatic calibration program and PC-controlled stage. And, coupled-terms of CCS signals were removed and the errors between measured position and mapped CCS signal were reduced obviously by sensitivity matrix that linearly.