• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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• pp.293-293
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• 2000

The SECS(SEMI Equipment Communications Standard) is a standard protocol for communication between equipments and a host in semiconductor processes. This paper proposes the implementation of the HSMS(High-speed SECS Message Services) as an interface for transmission of the SECS messages and SECS-II containing message contents defined as an SEMI standard. The HSMS driver is implemented as a type of the daemon program and several DLL files. The SECS-II composes of the SML(SECS Message Language) file defining the SECS messages, the SML translator being able to interpret and transform the SML, and the data index table being able to refer to SECS messages. We also define the shared parameter to exchange the HSMS header and SECS message between the HSMS and the SECS-II. Eventually, to show the effectiveness of the proposed drivers, we test the SECS communications between equipments and a host using the implemented communication programs.

• 반도체디스플레이기술학회지
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• 제19권3호
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• pp.124-129
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• 2020

Autonomous underwater vehicle makes attracts to many researchers. This paper proposes a convolutional neural network (CNN) based fish detection method. Since there are not enough data sets in the process of training, overfitting problem can be occurred in deep learning. To solve the problem, we apply the dropout algorithm to simplify the model. Experimental result showed that the implemented method is promising, and the effectiveness of identification by dropout approach is highly enhanced.

• 반도체디스플레이기술학회지
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• 제15권2호
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• pp.55-60
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• 2016

This study was developed through the secondary battery module charging/discharger possible utilization in the production process equipment circuit. The developed module is ensuring construction of efficient and productive charging and discharger through this research a limit on the yield and the price of existing single -channel charge and discharger circuit as a 5V 70A grade secondary battery Formation charge and discharger for up to 1 board 4 channels. In order to improve the sensing accuracy, through a robust differential amplifier circuit described using 16bit Analog-Digital Converter and noise was secured 16bit resolution sensing. The configuration also made demands for property Rise / Fall Time. Data Acquisition, discharge efficiency and also to fit the sink circuit temperature level for mass production.

• 반도체디스플레이기술학회지
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• 제10권1호
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• pp.83-89
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• 2011

In the case of the tracking system with an active camera, it is very difficult to guarantee real-time processing due to the attribute of vision system which handles large amounts of data at once and has time delay to process. The reliability of the processed result is also badly influenced by the slow sampling time and uncertainty caused by the image processing. In this paper, we figure out dynamic characteristics of pixels reflected on the image plane and derive the mathematical model of the vision tracking system which includes the actuating part and the image processing part. Based on this model, we find a controller that stabilizes the system and enhances the tracking performance to track a target rapidly. The centroid is used as the position index of moving object and the DC motor in the actuating part is controlled to keep the identified centroid at the center point of the image plane.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2004년도 춘계학술대회 발표 논문집
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• pp.163-168
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• 2004

Linear motor can directly apply to the system needed linear mot ions without rotary mot ions. To control a high-speed and high-resolution, the development of the linear motors is recently required in the high-integrated and speed process industry. This paper presents vibration analyses as well as measurement standards of the newly developed linear motors through analyzing the vibration characteristics and thermal behaviors of the advanced products. Vibration experiments are conducted for identifying the hysteresis and vibration level during operation. They are also included in the modal test to analyze the vibration. Analytic data using Finite Element Method (FEM) are compared with the results of the modal. Loss of temperature generated the linear motor leads to a serious deformation within its parts. The thermal behaviors are very important factor in linear motor. The FEM and experiments make it possible to understand these characteristics.

• Transactions on Electrical and Electronic Materials
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• 제7권4호
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• pp.173-179
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• 2006

Due to the limitations of the channel length, the lateral spread for two-dimensional impurity distributions is critical for the analysis of devices including the integrated complementary metal oxide semiconductor (CMOS) circuits and high frequency semiconductor devices. The developed codes were then compared with the two-dimensional implanted profiles measured by transmission electron microscope (TEM) as well as simulated by a commercial TSUPREM4 for verification purposes. The measured two-dimensional TEM data obtained by chemical etching-method was consistent with the results of the developed analytical model, and it seemed to be more accurate than the results attained by a commercial TSUPREM4. The developed codes can be applied on a wider energy range $(1KeV{\sim}30MeV)$ than a commercial TSUPREM4 of which the maximum energy range cannot exceed 1MeV for the limited doping elements. Moreover, it is not only limited to diffusion process but also can be applied to implantation due to the sloped and nano scale structure of the mask.

• 반도체디스플레이기술학회지
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• 제8권2호
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• pp.23-29
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• 2009

To increase the data capacity of one-dimensional symbology, 2D barcodes have been proposed a decade ago. In this paper, a new 2D barcode detection algorithm based on Local Binary Pattern is presented. To locate 2D barcode symbols, a texture analysis scheme based on the Local Binary Pattern is adopted, and a gray-scale projection with sub-pixel operation is utilized to separate the symbol precisely from the input image. Finally, the segmented symbol is normalized using the inverse perspective transformation for the decoding process. The proposed method ensures high performances under various lighting/printing conditions and strong perspective deformations. Experiments show that our method is very robust and efficient in detecting the symbol area for the various types of 2D barcodes.

• 반도체디스플레이기술학회지
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• 제16권2호
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• pp.98-105
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• 2017

In the display industry, the residual vibration of the transfer robot can increase the process time and cause the breakage of the glass substrate, which is critical to productivity of display manufacturing. In this paper, the natural frequencies of transfer robot are analyzed by finite element method. On the basis of the analyzed data, we investigated the response characteristics of input shaping control with or without the glass presence on the hand of the transfer robot using MATLAB program, and compared with the current response characteristics of input shaping control applied to the industry. Based on this, we suggest an optimal residual vibration control method for the practical application in display industry.

• 반도체디스플레이기술학회지
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• 제17권1호
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• pp.50-53
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• 2018

Cyclic measurement system using relay circuit for organic light emitting diode (OLED) was demonstrated. The OLED characterization such as current-voltage, impedance, and capacitance-voltage is performed in sequence, repetitively and automatically under full control of the personnel computer (PC) without changing the connection of cables. Owing to in situ degradation by cyclic measurement, the time dependence of the data can give good information on the reliability factor of the OLED devices. Therefore, both performance and reliability of the OLEDs can be evaluated, with no manual operation during the entire process.

• 전자통신동향분석
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• 제36권3호
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• pp.23-33
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• 2021

Two main technologies of III-V/Si laser diode for optical communication, direct epitaxial growth, and wafer bonding were studied. Until now, the wafer bonding has been vigorously studied and seems promising for the ideal III-V/Si laser. However, the wafer bonding process is still complicated and has a limit of mass production. The development of a concise and innovative integration method for silicon photonics is urgent. In the future, the demand for high-speed data processing and energy saving, as well as ultra-high density integration, will increase. Therefore, the study for the hetero-junction, which is that the III-V compound semiconductor is directly grown on Si semiconductor can overcome the current limitations and may be the goal for the ideal III-V/Si laser diode.