• ETRI Journal
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• v.10 no.1
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• pp.64-75
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• 1988

GaAs 등 화합물 반도체는 그 표면구조가 아직 확립되어 있지 않고, 표면조건이 소자특성에 큰 영향을 미친다. 소자공정중 이온주입 공정은 self-aligned MESFET(Metal Semiconductor Field Effect Transistor) 제작에 필수적인 기술이나, 이온 주입시 수 $\AA$ 크기의 vacancy 등 격자결함이 발생하며 이들 결함을 제어할 수 있는 기술이 필요하다. 에너지 가변 양전자 소멸기술은 표면에서 $1\mum$정도내에 존재하는 vacancy 형태의 격자결함을 감지해 낼 수 있으며 이들 격자결함의 depth profiling을 할 수 있는 기술이다. 본 고에서는 에너지 가변 양전자 소멸기술의 원리 및 최근 연구결과에 대해서 살펴보기로 한다.

• Proceedings of the Optical Society of Korea Conference
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• 1990.02a
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• pp.264-268
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• 1990

A guided-wave electro-optic Mach-Zehnder interferometric modulator was fabricated on X-cut LiNbO3 . The channel waveguides were formed by proton diffusion with self-aligned SiO2-cladding. A mach-Zehnder interferometric modulator with arm lengths of 7mm has been fabricated and tested at 0.6328${\mu}{\textrm}{m}$. Its modulation depth with V$\pi$ of only 3.5V was 85% and the 3dB bandwidth was 1.6KHz. For high speed operation, the electrode dimension should be reduced to have smaller R, L, and C.

• 한국정보디스플레이학회:학술대회논문집
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• 2008.10a
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• pp.907-910
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• 2008

The effect of channel length reduction on the electrical characteristics of self-aligned polysilicon TFTs has been investigated by combining experimental characteristics and 2-D numerical simulations. The role of drain induced barrier lowering and floating body effects has been carefully analized using numerical simulations.

• 한국정보디스플레이학회:학술대회논문집
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• 2006.08a
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• pp.1028-1029
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• 2006

We have developed a self-aligned single isolation structure (SIS) and an asymmetric single isolation structure with an image reversal photoresist to increase the aperture ratio in a passive matrix organic light emitting display (PMOLED). Compared to the conventional structure, the fabrication process is reduced by about 17% and the aperture ratio is enlarged over 4%.

• Electrical & Electronic Materials
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• v.6 no.1
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• pp.8-13
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• 1993

본 연구에서는 단일 광 변조기를 양자교환과 자기정열 방식을 이용하여 X-cut NiNbO$_{3}$기판에 제작하였다. 여기에서 어닐링 처리 효과는 단일 광 변조기에서 도파로의 굴절율 변화 특성을 나타냈으며 특히 어닐링 처리 시간의 조절에 의해서 단일 광 도파로가 광범위하게 변화된다는 것을 알았다. 이것을 기초로하여 광 변조기는 어닐링 공정 및 자기 정열방식에 의한 최적화와 간단화를 제작 공정에 응용 할 수 있었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2006.02a
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• pp.125-125
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• 2006

• The Transactions of The Korean Institute of Electrical Engineers
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• v.57 no.7
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• pp.1218-1222
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• 2008

We investigate the effect of rise time of a pulse bias voltage on atmospheric plasma generation. With the faster rise time of the pulse bias, the glow discharge appears to be more uniformly generated along the electrodes. I-V measurement confirms that higher loading power can be obtained using the faster rise time. A new understanding for atmospheric plasma generation at a micro-gap electrode is suggested.

• Proceedings of the KIEE Conference
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• 1996.11a
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• pp.413-415
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• 1996

This paper presents a technique for fabricating an electro-optical microlens for microcolumn e-beam system. The device, named Self-Aligned Microlens (SAM) was realized by mixing surface and bulk micromachining technology. The microbridges were formed on both sides of silicon wafer symmetrically. The alignment error between the electrodes could be controlled within a few micrometers with also reducing the numbers of anodic bonding.

• Proceedings of the Korean Vacuum Society Conference
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• 2004.02a
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• pp.95-95
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• 2004

• Journal of Periodontal and Implant Science
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• v.45 no.2
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• pp.62-68
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• 2015

Purpose: The goal of this study was to investigate the histomorphometric characteristics of the healing process of microcracks in the cortical bone after the installation of mini-implants (MIs). Methods: Self-drilling MIs were inserted into the tibial diaphysis of twelve adult male New Zealand rabbits. Four MIs per rabbit were placed randomly. The animals were divided into four groups according to the length of the healing period: group A was sacrificed immediately, group B was sacrificed after one week, group C was sacrificed after two weeks, and group D was sacrificed after four weeks. Cortical bone thickness was measured using micro-computed tomography, and histomorphometric analyses of the cumulative length of the microcracks (CLCr) and the total number of microcracks (NCr) were performed using hematoxylin and eosin staining. Results: The microcracks were radially and concentrically aligned in the peri-MI bone. The CLCr decreased significantly one week after the surgery, mainly due to healing of the concentrically aligned microcracks. The CLCr showed another significant decrease from two weeks after the surgery to four weeks after the surgery, mainly reflecting healing of the radially aligned microcracks. A statistically significant decrease in the NCr occurred as the microcracks healed from zero weeks to two weeks. However, no significant difference in the NCr was found between groups C and D. Conclusions: In order to improve the primary stability of MIs, delayed loading and a healing period of a certain length are recommended to ensure the optimal healing of microcracks and bone remodeling.