• 제목/요약/키워드: Self-aligned

검색결과 213건 처리시간 0.026초

트랜치 기법을 이용한 SOI MOSFET의 전기적인 특성에 관한 연구 (A New Structure of SOI MOSFETs Using Trench Mrthod)

  • 박윤식
    • 한국컴퓨터산업교육학회:학술대회논문집
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    • 한국컴퓨터산업교육학회 2003년도 제4회 종합학술대회 논문집
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    • pp.67-70
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    • 2003
  • In this paper, propose a new structure of MOFET(Metal-Oxide-Semiconductor Field Effect Transistor) which is widely application for semiconductor technologies. Eleminate the latch-up effect caused by closed devices when conpose a electronic circuit using proposed devices. In this device have a completely isolation structure, and advantage of leakage current elimination. Each independent devices are isolated by trench-well and oxide layer of SOI substrate. Using trench gate and self aligned techniques reduces parasitic capacitance between gate and source, drain. In this paper, we proposed the new structure of SOI MOSFET which has completely isolation and contains trench gate electrodes and SOI wafers. It is simulated by MEDICI that is device simulator.

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Wide-Viewing Liquid Crystal Displays with Periodic Surface Gratings

  • Lee, Sin-Doo;Park, Jae-Hong;Yoon, Tae-Young;Yu, Chang-Jae
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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    • pp.947-952
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    • 2002
  • A new concept of forming self-aligned multidomains is used for fabricating wide-viewing liquid crystal displays (LCDs) with periodic surface gratings.An array of the periodic surface gratings is produced on substrates using a photosensitive polymer by the illumination o. the UV light through a patterned photomask. A multidomain structure is naturally formed on the grating surface by the initial director distortions together with continuous variations of an external electric field. The LCD cells with periodic surface gratings are found to show excellent extinction in the off-state and wide-viewing property m the on-state.

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고주파에서 방향성결합형 광 스위치의 출력 특성변화 (Characterization of directional coupling optical switch at High frequency)

  • 강기성;소대화
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1996년도 춘계학술대회 논문집
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    • pp.264-268
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    • 1996
  • Directional coupling optical switch which on the LiNbO$_3$ substrate is fabricated by using proton exchange method and self-aligned method. Proton exchange of proton diffusion method was applied to pattern a waveguide on LiNbO$_3$ substrate. The annealing at 400[$^{\circ}C$] was caroled out to control waveguide width and depth. The process of proton exchange was done at 150[$^{\circ}C$] for 120[min], 200[$^{\circ}C$] for 60[min] and annealing process was done at 400[$^{\circ}C$] for 90[min], 400[$^{\circ}C$] for 60[min]. The high speed directional coupling optical switch has very good figures of merits:the measured high frequency power were achieved.

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Anodic formation of TiO2 nanoporous structures at high temperature in a glycerol/phosphate electrolyte

  • 이기영
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2017년도 춘계학술대회 논문집
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    • pp.95.2-95.2
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    • 2017
  • Anodic TiO2 nanostructures have wide applications due to their various functional properties such as wide band-gap, chemical stability, and anti-corrosiveness. In order to enhance the properties, several approaches to fabricate TiO2 structures have been developed. Especially, TiO2 nanotube arrays prepared by anodization in a fluoride electrolyte show impressive properties for dye sensitized solar cells1 and photocatalyst. In this presentation, we introduce new types of TiO2 nanostructures beyond TiO2 nanotubes that are fabricated by anodization at high temperature in a glycerol/phosphate electrolyte. We show that depending on the anodization parameters different self-organized morphologies - of highly aligned, high aspect ratio oxide structures can be formed. Critical factor for growth and the use for dye sensitized solar cells and photocatalyst will be discussed.

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Characterization of Thin Film Transistor using $Ta_2O_5$ Gate Dielectric

  • Um, Myung-Yoon;Lee, Seok-Kiu;Kim, Hyeong-Joon
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2000년도 제1회 학술대회 논문집
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    • pp.157-158
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    • 2000
  • In this study, to get the larger drain current of the device under the same operation condition as the conventional gate dielectric SiNx thin film transistor devices, we introduced new gate dielectric $Ta_2O_5$ thin film which has high dielectric constant $({\sim}25)$ and good electrical reliabilities. For the application for the TFT device, we fabricated the $Ta_2O_5$ gate dielectric TFT on the low-temperature-transformed polycrystalline silicon thin film using the self-aligned implantation processing technology for source/drain and gate doping. The $Ta_2O_5$ gate dielectric TFT showed better electrical performance than SiNx gate dielectric TFT because of the higher dielectric constant.

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Characteristics of Poly-Si TFTs Fabricated on Flexible Substrates using Sputter Deposited a-Si Films

  • Kim, Y.H.;Moon, D.G.;Kim, W.K.;Han, J.I.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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    • pp.297-300
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    • 2005
  • The characteristics of polycrystalline silicon thin-film transistors (poly-Si TFTs) fabricated using sputter deposited amorphous silicon (a-Si) precursor films are investigated. The a-Si films were deposited on flexible polymer substrates using argon-helium mixture gases to minimize the argon incorporation into the film. The precursor films were then laser annealed by using a XeCl excimer laser and a four-mask-processed poly-Si TFT was fabricated with fully self-aligned top gate structure. The fabricated pMOS TFT showed field-effect mobility of $32.4cm^2/V{\cdot}s$ and on/off ratio of $10^6$.

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A Roll-to-Roll Process for Manufacturing Flexible Active-Matrix Backplanes Using Self-Aligned Imprint Lithography and Plasma Processing

  • Taussig, Carl;Jeffrey, Frank
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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    • pp.808-810
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    • 2005
  • Inexpensive large area arrays of thin film transistors (TFTs) on flexible substrates will enable many new display products that cannot be cost effectively manufactured by conventional means. This paper presents a new approach for low cost manufacturing of electronic devices using roll-to-roll (R2R) processes exclusively. It was developed in partnership by Hewlett Packard Laboratories and Iowa Thin Film Technologies (ITFT), a solar cell manufacturer. The approach combines ITFT's unique processes for vacuum deposition and etching of semiconductors, dielectrics and metals on continuous plastic webs with a method HP has invented for the patterning and aligning the multiple layers of a TFT with sub-micron accuracy and feature size.

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고온 급속열처리에 의한 이온빔 증착 W/GaAs의 구조 및 전기적 특성 (Stuructural and Electrical Characteristics of Ion Beam Deposited Tungsten/GaAs by High Temperature Rapid Thermal Annealing)

  • 편광의;박형무;김봉렬
    • 대한전자공학회논문지
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    • 제27권1호
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    • pp.81-90
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    • 1990
  • In this study, ion beam deposited tungsten thin film for gate material of GaAs SAGFET(Self Aligned Gate FET) was annealed from 800\ulcorner to 900\ulcorner using RTA and detailed investigations of structural and electrical characteristics of this film were carried out using four-point probe, XRD, SEM, AES and current-voltage measurement. Investigated results showed phase of as deposited tungsten film was fine grain \ulcornerphase and phase tdransformation of this film into \ulcornerphase occured at annealing condition of 900\ulcorner, 6sec. But regardless of phase transformation, electrical characteristics of tungsten film were very stable to 900\ulcorner and in case of 900\ulcorner, 4sec annealing condition Schottky barrier height obtained from 10 diodes measurements was 0.66 + 0.003 eV.

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외부 베이스표면을 에미터 ledge로 포장한 InGaP/GaAs HBT의 신뢰도 향상 (High Reliable GaAs HBT with InGaP Ledge Emitter Structure)

  • 박재홍;박재운
    • 한국컴퓨터정보학회논문지
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    • 제5권4호
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    • pp.102-105
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    • 2000
  • 외부 베이스 표면에 형성되는 표면 재결합 상태의 불안정성을 개선하기 위해 에미터 ledge 구조로 제작된 InGaP/GaAs HBT의 신뢰도 측정을 위해 고온에서 오랜 시간동안 정전류 스트레스를 인가하였다. 553K, 533K, 513K에서 콜렉터 전류 24㎃로 스트레스를 인가해 전류이득의 열화를 관찰하였다. 그 결과 EA=1.97eV, WTTF=4.8$\times$108시간(14$0^{\circ}C$)을 구하였다. InGaP/GaAs HBT의 열화 원인은 베이스 도펀트인 C의 확산으로 추정된다.

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Nanofiber Aligned within Ordered Conducting Polymer TFT

  • Hur, Jae-Hyun;Cha, Seung-Nam;Yoon, Chi-Yul;Kim, Seong-Min;Park, Jong-Jin;Kim, Jong-Min
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.315-317
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    • 2009
  • We report the preparation of novel nanofiber organic semiconductors that can be utilized as the active channel materials in the field effect transistors (FETs). The nanofibers produced by the electrospinning reveals the excellent performances (mobility ~ 0.16 $cm^2$/V) due to thier highly ordered molecular packing in the polymer matrix.

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