• Title/Summary/Keyword: Seed Layer

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Characteristics of aluminum-induced polycrystalline silicon film for polycrystalline silicon solar cell fabrication (다결정 실리콘 태양전지 제조를 위한 비정질 알루미늄 유도 결정 입자 특성)

  • Jeong, Hyejeong;Kim, Ho-Sung;Lee, Ho-Jae;Boo, Seongjae
    • 한국신재생에너지학회:학술대회논문집
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    • 2010.11a
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    • pp.49.1-49.1
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    • 2010
  • 본 연구에서는 증착법에 의해 제조된 다결정 실리콘을 이용한 태양전지 제작과 관련하여 다결정 실리콘 씨앗층 제조를 위한 기판에 대하여 연구를 수행하였다. 다결정 실리콘 씨앗층을 제조할 수 있는 기술중 aluminum-induced layer exchange(ALILE) 공정을 이용하여 다결정 실리콘 씨앗층을 제조하였다. glass/Al/oxide/a-Si 구조로 알루미늄과 비정질 실리콘 계면에 알루미늄 산화막을 다양한 두께로 형성시켜, 알루미늄 유도 결정화에서 산화막의 두께가 결정화 특성에 미치는 영향, 결정결함, 결정크기에 대하여 연구하였다. 형성된 다결정 실리콘 씨앗층 막의 특성은 OM, SEM, FIB, EDS, Raman spectroscopy, XRD, EBSD 을 이용하여 분석하였다. 그 결과 산화막의 두께가 증가할수록 결함도 함께 증가하였다. 16nm 두께의 산화막 구조에서 <111> 방향의 우선배향성을 가진, $10{\mu}m$의 sub-grain 결정립을 갖는 씨앗층을 제조 하였다.

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The Analysis of New Video Conference System Based Secure Authentication

  • Jung Yong Deug;Kim Gil Choon;Jun Moon Seog
    • Proceedings of the IEEK Conference
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    • 2004.08c
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    • pp.600-607
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    • 2004
  • The paper describes the implementation of the video conferencing system using public key infrastructure which is used for user authentication and media stream encryption. Using public key infrastructure, we are able to reinforce the authentication for conference participant and block several malicious hacking while protecting conference control information. The paper shows the implementation of the transportation layer secure protocol in conformity with Korea public key authentication algorithm standard and symmetric key encryption algorithm (RC2, SEED, DES and 3DES) for media stream encryption. The feature of the paper is transportation layer secure protocol that is implemented for protection of information on a user authentication and video conference and the media streaming encryption algorithm also can be envisioned with another block encryption algorithm. The key for media streaming encryption may be safely distributed by the transportation layer secure protocol.

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Fabrication of Tip of Probe Card Using MEMS Technology (MEMS 기술을 이용한 프로브 카드의 탐침 제작)

  • Lee, Keun-Woo;Kim, Chang-Kyo
    • Journal of Institute of Control, Robotics and Systems
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    • v.14 no.4
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    • pp.361-364
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    • 2008
  • Tips of probe card were fabricated using MEMS technology. P-type silicon wafer with $SiO_2$ layer was used as a substrate for fabricating the probe card. Ni-Cr and Au used as seed layer for electroplating Ni were deposited on the silicon wafer. Line patterns for probing devices were formed on silicon wafer by electroplating Ni through mold which formed by MEMS technology. Bridge structure was formed by wet-etching the silicon substrate. AZ-1512 photoresist was used for protection layer of back side and DNB-H100PL-40 photoresist was used for patterning of the front side. The mold with the thickness of $60{\mu}m$ was also formed using THB-120N photoresist and probe tip with thickness of $50{\mu}m$ was fabricated by electroplating process.

Influence of thermal annealing on hybrid Organic Solar Cell with ZnO nanowire

  • Park, Seong-Hwak;Kim, Jong-Hyeon;Jo, Jin-U;Kim, Seong-Hyeon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.317-317
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    • 2010
  • ZnO나노와이어는 높은 투과도, 화학 및 열적 안정성을 가지며, 유기태양전지에 적용하였을 때 Active Layer의 표면적 증가, 전자의 수집 및 전달에 용이한 장점가지고 있어 하이브리드 유기 태양전지에 적용되고 있다. ZnO나노와이어와 P3HT/PCBM을 사용한 하이브리드 유기태양전지는 Active Layer의 열처리 온도를 변화시켜 ITO/AZO/ZnO wire/PCBM:P3HT/PEDOT:PSS/Ag구조로 제작되었다. ZnO나노와이어는 AZO를 Seed로 사용하고 Znc nitrate hydrate와 hexamethylenetetramine을 혼합하여 수열합성법으로 성장 후, P3HT:PCBM, PEDOT:PSS을 Spin Coating법으로 형성하였다. UV-vis와 Solar simulator를 통하여 Active Layer의 열처리 온도에 따른 태양전지의 특성을 분석하였다.

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The Fabrication of Tin Oxide Films by Atomic Layer Deposition using Tetrakis(Ethylmethylamino) Tin Precursor

  • Choi, Woon-Seop
    • Transactions on Electrical and Electronic Materials
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    • v.10 no.6
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    • pp.200-202
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    • 2009
  • Tin oxide thin films were prepared by atomic layer deposition using a tetrakis(ethylmethylamino) tin precursor without any seed layer. The average growth rate of tin oxide film is about 1.2 A/cycle from $50{^{\circ}C}$ to $150{^{\circ}C}$. The rate decreases rapidly at a substrate temperature of $200{^{\circ}C}$. ALD-grown tin oxide thin film was characterized with the use of XRD, AFM and XPS. Due to a thermal annealing effect, the surface roughness and the tin amount in the film composition are slightly increased.

Studies on the Sterol Components of Evodia daniellii $H_{EMSLEY}$ in Korea (II) (한국산(韓國産) 수유나무의 Sterol 성분(成分)에 관(關)한 연구(硏究) (II))

  • Chung, Bo-Sup;Ko, Young-Su
    • Korean Journal of Pharmacognosy
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    • v.8 no.4
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    • pp.149-153
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    • 1977
  • Evodia daniellii $H_{EMSLEY}$ (Rutaceae) is cultivated in Korea and used as a folkmedicine for gastric inflammation, extermination of noxious insects, headache and antiinflammatory. The seed oil of this plant also has been used in various diseases, for example, dermatitis, scabies and so forth. Fructus Evodiae seed oil sterols were obtained from the nonsaponifiable matters of ethereal extract of the seed. The composition of sterols have been determined by gas liquid chromatography and thin layer chromatography on the preparative plates. It was noted that ${\beta}-sitosterol$ was the major sterols in the Evodia daniellii $H_{EMSLEY}$ in Korea. The results showed that contents of Evodia daniellii $H_{EMSLEY}$ sterols were campesterol 14.01%, stigmasterol 4.36%, ${\beta}-sitosterol$ 71.26%, ${\delta}^7-sterol$ 9.21% and unknown sterol 1.16% by method of triangulation and campesterol 13.02%, stigmasterol 3.87%, ${\beta}-sitosterol$ 74.34%, ${\delta}^7-sterol$ 8.67% and unknown sterol 1.85% by method of planimetry.

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Effects of Boron Concentration in ZnO:Al Seed Films on the Growth and Properties of ZnO Nanorods (ZnO:Al 시드 막의 보론 농도가 ZnO 나노로드의 성장 및 특성에 미치는 영향)

  • Ma, Tae-Young;Park, Ki-Cheol
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.66 no.10
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    • pp.1488-1493
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    • 2017
  • Boron-doped ZnO:Al films were deposited by rf magnetron sputtering. The structural and optical property variations of the films with the boron amounts were studied. ZnO nanorods were grown on $SiO_2/Si$ wafers and glass by a hydrothermal method. ~50 nm-thick boron-doped ZnO:Al films were deposited on the substrates as seed layers. The mixed solution of zinc nitrate hexahydrate and hexamethylenetetramine in DI water was used as a precursor for ZnO nanorods. The concentration of zinc nitrate hexahydrate and that of hexamethylenetetramine were 0.05 mol, respectively. ZnO nanorods were grown at $90^{\circ}C$ for 2 hours. X-ray diffraction was conducted to observe the crystallinity of ZnO nanorods. A field emission scanning electron microscope was employed to study the morphology of nanorods. Optical transmittance was measured by a UV-Vis spectrophotometer, and photoluminescence was carried out with 266 nm light. The ZnO nanorods grown on the 0.5 wt% boron-doped ZnO seed layer showed the best crystallinity.

Growth of ZnO Nanorod with High-quality Assisted by an External Electric Field (외부 전계 인가를 통한 고품질 ZnO 나노로드 성장)

  • Son, Min-Kyu;Seo, Hyun-Woong;Kim, Soo-Kyoung;Hong, Na-Yeong;Kim, Byung-Man;Park, Song-Yi;Kim, Hee-Je
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.61 no.11
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    • pp.1641-1645
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    • 2012
  • In this study, the ZnO nanorod is grown on the seed layered glass substrate by applying an external electric field to fabricate the ZnO nanorod with the high quality and to increase the yield of the ZnO nanorod. It is possible to grow the definite and clear hexagonal ZnO nanorod as the cathode of the high voltage is connected to the side of the seed layered glass substrate and the anode is connected to the opposite side because more $Zn^{2+}$ ions are located around the ZnO seed layer and are accumulated easily due to the external electric field. As a result, it is succeeded to fabricate the definite hexagonal ZnO nanorod having better structural characteristics by applying the external electric field during the growth process. Therefore, it is demonstrated that the external electric field is effective to fabricate the high quality ZnO nanorod without changing any composition of the ZnO nanorod.

Characteristics of Copper Thin Films and Patter Filling by Electrochemical Deposition(ECD) (전기화학증착법에 의한 구리박막과 패턴충전 특성)

  • Kim, Yong-An;Yang, Seong-Hun;Lee, Seok-Hyeong;Lee, Gyeong-U;Park, Jong-Wan
    • Korean Journal of Materials Research
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    • v.9 no.6
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    • pp.583-588
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    • 1999
  • The characteristics of copper thin films and pattern filling capability were investigated by ECD. Prior to deposition of copper film, seed-Cu/Ta(TaN)/$SIO_2$(BPSG)/Si structure was manufactured. Copper deposition was performed with various current waveforms(DC/PC, 1~10,000Hz) and current densities(10~60 mA/$\textrm{cm}^2$) after pretreatment (Oxident removal, wetting) of seed-layer. Conformal pattern filling was performed using PC method with fast deposition rate of 6,000~8,000$\AA$/min. Heat-treated($450^{\circ}C$, 30min) copper films showed good resistivities of 1.8~2.1$\mu$$\Omega$.cm. According to the XRD analysis, (111)-preferred orientation of copper film was found in ECD-Cu/seed-Cu/Ta/$Sio_2$/Si structure. Also, we have successfully achieved to fill via holes with 0.35$\mu\textrm{m}$ width and 4:1 aspect ratio.

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Determination and Isolation of leaf Isoflavone in Hyacinth Bean (제비콩 잎의 isoflavone 함량 및 성분 분석)

  • Kim, Yong-Wook;Lim, Se-Jin;Kim, Myoung-Ae;Choi, Woo-Chul;Yoon, Hong-Tae
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.46 no.6
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    • pp.449-452
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    • 2001
  • Legume seed isoflavones may have a variety of desirable physiological effect on the human health including both the circulatory and skeletal systems. The present study was performed to determine the isoflavone content of leaf and seed as well as to purify and identify the types of isoflavone from leaf extract of hyacinth bean (Lablab purpureus (L.) Sweet). Reverse phase HPLC revealed six different types of isoflavone such as daidzin, genistin, daidzein, genistein, 6"-o-acetyl genistin and 6"-o-acetyl daidzin in aqueous methanol extract from seeds and leaves of the hyacinth bean. Relatively, leaf isoflavone content of hyacinth bean was greater than seed isoflavone content. Using DiAion HP-20 silica gel and sephadex LH-20 chromatography, pure daidzein was identified in the ether layer, whereas genistin was in the EtOAC fraction.

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