• 제목/요약/키워드: Se Deposition

검색결과 474건 처리시간 0.03초

PVD처리한 티타늄 합금의 고속충격 거동에 관한 연구 (A Study on the high velocity impact behavior of titanium alloy by PVD method)

  • 손세원;이두성;홍성희
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2001년도 춘계학술대회논문집A
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    • pp.567-572
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    • 2001
  • In order to investigate the fracture behaviors(penetration modes) and resistance to penetration during ballistic impact of Titanium alloy laminates and nitrified Titanium alloy laminates which were treated by PVD(Physical Vapor Deposition) method, ballistic tests were conducted. Evaporation, sputtering, and ion plating are three kinds of PVD method. In this research, Ion plating was used to achieve higher surface hardness and surface hardness test were conducted using a Micro vicker's hardness tester. Resistance to penetration is determined by the protection ballistic limit($V_{50}$), a statistical velocity with 50% probability for complete penetration. Fracture behaviors and ballistic tolerance, described by penetration modes, are respectfully observed at and above ballistic limit velocities, as a result of $V_{50}$ test and Projectile Through Plates (PTP) test methods. PTP tests were conducted with $0^{\circ}$ obliquity at room temperature using 5.56mm ball projectile. $V_{50}$ test with $0^{\circ}$ obliquity at room temperature were conducted with projectiles that were able to achieve near or complete penetration during PTP tests. Surface hardness, resistance to penetration, and penetration modes of Titanium alloy laminates are compared to those of nitrified Titanium alloy laminates.

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Electrical Properties of Local Bottom-Gated MoS2 Thin-Film Transistor

  • Kwon, Junyeon;Lee, Youngbok;Song, Wongeun;Kim, Sunkook
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.375-375
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    • 2014
  • Layered semiconductor materials can be a promising candidate for large-area thin film transistors (TFTs) due to their relatively high mobility, low-power switching, mechanically flexibility, optically transparency, and amenability to a low-cost, large-area growth technique like thermal chemical vapor deposition (CVD). Unlike 2D graphene, series of transition metal dichalcogenides (TMDCs), $MX_2$ (M=Ta, Mo, W, X=S, Se, Te), have a finite bandgap (1~2 eV), which makes them highly attractive for electronics switching devices. Recently, 2D $MoS_2$ materials can be expected as next generation high-mobility thin-film transistors for OLED and LCD backplane. In this paper, we investigate in detail the electrical characteristics of 2D layered $MoS_2$ local bottom-gated transistor with the same device structure of the conventional thin film transistor, and expect the feasibility of display application.

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Semiconductor Nanowires;Their Emission Stability and Energy Distribution

  • Yu, Se-Gi;Yi, Whi-Kun;Lee, Sang-Hyun;Heo, Jung-Na;Jeong, Tae-Won;Lee, Jeong-Hee;Lee, Soo-Chang;Kim, J.M.;Lee, Cheol-Jin;Lyu, Seung-Chul;Han, Jae-Hee;Yoo, Ji-Beom
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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    • pp.1028-1031
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    • 2002
  • Ga-based semiconductor nanowires (GaN, GaP) were synthesized by the reaction of Ga metal and GaN/GaP powder with a $NH_3/Ar$ gas using thermal chemical vapor deposition. The field emission and emission stability under oxygen and argon environments were investigated. Field emission energy distributions of electrons from these nanowires revealed that field emission mechanism of the semiconductor nanowires were different from carbon nanotubes.

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Electron Emission Property of Carbon Nanotubes Grown Using Different Source Gases

  • Han, Jae-Hee;Lee, Tae-Young;Yoo, Ji-Beom;Park, Chong-Yun;Jung, Tae-Won;Yu, Se-Gi;Yi, Whi-Kun;Kim, Jong-Min
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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    • pp.658-661
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    • 2002
  • Chemical species during growth of carbon nanotubes (CNTs) in direct current-plasma enhanced chemical vapor deposition were studied in details using $C_3H_4-NH_3$ and $CO-NH_3$ mixtures through optical emission spectroscopy (OES). In the $C_3H_4-NH_3$ system, the relative intensities of CN (388.3 nm) and CH (431.4 nm) decreased and that of $C_2$ (436 nm) increased, leading to $sp^2$-graphization into the CNT structure, leading to improvement of field emission property of CNTs. In the $CO-NH_3$ system, the trend is completely reversed. Attributing to the atomic oxygen for helping the graphitization of carbon, CNTs could be grown under the flow rate of CO (180 sccm)-$NH_3$ (10 sccm). Through these results, we suggest the growth mechanism in our system.

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OBSERV ATION OF MICRO-STRUCTURE AND OPTICAL PROPERTISE OF TITANIUM DIOXIDE THIN FILMS USING OPTICAL MMEHODS

  • Kim, S.Y.;Kim, H.J.
    • 한국표면공학회지
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    • 제29권6호
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    • pp.788-796
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    • 1996
  • $TiO_2$ films prepared by RF magnetron sputtering, electron beam evaporation, ion assisted deposition (IAD) and sol-gel method are prepared on c-Si substrate and vitreous silica substrate respectively. From the transmission spectra of $TiO_2$ films on vitreous silica substrate in the spectral region from 190 nm to 900 nm, k($\lambda$) of $TiO_2$ is obtained. Using k($\lambda$) in the interband transition region the coefficients of the quantum mechanical dispersion relation of an amorphous $TiO_2$ and hence n($\lambda$) including the optically opaque region of above fundamental transition energy are obtained. The spectroscopic ellipsometry spectra of $TiO_2$ films in the spectral region of 1.5-5.0eV are model analyzed to get the film packing density variation versus i) substrate material, ii) film thickness and iii) film growth technique. The complex refractive index change of these $TiO_2$ films versus water condensation is also studied. Film micro-structures by SE modelling results are compared with those by atomic force microscopy images and X-ray diffraction data.

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태양전지 CIGS용 Mo 후면전극의 전기 저항에 관한 연구 (The Study on the Electrical Resistivity for Mo Back Contacts Film of CIGS Solar Cell)

  • 김강삼;조용기
    • 한국표면공학회지
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    • 제44권6호
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    • pp.264-268
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    • 2011
  • The Molybedenium thin film is generally used on back contact material of CIGS solar cell due to low electrical resistivity and stable thermal expansion coefficient. The Mo thin films deposited on si wafer by the magnetron sputtering method. The research focused on the variation of electrical resistivity of films which deposited with various working pressure at the target power of 2.0 kW(8.4 W/). The lowest resistivity of Mo thin film showed $9.0{\mu}O$-cm at pressure of 1.5 mTorr. However, working pressure increasing up to 50 mTorr, resistivities were highly increased. The results showed that the conductivity of Mo films depended on growing structures and defects in deposition process. Surface morphology, porosity, grain size, oxidation, and bonding structures were analysed by SEM, AFM, spectroscopic ellipsometry (SE), XRD, and XPS.

Indium-Morin 착물에 관한 흡착벗김전압전류법적 연구 (Adsorptive Stripping Voltammetry of Indium-Morin Complex)

  • 손세철;엄태윤;하영경;정기석
    • 대한화학회지
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    • 제35권5호
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    • pp.506-511
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    • 1991
  • In-Morin 착물에 대한 흡착벗김전압전류법적 연구를 HMDE를 사용하여 pH 3.20의 0.1M 아세테이트 완충용액에서 수행하였다. 흡착 현상들을 미분펄스전압전류법으로 관찰하였으며, HMDE의 표면에 흡착된 착물의 환원 전류에 미치는 여러 분석 조건들에 과하여 논의하였다. 또한 여러 다른 금속이온들과 계면활성제의 방해효과에 관해서도 검토하였다. 본 연구에서의 검출한계는 90초의 흡착시간을 적용하였을 때 2.6nM이었으며, 4${\mu}g$/l의 In을 7회 분석하였을 때 상대표준편차는 2.0%이었다.

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The Silver Cycle and Fluxes in the Ocean

  • Ju, Se-Jong
    • Journal of the korean society of oceanography
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    • 제32권3호
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    • pp.156-161
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    • 1997
  • The biogeochemical cycle of silver has rarely been reviewed, even though the silver ion (Ag$^{\times}$) is extremly toxic to some organisms. Its concentration is still rising sharply because of increased anthropogenic activity, specifically the discharge from the film industry (mainly, silver thiosulfate: Ag (S$_2$O$_3$)${^3-}_2$). Recently, a number of researchers have quantified the major fluxes and reservoirs of silver in the open ocean, bays, and estuaries. A review of the available information for Ag cycling in the open ocean shows that the riverine input (from human activity and weathering processes: 7${\times}$10$^6$ kg/yr and 5${\times}$10$^6$ kg/yr, respectively) is the dominant source of Ag to estuarine and coastal regions. Most of the silver (90% of riverine input silver) is removed in coastal sediments by the physical-chemical character of silver due to its high partitioning with particulate matter. On the other hand, in the open ocean the atmospheric input (wet and dry deposition: 1.48${\times}$10$^6$ kg/yr and 1.94${\times}$ 10$^5$ kg/yr, respectively) becomes more important as a source of silver than riverine input. The residence time of silver calculated from available data is 1250 yrs in the deep ocean below 500 m, but only 3 yrs in the surface ocean.

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RF 마그네트론 스퍼터링 방법으로 증착된 CdS박막의 기판 온도와 열처리 온도 변화에 따른 구조적 및 광학적 특성

  • 임정우;김명섭;유재수
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.399-399
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    • 2012
  • II-V 족 화합물 반도체인 황화카드뮴(CdS)은 상온에서 2.42 eV의 밴드갭을 갖는 직접 천이형 물질로서 CdTe 또는 $CuInSe_2$와 같은 박막형 태양전지의 투과층(window layer)으로 널리 사용되고 있다. CdS 박막은 전자빔 증착법(e-beam evaporation), 화학용액증착법(chemical bath deposition), 열분해법(spray pyrolysis), 스퍼터링법(sputtering) 등으로 제작되고 있다. 이 중 스퍼터링법의 경우, 다른 증착법에 비해 조작이 간단하고 넓은 면적에서 균일한 박막을 증착할 수 있을 뿐만 아니라, 박막두께 조절이 용이하다. 따라서 본 실험에서는 RF 마그네트론 스퍼터링법으로 증착된 CdS 박막의 기판온도 및 열처리 온도변화에 따른 구조적 및 광학적 특성을 조사하였다. 기판은 RCA 기법으로 세정된 Corning Eagle 2000 유리 기판을 사용하였다. 박막 공정은 초기 진공 $1{\times}10^{-6}Torr$ 상태에서 20 sccm의 Ar 가스를 주입하고 100 W의 RF 파워, 7 mTorr의 공정 압력에서 기판 온도를 $200^{\circ}C$부터 $500^{\circ}C$까지 변화시키면서 수행하였다. 증착된 CdS 박막은 질소 분위기의 가열로(furnace)를 이용해 $300-500^{\circ}C$ 온도에서 30분간 열처리되었다. 시료들의 표면 형상은 scanning electron microscope를 사용하여 관찰하였으며, UV-vis-NIR spectrophotometer를 사용하여 400-1,000 nm 파장영역에서의 투과율을 측정하였다. 그리고 X-선 회절분석(X-Ray Diffraction)으로 결정구조를 조사하고 결정립 크기를 산출하였다.

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Mesh-type PECVD를 이용한 DC-bias인가 및 수소가스 첨가에 따른 저수소화 비정질 실리콘 박막에 관한 연구 (The Properties of Low Hydrogen Content α-Si Thin Film Using DC-bias Enhanced or Addition of H2Gas in Mesh-type PECVD System)

  • 류세원;권도현;박성계;남승의;김형준
    • 한국재료학회지
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    • 제12권4호
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    • pp.235-239
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    • 2002
  • In this study mesh-type PECVD system was suggested to minimize the hydrogen concentration. The main structural difference between the triode system and a conventional system is that, a third electrode, a mesh, is inserted between the powered and the ground electrode. We investigated several conditions to compare with conventional PECVD. The main effect of mesh was to minimize the substrate damage by ion bombardment and to enhance the surface reaction to induce hydrogen desorption. It was also found that hydrogen concentration decreased but deposition rate increased as increasing applied bias. Applied DC-bia s enhanced sputtering process. Intense ion bombardment causes the weakly bonded hydrogen or hydrogen-containing species to leave the growing film and increased adatom mobility. Furthermore, addition of hydrogen gas enhance the surface diffusion of adatom.