한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Electron Emission Property of Carbon Nanotubes Grown Using Different Source Gases

  • Han, Jae-Hee (Department of Physics, Sungkyunkwan University) ;
  • Lee, Tae-Young (Department of Physics, Sungkyunkwan University) ;
  • Yoo, Ji-Beom (Department of Physics, Sungkyunkwan University) ;
  • Park, Chong-Yun (Department of Physics, Sungkyunkwan University) ;
  • Jung, Tae-Won (NCRI Center for Electron Emission Source, Samsung Advanced Institute of Technology) ;
  • Yu, Se-Gi (NCRI Center for Electron Emission Source, Samsung Advanced Institute of Technology) ;
  • Yi, Whi-Kun (NCRI Center for Electron Emission Source, Samsung Advanced Institute of Technology) ;
  • Kim, Jong-Min (NCRI Center for Electron Emission Source, Samsung Advanced Institute of Technology)
  • Published : 2002.08.21
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Abstract

Chemical species during growth of carbon nanotubes (CNTs) in direct current-plasma enhanced chemical vapor deposition were studied in details using $C_3H_4-NH_3$ and $CO-NH_3$ mixtures through optical emission spectroscopy (OES). In the $C_3H_4-NH_3$ system, the relative intensities of CN (388.3 nm) and CH (431.4 nm) decreased and that of $C_2$ (436 nm) increased, leading to $sp^2$-graphization into the CNT structure, leading to improvement of field emission property of CNTs. In the $CO-NH_3$ system, the trend is completely reversed. Attributing to the atomic oxygen for helping the graphitization of carbon, CNTs could be grown under the flow rate of CO (180 sccm)-$NH_3$ (10 sccm). Through these results, we suggest the growth mechanism in our system.

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