• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.28 no.3
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• pp.273-282
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• 2018

Objectives: Dustiness of nanomaterials is considered as exposure index of essential material. Research on dustiness of nanomaterial is needed to control exposure in workplaces. Method: Dustiness measurement using vortex shaker were installed in the laboratory. Nanomaterials, 1 g, was put in the glass test tube and shaked using vortex shaker. Aerosol dispersed was measured using scanning mobility particle sizer(SMPS) and optical particle counter(OPC). Mass concentration using PVC filter and cassette was measured and TEM grid sampling was conducted. Total particle concentration and size distribution were calculated. Image and chemical composition of particles in the air were observed using transmission electron microscopy and energy dispersive X-ray spectrometer. Eleven different test nanomaterials were used in the study. Results: Rank of mass concentration and particle number concentration were coincided in most cases. Rank of nanomateirals with low concentration were not coincided. Two types of fumed silica had the highest mass concentration and particle number concentration. Indium tin oxide, a mixture of indium oxide and tin oxide, had high mass concentration and particle number concentration. Indium oxide had very low mass concentration and particle number concentration. Agglomeration of nanoparticles in the air were observed in TEM analysis and size distribution. In this study, mass concentration and particle number concentration were coincided and two index can be used together. The range of dustiness in particle number concentration were too wide to measure in one method. Conclusion: Particle number concentration ranged from low concentration to high concentration depend on type of nanomaterial, and varied by preparation and amount of nanomaterial used. Further study is needed to measure dustiness of all nanomaterial as one reference method.

• Particle and aerosol research
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• v.6 no.2
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• pp.91-103
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• 2010

Size-segregated number concentration and scattering coefficient of urban aerosols were measured using an SMPS (scanning mobility particle sizer) and a nephelometer, respectively in Seoul, Korea, during the winter season of 2003. The average number concentrations of ultrafine particles (20~100 nm) and accumulation mode particles (100~600 nm) were $2,170\;particles\;cm^{-3}$ and $1,521\;particles\;cm^{-3}$, respectively. The scattering coefficient at the wavelength of 550 nm ranged from $62.6Mm^{-1}$ to $330.1Mm^{-1}$ and average value was $163.4Mm^{-1}$. The peak concentrations of ultrafine particles and accumulation mode particles were simultaneously recorded between 6:00 and 9:00 A.M., indicating the effect of vehicle emissions which are major air pollution sources in the urban atmosphere. On average, the number concentration of ultrafine particles was 1.4 times higher than that of accumulation mode particles, although it was a little higher during the morning peak time. The variation of aerosol scattering coefficient was in good agreement with that of accumulation mode particle number concentration rather than that of ultrafine particle number concentration.g coefficient was in good agreement with that of accumulation mode particle number concentration rather than that of ultrafine particle number concentration.

• KEPCO Journal on Electric Power and Energy
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• v.8 no.2
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• pp.103-110
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• 2022

Ultrafine Particle number and size distributions were simultaneously measured at rural area around the power plant in Dangjin, South Korea. New Particle formation and growth events were frequently observed during January, 2021 and classified based on their strength and persistence as well as the variation in geometric mean diameter(GMD) on January 12, 21 and 17. In this study, we investigated mechanisms of new particle growth based on measurements using a high resolution time of flight aerosol mass spectrometer(HR-ToF-AMS) and a scanning mobility particle sizer(SMPS). On Event days(Jan 12 and 21), the total average growth rate was found to be 8.46 nm/h~24.76 nm/hr. These growth rate are comparable to those reported for other urban and rural sites in South Korea using different method. Comparing to the Non-Event day(Jan 17), New Particle Growth mostly occurred when solar radiation is peaked and relative humidity is low in daytime, moreover enhanced under the condition of higher precusors, NO₂ (39.9 vs 6.2ppb), VOCs(129.5 vs 84.6ppb), NH₃(11 vs 4.7ppb). The HR-ToF-AMS PM_1.0 composition shows Organic and Ammoniated nitrate were dominant species effected by emission source in domestic. On the other hand, The Fraction of Ammoniated sulfate was calculated to be approximately 16% and 31% when air quality is inflow from China. Longer term studies are needed to help resolve the relative contributions of each precusor species on new particle growth characteristics.

• Asian Journal of Atmospheric Environment
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• v.6 no.2
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• pp.96-103
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• 2012

Ambient particulate matter (PM) and particle-bound polycyclic aromatic hydrocarbon (PAH) concentrations were measured continuously for 70 days at a Korean elementary school located near a highway. The $PM_{10}$, $PM_{2.5}$, and $PM_1$ values were measured with a light-scattering, multi-channel, aerosol spectrometer (Grimm, Model 1.107). The number concentrations of the particles were measured using a scanning mobility particle sizer and counter (SMPS+C) which counted particles from 11.1 to 1083.3 nm classified in 44 channels. Particle-bound PAHs were measured with a direct reading, photoelectric aerosol sensor. The daily $NO_2$, $SO_2$, and CO concentrations were obtained from a national air-monitoring station located near the school. The average concentrations of $PM_{10}$, $PM_{2.5}$, and $PM_1$ were 75.3, 59.3, and $52.1{\mu}g/m^3$, respectively. The average number concentration of the ultrafine particles (UFPs) was $46,307/cm^3$, and the averaged particle-bound PAHs concentration was $17.9ng/cm^3$ during the study period. The ambient UFP variation was strongly associated with traffic intensity, particularly peak concentrations during the traffic rush hours. Particles <100 nm corresponded to traffic-related pollutants, including PAHs. Additional longterm monitoring of ambient UFPs and high-resolution traffic measurements should be carried out in future studies. In addition, transient variations in the ambient particle concentration should be taken into consideration in epidemiology studies in order to examine the short-term health effects of urban UFPs.

• Transactions of the Korean Society of Automotive Engineers
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• v.19 no.3
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• pp.65-72
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• 2011

In this study, the numbers, sizes of particles from a single cylinder direct injection spark-ignition (DISI) engine fuelled with gasoline and LPG are examined over a wide range of engine operating conditions. Tests are conducted with various engine loads (2~10bar of IMEP) and fuel injection pressures (60, 90, and 120 bar) at the engine speed of 1,500 rpm. Particles are sampled directly from the exhaust pipe using rotating disk thermodiluter. The size distributions are measured using a scanning mobility particle sizer (SMPS) and the particle number concentrations are measured using a condensation particle counter (CPC). The results show that maximum brake torque (MBT) timing for LPG fuel is less sensitive to engine load and its combustion stability is also better than that for gasoline fuel. The total particle number concentration for LPG was lower by a factor of 100 compared to the results of gasoline emission due to the good vaporization characteristic of LPG. Test result presents that LPG for direct injection spark ignition engine help the particle emission level to reduce.

• Atmosphere
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• v.21 no.1
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• pp.35-44
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• 2011

We investigated characteristics of new particle formation and growth events observed at Gosan climate observatory using Scanning Mobility Particle Sizer (SMPS) measurements of particle number size distribution with 54 size ranges from 10 to 487 nm in October 2009. Four days (17~20 October) and five days (22~26 October) were classified into strong new particle formation and growth event ($N_S$) and weak particle formation and growth event ($N_W$), respectively. $N_S$ and $N_W$ divided by increase of aerosol number concentration in nucleation mode and continuity of growth from nucleation to Aitken mode. Particle growth rates of $N_S$ (5.34~$9.19nm\;h^{-1}$) were greater than that of $N_W$ (2.15~$3.53nm\;h^{-1}$). $N_S$ and $N_W$ were analyzed with synoptic pattern over East Asia, meteorological elements, and sulfur dioxide ($SO_2$) measured at Gosan. We found that $N_S$ was characterized by a fast and northwesterly wind accompanied cold and dry airmass, but $N_W$ was affected airmass originated from South China and come through the Korea Peninsula. The events ($N_S$ and $N_W$) occurred at conditions of high solar flux ($&gt;700W\;m^{-2}$) and low relative humidity (< 60%). The $SO_2$ concentration on $N_S$ and $N_W$ was higher than that on case of non observed new particle formation.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.198-198
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• 2011

단분산 결정질 실리콘 나노입자 (<10 nm)는 양자점 효과로 인한 선택적 파장 흡수가 가능하므로 태양전지 분야에 응용 가능성이 크다. 특히 입경의 크기가 작아지면 부피대비 표면적이 넓어지기 때문에 태양빛 흡수 면적이 증가한다. 따라서 입자의 크기는 태양전지에서 효율을 결정하는 중요한 요소 중 하나이다. 이러한 이유에서 plasma arc synthesis, laser ablation, pyrolysis 그리고 PECVD (Plasma Enhanced Chemical Vapor Deposition) 등이 실리콘 나노입자를 합성하는데 연구되어 왔으며, 특히 PECVD는 입자 생성과 동시에 균일한 증착이 이루어질 수 있기 때문에 태양전지 제작 시 공정 효율을 높일 수 있다. PECVD를 이용한 나노입자 합성에서 입경을 제어하는데 중요한 전구물질은 Ar과 SiH4가스이다. Ar 가스는 ICP (Inductively Coupled Plasma) 챔버 내부에 가해준 전력을 통해 가속됨으로써 분해되어 Ar plasma가 생성된다. 이는 공급되는 SiH4가스를 분해시켜 핵생성을 유도하고, 그 주위로 성장시킴으로써 실리콘 나노입자가 합성된다. 이때 중요한 변수 중 하나는 핵생성과 입자성장시간의 조절을 통한 입경제어 이다. 또한 공급되는 가스의 유량은 입자가 생성될 때 필요한 화학적 구성비를 결정하므로 입경에 중요한 요소가 된다. 마지막으로 공정압력은 챔버내부의 plasma 구성 요소들의 평균 자유 행로를 결정하여 SiH4가 분해되어 입자가 생성되는 속도와 양을 제어한다. PECVD를 이용한 실리콘 나노입자 형성의 주요 변수는 RF pulse, 가스(Ar, SiH4, H2)의 유량, Plasma power, 공정압력 등이 있다. 본 연구에서는 RF (Radio Frequency) PECVD방법을 이용하여 실리콘 나노입자를 만드는데 필요한 여러 변수들을 제어함으로써 이에 따른 입경분포 차이를 연구하였다. 또한 SEM (Scanning Electron Microscopy)과 SMPS (Scanning Mobility Particle Sizer)를 이용하여 각 변수에 따라 생성된 나노입자의 입경과 농도를 분석하였다. 이 중 plasma power에 따른 입경분포 측정 결과 600W에서 합성된 실리콘 나노입자가 상당히 단분산 된 형태로 나타남을 확인할 수 있었고 향후 다른 변수의 제어, 특히 DC bias 전압과 열을 가함으로써 나노입자의 결정성을 확인하는 추가 연구를 통해 태양전지 제작에 응용 할 수 있을 것으로 예상된다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.482-482
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• 2013

반도체 소자의 미세화와 더불어 세정공정의 중요성이 차지하는 비중이 점점 커지고, 이에 따라 세정 기술 개발에 대한 요구가 증대되고 있다. 기존 세정 기술은 화학약품 위주의 습식 세정 방식으로 표면 손상, 화학 반응, 부산물, 세정 효율 등 여러 가지 어려움이 있다. 따라서 건식세정 방식이 활발하게 도입되고 있으며 대표적인 것이 에어로졸 세정이다. 에어로졸 세정은 기체상의 작동기체를 이용하여 에어로졸을 형성하고 표면 오염물질과 직접 물리적 충돌을 함으로써 세정한다. 하지만 이 또한 생성되는 에어로졸 내 발생 입자로 인해 패턴 손상이 발생하며 이러한 문제점을 극복하기 위하여 본 연구에서는 가스클러스터 장치를 이용한 세정 특성 평가에 관한 연구를 수행하였다. 가스 클러스터란 작동기체의 분자가 수십에서 수백 개 뭉쳐 있는 형태를 뜻하며 이렇게 형성된 클러스터는 수 nm 크기를 형성하게 된다. 그리고 짧은 시간의 응축에 의해 수십 nm 크기까지 성장하게 된다. 에어로졸 세정과 다르게 클러스터가 성장할 환경과 시간을 형성하지 않음으로써 작은 클러스터를 형성하게 되며 이로 인해 패턴 손상을 최소화 하고 상대적으로 높은 효율로 오염입자를 제거하게 된다. 클러스터 세정 장비를 이용한 표면 처리는 충돌에 의한 제거에 기반한다. 따라서 생성 및 가속되는 클러스터로부터 대상으로 전달되는 운동량의 정도가 세정 특성에 영향을 미치며 이는 생성되는 클러스터의 크기에 종속적이다. 생성 클러스터의 크기 분포는 분사 거리, 유량, 분사 각도, 노즐 냉각 온도 등의 변수에 관한 함수이다. 따라서 본 연구에서는 $CO_2$ 클러스터를 이용한 세정 특성을 평가하기 위하여 이러한 변수에 따라서 오염 입자의 종류, 크기에 따른 PRE (particle removal efficiency)를 평가하고 다양한 선폭의 패턴을 이용하여 손상 실험을 수행하였다. 제거 효율에 사용된 입자는 $CeO_2$와 $SiO_2$이며, 각각 30, 50, 100, 300 nm 크기를 정량적으로 오염시킨 쿠폰 웨이퍼를 제조하여 세정 효율을 평가하였다. 정량적 오염에는 SMPS (scanning mobility particle sizer)를 이용한 크기 분류와 정전기적 입자 부착 시스템이 사용되었다. 또한 패턴 붕괴 평가에는 35~180 nm 선폭을 가지는 Poly-Si 패턴을 이용하였다. 실험 결과 클러스터 형성 조건에 따라 상대적으로 낮은 패턴 붕괴에서 95% 이상의 높은 오염입자 제거효율을 전반적으로 보이는 것을 확인할 수 있었다. 따라서 이론적 계산에 기반하여 세정에 요구되는 클러스터 크기를 가정하고, 이를 통하여 세정에 적용할 경우 높은 기존 세정 방법의 단점을 보완하면서 높은 세정 효율을 가지는 대체 세정 방안으로 이용할 수 있음을 확인하였다.

• Asian Journal of Atmospheric Environment
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• v.11 no.4
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• pp.300-312
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• 2017

To improve the understanding of secondary organic aerosol (SOA) formation from the photo-oxidation of anthropogenic and biogenic precursors at the regional background station on Baengnyeong Island, Korea, gas phase and aerosol chemistries were investigated using the Proton Transfer Reaction Time of Flight Mass Spectrometer (PTR-ToF-MS) and the Aerodyne High Resolution Time of Flight Aerosol Mass Spectrometer (HR-ToF-AMS), respectively. HR-ToF-AMS measured fine particles ($PM_1$; diameter of particle matter less than $1{\mu}m$) at a 6-minute time resolution from February to November 2012, while PTR-ToF-MS was deployed during an intensive period from September 21 to 29, 2012. The one-minute time-resolution and high mass resolution (up to $4000m{\Delta}m^{-1}$) data from the PTR-ToF-MS provided the basis for calculations of the concentrations of anthropogenic and biogenic volatile organic compounds (BVOCs) including oxygenated VOCs (OVOCs). The dominant BVOCs from the site are isoprene (0.23 ppb), dimethyl sulphide (DMS, 0.20 ppb), and monoterpenes (0.38 ppb). Toluene (0.45 ppb) and benzene (0.32 ppb) accounted for the majority of anthropogenic VOCs (AVOCs). OVOCs including acetone (3.98 ppb), acetaldehyde (2.67 ppb), acetic acid (1.68 ppb), and formic acid (2.24 ppb) were measured. The OVOCs comprise approximately 75% of total measured VOCs, suggesting the occurrence of strong oxidation processes and/or long-range transported at the site. A strong photochemical aging and oxidation of the atmospheric pollutants were also observed in aerosol measured by HR-ToF-AMS, whereby a high $f_{44}:f_{43}$ value is shown for organic aerosols (OAs); however, relatively low $f_{44}:f_{43}$ values were observed when high concentrations of BVOCs and AVOCs were available, providing evidence of the formation of SOA from VOC precursors at the site. Overall, the results of this study revealed several different SOA formation mechanisms, and new particle formation and particle growth events were identified using the powerful tools scanning mobility particle sizer (SMPS), PTR-ToF-MS, and HR-ToF-AMS.

• Journal of Korean Society for Atmospheric Environment
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• v.33 no.2
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• pp.124-138
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• 2017

Physico-chemical measurement of non-refractory submicron particles($NR-PM_1$) was conducted in Baengnyeong Island, Korea using Aerodyne High Resolution Time of Flight Aerosol Mass Spectrometer (HR-ToF-AMS) from 2012 to 2014. Organics and ammoniated sulfate were dominant species in $NR-PM_1$. The organics was found to have similar fractions(approximate 40%) of $NR-PM_1$ during the summer and winter, while the sulfate fractions of $NR-PM_1$ were calculated to be approximately 47% and 31% for the summer and winter, respectively, suggesting the possibility that particles provide non-acidic surfaces for condensation of nitric acid in the winter. The nitrate fractions of approximate 4% and 20% of $NR-PM_1$ were observed in August (summer) and November (winter), respectively, resulting that the relatively low concentration of sulfate in $NR-PM_1$ provided a non-acidic surface for nitric acid condensation and formation of particulate ammoniated nitrate is favored thermodynamically in winter. The new particle formation (NPF) event and particle growth rate were analyzed for each month in 2014 using Scanning Mobility Particle Sizer(SMPS). The Percent of NPF events was the highest in winter, but NPF event was not observed during summer due to relatively high temperature and frequent rainfall. The average particle growth rate was 3.5 nm/h and the highest particle growth rate was 5.5 nm/h in May. We observed the long-range transport of the anthropogenic sulfate from the East Asia during the intensive monitoring period of November between Qingdao and Baengnyeong Island in 2013. The relatively high concentrations of m/z 60 measured in HR-ToF-AMS was observed in May and June at Baengnyeong Island, suggesting the possibility of the influence of biomass burning from the East Asia to the Korean Peninsula.