• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.91-91
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• 2015

반도체 공정의 발전에 의해 최근 생산되는 메모리 등은 십 수 나노미터까지 좁아진 선 폭을 갖게 되었다. 이러한 이유로, 기존에는 큰 문제를 발생시키지 않던 나노미터 영역의 입자들이 박막 증착 공정과 같은 반도체 제조공정 수율을 저감시키게 되었다. 따라서 오염입자의 유입을 막거나 제어하기 위해 transmission electron microscopy (TEM)나 scanning electron microscopy (SEM)과 같은 전자현미경을 활용한 비 실시간 입자 측정 방법 및 광원을 이용하는 in-situ particle monitor (ISPM) 및 전기적 이동도를 이용한 scanning mobility particle sizer (SMPS) 등 다양한 원리를 이용한 실시간 입자 측정방법이 현재 사용중에 있다. 이 중 진공 내 입자의 수농도를 측정하기 위해 개발된 particle beam mass spectrometer (PBMS) 기술은 박막 증착 공정 등 chemical vapor deposition (CVD) 방법을 이용하는 진공공정에서 활용 가능하여 개발이 진행되어 왔다. 본 연구에서는 PBMS의 한계점인 입자 밀도, 형상 등의 특성분석이 용이하도록 PBMS와 scanning electron microscopy (SEM), 그리고 energy dispersive spectroscopy (EDS) 기술을 결합하여 입자의 직경별 개수농도, 각 입자의 형상 및 성분을 함께 측정 가능하도록 하였다. 협소한 반도체 제조공정 내부 공간에 적용 가능하도록 기존 PBMS 대비 크기 또한 소형화 하였다. 각 구성요소인 공기역학 집속렌즈, electron gun, 편향판, 그리고 패러데이 컵의 설치 및 물리적인 교정을 진행한 후 입자발생장치를 통해 발생시킨 sodium chloride 입자를 상압 입자 측정 및 분류장치인 SMPS 장치를 이용하여 크기별로 분류시켜 압력차를 통해 PBMS로 유입시켜 측정을 진행하였다. 나노입자의 입경분포, 형상 및 성분을 측정결과를 토대로 장치의 측정정확도를 교정하였다. 교정된 장치를 이용하여 실제 박막 증착공정 챔버의 배기라인에서 발생하는 입자의 수농도, 형상 및 성분의 복합특성 측정이 가능하였으며, 최종적으로 실제 공정에 적용가능하도록 장치 교정을 완료하였다.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.05a
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• pp.255-258
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• 2006

In this paper, the new method which is monitoring quantity of particles using by ion-counter has been developed. ISPM system is composed by Gerdien type ion-counter (house-made), DC power supply and electrometer. Ion-counter applied positive voltage could detect only positive charged particles. Therefore charged particles to Boltzmann equilibrium distribution or to some identified charge distribution can be detected by ion-counter. Ion-counter could install on the exhaust line of process equipment since pressure loss is structurally low. ISPM system has been certified by comparison with the result of SMPS (Scanning Mobility Particle Sizer) system. The relation coefficiency is above 0.98 about $20{\sim}300nm$ particles with identified charge distribution under $0.1{\sim}10.0$ Torr.

• 한국연소학회:학술대회논문집
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• 2013.06a
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• pp.29-31
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• 2013

In this study, the characteristics of particulate matters (PM) from diesel and biodiesel fuel combustion was experimentally investigated. The experiment was performed in a single cylinder common-rail compression ignition engine. The fuels were injected at -5 CAD (Crank angle degree) ATDC (After top dead center) with 80 MPa injection pressure. Size distribution of PM was measured by scanning mobility particle sizer (SMPS) and morphology of PM was studied by transmission electron microscopy (TEM). PM from biodiesel shows lower emission level and smaller primary particles.

• Transactions of the Korean Society of Automotive Engineers
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• v.20 no.5
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• pp.19-25
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• 2012

This study describes effects of DME additives on combustion and exhaust emissions characteristics including nano-particle in a single cylinder compression ignition engine. Considered additives include bio-diesel, n-butanol, and MTBE for increasing kinematic viscosity. Among three additives, n-butanol showed the greatest kinematic viscosity. In addition MTBE showed the highest vapor pressure. In the present study mixing ratios of additives were kept constant at 1 and 10% by volume. Experiments were performed at 1200rpm engine speed and nano-particles were measured by SMPS (Scanning mobility particle sizer) devices. Results of combustion characteristics showed that considered additives had little effects on combustion pressure. However, patterns of heat release rate were dependent on properties of additives. Nano-particles of MTBE were the lowest among considered additives.

• Journal of Power System Engineering
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• v.12 no.1
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• pp.5-12
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• 2008

We measured emission characteristics of CRDI diesel engine equipped with a commercial CPF. Experimental parameters adopted a neat diesel fuel, a blend of diesel fuel with 20% biodiesel, a blend of diesel fuel with 15% biodiesel and 5% ethanol. The experiments were carried out to measure the emission and engine performance according to ESC 13-mode cycles. The maximum torque with biodiesel blend fuel is slightly lower than that of neat diesel fuel in the entire the 13-mode cycles, and 5% ethanol and 15% biodiesel blend fuel is slightly higher than that of neat diesel fuel. THC and CO emissions of the biofuel blended diesel fuel were slightly increased and decreased, and mean conversion efficiencies of THC and CO on the commercial CPF were achieved about 70$\sim$87% in the ESC 13-mode. From the measurement by the Scanning Mobility Particle Sizer(SMPS), the total number and mass of nano-sized particles by a commercial CPF were decreased about 97.8% and 96.8 % in the range of the nano-size from 10.6 to 385nm, respectively.

• Journal of Korean Society for Atmospheric Environment
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• v.22 no.E2
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• pp.78-88
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• 2006

In order to study the characteristics of cloud, a real-scale experiment for cloud generation was carried out using an extinct vertical mine (430 m height) located in the northeastern Honshu, Japan. The dry particles generated from the three-step concentrations of NaCl solutions were used for cloud generation. The number size distributions of initial dry particles and cloud droplets were monitored by Scanning Mobility Particle Sizer (SMPS) and Forward Scattering Spectrometer Probe (FSSP) at bottom and upper sites of pit, respectively. The polymeric water absorbent film (PWAF) method was employed to measure liquid water content ($W_L$) as a function of droplet size. Moreover the chemical properties of individual droplet replicas were determined by micro-PIXE. The CCN number concentration shows the lognormal form in dependence of the particle size, while the number size distributions of droplets are bimodal showing the peaks around $9{\mu}m$ and $20{\mu}m$ for every case. In comparison to background mineral particles, right shifting of size distribution line for NaCl particles was occurred. When NaCl solutions with three-step different concentrations were neulized, $W_L$ shows the strong droplet size dependence. It varied from $10.0mg\;m^{-3}$ up to $13.6mg\;m^{-3}$ with average $11.6mg\;m^{-3}$. A good relationship between $W_L$ and cloud droplet number concentration was obtained. Both chemical inhomogeneities (mixed components with mineral and C1) and homogeneities (only mineral components or C1) in individual droplet replicas were obviously observed from micro-PIXE elemental images.

• Journal of Korean Society for Atmospheric Environment
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• v.20 no.3
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• pp.411-419
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• 2004

Titania particles are widely used as a photocatalyst to treat various contaminants in air and water. Titania particles were formed by vapor-phase oxidation of titanium tetraisopropoxide (TTIP) in a tube furnace between 773 and 1,273 K. The effect of process variables such as furnace temperature, flow rate of carrier air, and flow rate of sheath air on powder size and phase characteristics was investigated using a scanning mobility particle sizer (SMPS), transmission electron microscopy (TEM) and X-ray diffraction (XRD). The size distribution of synthesized titania particles was characterized with mode diameter and peak concentration. The mode diameter ranging from 20 to 80 nm decreased with increasing flow rates of sheath air and carrier air, and increased with increasing furnace temperature. The peak concentration increased with increasing flow rates of sheath air and carrier air The best synthetic condition for high production rate can be derived from the experimental data set represented by mode diameter and peak concentration. The crystal structure of synthesized titania particles was found to be anatase phase, ensuring high photocatalytic potential.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.35 no.12
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• pp.1359-1365
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• 2011

The purpose of this study is to investigate the effect of ethanol content on the emission of nanosized particles from a diesel-ethanol blended fuel engine. The engine combustion and exhaust emission characteristics of a singlecylinder diesel engine were analyzed using an emission analyzer and an SMPS(scanning mobility particle sizer). The analysis revealed that soot emission increased with the ignition delay. When the ignition delay was fixed, an increase in the ethanol content caused a decrease in the soot emission. With an increase in the ethanol blending ratio, the number concentration and mass distribution of nanosized particles generally decreased. However, for 30% ethanol blending, large particles were observed because of the agglomeration of soot particles, and consequently, the particle mass increased.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.233-233
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• 2012

나노입자가 가지는 고유한 특성이 부각되면서 이를 소자 특성 향상에 응용하고자 하는 연구가 집중적으로 이루어지고 있다. 박막에 포함된 나노입자는 메모리, 고효율 박막형 태양전지 등에 이용될 수 있는 가능성을 보여주었으며, 나노입자에 기반 하는 소자 제조에 관한 연구가 이루어지면서 플라즈마 내 발생하는 나노입자를 이용하여 패터닝 등에 적용하고자 하는 연구가 국내외에서 활발히 이루어지고 있다. 특히 플라즈마에서 발생하는 나노입자는 플라즈마 내 전기적 및 화학적 특징으로 인해 다른 입자 제조 공정과 달리 응집이 없는 균일한 입자를 제조할 수 있다. 이러한 플라즈마 내 발생 입자를 응용하기 위해서는 각각의 응용 분야에 적합한 입경 분포 제어가 요구된다. 하지만 입자 합성 시 크기분포 특성에 관한 연구는 기존의 포집 및 전자현미경을 이용한 방법으로 실시간으로 분석하기에는 한계가 있다. 따라서 본 연구에서는 저압에서 실시간으로 나노입자 분포를 측정할 수 있는 PBMS (particle beam mass spectrometer)를 이용하여, PECVD (plasma enhanced chemical vapor deposition)의 입자 생성 조건에 따라 continuous, pulse, dual pulse로 분류되는 공정 조건에서 생성되는 입자의 크기 분포를 측정하였다. 또한 그 결과를 기존의 동일한 조건에서 포집 후 SMPS (scanning mobility particle sizer)와 전자 현미경을 이용하여 분석한 결과와 비교하였다. 실리콘 나노 입자의 측정은 PBMS 장비의 전단 부분을 PECVD 장치 내부에 연결하여 진행하였다. PECVD를 이용한 실리콘 나노입자 형성의 주요 변수는 RF pulse, 가스(Ar, SiH4, H2)의 유량, Plasma power, 공정 압력 등이 있으며 각 변수를 조절하여 공정 환경을 구성하였다. 결론적으로 본 연구를 통하여 PECVD를 이용해 각각의 공정 환경에서 생성되는 실리콘 나노입자의 실시간 입경 분포 분석을 PBMS로 수행하는 것에 신뢰성이 있음을 알 수 있었으며, 그 경향을 확인할 수 있었다. 추후 지속적 연구에 의해 변수에 따른 나노입자 생성을 데이터베이스화 하여 요구되는 응용분야에 적합한 특성을 가지는 나노입자를 형성하는 조건을 정립 하는데 중요한 역할을 할 것을 기대할 수 있다.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.92-92
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• 2012

Chalcopyrite-type Cu(In,Ga)Se2 (CIGS) is one of the most attractive compound semiconductor materials for thin film solar cells. Among various approaches to prepare the CIGS thin film, the powder process offers an extremely simple and materials-efficient method. Here, we present the mechano-chemical synthesis of CIGS compound powders and their use as an ink material for screen-printing. During the synthesis process, milling time and speed were varied in the range of 10~600 min and 100~300 rpm, respectively. Both phase evolution and powder characteristics were carefully monitored by X-ray diffraction (XRD) method, scanning electron microscope (SEM) observation, and particle size analysis by scanning mobility particle spectrometer (SMPS) and aerodynamic particle sizer (APS). We found the optimal milling condition as 200 rpm for 120 min but also found that a monolithic phase of CIGS powders without severe particle aggregation was difficult to be obtained by the mechano-chemical milling alone. Therefore, the optimized milling condition was combined with an adequate heat-treatment (300oC for 60 min) to provide the monolithic CIGS powder of a single phase with affordable particle characteristics for the preparation of CIGS thin film. The powder was used to prepare an ink for screen printing with which dense CIGS thin films were fabricated under the controlled selenization. The morphology and electrical properties of the thin films were analyzed by SEM images and hall measurement, respectively.