• Title/Summary/Keyword: Scanning Device

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p-Type AlN epilayer growth for power semiconductor device by mixed-source HVPE method (혼합소스 HVPE 방법에 의한 전력 반도체 소자용 p형 AlN 에피층 성장)

  • Lee, Gang Seok;Kim, Kyoung Hwa;Kim, Sang Woo;Jeon, Injun;Ahn, Hyung Soo;Yang, Min;Yi, Sam Nyung;Cho, Chae Ryong;Kim, Suck-Whan
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.29 no.3
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    • pp.83-90
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    • 2019
  • In this paper, Mg-doped AlN epilayers for power semiconductor devices are grown by mixed-source hydride vapor phase epitaxy. Magnesium is used as p-type dopant material in the grown AlN epilayer. The AlN epilayers on the GaN-templated sapphire substrate and GaN-templated-patterned sapphire substrate (PSS), respectively, as the base substrates for device application, were selectively grown. The surface and the crystal structures of the AlN epilayers were investigated by field emission scanning electron microscopy (FE-SEM) and high-resolution-X-ray diffraction (HR-XRD). From the X-ray photoelectron spectroscopy (XPS) and Raman spectra results, the p-type AlN epilayers grown by using the mixed-source HVPE method could be applied to power devices.

Study on the ICT Device Safety System Application Examples in Mines (광산에서의 ICT 장비 활용 및 안전시스템 운용 사례 연구)

  • Kim, Seung-Jun;Ko, Young-Hun;Kim, Jung-Gyu;Seo, Man-Keun;Kim, Jong-Gwan
    • Tunnel and Underground Space
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    • v.32 no.3
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    • pp.194-202
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    • 2022
  • An increased number of cases have occurred in applying ICT technology in the resource development field due to factors such as safety, eco-friendliness, and low cost since the 2000s. In Korea, the 2nd mining master plan specified the significance of converging the full cycle of mining and ICT, while the 3rd mining master plan highlighted ICT and smart mining such as supporting the supply of an ICT mining device and introducing demonstrational smart mining. This study introduces the application of an ICT device and safety system operation in the Jangseong underground mine of Korea Cement Co., Ltd. Currently, Jangseong mine combines two different kinds of 3D equipment including the handheld 3D scanner and multi-station that provides both the measurement and 3D scanning to perform a 3D measurement of the mine. Taken from the 3D measurement of the mine, it is now possible to identify any hazardous areas and abnormalities in different directions and analyze the safety of the crown pillar between two stopes in different level. Besides, the real-time location tracking and communications system have established highly efficient rescue and evacuation plans to effectively deal with any accidents in the mine.

COMPARATIVE STUDY ON THE EARLY DETECTION OF ENAMEL LESIONS USING DIFOTI AND LASER FLUORESCENCE (Digital Imaging Fiber-Optic Trans-Illumination과 Laser Fluorescence를 이용한 법랑질 우식증의 조기 진단에 관한 비교 연구)

  • Maeng, Myoung-Ho;Kim, Seung-Oh;Kim, Jong-Soo
    • Journal of the korean academy of Pediatric Dentistry
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    • v.33 no.2
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    • pp.207-220
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    • 2006
  • The newly developed equipments for the early detection of carious lesion are LFD (laser fluorescence device), Ultrasonic diagnostic system, CLSM(confocal laser scanning microscopy), QLF(quantitative light-induced fluorescence) and DIFOTI (digital imaging fiber-optic trans-illumination) system. In this study, DIFOTI system and LFD were used for the detection of early enamel caries. Twenty five primary teeth extracted from twenty one children at around the dentitional exchanging period were selected as samples. The results obtained from DIFOTI imaging and LFD measurement were compared with those of CLSM and comprehensive evaluations were made for the diagnostic capacity of each device. In vitro test, 40 sample teeth with their buccal & lingual surface formed by a window of $2{\times}3mm$ in diameter were immersed in artificial demineralizing solution for the period of 4, 8, 12 and 16 days. The results obtained from the experimental groups (DIFOTI, LFD) were compared to control group (CLSM) and we have reached to the following conclusions. 1. The sensitivity and specificity of DIFOTI system operated in oral environment was 88.2% and 76.9% respectively. 2. The sensitivity and specificity of LFD measured in oral environment was 76.5% and 69.2% respectively. 3, Regression analysis on the light transparent rate of DIFOTI showed its decrease according to the length of primary enamel decalcification performed in vitro(r=-0.96, p<0.05). 4. No statistically significant difference between LFT measurement and the length of in vitro decalcification was found in regression analysis (p>0.05). 5. The correlation coefficient of DIFOTI image transparent rate and the lesion depth of CLMS was -0.6988 (p<0.05), whereas no statistically significant difference was found for LFD measurement.

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Analysis of Optimal Pathways for Terrestrial LiDAR Scanning for the Establishment of Digital Inventory of Forest Resources (디지털 산림자원정보 구축을 위한 최적의 지상LiDAR 스캔 경로 분석)

  • Ko, Chi-Ung;Yim, Jong-Su;Kim, Dong-Geun;Kang, Jin-Taek
    • Korean Journal of Remote Sensing
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    • v.37 no.2
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    • pp.245-256
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    • 2021
  • This study was conducted to identify the applicability of a LiDAR sensor to forest resources inventories by comparing data on a tree's position, height, and DBH obtained by the sensor with those by existing forest inventory methods, for the tree species of Criptomeria japonica in Jeolmul forest in Jeju, South Korea. To this end, a backpack personal LiDAR (Greenvalley International, Model D50) was employed. To facilitate the process of the data collection, patterns of collecting the data by the sensor were divided into seven ones, considering the density of sample plots and the work efficiency. Then, the accuracy of estimating the variables of each tree was assessed. The amount of time spent on acquiring and processing the data by each method was compared to evaluate the efficiency. The findings showed that the rate of detecting standing trees by the LiDAR was 100%. Also, the high statistical accuracy was observed in both Pattern 5 (DBH: RMSE 1.07 cm, Bias -0.79 cm, Height: RMSE 0.95 m, Bias -3.2 m), and Pattern 7 (DBH: RMSE 1.18 cm, Bias -0.82 cm, Height: RMSE 1.13 m, Bias -2.62 m), compared to the results drawn in the typical inventory manner. Concerning the time issue, 115 to 135 minutes per 1ha were taken to process the data by utilizing the LiDAR, while 375 to 1,115 spent in the existing way, proving the higher efficiency of the device. It can thus be concluded that using a backpack personal LiDAR helps increase efficiency in conducting a forest resources inventory in an planted coniferous forest with understory vegetation, implying a need for further research in a variety of forests.

A new Clustering Algorithm for the Scanned Infrared Image of the Rosette Seeker (로젯 탐색기의 적외선 주사 영상을 위한 새로운 클러스터링 알고리즘)

  • Jahng, Surng-Gabb;Hong, Hyun-Ki;Doo, Kyung-Su;Oh, Jeong-Su;Choi, Jong-Soo;Seo, Dong-Sun
    • Journal of the Institute of Electronics Engineers of Korea SP
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    • v.37 no.2
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    • pp.1-14
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    • 2000
  • The rosette-scan seeker, mounted on the infrared guided missile, is a device that tracks the target It can acquire the 2D image of the target by scanning a space about target in rosette pattern with a single detector Since the detected image is changed according to the position of the object in the field of view and the number of the object is not fixed, the unsupervised methods are employed in clustering it The conventional ISODATA method clusters the objects by using the distance between the seed points and pixels So, the clustering result varies in accordance with the shape of the object or the values of the merging and splitting parameters In this paper, we propose an Array Linkage Clustering Algorithm (ALCA) as a new clustering algorithm improving the conventional method The ALCA has no need for the initial seed points and the merging and splitting parameters since it clusters the object using the connectivity of the array number of the memory stored the pixel Therefore, the ALCA can cluster the object regardless of its shape With the clustering results using the conventional method and the proposed one, we confirm that our method is better than the conventional one in terms of the clustering performance We simulate the rosette scanning infrared seeker (RSIS) using the proposed ALCA as an infrared counter countermeasure The simulation results show that the RSIS using our method is better than the conventional one in terms of the tracking performance.

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Development of a Laser-Generated Ultrasonic Inspection System by Using Adaptive Error Correction and Dynamic Stabilizer (적응적 에러 보정과 다이나믹 안정기를 이용한 레이저 유도 초음파 검사 시스템 개발)

  • Park, Seung-Kyu;Baik, Sung-Hoon;Park, Moon-Cheol;Lim, Chang-Hwan;Ra, Sung-Woong
    • Journal of the Korean Society for Nondestructive Testing
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    • v.25 no.5
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    • pp.391-399
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    • 2005
  • Laser-generated ultrasonic inspection system is a non-contact scanning inspection device with high spatial resolution and wide bandwidth. The amplitude of laser-generated ultrasound is varied according to the energy of pulse laser and the surface conditions of an object where the CW measuring laser beam is pointing. In this paper, we correct the generating errors by measuring the energy of pulse laser beam and correct the measuring errors by extracting the gain information of laser interferometer at each time. h dynamic stabilizer is developed to stably scan on the surface of an object for an laser-generated ultrasonic inspection system. The developed system generates ultrasound after adaptively finding the maximum gain time of an laser interferometer and processes the signal in real time after digitization with high speed. In this paper, we describe hardware configuration and control algorithm to build a stable laser-generated ultrasonic inspection system. Also, we confirmed through experiments that the proposed correction method for the generating errors and measuring errors is effective to improve the performance of a system.

Effects of Leveler on the Trench Filling during Damascene Copper Plating (전해전착시 상감 구리 배선의 충전에 미치는 레벨러의 효과)

  • Lee, Yu-Young;Park, Young-Joon;Lee, Jae-Bong;Cho, Byung-Won
    • Journal of the Korean Electrochemical Society
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    • v.5 no.3
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    • pp.153-158
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    • 2002
  • The effects of leveler on the copper trench filling were investigated during damascene plating process. To investigate the trench filling effect with the addition of a leveler, a cross-section images of the electroplated trenches with the width of$0.37{\mu}m,\;and\;0.18{\mu}m$ were observed by field emission scanning electron microscope (FE-SEM). Polyethylene glycol(PEG), 3-mercapto-1-propanesulfonic acid and Janus Green B were used as a carrier, an accelerator and a leveler. $0.37{\mu}m$ trenches were superfilled without voids, but there was voids formation in $0.18{\mu}m$ trenches when the leveler was not added into the electrolyte. On the other hand $0.18{\mu}m$ trenches were superfilled without voids with the addition of the leveler due to the reduction growth rate of copper at protrusions and edges, which yield smooth final deposit surface. The leverer effect becomes more significant as the width of trenches becomes smaller when trenches are filed.

Evaluation of Setup When Using C-Rad System in Radiotherapy (방사선치료 시 C-Rad system을 이용한 셋업의 평가)

  • Park, Eun-Tae;Ko, Seong-Jin;Choi, Seok-Yoon;Kim, Jung-Hoon;Kim, Chang-Soo;Kim, Dong-Hyun;Kang, Se-Sik
    • The Journal of the Korea Contents Association
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    • v.12 no.5
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    • pp.303-310
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    • 2012
  • In radiotherapy, accurate patient positioning and set up are important factor that treatment can influence success. In generally, the 3-laser system is used when the patient set up. But today the body surface scanning system(C-Rad system) is trying to use. Compare and evaluate the C-Rad system and the 3-laser system to check availability. Head and neck that are no movement of internal organs and easy to apply fixation device are limited. Alderson Rando anthropomorphic phantom and 10 patients who have lesions of head and neck are targeted. C-RAD system's setup error mean and standard deviation are the X axis($0.55{\pm}0.51mm$), Y axis($-0.2mm{\pm}0.523mm$), Z axis($-0.85{\pm}0.587mm$) in the phantom study, and in the patient study X axis($-0.05{\pm}0.621mm$), Y axis($0.075{\pm}0.755mm$) Z axis($-1.025{\pm}0.617mm$). So C-RAD system is better than 3-laser system mostly, but C-RAD system's error rate is a little worse than 3-laser system in the Z axis. When radiation treatment of head and neck, body surface contour scanning system contribute to correct positioning and minimize the set up error.

Scalable RSA public-key cryptography processor based on CIOS Montgomery modular multiplication Algorithm (CIOS 몽고메리 모듈러 곱셈 알고리즘 기반 Scalable RSA 공개키 암호 프로세서)

  • Cho, Wook-Lae;Shin, Kyung-Wook
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.22 no.1
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    • pp.100-108
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    • 2018
  • This paper describes a design of scalable RSA public-key cryptography processor supporting four key lengths of 512/1,024/2,048/3,072 bits. The modular multiplier that is a core arithmetic block for RSA crypto-system was designed with 32-bit datapath, which is based on the CIOS (Coarsely Integrated Operand Scanning) Montgomery modular multiplication algorithm. The modular exponentiation was implemented by using L-R binary exponentiation algorithm. The scalable RSA crypto-processor was verified by FPGA implementation using Virtex-5 device, and it takes 456,051/3,496347/26,011,947/88,112,770 clock cycles for RSA computation for the key lengths of 512/1,024/2,048/3,072 bits. The RSA crypto-processor synthesized with a $0.18{\mu}m$ CMOS cell library occupies 10,672 gate equivalent (GE) and a memory bank of $6{\times}3,072$ bits. The estimated maximum clock frequency is 147 MHz, and the RSA decryption takes 3.1/23.8/177/599.4 msec for key lengths of 512/1,024/2,048/3,072 bits.

Measurement of Width and Step-Height of Photolithographic Product Patterns by Using Digital Holography (디지털 홀로그래피를 이용한 포토리소그래피 공정 제품 패터닝의 폭과 단차 측정)

  • Shin, Ju Yeop;Kang, Sung Hoon;Ma, Hye Joon;Kwon, Ik Hwan;Yang, Seung Pil;Jung, Hyun Chul;Hong, Chung Ki;Kim, Kyeong Suk
    • Journal of the Korean Society for Nondestructive Testing
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    • v.36 no.1
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    • pp.18-26
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    • 2016
  • The semiconductor industry is one of the key industries of Korea, which has continued growing at a steady annual growth rate. Important technology for the semiconductor industry is high integration of devices. This is to increase the memory capacity for unit area, of which key is photolithography. The photolithography refers to a technique for printing the shadow of light lit on the mask surface on to wafer, which is the most important process in a semiconductor manufacturing process. In this study, the width and step-height of wafers patterned through this process were measured to ensure uniformity. The widths and inter-plate heights of the specimens patterned using photolithography were measured using transmissive digital holography. A transmissive digital holographic interferometer was configured, and nine arbitrary points were set on the specimens as measured points. The measurement of each point was compared with the measurements performed using a commercial device called scanning electron microscope (SEM) and Alpha Step. Transmission digital holography requires a short measurement time, which is an advantage compared to other techniques. Furthermore, it uses magnification lenses, allowing the flexibility of changing between high and low magnifications. The test results confirmed that transmissive digital holography is a useful technique for measuring patterns printed using photolithography.