• Title/Summary/Keyword: SOL-GEL

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Synthesis of Sludge Waste-derived Semiconductor Grade Uniform Colloidal Silica Nanoparticles and Their CMP Application (슬러지 폐기물을 활용한 반도체급 균일한 콜로이달 실리카 나노입자의 제조 및 CMP 응용)

  • Kim, Dong Hyun;Kim, Jiwon;Jekal, Suk;Kim, Min Jeong;Kim, Ha-Yeong;Kim, Min Sang;Kim, Sang-Chun;Park, Seon-Young;Yoon, Chang-Min
    • Journal of the Korea Organic Resources Recycling Association
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    • v.30 no.3
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    • pp.5-12
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    • 2022
  • This study suggests the effective recycling method of sludge waste from various industrial fields to synthesize uniform colloidal silica nanoparticles. In detail, polymers are removed from the sludge waste to attain sludge-extracted silica (s-SiO2) micron-sized particles, and ammonia assisted sonication is applied to s-SiO2, which has effectively extracted the silanol precursor. The nano-sized silica (n-SiO2) particles are successfully synthesized by a typical sol-gel method using silanol precursor. Also, the yield amounts of n-SiO2 are determined by the function of s-SiO2 etching time. Finally, n-SiO2-based slurry is synthesized for the practical CMP application. As a result, rough-surfaced semiconductor chip is successfully polished by the n-SiO2-based slurry to exhibit the mirror-like clean surface. In this regard, sludge wastes are successfully prepared as valuable semicondutor grade materials.

An Experimental Study for the Development of Soil Injection Materials using Vietnam's Circulating Resources (베트남 순환자원을 활용한 지반주입재 개발을 위한 실험적 연구)

  • Young-Won, Lee;Kwang-Wu, Lee;Se-Gwan, Seo;Wan-Kyu, Yoo;Jae-Hyun, Park
    • Journal of the Korean Recycled Construction Resources Institute
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    • v.10 no.4
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    • pp.457-464
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    • 2022
  • In this study, XRF, Loss on ignition, SEM, and PSA analysis were performed on four types of fly ash in Vietnam and compared with fly ash in Korea. As a result, PC boiler fly ash in Vietnam has a similar chemical composition to that of PC boiler fly ash in Korea, where the content of SiO2, Al2O3, and Fe2O3 accounts for about 70%. In addition, the result showed that blast furnace slags in Vietnam and Korea have similar quality criteria and performance. A binder material mixing test using four types of fly ash supplied from Vietnam was conducted, and the compressive strength ranged from 7.60 to 13.25 MPa after 28 days of curing. Vinh Tan fly ash showing the highest compressive strength was selected as the soil injection material for the chemical grouting method. For the formulation of the chemical grouting method, sodium silicate No.3 and silica-sol were used as liquid-A. As a result of measuring the gel time and the compressive strength of the homogel, they showed good performance satisfying the quality criteria applied in Korean construction fields. Therefore, Vinh Tan fly ash can be used as a soil injection material for the chemical grouting method.

Core-shell TiO2/Ag Nanoparticle Synthesis and Characterization for Conductive Paste (전도성 페이스트용 코어-쉘 TiO2/Ag 나노입자의 합성 및 특성 연구)

  • Sang-Bo, Sim;Jong-Dae, Han
    • Applied Chemistry for Engineering
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    • v.34 no.1
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    • pp.36-44
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    • 2023
  • Core-shell TiO2/Ag nanoparticles were synthesized by a modified sol-gel process and the reverse micelle method using acetoxime as a reducing agent in water/dodecylbenzenesulfonic acid (DDBA)/cyclohexane. The structure, shape, and size of the TiO2/Ag nanoparticles were investigated using X-ray diffraction (XRD), UV-visible spectroscopy, scanning electron microscope (SEM), transmission electron microscope (TEM), and thermogravimetric analysis (TGA). The size of TiO2/Ag nanoparticles could be controlled by changing the [water]/[DDBA] molar ratio values. The size and the polydispersity of TiO2/Ag nanoparticles increased when the [water]/[DDBA] molar ratio rose. The resultant Ag nanoparticles over the anatase crystal TiO2 nanoparticles exhibited a strong surface plasmon resonance (SPR) peak at about 430 nm. The SPR peak shifted to the red side with the increase in nanoparticle size. Conductive pastes with 70 wt% TiO2/Ag nanoparticles were prepared, and the pastes were coated on the PET films using a screen-printing method. The printed paste films of the TiO2/Ag nanoparticles demonstrated greater surface resistance than conventional Ag paste in the range of 405~630 μΩ/sq.

Application of Silicon Sludge from Semiconductor Manufacturing Process as Pigments and Paints through Titanium Dioxide Coating (반도체 제조공정에서 발생하는 실리콘 슬러지의 이산화티타늄 코팅을 통한 안료 및 도료 소재로의 응용)

  • Yeon-Ryong Chu;Minki Sa;Jiwon Kim;Suk Jekal;Chan-Gyo Kim;Ha-Yeong Kim;Song Lee;Hyung Sub Sim;Chang-Min Yoon
    • Journal of the Korea Organic Resources Recycling Association
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    • v.31 no.3
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    • pp.35-41
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    • 2023
  • In this study, silicon sludge generated in semiconductor manufacturing process is recycled and applied as materials for pigments and paints. In detail, metallic impurities are removed from silicon sludge to obtain plate-like silicon sludge powder (SW-sludge), which is then coated with titanium dioxide via sol-gel method (TCS-sludge). SW-sludge and TCS-sludge are dispersed in hydrophilic transparent varnish and sprayed onto glass substrates to observe the possibility for the application as materials for pigments and paints. Notably, the applicability of TCS-sludge-based paint is improved compared to SW-sludge-based paint after the titanium dioxide coating. Moreover, the color of TCS-sludge-based paint turns into white. Accordingly, it is confirmed that the applicability and hydrophilicity are improved by the presence of outer titanium dioxide layer. In this regard, it is expected that the recycled TCS-sludge may be a future material for the application as pigments and paints.

Synthesis of Polyimide Crosslinked Silica-based Aerogel with Enhanced Mechanical Properties and Its Physico-chemical Properties (폴리이미드 가교로 기계적 강도가 향상된 실리카 기반 에어로겔의 합성 및 물리화학적 특성 분석)

  • Kim, Jiseung;Choi, Haryeong;Kim, Taehee;Lee, Wonjun;Lee, Hong-Sub
    • Journal of the Microelectronics and Packaging Society
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    • v.29 no.4
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    • pp.9-14
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    • 2022
  • Silica aerogel is a porous material with a very low density and high specific surface area. Still, its application is limited due to its weak mechanical properties due to structural features. To solve this problem, a method of complexing it with various polymers has been proposed. We synthesized polyimide cross-linked silica aerogel by the sol-gel process to obtain high mechanical properties. Tetraethyl orthosilicate (TEOS) was used as a precursor to make silica aerogel, and 3- aminopropyltriethoxysilane (APTES) was used as a coupling agent for cross-linking polyimide. Polyimide was synthesized using pyromellitic dianhydride and 3,5-diaminobenzoic acid, and mechanical properties were improved by crosslinking polyimide with 10 repeating units in the polyimide chain using the reaction formula ${\frac{n_1}{n_2}}={\frac{n}{n+1}}$ To realize silica aerogel, polyimide having various weight ratios was added before gelation, resulting in a 19-fold or greater increase in maximum compressive strength compared to pure silica aerogel. From this study, an enhancement of silica aerogel could be enhanced through polymer cross-linking bonds.

Fabrication of LiDAR-detectable Plate-type Black Materials and Application in Hydrophilic Paints (라이다 센서에 인지되는 판상형 검은색 소재의 제조 및 친수성 도료로의 응용)

  • Jiwon Kim;Minki Sa;Chan-Gyo Kim;Ha-Yeong Kim;Yeon-Ryong Chu;Suk Jekal;Chang-Min Yoon
    • Journal of Adhesion and Interface
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    • v.24 no.3
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    • pp.95-99
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    • 2023
  • In this study, LiDAR-detectable black materials are synthesized by coating and reduction of titanium dioxide onto plate-type natural mica, which evaluated practical LiDAR verification. In detail, black TiO2@Mica materials are fabricated by utilizing a sol-gel reaction to coat titanium dioxide onto natural mica, followed by reduction using sodium tetrahydridoborate. Subsequently, Black TiO2@Mica materials are dispersed in hydrophilic transparent varnish and sprayed onto the glass substrate to assess applicability as paints. As a result, Black TiO2@Mica-based paints exhibit true blackness (L*=12.1) and a higher NIR reflectance (30.2 R%). In addition, it was confirmed that as-synthesized Black TiO2@Mica materials are successfully recognized by a LiDAR sensor. This phenomenon is attributed to Fresnel's reflection law, in which light reflection occurs at the interface between natural mica and titanium dioxide with different refractive indices. In this regard, the findings of the study are expected to contribute to the potential utilization of LiDAR-detectable materials in various fields such as autonomous vehicles, robotics, and drones.

Development of Composite-film-based Flexible Energy Harvester using Lead-free BCTZ Piezoelectric Nanomaterials (비납계 (Ba0.85Ca0.15)(Ti0.9Zr0.1)O3 압전 나노소재를 이용한 복합체 필름 기반의 플렉서블 에너지 하베스터 개발)

  • Gwang Hyeon Kim;Hyeon Jun Park;Bitna Bae;Haksu Jang;Cheol Min Kim;Donghun Lee;Kwi-Il Park
    • Journal of Powder Materials
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    • v.31 no.1
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    • pp.16-22
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    • 2024
  • Composite-based piezoelectric devices are extensively studied to develop sustainable power supply and self-powered devices owing to their excellent mechanical durability and output performance. In this study, we design a lead-free piezoelectric nanocomposite utilizing (Ba0.85 Ca0.15)(Ti0.9Zr0.1)O3 (BCTZ) nanomaterials for realizing highly flexible energy harvesters. To improve the output performance of the devices, we incorporate porous BCTZ nanowires (NWs) into the nanoparticle (NP)-based piezoelectric nanocomposite. BCTZ NPs and NWs are synthesized through the solid-state reaction and sol-gel-based electrospinning, respectively; subsequently, they are dispersed inside a polyimide matrix. The output performance of the energy harvesters is measured using an optimized measurement system during repetitive mechanical deformation by varying the composition of the NPs and NWs. A nanocomposite-based energy harvester with 4:1 weight ratio generates the maximum open-circuit voltage and short-circuit current of 0.83 V and 0.28 ㎂, respectively. In this study, self-powered devices are constructed with enhanced output performance by using piezoelectric energy harvesting for application in flexible and wearable devices.

Fabrication of Silica Nanoparticles by Recycling EMC Waste from Semiconductor Molding Process and Its Application to CMP Slurry (반도체 몰딩 공정에서 발생하는 EMC 폐기물의 재활용을 통한 실리카 나노입자의 제조 및 반도체용 CMP 슬러리로의 응용)

  • Ha-Yeong Kim;Yeon-Ryong Chu;Gyu-Sik Park;Jisu Lim;Chang-Min Yoon
    • Journal of the Korea Organic Resources Recycling Association
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    • v.32 no.1
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    • pp.21-29
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    • 2024
  • In this study, EMC(Epoxy molding compound) waste from the semiconductor molding process is recycled and synthesized into silica nanoparticles, which are then applied as abrasive materials contains CMP(Chemical mechanical polishing) slurry. Specifically, silanol precursor is extracted from EMC waste according to the ultra-sonication method, which provides heat and energy, using ammonia solution as an etchant. By employing as-extracted silanol via a facile sol-gel process, uniform silica nanoparticles(e-SiO2, experimentally synthesized SiO2) with a size of ca. 100nm are successfully synthesized. Through physical and chemical analysis, it was confirmed that e-SiO2 has similar properties compared to commercially available SiO2(c-SiO2, commercially SiO2). For practical CMP applications, CMP slurry is prepared using e-SiO2 as an abrasive and tested by polishing a semiconductor chip. As a result, the scratches that are roughly on the surface of the chip are successfully removed and turned into a smooth surface. Hence, the results present a recycling method of EMC waste into silica nanoparticles and the application to high-quality CMP slurry for the polishing process in semiconductor packaging.

A study on the crystallographic and magnetic Properties of Ce doped Garnet (Ce이 치환된 YIG garnet의 결정학적 및 자기적 성질 연구)

  • Kum, Jun-Sig;Kim, Sam-Jin;Shim, In-Bo;Kim, Chul-Sung
    • Journal of the Korean Magnetics Society
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    • v.14 no.1
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    • pp.46-50
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    • 2004
  • Compounds of $Y_{3-x}Ce_{x}Fe{5}O_{12}$(x=0.0, 0.1, 0.2, and 0.3) were prepared using the sol-gel method. The XRD measurements show that these samples have only a single phase of the garnet structure regardless of the amount of Ce substitution. The lattice constants of x = 0.0 and x = 0.3 were found to be a$_0$ = 12.3758 ${\pm}$0.0005 ${\AA}$ and 12.4062 ${\pm}$0.0005 ${\AA}$, respectively. The lattice constant increases linearly with increasing Ce concentration. The saturation magnetization was not changed flirty, with increasing Ce concentration, but coercivity decreased form 18.3 Oe to 5.8 Oe as x increased form x = 0.0 to x = 0.1. Mossbauer spectra of $Y_{3-x}Ce_{x}Fe{5}O_{12}$ were measured at various absorber temperatures from 13 K to Neel temperature. The Mossbauer spectra were fitted by least-squares technique with two subpatterns of Fe sites in the structure and corresponding to the 16a and 24d site. The temperature dependence of the magnetic hyperfine field in $^{57}$/Fe nuclei at the tetrahedral 240 and octahedral 16a sites were analyzed based on the Neel theory of ferrirnagnetism. The result of the Debye temperatures indicated that the inter-atomic binding force for the 24d site was larger than that for the 16a site.

Crystallization and Magnetic Properties of Iron Doped La-Ba-Mn-O (Fe이 치환된 LaBaMnO계 산화물의 중성자 회절 및 Messbauer분광학연구)

  • Choi, Kang-Ryong;Kim, Sam-Jin;Shim, In-Bo;Kim, Chul-Sung
    • Journal of the Korean Magnetics Society
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    • v.14 no.1
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    • pp.38-44
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    • 2004
  • The iron doped colossal magnetoresistance materials with La-Ba-Mn-O perovskites structure have been synthesized by chemical reaction of sol-gel methods. Their crystallographic and magnetic properties have been studied with x-ray diffraction, VSM, RBS, Mossbauer spectroscopy, and magnetoresistance measurements. The crystal structure of the La$\_$0.67/Ba$\_$0.33/Mn$\_$0.99/Fe$\_$0.01/ $O_3$ at room temperature was determined to be orthorhombic of Pnma. The lattice parameters a$\_$0/ and c$\_$0/ increased gradually, but b$\_$0/ deceased with increase of iron substitution. The magnetization and coercivity deceased, also the Curie temperature decreased from 360 K as x increased from 0.00 to 0.05. Magnetoresistence measurements were carried out, and the maximum MR ($\Delta$$\rho$/$\rho$(0)) was observed at 281 K, about 9.5 % in 10 kOe. The temperature of maximum resistance (R$\_$MAX/) decreased with increasing substitution of Fe ions and a semiconductor-metal transition temperature (T$\_$SC-M/) decreased too. This phenomena show that ferromagnetic transition temperature decreased by substituting Fe for Mn ions, it decreases double exchange interaction. This result accords with magnetic structure of neutron diffraction. Mossbauer spectra of La$\_$0.67/Ba$\_$0.33/Mn$\_$0.99/Fe$\_$0.01/ $O_3$were taken at various temperatures ranging from 15 to 350 K. With lowering temperature of the sample, two magnetic phases were increased and finally it showed the two sharp sextets of spectra at 15 K. The isomer shift at all temperature range is about 0.3 mm/s relative to Fe metal, which means that both Fe ions are Fe$\^$3+/ states.Fe$\^$3+/ states.