• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.183-183
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• 2012

In the era of 45 nm or beyond technology, conventional etch mask using photoresist showed its limitation of etch mask pattern collapse as well as pattern erosion, thus hard mask in etching became necessary for precise control of etch pattern geometry. Currently available hard mask materials are amorphous carbon and polymetric materials spin-on containing carbon or silicon. Amorphous carbon layer (ACL) deposited by PECVD for etch hard mask has appeared in manufacturing, but spin-on carbon (SOC) was also suggested to alleviate concerns of particle, throughput, and cost of ownership (COO) [1]. SOC provides some benefits of reduced process steps, but it also faced with wiggling on a sidewall profile. Diamond like carbon (DLC) was also evaluated for substituting ACL, but etching selectivity of ACL was better than DLC although DLC has superior optical property [2]. Developing a novel material for pattern hard mask is very important in material research, but it is also worthwhile eliminating a potential issue to continuously develop currently existing technology. In this paper, we investigated in-situ dry-cleaning (ISD) monitoring of ACL coated process chamber. End time detection of chamber cleaning not only provides a confidence that the process chamber is being cleaned, but also contributes to minimize wait time waste (WOW). Employing Challenger 300ST, a 300mm ACL PECVD manufactured by TES, a series of experimental chamber cleaning runs was performed after several deposition processes in the deposited film thickness of $2000{\AA}$ and $5000{\AA}$. Ar Actinometry and principle component analysis (PCA) were applied to derive integrated and intuitive trace signal, and the result showed that previously operated cleaning run time can be reduced by more than 20% by employing real-time monitoring in ISD process.

• International Journal of Internet, Broadcasting and Communication
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• v.12 no.3
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• pp.32-38
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• 2020

The deployment of geographically distributed wireless sensors has greatly elevated the capability of monitoring structural health in social-overhead capital (SOC) public infrastructures. This paper deals with the utilization of a distributed mobility management (DMM) approach for the deployment of wireless sensing devices in a structural health monitoring system (SHM). Then, a wireless sensing mechanism utilizing low-energy adaptive clustering hierarchy (LEACH)-based clustering algorithm for smart sensors has been analyzed to support the seamless data transmission of structural health information which is essentially important to guarantee public safety. The clustering of smart sensors will be able to provide real-time monitoring of structural health and a filtering algorithm to boost the transmission of critical information over heterogeneous wireless and mobile networks.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.16 no.6
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• pp.43-54
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• 2016

The occurrence of cyber crime is on the rise every year, and the security control center, which should play a crucial role in monitoring and early response against the cyber attacks targeting various information systems, its importance has increased accordingly. Every endeavors to prevent cyber attacks is being attempted by information security personnel of government and financial sector's security control center, threat response Center, cyber terror response center, Cert Team, SOC(Security Operator Center) and else. The ordinary method to monitor cyber attacks consists of utilizing the security system or the network security device. It is anticipated, however, to be insufficient since this is simply one dimensional way of monitoring them based on signatures. There has been considerable improvement of the security control system and researchers also have conducted a number of studies on monitoring methods to prevent threats to security. In accordance with the environment changes from ESM to SIEM, the security control system is able to be provided with more input data as well as generate the correlation analysis which integrates the processed data, by extraction and parsing, into the potential scenarios of attack or threat. This article shows case studies how to detect the threat to security in effective ways, from the initial phase of the security control system to current SIEM circumstances. Furthermore, scenarios based security control systems rather than simple monitoring is introduced, and finally methods of producing the correlation analysis and its verification methods are presented. It is expected that this result contributes to the development of cyber attack monitoring system in other security centers.

• Journal of the Korea Institute of Information Security & Cryptology
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• v.30 no.3
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• pp.465-479
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• 2020

Regardless of the domestic and foreign governments/companies, SOC (Security Operation Center) has operated 24 hours a day for the entire year to ensure the security for their IT infrastructures. However, almost all SOCs have a critical limitation by nature, caused from heavily depending on the manual analysis of human agents with the text-based monitoring architecture. Even though, in order to overcome the drawback, technologies for a comprehensive visualization against complex cyber threats have been studying, most of them are inappropriate for the security monitoring in large-scale networks. In this paper, to solve the problem, we propose a novel visual approach for intuitive threats monitoring b detecting suspicious IP address, which is an ultimate challenge in cyber security monitoring. The approach particularly makes it possible to detect, trace and analysis of suspicious IPs statistically in real-time manner. As a result, the system implemented by the proposed method is suitably applied and utilized to the real-would environment. Moreover, the usability of the approach is verified by successful detecting and analyzing various attack IPs.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.29 no.8
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• pp.40-48
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• 2015

In this paper, battery charging and discharging circuit with a single voltage power supply is proposed. The proposed circuit has the separated current path and charging-monitoring sequence control scheme. In the charging sequence, the proposed 2-level comparator combined with control signal of the micro-processor can control the constant charging current to protect the over current of the battery. Furthermore, the proposed circuit uses a periodic main power switch control to detect the discharging characteristics to estimate the approximated battery life-time. In the experiments, the proposed emergency power supply for emergency call system has 89% efficiency with 98% power factor. And the proposed sequence control scheme is well operated in the designed emergency power system.

• KEPCO Journal on Electric Power and Energy
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• v.8 no.2
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• pp.143-149
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• 2022

As ESS safety issues increase recently, there is a need to more precisely monitor the temperature of the ESS. In this paper, DTS technology for temperature monitoring of ESS batteries is introduced and the temperature measurement principle is explained. The temperature of the battery module is measured using the DTS system, and the thermal deviation between battery cells inside the battery module is analyzed. In order to analyze how thermal imbalance affects the charging and discharging performance of the battery, an accelerated degradation test was conducted. Cycle life characteristics analysis, battery surface temperature change, and AC impedance characteristics were conducted to analyze how the performance of battery cells differs according to temperature conditions.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.139.2-139.2
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• 2016

Electrons and phonons in chalcogenide-based materials play are important factors in the performance of an optical data storage media and thermoelectric devices. However, the fundamental kinetics of carriers in chalcogenide materials remains controversial, and active debate continues over the mechanism responsible for carrier relaxation. In this study, we investigated ultrafast carrier dynamics in an multilayered $\{Sb(3{\AA})/Te(9{\AA})\}n$ thin film during the transition from the amorphous to the crystalline phase using optical pump terahertz probe spectroscopy (OPTP), which permits the relationship between structural phase transition and optical property transitions to be examined. Using THz-TDS, we demonstrated that optical conductance and carrier concentration change as a function of annealing temperature with a contact-free optical technique. Moreover, we observed that the topological surface state (TSS) affects the degree of enhancement of carrier lifetime, which is closely related to the degree of spin-orbit coupling (SOC). The combination of an optical technique and a proposed carrier relaxation mechanism provides a powerful tool for monitoring TSS and SOC. Consequently, the response of the amorphous phase is dominated by an electron-phonon coupling effect, while that of the crystalline structure is controlled by a Dirac surface state and SOC effects. These results are important for understanding the fundamental physics of phase change materials and for optimizing and designing materials with better performance in optoelectronic devices.

• Journal of Cadastre & Land InformatiX
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• v.53 no.1
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• pp.123-137
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• 2023

This study is to review the concept of digital twin, analyse digital twin cases and suggest implications. The definition of digital twin is somewhat different depending on purposes but the importance of visualization, monitoring, analysis, prediction and optimization characteristics are accepted. In terms of the concept, digital twin cases are reviewed and analyzed. Based on the analysis, implications from a data point of view for the future development of digital twin in South Korea are suggested.

• Journal of KIISE:Software and Applications
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• v.37 no.11
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• pp.812-825
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• 2010

Service-Oriented Computing (SOC) is a reuse paradigm for developing business processes by dynamic service composition. Service consumers subscribe services deployed by service providers only through service interfaces. Therefore, services on server-side are perceived as black box to service consumers. Due to this nature of services, service consumers have limited knowledge on the quality of services. This limits utilizing of services in critical domains hard. Therefore, there is an increasing demand for effective methods for monitoring services. Current monitoring techniques generally depend on specific vendor's middleware without direct access to services due to the technical hardship of monitoring. However, these approaches have limitations including low data comprehensibility and data accuracy. And, this results in a demand for effective service monitoring framework. In this paper, we propose a framework for efficiently monitoring services. We first define requirements for designing monitoring framework. Based on the requirements, we propose architecture for monitoring framework and define generic patterns for efficiently acquiring monitored data from services. We present the detailed design of monitoring framework and its implementation. We finally implement a prototype of the monitor, and present the functionality of the framework as well as the results of experiments to verify efficiency of patterns for transmitting monitoring data.

• Smart Structures and Systems
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• v.15 no.2
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• pp.283-297
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• 2015

Jacket-type offshore structures are always exposed to severe environmental conditions such as salt, high speed of current, wave, and wind compared with other onshore structures. In spite of the importance of maintaining the structural integrity for an offshore structure, there are few cases to apply a structural health monitoring (SHM) system in practice. The impedance-based SHM is a kind of local SHM techniques and to date, numerous techniques and algorithms have been proposed for local SHM of real-scale structures. However, it still requires a significant challenge for practical applications to compensate unknown environmental effects and to extract only damage features from impedance signals. In this study, the impedance-based SHM was carried out on a 1/20-scaled model of an Uldolmok current power plant structure in Korea under changes in temperature and transverse loadings. Principal component analysis (PCA)-based approach was applied with a conventional damage index to eliminate environmental changes by removing principal components sensitive to them. Experimental results showed that the proposed approach is an effective tool for long-term SHM under significant environmental changes.