• Title/Summary/Keyword: SI Separation

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Design and Fabrication of Si pin photodiode for APF optical link (APF optical link용 Si pin photodiode의 설계 및 제작)

  • 강현구;남정식;이지현;김윤희;이상열;김장기;장지근
    • Proceedings of the IEEK Conference
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    • 2000.06b
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    • pp.270-273
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    • 2000
  • We have fabricated and analyzed photodiodes for optical link with Si pin structures. As the results of experiment, the web patterned photodiode(type C) with $p^{+}$-guard ring showed low junction capacitance of 6~7 pF at $V_{R}$=-5V and high separation ability for optical signal(dark current : $\leq$ 5 nA, optical signal current : $\geq$ 340 nA) due to the small effective $p^{+}$-n junction area and the expanded electric field region. The fabricated Si pin photodiode can be applicable for detecting an optical signal with the wavelength of about 660~670 nm. It can also be integrated with the twin well CMOS structure to develope an one chip based optical receiver IC. IC.C.

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UF Separation of the Waste Water Containing Silicon Fine Particle (Si 미립자 함유 폐수의 UF 투과 특성)

  • 이석기;김우정;전재홍;곽순철;남석태;최호상
    • Proceedings of the Membrane Society of Korea Conference
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    • 1997.10a
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    • pp.129-130
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    • 1997
  • 1. 서론 : 반도체 제조공정중 wafer가공 공정에 사용되는 많은 양의 RO 초순수는 미세한 규소입자를 비롯하여 비교적 낮은 농도의 불순물을 포함하고 있으나, 현재 1차세정후 공정폐수로 전량 희석되어 폐기되고 있다. 반도체 제조공정에서 발생되는 이러한 세정폐수를 적절한 전처리와 분리막 처리를 통하여 유가물질인 Si 입자를 회수하고, 처리수를 재이용함으로써 환경오염의 감소 및 공업용수의 증대를 도모할 수 있다. 본 연구에서는 고분자 분리막을 이용하여 반도체 제조공정중 발생한 세정중의 유가물질인 Si를 회수하고, 용수를 재이용하기 위하여 한외여과용 평막을 제조하여 Si 함유 폐수에 대한 막성능을 평가하였으며, 또한 상용 tubular 및 hallow fiber막의 성능과도 비교하였다.

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Chemically Modified Submicron Silica Particulate Extractants for Preconcentration of Mercury(II)

  • Kaur, Anupreet;Gupta, Usha
    • Bulletin of the Korean Chemical Society
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    • v.29 no.10
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    • pp.1932-1936
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    • 2008
  • A new analytical method using 1-(2-pyridylazo)-2-naphthol modified $SiO_2$ nanoparticles as solid-phase extractant has been developed for the preconcentration of trace amounts of mercury(II) in different water samples. Conditions of the analysis such as preconcentration time, effect of pH, sample volumes, shaking time, elution conditions and effects of interfering ions for the recovery of analyte were investigated. The adsorption capacity of nanometer $SiO_2$-PAN was found to be 260 ${\mu}molg^{-1}$ at optimum pH and the detection limit (3$\sigma$) was 0.48 ${\mu}gL^{-1}$. The extractant showed rapid kinetic sorption. The adsorption equilibrium of mercury(II) on nanometer $SiO_2$-PAN was achieved just in 5 mins. Adsorbed mercury(II) was easily eluted with 5 mL of 6 M hydrochloric acid. The maximum preconcentration factor was 50. The method was applied for the determination of trace amounts of mercury(II) in various water samples and industrial effluents.

Annealing Characteristic of Phosphorus Implanted Silicon Films using an Ion Mass Doping Method (Ion Mass Doping 법을 이용한 Phosphorus 주입된 실리콘 박막의 Annealing 특성)

  • 강창용;최덕균;주승기
    • Journal of the Korean institute of surface engineering
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    • v.27 no.4
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    • pp.234-240
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    • 1994
  • A large area impurity doping method for poly-Si TFT LCD has been developed. The advantage of this method is the doping of impurities into Si over a large area without mass separation and beam scanning. Phosphorus diluted in hydrogen was discharged by RF(13.56MHz) power and ions from discharged gas were accelerated by DC acceleration voltage and were implanted into deposited Si films. The annealing characteristic of this method was similar to that of the ion implantation method in the low doping concentration. Three mechanisms were evolved in the annealing characteristics of phosphorus doped Si films. Point defects annihilation and the retrogradation of dopant atoms at grain boundaries as a result of grain growth played a major role at low and high annealing temperature, respectively. However, due to the dopant segregation, the reverse annealing range existed at intermediate annealing temperature.

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Effects of Axial Ligand Basicity on the Isotropic NMR Shifts in Pyridine-Type Ligands Coordinated to the Paramagnetic Polyoxometalate, $[SiW_{11}Co^{11}O_{39}]^{6-}$

  • 김지영;박석민;소현수
    • Bulletin of the Korean Chemical Society
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    • v.18 no.4
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    • pp.369-373
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    • 1997
  • When 1H NMR spectra of pyridine, 4-amino-, 4-methyl-, and 4-cyanopyridine coordinated to the paramagnetic polyoxometalate, [SiW11CoⅡO39]6- in D2O are compared, both α- and β-proton peaks are shifted upfield as the basicity of the ligand decreases. The isotropic shifts are separated into contact and pseudocontact contributions by assuming that the contact shifts are proportional to the isotropic shifts of the same ligands coordinated to [SiW11NiⅡO39]6-. This separation reveals that the shift variations with the axial ligand basicity are dominated by changes in the magnetic anisotropy (pseudocontact shift) of [SiW11CoⅡ(ptl)O39]6- (ptl=pyridine-type ligand). The magnitude of the magnetic anisotropy in a series of pyridine-type ligands increases linearly as the pKa of their conjugate acids decreases.

Vapor Permeation Characteristics of TiO2 Composite Membranes Prepared on Porous Stainless Steel Support by Sol-Gel Method

  • Lee, Yoon-Gyu;Lee, Dong-Wook;Kim, Sang-Kyoon;Sea, Bong-Kuk;Youn, Min-Young;Lee, Kwan-Young;Lee, Kew-Ho
    • Bulletin of the Korean Chemical Society
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    • v.25 no.5
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    • pp.687-693
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    • 2004
  • Composite membranes with a titania layer were prepared by soaking-rolling method with the titania sol of nanoparticles formed in the sol-gel process and investigated regarding the vapor permeation of various organic mixtures. The support modification was conducted by pressing $SiO_2$ xerogel of 500 nm in particle size under 10 MPa on the surface of a porous stainless steel (SUS) substrate and designed the multi-layered structure by coating the intermediate layer of ${\gamma}-Al_2O_3$. Microstructure of titania membrane was affected by heat-treatment and synthesis conditions of precursor sol, and titania formed at calcination temperature of 300$^{\circ}C$ with sol of [$H^+$]/[TIP]=0.3 possessed surface area of 210 $m^2$/g, average pore size of 1.25 nm. The titania composite membrane showed high $H_2/N_2$ selectivity and water/ethanol selectivity as 25-30 and 50-100, respectively. As a result of vapor permeation for water-alcohol and alcohol-alcohol mixture, titania composite membrane showed water-permselective and molecular-sieve permeation behavior. However, water/methanol selectivity of the membrane was very low because of chemical affinity of permeants for the membrane by similar physicochemical properties of water and methanol.

The enhancement of protein separation by duplex SDS-PAGE (Duplex SDS-PAGE를 이용한 단백질 분리향상)

  • Pyo, Jae Sung;Roh, Si Hun;Song, Jin-Su;Lee, Kyung Hyeon;Kim, Hie-Joon;Park, Jeong Hill;Kwon, Sung Won
    • Analytical Science and Technology
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    • v.19 no.6
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    • pp.529-534
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    • 2006
  • The protein separation with molecular weight using SDS-PAGE(sodium dodecyl sulfate-polyacrylamide gel electrophoresis) is the one of the most conventional and simple techniques. In, this study, two dimensional SDS-PAGE using same separation principle consecutively was investigated and compared with one dimensional SDS-PAGE. The enhanced separation from duplex SDS-PAGE was observed and separated proteins in the gel were identified by MALDI TOF MS. Identified proteins from different gel spots were found to have different gi numbers. Therefore, duplex SDS-PAGE separation method will be used for economic separation method in the future because only tiny amount of inexpensive reagents are used to perform duplex SDS-PAGE.

Microstructural Features of Multicomponent FeCoCrNiSix Alloys

  • Kong, Kyeong Ho;Kim, Kang Cheol;Kim, Won Tae;Kim, Do Hyang
    • Applied Microscopy
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    • v.45 no.1
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    • pp.32-36
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    • 2015
  • The microstructural features of FeCoCrNi, FeCoCrNiAl and FeCoCrNiSix (x=0, 5, 10, 15, 20) alloys have been investigated in the present study. The microstructure of FeCoCrNi alloy changes dramatically with equiatomic addition of Al. The fcc irregular shaped grain structure in the as-cast FeCoCrNi alloy changes into the bcc interconnected structure with phase separation of Al-Ni rich and Cr-Fe rich phases in the as-cast FeCoCrNiAl alloy. The microstructure of FeCoCrNi alloy changes with the addition of Si. With increasing the amount of Si, the fcc structure of the grains is maintained, but new phase containing higher amount of Si forms at the grain boundary. As the amount of Si increases, the fraction the Si-rich grain boundary phase increases.

Anodic bonding characteristics of MCA to Si-wafer using pyrex #7740 glass intermediatelayer for MEMS applications (파일렉스 #7740 글라스 매개층을 이용한 MEMS용 MCA와 Si기판의 양극접합 특성)

  • Ahn, Jung-Hac;Chung, Gwiy-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.374-375
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    • 2006
  • This paper describes anodic bonding characteristics of MCA to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with the same properties were deposited on MCA under optimum RF sputter conditions (Ar 100 %, input power $1\;W/cm^2$). After annealing at $450^{\circ}C$ for 1 hr, the anodic bonding of MCA to Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in $110^{-6}$ Torr vacuum condition. Then, the MCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation and simulation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity being 0.05-0.08 %FS. Moreover, any damages or separation of MCNSi bonded interfaces did not occur during actuation test. Therefore, it is expected that anodic bonding technology of MCNSi-wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

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The Legislation of SI Distinction & Separation in Long-Life Housing (장수명 공동주택에서의 SI구분 및 분리기준에 관한 법제화 방향)

  • Chung, Joon-Soo;Kim, Soo-Am
    • Proceeding of Spring/Autumn Annual Conference of KHA
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    • 2009.04a
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    • pp.222-225
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    • 2009
  • The apartment housing in Korea has been rapidly constructed by adapting the most suitable construction methods as like wall structure, wet and united construction. But most of short-lived equipments usually filled in the structure which has longer life, and it causes not only to make difficult coping with the deterioration of equipments but also to let buildings remained deteriorate themselves. The buildings can be remodelled to slow down the terms of deterioration or reconstructed to give a new life of themselves, although the disposal of wastes or the lack of natural resources still be problems and unsolved that can occurred in pulling down and reconstructing the buildings. Furthermore, it is the time to need keeping with worldwide trends and movements as like sustainability or 'green growth' movements based on low carbon emissions. The researches for Long-Life Housing apartments which has durability and variation have been advanced up to now. Long-Life Housing apartments can separate their structures from equipments and interior or exterior materials of buildings. Therefore equipments or materials of buildings can be easily repaired and replaced with new ones, even if they are deteriorated themselves. Also, the construction process of Long-Life Housing apartments can be independent from the matter of proprietary rights, terms of durability, decision rights and so on. 'The law of Possession and Management of Collective Building' and the 'Regulation of Management of Collective Building' established by each local governments are already legislated for declaring the rights of using and ownership, responsibilities of each parts of apartment buildings. These laws and regulations classify the ownership of each parts of apartment buildings, and divide the ownership with public possession and exclusive possession. Therefore, this study will conduct comparative analysis between 'The law of Possession and Management of Collective Building' and 'the Regulation of Management of Collective Building' and find problems which can be occurred in future construction of Long-Life Housing apartments. It will be helpful to revise laws and regulations.

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