• 한국산업안전학회:학술대회논문집
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• 한국안전학회 1998년도 추계 학술논문발표회 논문집
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• pp.173-177
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• 1998

In this paper, we reported an outbreak of fire hazard of ballast for fluorescent lamp. The surface structure and composition of ballast coil analyzed by using metallurgical microscope, scanning electron microscope(SEM) and energy dispersive x-ray spectroscopy(EDX). The surface of molten mark appeared columnar structure and void. EDX analysis indicated that the molten mark spectra were composed not only of the corresponding original spectra but also of several new lines.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.298-299
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• 2008

Images of deposited layers of organic light-emitting diodes were observed by scanning-electron microscope (SEM). We were able to see a clear cross-sectional view of deposited layers. The SEM is a type of electron microscope that images the sample surface by scanning it with a high-energy beam of electrons in a raster scan pattern. A thickness of deposited layer measured by thickness monitor is close to a real value measured by a-step surface profiler within 5%. We were able to see a formation of domains of size about 50-100nm from a surface morphology of Al, and pin holes of size about 50nm.

• 한국산업보건학회지
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• 제19권3호
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• pp.213-232
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• 2009

This document was prepared to review and summarize the analytical methods for airborne and bulk asbestos. Basic principles, shortcomings and advantages for asbestos analytical instruments using phase contrast microscopy(PCM), polarized light microscopy(PLM), X-ray diffractometer (XRD), transmission electron microscopy(TEM), scanning electron microscopy(SEM) were reviewed. Both PCM and PLM are principal instrument for airborne and bulk asbestos analysis, respectively. If needed, analytical electron microscopy is employed to confirm asbestos identification. PCM is used originally for workplace airborne asbestos fiber and its application has been expanded to measure airborne fiber. Shortcoming of PCM is that it cannot differentiate true asbestos from non asbestos fiber form and its low resolution limit ($0.2{\sim}0.25{\mu}m$). The measurement of airborne asbestos fiber can be performed by EPA's Asbestos Hazard Emergency Response Act (AHERA) method, World Health Organization (WHO) method, International Standard Organization (ISO) 10312 method, Japan's Environmental Asbestos Monitoring method, and Standard method of Indoor Air Quality of Korea. The measurement of airborne asbestos fiber in workplace can be performed by National Institute for Occupational Safety and Health (NIOSH) 7400 method, NIOSH 7402 method, Occupational Safety and Health Administration (OSHA) ID-160 method, UK's Health and Safety Executive(HSE) Methods for the determination of hazardous substances (MDHS) 39/4 method and Korea Occupational Safety and Health Agency (KOSHA) CODE-A-1-2004 method of Korea. To analyze the bulk asbestos, stereo microscope (SM) and PLM is required by EPA -600/R-93/116 method. Most bulk asbestos can be identified by SM and PLM but one limitation of PLM is that it can not see very thin fiber (i.e., < $0.25{\mu}m$). Bulk asbestos analytical methods, including EPA-600/M4-82-020, EPA-600/R-93/116, OSHA ID-191, Laboratory approval program of New York were reviewed. Also, analytical methods for asbestos in soil, dust, water were briefly discussed. Analytical electron microscope, a transmission electron microscope equipped with selected area electron diffraction (SAED) and energy dispersive X-ray analyser(EDXA), has been known to be better to identify asbestiform than scanning electron microscope(SEM). Though there is no standard SEM procedures, SEM is known to be more suitable to analyze long, thin fiber and more cost-effective. Field emission scanning electron microscope (FE-SEM) imaging protocol was developed to identify asbestos fiber. Although many asbestos analytical methods are available, there is no method that can be applied to all type of samples. In order to detect asbestos with confidence, all advantages and disadvantages of each instrument and method for given sample should be considered.

• 대한기계학회논문집A
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• 제26권6호
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• pp.1159-1168
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• 2002

Power-transmission Nylon pinions against steel gears fur different pitch line velocities was studied with a power circulating gear test rig under unlubricated condition by SEM(Scanning Electron Microscope). The wear characteristics of Nylon pinions varied significantly with the pitch line velocity and applied load. Wear occurred most severely at the regions including pitch circle and root circle of Nylon pinions. It is confirmed that Nylon pinions are able to be used fer power-transmission under limited conditions.

• International Journal of Precision Engineering and Manufacturing
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• 제9권2호
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• pp.28-33
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• 2008

In a scanning electron microscope (SEM), outside acoustic noise causes image noise that distorts observations of the specimen being examined. A SEM that is less sensitive to acoustic noise is highly desirable. This paper investigates the image noise problem by addressing the mode shapes of the base plate and the transmission path of the acoustic noise and vibration. By arranging the position of the rib, a new SEM base plate was developed that had twisting as the 1st and 2nd modes. In those two twisting modes, vibration nodes existed near the center of the base plate where the specimen chamber is placed. Less vibration was transmitted to the chamber and to the specimen by the twisting modes compared to bending ones, which are the 2nd and 3rd modes for a rectangular plain base plate. An SEM with the developed base plate installed exhibited a significant reduction of image noise when exposed to acoustic noises below 250 Hz.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.154-157
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• 2005

The use of electron-beam(E-Beam) manufacture systems provides a means to alleviate optic exposure equipment's problems. We designed an E-beam manufacture system with SEM function. Optimal beam scanning is one of the most important conditions in the performance of E-beam and SEM. The performance of E-beam manufacture system and images of SEM are a close affinity with each other. Developed E-beam manufacture system consist of the controllers of high voltage, scanning, optic and high voltage generator. In this paper, we analyze the condition of steady beam scanning and describe the development of controller fer optimal beam scanning.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2009년도 정보 및 제어 심포지움 논문집
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• pp.335-337
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• 2009

A scanning electron microscope(SEM) is a system that visualizes complex surface features. The resolution of SEM is affected by each of equipment components. In this study, we examined the effects of the four factors including the beam current, magnification, voltage and working distance. A statistical analysis was conducted to investigate the main and interaction effects. For a systematic characterization, a $2^4$ full factorial experiment was conducted. The $R^2$ of constructed statistical model was 88.9%. The main effect revealed that the current and working distance are dominant factors. Of the interactions, those between the current and voltage yielded the highest interaction. 3D plots generated from the model were used to explore various parameter effects.

• 한국공작기계학회논문집
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• 제16권5호
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• pp.140-144
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• 2007

As an electron scanning microscopes has traditionally required a considerably large room equipped with several service and pipe lines due to its inherent size. As an alternative, a small sized SEM, simply called a mini-SEM, is introduced even if the performance in terms of magnification and resolution is a little inferior to a classical thermal SEM. However, the size and fabrication cost is dramatically reduced, dedicating to opening a new market. The optical system in the mini-SEM is redesigned and specimen stage is quitely reduced and vertical axis is excluded. The design tools and calibration techniques to develope the mini-SEM are introduced and its performance is verified through numerical analysis experiments.

• 한국전자현미경학회:학술대회논문집
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• 한국현미경학회 2001년도 제32차 추계학술대회
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• pp.18-22
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• 2001

A technique to characterize specific site of materials using a combination of a dedicated focused ion beam system(FIB), and Intermediate-voltage scanning transmission electron microscope(STEM) or transmission electron microscope(TEM) equipped with a scanning electron microscope(SEM) unit has been developed. The FIB system is used for preparation of electron transparent thin samples, while STEM or TEM is used for localization of a specific site to be milled in the FIB system. An FIB-STEM(TEM) compatible sample holder has been developed to facilitate thin sample preparation with high positional accuracy Positional accuracy of $0.1{\mu}m$ or better can be achieved by the technique. In addition, an FIB micro-sampling technique has been developed to extract a small sample directly from a bulk sample in a FIB system These newly developed techniques were applied for the analysis of specific failure in Si devices and also for characterization of a specific precipitate In a metal sample.

• 공업화학
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• 제25권5호
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• pp.463-467
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• 2014

본 연구에서는 팽창흑연의 함량 변화를 달리하여 제조한 팽창흑연/에리스리톨 복합체의 열적거동에 관하여 고찰하였다. 팽창흑연이 도입된 팽창흑연/에리스리톨 복합체의 표면 및 구조특성은 scanning electron microscope (SEM), transmission electron microscope (TEM), 그리고 X-ray diffraction (XRD)를 이용하여 관찰하였으며, 열적특성은 differential scanning calorimetry (DSC)와 thermal conductivity (TC)를 이용하여 분석하였다. 실험 결과 팽창흑연의 함량이 증가함에 따라 팽창흑연/에리스리톨 복합체의 열전도도가 증가하였으며, 반면에 잠열은 팽창흑연의 존재 하에 약간 감소하였다. 결론적으로 팽창흑연은 상변이 물질의 높은 열 전달성능 및 열 저장능력을 향상시키는데 적합한 소재라 판단된다.