• 제목/요약/키워드: SEM(Scanning electronic microscope)

검색결과 220건 처리시간 0.032초

The Effect of Magnetic Field Direction on the Imaging Quality of Scanning Electron Microscope

  • Ai, Libo;Bao, Shengxiang;Hu, Yongda;Wang, Xueke;Luo, Chuan
    • Journal of Magnetics
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    • 제22권1호
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    • pp.49-54
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    • 2017
  • The significant reduction of the image quality caused by the magnetic field of samples is a major problem affecting the application of SEM (scanning electron microscopy) in the analysis of electronic devices. The main reason for this is that the electron trajectory is deflected by the Lorentz force. The usual solution to this problem is degaussing the sample at high temperatures. However, due to the poor heat resistance of some electronic components, it is imperative to find a method that can reduce the impact of magnetic field on the image quality and is straightforward and easy to operate without destroying the sample. In this paper, the influence of different magnetic field directions on the imaging quality was discussed by combining the experiment and software simulation. The principle of the method was studied, and the best observation direction was obtained.

경도 변화에 따른 실리콘 고무의 유전 특성에 관한 연구 (A Study on the Dielectric Properties of Silicone Rubber due to Hardness Variation)

  • 이성일
    • 한국전기전자재료학회논문지
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    • 제25권11호
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    • pp.916-921
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    • 2012
  • This research measured the dielectric properties of silicone rubber with various hardness in 100 Hz~3 MHz, $30{\sim}170^{\circ}C$ conditions. When the hardness increases from 65 degree to 75 degree, the dielectric loss increased within frequency range of 100 kHz~3 MHz and was a little change in dielectric loss within temperature range of $90^{\circ}C{\sim}170^{\circ}C$. Thermogravimetric Analysis (TGA) showed the weight change rate increased a little while heated until $800^{\circ}C$. Scanning Electron Microscope (SEM) measurement showed that Aluminium Trihydroxide($AlOH_3$) which acts as a reinforcement agent reduced the size of the particles as the hardness increased.

고압전동기 고정자 권선 절연재료의 미세구조 특성 (Microstructure Property of High Voyage Motor Stator Insulation)

  • 김희동;주영호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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    • pp.513-517
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    • 1999
  • High voltage motor(rated 6.6kV and 448kw) has failed in the stator endwinding area during normal service. Experiments on microstructure property were conducted using the control and aged insulations, which were drawn out from stator windings of the high voltage motor. The analyses were characterized using stereozoom microscope(SM), scanning electron microscope(SEM) and energy dispersive X-ray spectroscopy(EDS). SM result shows that large voids are present in the interface between turn insulation and groundwall insulation. SEM results indicated that the groundwall insulation is rarely thermal stress. EDS results showed that chemical elements in the high voltage motor stator insulations were Al, Si, O, K and Fe.

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전자빔을 이용한 단일 나노선상 선택적 패터닝 방법 (Method of selective electron beam pattering on a single nanowire.)

  • 김강현;임찬영;원부운;김규태
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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    • pp.44-47
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    • 2004
  • 단일 나노선 연구에 있어서 나노선에 원하는 패턴을 선택적으로 구현하는 새로운 방법을 소개한다. 기존에 많이 쓰였던 SEM(Scanning Electron Microscope) 사진을 통한 나노선의 위치를 찾는 방법은 전자빔에 의해 유도되는 비결정성 탄소입자 등으로 인해 측정하고자하는 나노선의 전기적 특성을 왜곡시킬 수 있다. 이러한 점을 예방하고 작업의 편리성을 위하여 ER(E-beam Resist)이 코팅된 상태에서 바로 SEM을 이용해 패터닝하는 방법을 고안하였다. 또 다른 방법으로 기존의 AFM(Atomic Force Microscope) 사진으로 위치를 찾는 방식의 단점인 긴 작업시간을 개선하기 위해 광학현미경 사진을 이용해 패터닝하는 방법을 고안하였다. 이러한 방법들은 작업의 편리성이나 패턴의 정확도면에서 서로 보완적인 성격을 가지고 있어 필요에 따라 방법을 선택할 수 있다.

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OCT를 위한 신호처리계 (Electronic Signal Processing for OCT)

  • 이병하;최은서;나지훈;이창수
    • 한국광학회:학술대회논문집
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    • 한국광학회 2003년도 제14회 정기총회 및 03년 동계학술발표회
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    • pp.292-293
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    • 2003
  • 최근 생체의 단층영상 촬영기법으로 각광을 받고 있는 OCT (Optical Coherence Tomography)는 백색광 간섭계를 근간으로 하여 생체의 깊이 정보를 얻어낸다. 2-D 또는 3-D의 입체영상을 얻기 위해서는 1축 또는 2축의 횡방향 스캔이 필요하다. 횡방향 스캔 기법은 SEM (Scanning electron microscope)이나 공초점현미경 (Confocal microscope) 등에서 널리 사용되고 있으므로 기술적인 흥미는 적으나 축방향 (깊이 방향)의 정보 취득 방법은 OCT만의 특징으로 아직 기술적으로 해결 되어야될 부분이 많다. (중략)

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Carbon fiber 후막형 열전센서 소자를 이용한 적외선 체열진단 (The Method of Thermograph using Thermoelectric Sensor Device in the Carbon fiber Thick Films)

  • 송민종;김명훈;유성미;이호식;이원재;박춘배;최운식;김태완
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 춘계학술대회 논문집
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    • pp.1-2
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    • 2008
  • Thick films of Carbon fiber were prepared by a heating element of plan shape made in Darin co.. We have investigated surface morphology of the specimen depending on second heat-treatment temperatures. X-ray diffraction patterns of Carbon fiber thick films show that the specimen heat treated below $600^{\circ}C$ was an amorphous phase and the one heat treated above $1100^{\circ}C$ forms a poly-crystallization. Scanning electron microscope(SEM) image of Carbon fiber thick films of the specimen heat treated in between 900 and $1100^{\circ}C$ shows a grain growth. At $1100^{\circ}C$, the specimen stops grain-growing and becomes a poly-crystallization.

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집속 아르곤 이온 레이저 빔을 이용한 레이저 유도 직접 구리 패터닝 (Laser-Induced Direct Copper Patterning Using Focused $Ar^+$ Laser Beam)

  • 이홍규;이경철;안민영;이천
    • 한국전기전자재료학회논문지
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    • 제13권11호
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    • pp.969-975
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    • 2000
  • Laser direct writing of micro-patterned copper lines has been achieved by pyrolytic decomposition of copper formate films (Cu(HCOO)$_2$.4$H_2O$), as a metallo-organic precursor, using a focused CW Ar$^{+}$ laser beam (λ=514nm) on PCB boards and glass substrates. The linewidth and thickness of the lines wee investigated as a functin of laser power and scan speed. The profiles of the lines were measured by scanning electron microscope (SEM), surface profiler ($\alpha$-step) and atomic force measured by scanning electron microscope (SEM), surface profiler ($\alpha$-step) and atomic force microscopy (AFM). The electrical resistivities of the patterned lines were also investigated as a function of laser parameters using probe station and semiconductor analyzer. We compared resistivities of the patterned copper lines with these of the Cu bulk. Resistivities decreased due to changes in morphology and porosity of the deposit, which were about 3.8 $\mu$$\Omega$cm and 12$\mu$$\Omega$cm on PCB and glass substrates after annealing at 30$0^{\circ}C$ for 5 minutes.s.

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피로하중을 받은 저압 터빈 블레이드의 파손해석에 관한 연구 (A Study on Failure Analysis of Low Pressure Turbine Blade Subject to Fatigue Load)

  • 홍순혁;이동우;조석수;주원식
    • Journal of Welding and Joining
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    • 제19권3호
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    • pp.298-304
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    • 2001
  • Turbine blade is subject to force of three types ; the torsional force by torsional mount, the centrifugal force by the rotation of rotor and the cyclic bending force by steam pressure. The cyclic bending force was a main factor on fatigue strength. SEM fractography in root of turbine blade showed micro-clack width was not dependent on stress intensity factor range. Especially, fatigue did not exist on SEM photograph in root of turbine blade. To clear out the fracture mechanism of turbine blade, nanofractography was needed on 3-dimensional crack initiation and crack growth with high magnification. Fatigue striation partially existed on AFM photograph in root of turbine blade. Therefore, to find a fracture mechanism of the torsion-mounted blade in nuclear power plant, the relation between stress intensity factor range and surface roughness measured by AFM was estimated, and then the load amplitude ΔP applied to turbine blade was predicted exactly by root mean square roughness.

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레이저 유도 광열 효과를 이용하여 제작된 오목한 광섬유 팁의 곡률 반경에 관한 연구 (A Study on the Radius of Curvature of Concave Optical Fiber Tips fabricated by Laser-Induced Photothermal Effect)

  • 최지원;손경호;유경식
    • 한국전자통신학회논문지
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    • 제14권5호
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    • pp.871-876
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    • 2019
  • 본 논문에서는 플루오린화 수소산(Hydrofluoric acid: HF) 수용액과 광섬유에 인가된 $1.55{\mu}m$ 파장의 레이저를 통해 유도된 광열 효과를 이용하여 오목한 광섬유 팁을 제작하였다. 제작 과정에서 인가한 레이저의 세기, 식각 시간, HF 수용액의 농도에 따른 광섬유 팁 오목 면의 곡률 반경을 광학 현미경을 이용하여 측정하였으며 곡률 반경이 세 변인에 대하여 어떻게 변화하는지 분석하였다. 또한, Free Spectral Range(FSR)와 Scanning electron microscope(SEM) 촬영을 통해 현미경을 이용한 측정 방법의 신뢰성을 검증하였다. 본 논문을 통해 광섬유 팁의 오목 면 제작 과정에서 변인에 따라 곡률 반경을 조절할 수 있게 됨으로써 기존의 HF 수용액을 이용한 광섬유 식각 방법의 한계점을 극복할 수 있었다.

PECVD로 증착된 금속층을 포함하는 DLC 박막의 기계적 특성 분석 (An Analysis of Tribological Properties of Metal Interlayered DLC Films Prepared by PECVD Method)

  • 전영숙;최원석;홍병유
    • 한국전기전자재료학회논문지
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    • 제19권7호
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    • pp.631-635
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    • 2006
  • The properties of metal interlayered DLC films between the Si substrate and the DLC films were studied. DC magnetron sputtering method has been used to deposit intermediate layers of metals. And RF-PECVD method has been employed to synthesize DLC onto substrates of the silicon and metal layers. After we used metal Inter-layers, such as chromium, nickel, titanium and we studied tribological properties of the DLC films. The thickness of films were observed by field emission scanning electron microscope (FE-SEM). Also the surface morphology of the films were observed by an atomic force microscope (AFM). The crystallographic properties of the films were analyzed with X-ray diffraction (XRD), the friction coefficients were investigated by AFM in friction force microscope (FFM) mode. Tribological performances of the films were estimated by nano-indenter, stress tester measurement.